CN113899509B - Method and system for detecting moisture influence resistance of packaging device - Google Patents
Method and system for detecting moisture influence resistance of packaging device Download PDFInfo
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- CN113899509B CN113899509B CN202111092412.9A CN202111092412A CN113899509B CN 113899509 B CN113899509 B CN 113899509B CN 202111092412 A CN202111092412 A CN 202111092412A CN 113899509 B CN113899509 B CN 113899509B
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
- G01M3/3272—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers for verifying the internal pressure of closed containers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
Abstract
The disclosure relates to a method and a system for detecting the influence of moisture resistance of a packaging device, wherein the method comprises the following steps: extracting gas in the sealed cavity to manufacture vacuum conditions; wherein, the sealing cavity is internally provided with a packaging device to be tested; introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring air pressure data in the sealed cavity in real time to ensure that the air pressure in the sealed cavity is stabilized at target air pressure; monitoring the concentration of water vapor in the sealed cavity in real time, and adjusting the flow rate and the water vapor content of the mixed gas according to the concentration of the water vapor until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas; and monitoring the electrical performance data of the packaging device to be tested in real time to obtain an evaluation result of the water vapor influence of the packaging device to be tested. The method and the device are beneficial to the acceleration evaluation of a single water vapor influence failure mechanism, and improve the accuracy and reliability of detecting the water vapor influence capability of the packaging device.
Description
Technical Field
The application relates to the technical field of airtight packaging device testing, in particular to a method and a system for detecting the moisture influence resistance of a packaging device.
Background
With rapid development of science and technology, the reliability requirements of electronic packaging devices are increasing. However, the electronic components in the packaging device are affected by water vapor, so that failure occurs in some cases, and the reliability of the electronic product is seriously threatened. Exceeding the moisture content can have a serious impact on component performance, shelf life and reliability. Moisture can reduce the insulating properties of electronic devices, chips, and components, cause corrosion of bond sites or internal leads within the devices, induce or passivate defects within the devices, and thereby severely impact the electrical properties and lifetime of the devices, chips, and components.
As the volume of devices has been reduced toward miniaturization and microminiaturization, the volume of the device cavity has also been reduced. For small-size devices, because the cavity is small, the total cavity gas is little, so that little water vapor can cause the excessive water vapor content of the cavity, and the reliability of the device is seriously affected. However, the analysis method and the evaluation experiment method for the failure mechanism of the water vapor influence are rarely researched at present. In order to avoid or mitigate the above-mentioned drawbacks, it is necessary to test the degradation effect of moisture on devices, chips and components, thereby improving the design of the devices, chips and components and improving the reliability of the product. In the traditional technology, a tester often places a device above an open water tank, so that the traditional testing device is difficult to accurately control the single water vapor to influence the atmosphere, cannot control the specific content of the water vapor, and cannot comprehensively, accurately and rapidly test the influence of the water vapor on the device.
Disclosure of Invention
Accordingly, there is a need for a method and system for detecting moisture resistance of a packaged device. The technical scheme of the present disclosure includes:
a method of detecting the effects of moisture resistance of a packaged device, comprising the steps of:
extracting gas in the sealed cavity to manufacture vacuum conditions; wherein, the sealing cavity is internally provided with a packaging device to be tested;
introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring air pressure data in the sealed cavity in real time to ensure that the air pressure in the sealed cavity is stabilized at target air pressure;
monitoring the concentration of water vapor in the sealed cavity in real time, and adjusting the flow rate and the water vapor content of the mixed gas according to the concentration of the water vapor until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and the water vapor content;
and monitoring the electrical performance data of the packaging device to be tested in real time, and obtaining an evaluation result of the water vapor resistance effect of the packaging device to be tested according to the electrical performance data and the characteristic parameters of the target atmosphere.
In one embodiment, the pumping of the gas within the sealed cavity, creating the vacuum condition, comprises:
determining the surface material of the peripheral circuit after the packaging device to be tested is unsealed, and acquiring the characteristic parameters of the surface material;
obtaining target negative pressure according to the preset detection accuracy and the characteristic parameters;
and extracting gas until the air pressure in the sealed cavity reaches the target negative pressure.
In one embodiment, the introducing the mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time, so that the air pressure in the sealed cavity is stabilized at the target air pressure includes:
introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reach target air pressure;
and when the air pressure data reaches the target air pressure for the first time, introducing mixed gas of water vapor and inert gas into the sealed cavity for a preset time.
In one embodiment, the characteristic parameter of the target atmosphere further comprises a temperature, and the method further comprises:
acquiring the current atmosphere temperature in the sealed cavity, and comparing the current atmosphere temperature with the temperature parameter of the target atmosphere;
and heating the atmosphere environment in the sealed cavity when the temperature of the atmosphere in the sealed cavity is smaller than the temperature parameter of the target atmosphere.
In one embodiment, the method further comprises:
and monitoring the air pressure data in the sealed cavity in real time, and triggering and opening a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to the safety air pressure.
A system for detecting moisture vapor effects of a packaged device, comprising:
the sealed cavity comprises a test platform substrate and a cavity bell jar, wherein the cavity bell jar covers the test platform substrate to form the sealed cavity, and a sample frame for setting a packaging device to be tested is arranged on the test platform substrate;
the vacuum pump is communicated with the sealed cavity and is used for extracting gas in the sealed cavity to manufacture a vacuum environment;
the water vapor generation device is communicated with the air inlet of the sealed cavity and is used for outputting mixed gas of water vapor and inert gas;
the mass spectrometer is communicated with the sampling pipeline of the sealed cavity and is used for detecting the concentration of water vapor in the sealed cavity;
the monitoring device is electrically connected with the packaging device to be tested and is used for detecting the electrical performance data of the packaging device to be tested in real time;
the air pressure detection element is arranged in the sealed cavity and is used for detecting air pressure data in the sealed cavity;
the temperature detection element is arranged in the sealed cavity and is used for detecting temperature data in the sealed cavity;
the heating element is arranged at the inner side or the bottom of the sealed cavity and is used for heating the atmosphere environment in the sealed cavity.
In one embodiment, the sealing cavity is communicated with a one-way valve and a safety valve.
In one embodiment, the lower edge of the cavity bell jar is fixedly connected with the test platform base through a fastening bolt, and a sealing rubber ring is arranged at the joint of the lower edge of the cavity bell jar and the test platform.
In one embodiment, the device further comprises a driving module, wherein the driving module is used for opening and closing the cavity bell jar, the driving module comprises a lifting rod and a stepping motor, one end of the lifting rod is fixedly connected with the top end of the inner side of the cavity bell jar, and the other end of the lifting rod is connected with the output end of the stepping motor.
In one embodiment, the system further comprises a controller electrically connected to the vacuum pump, the water vapor generating device, the mass spectrometer, the monitoring device, the air pressure detecting element, the temperature detecting element and the heating element, respectively, the controller comprises a memory and a processor, the memory stores a computer program, and the processor executes the computer program to realize the steps of the method for detecting the water vapor influence of the packaging device.
The method and the system for detecting the moisture influence resistance of the packaging device have the beneficial effects that at least:
the invention is based on the vapor generator and the sealed cavity, combines the vacuum extraction, the residual gas flushing and the preparation of the mixed gas of vapor and inert gas, eliminates the influence of other gases, constructs the needed single vapor influence environment, can precisely control the proportion and the content of the water-nitrogen atmosphere in the sealed cavity, can control the gas pressure in the sealed cavity within the needed range, is beneficial to the acceleration evaluation of the single vapor influence failure mechanism, and improves the accuracy and the reliability of the capability of detecting the water vapor influence of the packaging device.
Drawings
In order to more clearly illustrate the technical solutions of embodiments or conventional techniques of the present application, the drawings required for the descriptions of the embodiments or conventional techniques will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 is a flow chart of a method for detecting the effect of water vapor on a packaged device according to one embodiment;
FIG. 2 is a schematic flow chart of a process vacuum condition provided in one embodiment;
FIG. 3 is a schematic flow chart of stabilizing the air pressure in the sealed cavity at the target air pressure according to one embodiment;
FIG. 4 is a schematic diagram of a system for detecting the effect of water vapor on a packaged device according to an embodiment;
FIG. 5 is a schematic diagram of a system logic structure for detecting the effect of moisture on a packaged device according to an embodiment;
FIG. 6 is a schematic diagram of a structure for providing a sealed cavity in one embodiment;
FIG. 7 is a system workflow diagram for detecting the effects of moisture on a packaged device, in accordance with one embodiment;
FIG. 8 is a block diagram of an apparatus for detecting moisture impact of a packaged device according to one embodiment;
FIG. 9 is a block diagram of a computer device provided in an embodiment.
Detailed Description
In order to facilitate an understanding of the present application, a more complete description of the present application will now be provided with reference to the relevant figures. Examples of the present application are given in the accompanying drawings. This application may, however, be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or be connected to the other element through intervening elements. Further, "connection" in the following embodiments should be understood as "electrical connection", "communication connection", and the like if there is transmission of electrical signals or data between objects to be connected.
As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises" and/or "comprising," and/or the like, specify the presence of stated features, integers, steps, operations, elements, components, or groups thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, elements, components, or groups thereof. Also, in this specification, the term "and/or" includes any and all combinations of the associated listed items.
Referring to fig. 1, the present invention provides a method for detecting the influence of water vapor on a packaging device, comprising the following steps:
step S100: extracting gas in the sealed cavity to manufacture vacuum conditions; wherein, be provided with the encapsulation device that awaits measuring in the sealed cavity.
Through a sealed cavity, a reliable testing environment is provided, when the water vapor influence of the packaging device to be tested is evaluated, firstly, the gas in the sealed cavity is pumped out, so that the gas adsorbed by the inner wall of the sealed cavity is desorbed, and the interference of non-water vapor components in the air to the packaging device to be tested is eliminated. In this embodiment, in order to accurately measure that the electronic component in the package to be tested is affected by moisture, the package to be tested is unsealed to expose the peripheral circuit.
Step S200: and introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time to ensure that the air pressure in the sealed cavity is stabilized at the target air pressure.
In this example, nitrogen was used as the inert gas. When the air is ventilated into the sealed cavity, the air pressure data in the sealed cavity needs to be detected in real time so as to ensure that the air pressure of the sealed cavity is maintained at the target air pressure, wherein the target air pressure can be a preset constant value or air pressure simulating the working environment of the to-be-detected packaged device.
Step S300: and monitoring the concentration of the water vapor in the sealed cavity in real time, and adjusting the flow rate and the water vapor content of the mixed gas according to the concentration of the water vapor until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and the water vapor content.
When the air is ventilated into the sealed cavity, the concentration of the water vapor in the sealed cavity is detected in real time, and the flow rate and the water vapor content of the mixed gas which is ventilated into the sealed cavity are regulated to reach the characteristic parameters of the target atmosphere. The target atmosphere herein may refer to a target atmosphere environment of a single moisture variable that needs to be evaluated during the evaluation of the packaged device under test.
Step S400: and monitoring the electrical performance data of the packaging device to be tested in real time, and obtaining an evaluation result of the water vapor resistance effect of the packaging device to be tested according to the electrical performance data and the characteristic parameters of the target atmosphere.
The electrical performance data may be voltage, current, etc. The influence of the current target atmosphere on the packaged device to be tested can be deduced through the electrical performance data of the packaged device to be tested, and the evaluation result is ensured to be influenced by single water vapor.
In the embodiment, a closed and non-open assessment environment is provided through the sealed cavity, the atmosphere in the sealed cavity is controlled, the interference of complex environmental factors on the packaged device to be tested is eliminated, the single water vapor influence is strictly ensured, and the accuracy of evaluating the water vapor influence resistance of the packaged device to be tested is effectively improved.
Referring to fig. 2, in the above example, step S100 includes:
step S102: and determining the surface material of the peripheral circuit after the packaging device to be tested is unsealed, and obtaining the characteristic parameters of the surface material.
The characteristic parameters of the surface material of the peripheral circuit after the package device to be tested is unsealed can be used for representing the strength and the stability of the surface material of the peripheral circuit. The characteristic parameters may include a texture decay index, from which a time for maintaining the surface texture in a steady state under a set pressure environment may be obtained. The vacuum environment is favorable for the subsequent manufacture of a single water vapor environment, the measurement of the water vapor resistance of the packaging device to be tested is improved, but the surface material of the peripheral circuit is subjected to surface gas desorption for a long time in the vacuum environment, so that the defects of the surface material are increased, and the electrical performance of the device to be tested is influenced. The defect density of the surface material can be calculated by measuring the low-frequency noise of the surface material.
In this embodiment, a database may be constructed, where the database includes surface materials and feature parameters corresponding to the surface materials. After the surface material of the packaging device to be tested is determined, the characteristic parameters of the corresponding surface material in the database are read, and the time for maintaining the surface material in a stable state in a set pressure environment is calculated according to the characteristic parameters.
For example, the surface material of the peripheral circuit has a number of defects per unit area, and the surface material is in a stable state at normal temperature and pressure. When the surface material is in a negative pressure state, surface molecules of the surface material are gradually desorbed due to thermal motion. The surface material defects are increased, and the defect density is increased. The defect density of the surface material is related to the material attenuation index, and the larger the material attenuation index is, the defect density is increased along with the change of time. When the defect density of the surface material exceeds a set critical value, the peripheral circuit of the packaged device is unstable, and the electrical performance of the packaged device is negatively affected.
Step S104: and obtaining the target negative pressure according to the preset detection accuracy and the characteristic parameters.
The detection accuracy can be the accuracy of the concentration of the water vapor in the sealed cavity when the mixed gas of the water vapor and the inert gas is introduced into the sealed cavity later. Under ideal conditions, it can be considered that when the mixed gas of water vapor and inert gas is introduced into the sealed cavity in a completely extracted vacuum state, the accuracy of the water vapor concentration in the sealed cavity can be up to 100%.
The preset detection accuracy can be set according to actual requirements, for example, the detection accuracy can be set to 90% -99.99% for the packaging device to be detected which is greatly affected by water vapor, and the detection accuracy can be set to 80% -90% for the packaging device to be detected which is less affected by water vapor.
When the target negative pressure is obtained according to the preset detection accuracy and the characteristic parameters, the preset negative pressure corresponding to the preset detection accuracy can be calculated according to the preset detection accuracy. In actual detection, the formula can be usedTo calculate the preset negative pressure. And calculating the time required for extracting the sealed cavity to the preset negative pressure by combining the performance parameters of the vacuum pump. And judging whether the surface material stability of the packaging device to be tested is maintained in the process of reaching a preset negative pressure condition according to the characteristic parameters of the surface material. If the judgment result shows that the surface material can be maintained stable, the preset negative pressure is used as the target negative pressure; and if the judgment result shows that the surface material stability cannot be maintained, resetting the preset negative pressure, and repeating the step of obtaining the target negative pressure according to the preset detection accuracy and the characteristic parameters.
For example, a certain packaged device to be tested is greatly affected by water vapor, and the detection accuracy is set to be 99.99%. And obtaining the preset negative pressure of 10Pa according to the calculation. According to the performance of the vacuum pump, calculating the time T required for extracting the vacuum in the sealed cavity to 10Pa, and according to the characteristic parameters, calculating whether the defect density of the surface material is increased to a critical value or not in the process of extracting the vacuum in the sealed cavity to 10Pa, if not, judging that the surface material can be maintained stable in the process of reaching the preset negative pressure condition of the packaging device to be detected, and obtaining the target negative pressure, namely 10Pa. If the defect density of the surface material is increased to or exceeds a critical value in the process, judging that the surface material of the packaging device to be tested cannot be maintained stable in the process of reaching a preset negative pressure condition, and resetting the preset detection accuracy.
Step S106: and extracting gas until the air pressure in the sealed cavity reaches the target negative pressure.
Vacuum generally refers to a gaseous state below one atmosphere pressure in a given space, i.e. a negative pressure state. When the vacuum condition is manufactured, the vacuum condition is considered to be achieved when the target negative pressure in the sealed cavity is reached.
According to the embodiment, the target negative pressure is comprehensively calculated through the characteristic parameters of the surface material of the packaging device to be detected and the preset detection accuracy, so that the accuracy of the water vapor concentration is improved on the premise that the surface material of the peripheral circuit is stable after the packaging device to be detected is unsealed, namely, the interference influence of the negative pressure on the packaging device to be detected is avoided, and the requirement of the follow-up water vapor singleness is also met.
In some embodiments of the present disclosure, referring to fig. 3, the step 200 includes the steps of:
step S202: and introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reach target air pressure.
An air outlet pipeline is arranged on one side of the sealed cavity, and a one-way valve is arranged at the tail end of the air outlet pipeline, wherein when the one-way valve is opened, the sealed cavity is allowed to exhaust to the outside, and the outside air is not allowed to flow back to the sealed cavity. The target air pressure may be set to 1atm, i.e., standard atmospheric pressure.
Step S204: when the air pressure data reaches the target air pressure for the first time, introducing mixed gas of water vapor and inert gas into the sealed cavity for a preset time.
When the air pressure in the sealed cavity is gradually increased from the negative pressure after the vacuum extraction, continuously introducing mixed gas of water vapor and inert gas into the sealed cavity for a preset period of time when the monitored air pressure data reaches the target air pressure for the first time, and flushing a small amount of residual gas during the vacuum extraction by combining a one-way valve to further eliminate interference for the subsequent preparation of the target atmosphere.
In one embodiment, the characteristic parameter of the target atmosphere further comprises a temperature, the method further comprising:
and obtaining the temperature of the atmosphere in the sealed cavity, comparing the temperature with the temperature parameter of the target atmosphere, and heating the atmosphere environment in the sealed cavity when the temperature of the atmosphere in the sealed cavity is smaller than the temperature parameter of the target atmosphere.
By adding the characteristic parameter of the temperature, namely the target atmosphere, the influence on the water vapor concentration of the packaged device to be tested at a specific temperature can be prepared, and the constant temperature can be maintained, so that the interference caused by temperature change can be eliminated.
In one embodiment, the method further comprises:
and monitoring air pressure data in the sealed cavity in real time, and triggering and opening a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to the safety air pressure.
The safety valve can be a special valve which is in a normally closed state under the action of external force, and when the pressure of the medium in the system or the pipeline rises to exceed a specified value, the medium is discharged outside the system to prevent the pressure of the medium in the pipeline or the pipeline from exceeding the specified value, and the safety valve belongs to automatic valves. And when the air pressure data in the evaluation process is greater than or equal to the safety air pressure, the safety valve timely discharges air to the outside, so that the experiment safety is ensured.
It should be understood that, although the steps in the flowcharts of fig. 1-3 are shown in order as indicated by the arrows, these steps are not necessarily performed in order as indicated by the arrows. The steps are not strictly limited to the order of execution unless explicitly recited herein, and the steps may be executed in other orders. Moreover, at least a portion of the steps of fig. 1-3 may include multiple steps or stages that are not necessarily performed at the same time, but may be performed at different times, nor does the order in which the steps or stages are performed necessarily occur sequentially, but may be performed alternately or alternately with other steps or at least a portion of the steps or stages in other steps. For example, the above-described step S300 and step S400 may be performed sequentially in tandem or simultaneously.
In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.
The technical features of the above embodiments may be arbitrarily combined, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
With reference to fig. 4 to 6, in one embodiment, there is also provided a system for detecting the effect of moisture on a packaged device, comprising:
the sealed cavity 1 comprises a test platform substrate 102 and a cavity bell jar 101, wherein the cavity bell jar 101 covers the test platform substrate 102 to form the sealed cavity 1, and a sample frame 2 for setting the packaged device 20 to be tested is arranged on the test platform substrate 101. The sealed cavity 1 can be made of stainless steel materials or glass with low outgassing rate. The sealed cavity 1 is composed of a test platform substrate 102 and a cavity bell jar 101, the cavity bell jar 101 is opened, a to-be-tested packaging device 20 can be arranged in the sealed cavity 1, the to-be-tested packaging device 20 is electrically connected with a monitoring device 21 outside the sealed cavity 1, and the cavity bell jar 101 is covered after circuit connection.
The vacuum pump 3 is communicated with the sealed cavity 1 and is used for pumping gas in the sealed cavity 1 to manufacture a vacuum environment, and the vacuum pump 3 is communicated with the sealed cavity 1 through the first valve 10.
The water vapor generating device 4 is communicated with the air inlet of the sealed cavity 1, and the water vapor generating device 4 is used for outputting mixed gas of water vapor and inert gas. In this embodiment, nitrogen is adopted as the inert gas, so that the input end of the water vapor generating device 4 is connected with a nitrogen bottle 5, and a second valve 11 is arranged between the nitrogen bottle 5 and the water vapor generating device 4. The output end of the water vapor generating device 4 is connected with the air inlet 14 of the sealed cavity 1 through the third valve 12.
And the mass spectrometer 7 is communicated with the sampling pipeline of the sealed cavity 1 and is used for detecting the water vapor concentration in the sealed cavity 1. In this embodiment, the input end of the mass spectrometer 7 is connected to a gas sampling device 6, and the gas sampling device 6 is connected to the gas outlet 15 of the sealed cavity 1 through a fourth valve 13. The mass spectrometer 7, also called mass spectrometer, may refer to an instrument for separating and detecting different gases, in this embodiment for detecting water vapour concentration and nitrogen concentration. When the gas in the sealed cavity 1 needs to be detected, the fourth valve 13 is opened, so that the gas in the sealed cavity 1 flows into the gas sampling device 6, and the mass spectrometer 7 can sample and detect conveniently.
The monitoring device 21 is electrically connected to the packaged device under test 20, and is used for detecting electrical performance data, such as voltage, current, etc., of the packaged device under test 20 in real time.
The air pressure detecting element 23 is disposed inside the sealed cavity 1 and is used for detecting air pressure data in the sealed cavity 1, and the air pressure detecting element 23 may be specifically an air pressure sensor, and transmits the detected air pressure data to the controller 22.
The temperature detecting element 24 is disposed inside the sealed cavity 1 and is used for detecting temperature data in the sealed cavity 1, and the temperature detecting element 24 may be specifically a temperature sensor, and transmits the detected temperature data to the controller 22.
And a heating element 17, which is arranged at the inner side or the bottom of the sealed cavity 1 and is used for heating the atmosphere environment in the sealed cavity 1.
The sealed cavity 1 is communicated with a one-way valve 8 and a safety valve 9, and the one-way valve 8 and the safety valve 9 are both communicated with a cavity bell 102.
In one embodiment, the lower edge of the cavity bell 102 is fixedly connected with the test platform base 101 through fastening bolts 18, and a sealing rubber ring 19 is arranged at the joint of the lower edge of the cavity bell 102 and the test platform base 101.
The system further comprises a driving module 16, wherein the driving module 16 is used for opening and closing the cavity bell jar, the driving module 16 comprises a lifting rod 161 and a stepping motor 162, one end of the lifting rod 161 is fixedly connected with the top end of the inner side of the cavity bell jar 102, and the other end of the lifting rod is connected with the output end of the stepping motor 162.
In one embodiment, the system further comprises a controller 22 electrically connected to the vacuum pump 3, the moisture generating device 4, the mass spectrometer 7, the monitoring device 21, the air pressure detecting element 23, the temperature detecting element 24 and the heating element 17, respectively.
The controller 22 includes a memory storing a computer program and a processor that when executed performs the steps of a method of detecting the effects of moisture on a packaged device as in the above embodiments.
The stepper motor 162 is electrically connected to the controller 22, and is configured to receive a switch command of the controller 22 to drive the lifting rod 161 to stretch and retract, so as to drive the cavity bell 102 to rise, open or fall, close. The driving module 16 further comprises a limiting device, and the limiting device is respectively arranged at the limiting position of the cavity bell jar 102 for ascending and fully opening and the limiting position for descending and fully closing.
The check valve 8 and the relief valve 9, and the first to fourth valves may be electrically connected to the controller 22, and the controller 22 controls the opening and closing.
When the system is applied to an experiment for detecting the influence of the water vapor resistance of the packaging device, the working flow is as follows in combination with fig. 7:
the system is started, the sealed cavity 1 is opened through the controller 22, the packaging device 20 to be tested is arranged, the packaging device 20 to be tested is connected with the monitoring device 21 in a line mode, and then the sealed cavity 1 is closed. Then the vacuum pump 3 is started to extract vacuum, then the mixed gas is introduced into the sealed cavity 1 to manufacture a target atmosphere environment, the mass spectrometer 7 monitors the atmosphere in real time, the monitoring device 21 monitors the packaging device 20 to be tested in real time, finally, an evaluation result is obtained, and the experiment is finished.
Based on the description of the embodiment of the method for detecting the water vapor influence resistance of the packaging device, the disclosure also provides a device for detecting the water vapor influence resistance of the packaging device. The apparatus may comprise a system (including a distributed system), software (applications), modules, components, servers, clients, etc. that employ the methods described in the embodiments of the present specification in combination with the necessary apparatus to implement the hardware. Based on the same innovative concepts, embodiments of the present disclosure provide for devices in one or more embodiments as described in the following examples. Because the implementation scheme and the method for solving the problem by the device are similar, the implementation of the device in the embodiment of the present disclosure may refer to the implementation of the foregoing method, and the repetition is not repeated. As used below, the term "unit" or "module" may be a combination of software and/or hardware that implements the intended function. While the means described in the following embodiments are preferably implemented in software, implementation in hardware, or a combination of software and hardware, is also possible and contemplated.
Fig. 8 is a block diagram illustrating an apparatus for detecting the moisture impact of a packaged device according to an exemplary embodiment. The device Z00 may be a terminal, a server, or a module, a component, a device, a unit, etc. integrated in the terminal. Referring specifically to fig. 8, the apparatus Z00 may include:
the vacuum module Z10 is used for extracting gas in the sealed cavity and manufacturing vacuum conditions; wherein, the sealing cavity is internally provided with a packaging device to be tested;
the air pressure module Z20 is used for introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring air pressure data in the sealed cavity in real time so that the air pressure in the sealed cavity is stabilized at target air pressure;
the water vapor module Z30 is used for monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and the water vapor content;
and the monitoring module Z40 is used for monitoring the electrical performance data of the packaging device to be tested in real time and obtaining an evaluation result of the water vapor resistance of the packaging device to be tested according to the electrical performance data and the characteristic parameters of the target atmosphere.
In an exemplary embodiment, the vacuum module Z10 includes:
the surface material unit is used for determining the surface material of the peripheral circuit after the packaging device to be tested is unsealed, and acquiring characteristic parameters of the surface material;
the target negative pressure unit is used for obtaining target negative pressure according to the preset detection accuracy and the characteristic parameters;
and the extraction unit is used for extracting gas until the air pressure in the sealed cavity reaches the target negative pressure.
The vacuum module Z10 further includes a database, where the database stores surface materials and feature parameters corresponding to the surface materials.
In an exemplary embodiment, the air pressure module Z20 includes:
the check valve unit is used for introducing mixed gas of water vapor and inert gas into the sealed cavity to acquire air pressure data in the sealed cavity, and triggering and opening a check valve on an air outlet pipeline of the sealed cavity when the air pressure data reach target air pressure;
and the maintaining unit is used for continuously introducing mixed gas of water vapor and inert gas into the sealing cavity for a preset time when the air pressure data reaches the target air pressure for the first time.
In an exemplary embodiment, the device further includes a safety valve module, configured to monitor the air pressure data in the sealed cavity in real time, and trigger to open a safety valve on an air outlet pipe of the sealed cavity when the air pressure data is greater than or equal to a safety air pressure.
It should be noted that the description of the foregoing apparatus according to the embodiment of the method may further include other embodiments, and specific implementation manner may refer to the description of the foregoing embodiment of the related method in the method for detecting the moisture influence resistance of the packaging device, which is not described herein in detail. The above-mentioned various modules of the device for detecting the influence of water vapor on the packaging device can be realized in whole or in part by software, hardware and a combination thereof. The above modules may be embedded in hardware or may be independent of a processor in a computer system, or may be stored in software in a memory in the computer system, so that the processor may call and execute operations corresponding to the above modules. It should be noted that, in the embodiment of the present application, the division of the modules is schematic, which is merely a logic function division, and other division manners may be implemented in actual implementation.
Based on the description of the embodiment of the method for detecting the water vapor influence of the packaging device, the disclosure further provides a computer device, which comprises a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to realize the steps of the method for detecting the water vapor influence of the packaging device in the embodiment.
FIG. 9 is a block diagram of a computer device, according to an example embodiment. For example, device S00 may be a server. Referring to fig. 9, device S00 includes a processing component S20 that further includes one or more processors, and memory resources represented by memory S22, for storing instructions, such as applications, executable by processing component S20. The application program stored in the memory S22 may include one or more modules each corresponding to a set of instructions. In addition, the processing component S20 is configured to execute instructions to perform the steps of the method for detecting the moisture impact of a packaged device described above.
Device S00 can also include a power component S24 configured to perform power management of device S00, a wired or wireless network interface S26 configured to connect device S00 to a network, and an input/output (I/O) interface S28. Device S00 may operate based on an operating system stored in memory S22, such as Windows Server, mac OS X, unix, linux, freeBSD, or the like.
Based on the foregoing description of the embodiments of the method, in another embodiment of the apparatus provided by the present disclosure, a computer program product is provided, where the computer program product includes instructions that, when executed, are capable of executing the steps of the method for detecting the moisture influence of the package device in the foregoing embodiment.
Based on the foregoing description of the embodiments of the method, in another embodiment of the apparatus provided by the present disclosure, a computer readable storage medium is provided, on which a computer program is stored, where the computer program when executed by a processor implements the steps of the method for detecting the moisture influence of the package device in the foregoing embodiment.
Those skilled in the art will appreciate that implementing all or part of the above described methods may be accomplished by way of a computer program stored on a non-transitory computer readable storage medium, which when executed, may comprise the steps of the embodiments of the methods described above. Any reference to memory, storage, database, or other medium used in embodiments provided by the present disclosure may include at least one of non-volatile and volatile memory, among others. The nonvolatile Memory may include Read-Only Memory (ROM), magnetic tape, floppy disk, flash Memory, optical Memory, or the like. Volatile memory can include random access memory (Random Access Memory, RAM) or external cache memory. By way of illustration, and not limitation, RAM can be in the form of a variety of forms, such as static random access memory (Static Random Access Memory, SRAM) or dynamic random access memory (Dynamic Random Access Memory, DRAM), and the like.
In the description of the present specification, reference to the terms "some embodiments," "other embodiments," "desired embodiments," and the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, schematic descriptions of the above terms do not necessarily refer to the same embodiment or example.
It should be understood that, in the present specification, each embodiment of the method is described in a progressive manner, and the same/similar parts of each embodiment are referred to each other, where each embodiment focuses on a difference from other embodiments. For relevance, reference should be made to the description of other method embodiments.
The technical features of the above embodiments may be arbitrarily combined, and for brevity, all of the possible combinations of the technical features of the above embodiments are not described, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.
The above examples merely represent a few embodiments of the present disclosure, which are described in more detail and are not to be construed as limiting the scope of the claims. It should be noted that variations and modifications can be made by those skilled in the art without departing from the spirit of the disclosure, which are within the scope of the disclosure. Accordingly, the scope of protection of the present disclosure should be determined by the following claims.
Claims (9)
1. A method of detecting the effects of moisture resistance of a packaged device, comprising the steps of:
extracting gas in the sealed cavity to manufacture vacuum conditions; wherein, the sealing cavity is internally provided with a packaging device to be tested;
introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring air pressure data in the sealed cavity in real time to ensure that the air pressure in the sealed cavity is stabilized at target air pressure;
monitoring the concentration of water vapor in the sealed cavity in real time, and adjusting the flow rate and the water vapor content of the mixed gas according to the concentration of the water vapor until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and the water vapor content;
the electrical performance data of the packaging device to be tested is monitored in real time, and an evaluation result of the water vapor resistance effect of the packaging device to be tested is obtained according to the electrical performance data and the characteristic parameters of the target atmosphere;
the extraction of the gas in the sealed cavity, and the vacuum manufacturing conditions comprise:
determining the surface material of the peripheral circuit after the packaging device to be tested is unsealed, and acquiring the characteristic parameters of the surface material;
obtaining target negative pressure according to the preset detection accuracy and the characteristic parameters;
extracting gas until the air pressure in the sealed cavity reaches the target negative pressure;
the mixed gas of water vapor and inert gas is introduced into the sealed cavity, and the air pressure data in the sealed cavity is monitored in real time, so that the air pressure in the sealed cavity is stabilized at the target air pressure, and the method comprises the following steps:
introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reach target air pressure;
and when the air pressure data reaches the target air pressure for the first time, introducing mixed gas of water vapor and inert gas into the sealed cavity for a preset time.
2. The method of claim 1, wherein the obtaining the target negative pressure based on the preset detection accuracy and the characteristic parameter comprises:
calculating a preset negative pressure corresponding to the preset detection accuracy according to the preset detection accuracy;
calculating the time required for extracting the sealed cavity to the preset negative pressure;
judging whether the surface material stability of the packaging device to be tested is maintained in the process of reaching the preset negative pressure condition according to the characteristic parameters of the surface material;
and taking the preset negative pressure as the target negative pressure when the judgment result is yes.
3. The method of claim 1, wherein the characteristic parameters of the target atmosphere further comprise temperature, the method further comprising:
acquiring the current atmosphere temperature in the sealed cavity, and comparing the current atmosphere temperature with the temperature parameter of the target atmosphere;
and heating the atmosphere environment in the sealed cavity when the temperature of the atmosphere in the sealed cavity is smaller than the temperature parameter of the target atmosphere.
4. The method of claim 1, wherein the method further comprises:
and monitoring the air pressure data in the sealed cavity in real time, and triggering and opening a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to the safety air pressure.
5. A system for detecting the effects of moisture on a packaged device, comprising:
the sealed cavity comprises a test platform substrate and a cavity bell jar, wherein the cavity bell jar covers the test platform substrate to form the sealed cavity, and a sample frame for setting a packaging device to be tested is arranged on the test platform substrate;
the vacuum pump is communicated with the sealed cavity and is used for extracting gas in the sealed cavity to manufacture a vacuum environment;
the water vapor generation device is communicated with the air inlet of the sealed cavity and is used for outputting mixed gas of water vapor and inert gas;
the one-way valve is communicated with the air outlet pipeline of the sealing cavity;
the mass spectrometer is communicated with the inside of the sealed cavity through a gas sampling device and is used for detecting the concentration of water vapor in the sealed cavity;
the monitoring device is electrically connected with the packaging device to be tested and is used for detecting the electrical performance data of the packaging device to be tested in real time;
the air pressure detection element is arranged in the sealed cavity and is used for detecting air pressure data in the sealed cavity;
the temperature detection element is arranged in the sealed cavity and is used for detecting temperature data in the sealed cavity;
the heating element is arranged at the inner side or the bottom of the sealed cavity and is used for heating the atmosphere environment in the sealed cavity.
6. The system of claim 5, wherein the sealed chamber is in communication with a relief valve.
7. The system of claim 5, wherein the lower edge of the cavity bell is fixedly connected with the test platform base by fastening bolts, and a sealing rubber ring is arranged at the joint of the lower edge of the cavity bell and the test platform.
8. The system of claim 5, further comprising a drive module for opening and closing the cavity bell, the drive module comprising a lifting rod and a stepper motor, one end of the lifting rod being fixedly connected to the top of the inner side of the cavity bell, the other end being connected to the output end of the stepper motor.
9. The system of any one of claims 5-8, further comprising a controller in electrical communication with the vacuum pump, the moisture generating device, the mass spectrometer, the monitoring device, the air pressure detection element, the temperature detection element, and the heating element, respectively, the controller comprising a memory and a processor, the memory storing a computer program, the processor executing the computer program to perform the steps of the method of any one of claims 1-4.
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