CN110132824A - A kind of simulating test device and its application for air humidity photo-thermal environment - Google Patents
A kind of simulating test device and its application for air humidity photo-thermal environment Download PDFInfo
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- CN110132824A CN110132824A CN201810107426.5A CN201810107426A CN110132824A CN 110132824 A CN110132824 A CN 110132824A CN 201810107426 A CN201810107426 A CN 201810107426A CN 110132824 A CN110132824 A CN 110132824A
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- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
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Abstract
The invention discloses a kind of simulating test device for air humidity photo-thermal environment and its applications, it be the 1ppb upper limit is pure gas that the simulating test device can provide gas concentration lower limit for electricity component to be measured, relative humidity is the certain concentration of 0%-100%RH and the gas of humidity, all-wave spectrum can be also provided for electricity component to be measured, the different capacity illumination of Single wavelength or specific band, the current error of the simulating test device is lower than 0.1%, 30 time/second of signal acquisition speed highest or more, the translocation of unit piece and multicomponent can be achieved, the simulating test device has wide temperature working range, homogeneous heating, environmental resistance is high and electromagnetic shielding is good, heating can inject the light source of required wavelength from different directions simultaneously, electrical signal provide direct current with exchange both of which.The simulating test device can not only meet independent gas/wet/light heat environmental simulation, but also can realize that combination of two, three kinds of combinations and four kinds of full combination environment are precisely simulated, and meet device and the complex environment atmosphere requirements that react.
Description
Technical field
The present invention relates to equipment manufacturing technical field more particularly to a kind of simulating test devices for air humidity photo-thermal environment
And its application.
Background technique
As an important ring for Internet of Things and " made in China 2025 ", intelligence sensor and field effect transistor are as 21 generation
It records with strongest influence power and development prospect new and high technology, is just causing the great attention of domestic and international electronic information circle and material circle.From biography
Indoor workshop gas-monitoring unite to the emerging fields such as smart home and wearable device, air humidity dependent sensor, photodetector and
The electronic components such as field effect transistor are playing an increasingly important role.However, being directed to current sensor and field-effect
The international Disciplinary Frontiers such as ultralow detection limit, the single selective in complex environment and the light auxiliary room temperature detection of transistor research and development are ground
Study carefully demand, still lacks universality solution both at home and abroad.
(such as gas concentration is only ppm grades and error is big, and divider resistance method electrical signal is missed for the precision problem of test macro
It is poor big etc.) and have a single function problem (such as be only capable of the test of simple realization air-sensitive or wet sensitive is tested) and seriously constrain efficient biography
The research and development and application of sensor.And in scientific research, the high-precision detection of electricity component is extremely important, especially a variety of in realization
High-precision detection of the element in complex environment atmosphere.The type and controllable precision for the complex environment that test macro provides simultaneously
It is most important.The control of precision and complex environment atmosphere is to support the effective way of new generation sensor research and development.
Summary of the invention
For the blank of current such integrated test system both at home and abroad, comprehensive intelligence sensor both domestic and external and field-effect are brilliant
It is low and the problems such as have a single function often to there is precision in body pipe commercialization detection device or self-built equipment, for ultralow detection limit, complexity
The international Disciplinary Frontiers Research Requirements such as single selective and light auxiliary room temperature detection in environment there is no universality solution etc.
Problem, the invention proposes a kind of simulating test device for air humidity photo-thermal environment and its applications.The test device can be real
Existing unit piece or multicomponent are tested simultaneously, and are accurately controlled complex environments such as air humidity photo-thermal.The test device can
For research fields such as air humidity dependent sensor, photodetector, field effect transistor, photocatalytic degradation, photo-thermal concerted reactions
Use.
The invention provides the following technical scheme:
A kind of simulating test device comprising: environmental simulation system, test sample system and data acquisition are with control
System；
The test sample system includes the sample room of electromagnetic shielding and the electrode being arranged in inside sample room input
Output device；
The environmental simulation system includes gas and concentration control unit and/or humidity controlling unit and/or optical wavelength
With intensity control unit and/or temperature control unit；
The acquisition and control system includes electrical signal source acquisition unit and control and data collection module；It is described
Electrical signal source acquisition unit is electrically connected with the electrode input/output unit；The control and data collection module and the ring
Border simulation system is connected with the test sample system signal.
Preferred embodiment according to the present invention, the test sample system further include the quartz being arranged at the top of the sample room
Plate, the sample stage for being arranged in inside the sample room and being located at immediately below the quartzy plate.
Preferred embodiment according to the present invention, electrical signal of the electrical signal source acquisition unit for sample to be tested input
With acquisition, to test the performances such as its electricity, photoelectricity, photo-thermal；The control and data collection module are for realizing the control of each system
System and data collection.
Preferred embodiment according to the present invention, the gas are used to provide for test sample system specific with concentration control unit
The gas of concentration；
Preferred embodiment according to the present invention, the humidity controlling unit are used to provide specified moisture for test sample system
Gas；
Preferred embodiment according to the present invention, the optical wavelength and intensity control unit are used to provide spy for test sample system
The long light with intensity of standing wave；
Preferred embodiment according to the present invention, the temperature control unit are used to provide specific temperature for test sample system；
Preferred embodiment according to the present invention, the simulating test device further include vent gas treatment and exhaust unit, the tail
Gas disposal is connected with exhaust unit with the test sample system, for collecting and handling the useless of the test sample system generation
Gas.
Preferably, the vent gas treatment and exhaust unit include water-soluble treatment fluid (for example, water), oil-soluble treatment fluid
(for example, diesel oil and/or kerosene), acid-base reaction treatment fluid (for example, sodium hydroxide solution).
Preferred embodiment according to the present invention, the sample room of the electromagnetic shielding are the sample room of metal faraday cup package.
Preferably, the material of the sample room is selected from least one of corundum, metal and quartz glass；Preferably, institute
The shape for stating sample room can be hollow cylinder, at least one of square hollow and hollow shaped pipe.
Preferably, the quartzy plate is the quartzy plate of light-transparent optical grade.
Preferably, the sample stage is rotating sample platform, i.e. sample stage rotates in sample room, and the angle of rotation meets
The angle of sample stage and light is within the scope of -90 ° to 90 °.
Preferably, the light is the light of optical wavelength and the intensity control unit specific wavelength issued and intensity.
Preferred embodiment according to the present invention, the front end of the sample room are provided with air inlet, the air inlet and gas with
Concentration control unit and/or humidity controlling unit connection, the gas of the certain concentration for issuing gas and concentration control unit
Body is introduced into the test sample system, and/or described in the gas introducing of the specified moisture for issuing humidity controlling unit
In test sample system, the as described test sample system provides air humidity atmosphere.
Preferred embodiment according to the present invention, the rear end of the sample room are provided with gas outlet, at the gas outlet and tail gas
Reason is connected to exhaust unit, and the sample room is discharged in the gas for that will react or not react.
The outlet of the sample room rear end is arranged in preferred embodiment according to the present invention, the electrode input/output unit
Mouthful, one end of the electrode input/output unit is electrically connected with sample to be tested；The other end of the electrode input/output unit with
Electrical signal source acquisition unit is connected.
Preferred embodiment according to the present invention, it is preferable that the gas and concentration control unit are passed through using Standard Gases and air
The mode of flowmeter mixing, or in such a way that boil-off gas is mixed with air through flowmeter, can be obtained by flowmeter mixing
To gas with various type, the target atmosphere of various concentration.
Wherein, the mode for using Standard Gases to mix with air through flowmeter for setting at least one standard air pipe and
At least one air pipe line, and humidity controlling unit is provided at least one in the air pipe line, the Standard Gases
Pipeline is for inputting Standard Gases；The air pipe line is used for input air；Standard Gases in at least one standard air pipe
It can be the same or different.
Preferably, the mode for using Standard Gases to mix with air through flowmeter is setting two standard air pipe and two
Air pipe line, and humidity controlling unit is provided on an air pipe line wherein；Mark in two standard air pipes
Quasi- gas can be the same or different.
Wherein, the mode for using boil-off gas to mix with air through flowmeter is setting at least one steam pipework and extremely
A few air pipe line, and it is provided with humidity controlling unit at least one in the air pipe line, described at least one
Liquid vaporising unit is set on steam pipework, and the liquid vaporising unit is for providing the steam of target liq, the steam
Pipeline is used to input the steam of target liq, and the air pipe line is used for input air.
Preferably, the mode for using boil-off gas to mix with air through flowmeter is one steam pipework of setting and two
Air pipe line, and liquid vaporising unit is set on the steam pipework, humid control is set in a wherein air pipe line
Unit.
Preferred embodiment according to the present invention, it is preferable that the humidity controlling unit includes humidity generator, the humidity hair
Raw device uses ultrapure water Bubbling method, and the air of 100% relative humidity (relative humidity, RH) is made.
Preferably, the humidity generator includes micro porous aeration head, can body, air inlet pipe and an air outlet pipe；It is further preferred that described
The material of micro porous aeration head is all-metal or is full glass；It is further preferred that the all-metal tank micro porous aeration head uses titanium
Powder sintering molding is connect with air inlet pipe using double card set all-metal；Alternatively, the full glass microporous aeration head uses glass sand core
Sinter molding, with air inlet pipe direct sintering.
Preferred embodiment according to the present invention, it is preferable that under the gas concentration that the gas and concentration control unit provide
It is limited to 1ppb, the upper limit is pure gas.
Preferred embodiment according to the present invention, it is preferable that the relative humidity through the humidity controlling unit treated gas
Within the scope of 0%-100%RH.
Preferred embodiment according to the present invention, the optical wavelength and intensity control unit include light source, and the light source is Gao Gong
Rate mode light source or low-power mode light source, the high-power mode light source are what Single wavelength LED light and combinations thereof array provided
Light source, the light source that the low-power mode light source provides for the integrated mode of xenon lamp and optical filter.
Preferred embodiment according to the present invention, it is preferable that the optical wavelength and intensity control unit can provide all-wave spectrum, spy
The light of standing wave section or Single wavelength.
Preferred embodiment according to the present invention, it is preferable that the optical wavelength and intensity control unit is in test sample systems
The distance between sample stage be less than 30cm, such as can be 5cm, 10cm or 20cm.
Preferred embodiment according to the present invention, it is preferable that the bottom of the sample room is arranged in the temperature control unit；Also
Preferably, the bottom of the sample stage inside the sample room is arranged in the temperature control unit, it is further preferred that institute
State the bottom for the sample stage that temperature control unit is arranged in immediately below quartzy plate.
Preferred embodiment according to the present invention, the temperature control unit are circumferentially positioned at the sample room surrounding.
Preferred embodiment according to the present invention, it is preferable that the temperature control unit be selected from resistance wire, resistance furnace, tube furnace,
One of silicon carbide rod furnace and electric hot plate are a variety of.
Preferred embodiment according to the present invention, it is preferable that the temperature control unit can mention for the test sample system
For 0-1400 DEG C of thermostatic control, it is further preferred that the temperature control unit can provide for the test sample system
0-600 DEG C of thermostatic control.
Preferred embodiment according to the present invention, electrical signal source acquisition unit include DC source table and/or alternating current source table,
For testing and acquiring the electrical signal source of sample to be tested；One end of electrical signal source acquisition unit is connected by coaxial shielding
Wiring is connected with the electrode input/output unit in test sample system, and the other end passes through converting interface and control and data collection list
Member is connected, and realizes control and signal acquisition.
The current error of preferred embodiment according to the present invention, electrical signal source acquisition unit is lower than 0.1%, signal source
Acquire 30 time/second of speed highest or more.
Preferred embodiment according to the present invention, it is preferable that the control model of the control and data collection module includes manual
The mode that control model and automatic control mode combine, the MANUAL CONTROL mode are to be realized using general temperature control instrument to temperature
Degree manually controls, and the automatic control mode is to realize Digital Control using being connected by data line with computer.
Preferred embodiment according to the present invention, the sample to be tested are electricity component, and the electricity component includes sensor, light
At least one of electric explorer and field effect transistor；The quantity of the electricity component is one or more, if multiple electricity
When learning element, do not connected between multiple electricity component.
Preferred embodiment according to the present invention, the simulating test device is resistance, electricity based on above-mentioned electricity component
The monitoring to the electricity component is realized in stream, voltage, impedance or the variation of capacitor.
The present invention also provides above-mentioned simulating test device answering in sensor, photodetector and field effect transistor
With.
The present invention also provides application of the above-mentioned simulating test device in electricity device evaluation and test.
The utility model has the advantages that
1. simulating test device of the invention, the simulating test device can provide gas concentration for electricity component to be measured
It is pure gas that lower limit, which is the 1ppb upper limit, and relative humidity is the certain concentration of 0%-100%RH and the gas of specified moisture, can be with
The different capacity illumination of all-wave spectrum, Single wavelength or specific band, the electricity of the simulating test device are provided for electricity component to be measured
Stream error is lower than 0.1%, and the translocation of unit piece and multicomponent may be implemented in 30 time/second of signal acquisition speed highest or more, described
Simulating test device has wide temperature working range (0-1400 DEG C), and homogeneous heating, environmental resistance are high and electromagnetic shielding is good, heating
Can inject the light source of required wavelength from different directions simultaneously, electrical signal provide direct current with exchange both of which.
2. simulating test device of the invention can not only meet independent gas/wet/light heat environmental simulation, but also may be implemented two-by-two
Combination, three kinds of combinations and four kinds of full combination environment are precisely simulated, and meet device and the complex environment atmosphere requirements that react.
3. simulating test device of the invention is suitable for answering sensor, photodetector and field effect transistor
With；Apply also for the application in electricity device evaluation and test.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of simulating test device described in a preferred embodiment of the invention；
Fig. 2 is one of gas and concentration control unit of the invention gas mixing mode；
Fig. 3 is another gas mixing mode in gas and concentration control unit of the invention；
Fig. 4 is the structural schematic diagram of humidity controlling unit described in a preferred embodiment of the invention；
Fig. 5 is the structural schematic diagram of test sample system described in a preferred embodiment of the invention.
Specific embodiment
[simulating test device]
As previously mentioned, the present invention provides a kind of simulating test device comprising: environmental simulation system, test sample system
And acquisition and control system；
The test sample system includes the sample room of electromagnetic shielding, and the quartzy plate at the top of the sample room is arranged in,
Sample stage inside the sample room and immediately below the quartzy plate is set and is arranged in inside the sample room
Electrode input/output unit；
The environmental simulation system includes gas and concentration control unit, for providing certain concentration for test sample system
Gas；Humidity controlling unit, for providing the gas of specified moisture for test sample system；Optical wavelength and strength control list
Member, for providing the light of specific wavelength and intensity for test sample system；Temperature control unit, for being mentioned for test sample system
For specific temperature；
The acquisition and control system includes electrical signal source acquisition unit and control and data collection module；It is described
Electrical signal source acquisition unit is electrically connected with the electrode input/output unit, and the electrical signal for sample to be tested is inputted and adopted
Collection, to test the performances such as its electricity, photoelectricity, photo-thermal；The control and data collection module and the environmental simulation system and institute
State the connection of test sample system signal, control and data collection for realizing each system.
Preferred embodiment according to the present invention, the simulating test device further include vent gas treatment and exhaust unit, the tail
Gas disposal is connected with exhaust unit with the test sample system, for collecting and handling the useless of the test sample system generation
Gas.
Preferably, the vent gas treatment and exhaust unit include water-soluble treatment fluid (for example, water), oil-soluble treatment fluid
(for example, diesel oil and/or kerosene), acid-base reaction treatment fluid (for example, sodium hydroxide solution).
Preferred embodiment according to the present invention does not limit the sample room of the electromagnetic shielding specifically, art technology
Personnel are appreciated that it can be the sample room that any electromagnetic shielding of electromagnetic shielding action can be generated to sample room, only
It is able to achieve the purpose that electromagnetic shielding action is generated to sample room.Preferably, the sample room of the electromagnetic shielding is metal
The sample room of faraday cup package.
Preferred embodiment according to the present invention, material and shape to the sample room do not limit specifically, this field skill
Art personnel are appreciated that the material of the sample room can will not generate the test simulation system to be any to test result
The material for influencing and not reacting.Preferably, the material of the sample room is selected from corundum, metal and quartzy glass
At least one of glass；It will be understood by those skilled in the art that the shape of the sample room does not limit specifically, only need to meet
Side can open up quartzy plate thereon, and inside can be placed in sample stage.Preferably, the shape of the sample room can be sky
The heart is cylindrical, at least one of square hollow and hollow shaped pipe.
Preferred embodiment according to the present invention, is provided with quartzy plate at the top of the sample room, and the quartz plate is set
The purpose set is to irradiate optical wavelength and the intensity control unit specific wavelength issued and the luminous energy of intensity by the quartz plate
To inside sample room, that is, it is irradiated on the sample stage inside sample room.It will be understood by those skilled in the art that the quartz plate
The quartzy plate not absorbed for any pair of optical wavelength and the intensity control unit specific wavelength issued and the light of intensity.
Preferably, the quartzy plate is the quartzy plate of light-transparent optical grade.
Preferred embodiment according to the present invention, to the sample stage inside the sample room and immediately below the quartzy plate
Size and shape and material do not limit specifically, will it will be understood by those skilled in the art that in the actual operation process
Sample to be tested is placed on the sample stage, therefore the material of the sample cell is that one kind does not react with sample to be tested, will not be right
Sample to be tested tests any material having an impact, it is preferable that the material of the sample stage is stainless steel；This field skill
Art personnel are appreciated that the size and shape of the sample stage can be adapted with the size of above-mentioned sample room.
Preferably, it is issued with intensity control unit in order to realize the sample to be tested on the sample stage with optical wavelength specific
Sufficiently, the sample stage can be rotating sample platform, i.e. sample stage can be in sample room inward turning for wavelength and the irradiation of the light of intensity
Turn, the angle of rotation meets the folder of the sample stage and optical wavelength and the intensity control unit specific wavelength issued and the light of intensity
Angle is within the scope of -90 ° to 90 °.
Preferred embodiment according to the present invention, the front end of the sample room are provided with air inlet, the air inlet and gas with
Concentration control unit and/or humidity controlling unit connection, the gas of the certain concentration for issuing gas and concentration control unit
Body is introduced into the test sample system, and/or described in the gas introducing of the specified moisture for issuing humidity controlling unit
In test sample system, the as described test sample system provides air humidity atmosphere.The air humidity atmosphere refer to specific gas concentration,
The atmosphere of gaseous species and gas humidity.
Preferred embodiment according to the present invention, the rear end of the sample room are provided with gas outlet, at the gas outlet and tail gas
Reason is connected to exhaust unit, and the sample room is discharged in the gas for that will react or not react.
The outlet of the sample room rear end is arranged in preferred embodiment according to the present invention, the electrode input/output unit
Mouthful, one end of the electrode input/output unit is electrically connected with sample to be tested, such as is connected by metal wire；The electrode input
The other end of output device is connected with electrical signal source acquisition unit.
Preferred embodiment according to the present invention, the gas do not limit specifically with concentration control unit, art technology
Personnel are appreciated that the gas and concentration control unit can provide the gas of certain concentration for test sample system,
The mode of the gas for the certain concentration that the gas is provided with concentration control unit does not limit.Preferably, the gas with it is dense
Control unit is spent to mix with air through flowmeter in such a way that Standard Gases are mixed with air through flowmeter, or using boil-off gas
Mode, by flowmeter mixing gas with various type, the target atmosphere of various concentration can be obtained.
Wherein, the mode for using Standard Gases to mix with air through flowmeter for setting at least one standard air pipe and
At least one air pipe line, and humidity controlling unit is provided at least one in the air pipe line, the Standard Gases
Pipeline is for inputting Standard Gases；The air pipe line is used for input air；Standard Gases in at least one standard air pipe
It can be the same or different.
Preferably, the mode for using Standard Gases to mix with air through flowmeter is setting two standard air pipe and two
Air pipe line, and humidity controlling unit is provided on an air pipe line wherein；Mark in two standard air pipes
Quasi- gas can be the same or different.
Wherein, the mode for using boil-off gas to mix with air through flowmeter is setting at least one steam pipework and extremely
A few air pipe line, and it is provided with humidity controlling unit at least one in the air pipe line, described at least one
Liquid vaporising unit is set on steam pipework, and the liquid vaporising unit is for providing the steam of target liq, the steam
Pipeline is used to input the steam of target liq, and the air pipe line is used for input air.
Preferably, the mode for using boil-off gas to mix with air through flowmeter is one steam pipework of setting and two
Air pipe line, and liquid vaporising unit is set on the steam pipework, humid control is set in a wherein air pipe line
Unit.
Wherein, for the liquid vaporising unit for providing the steam of target liq, the steam is target liq through steaming
The steam obtained after hair；Specifically, target liq is sent into liquid vaporising unit through peristaltic pump at the uniform velocity fixed amount, and pass through control
Temperature realizes liquid evaporating completely, obtains the steam of the target liq.
Wherein, the flowmeter can realize the flowmeter controlled flow to be any, it is preferable that the flow
Meter uses digital mass flowmeter, it is further preferred that the flowmeter can be connected by data line with computer, realizes digitlization control
System.
Preferred embodiment according to the present invention, the humidity controlling unit do not limit specifically, and those skilled in the art can
To understand, the humidity controlling unit, which can be, to provide the gas of specified moisture for the test sample system；Preferably,
The humidity controlling unit includes humidity generator, and the humidity generator uses ultrapure water Bubbling method, and it is relatively wet to be made 100%
The air of degree.
Preferred embodiment according to the present invention, the humidity generator do not limit specifically, and those skilled in the art can be with
Understand, mode well known in the prior art and device is used to prepare the air of 100% relative humidity.Preferably, described
Humidity generator includes micro porous aeration head, can body, air inlet pipe and an air outlet pipe；It is further preferred that the material of the micro porous aeration head is
All-metal is full glass；It is further preferred that the all-metal tank micro porous aeration head uses titanium valve sinter molding, with air inlet pipe
Using double card set all-metal connection；Alternatively, the full glass microporous aeration head uses glass sand core sinter molding, it is straight with air inlet pipe
Connect sintering.
The type and concentration for the gas that preferred embodiment according to the present invention, the gas and concentration control unit are prepared
It does not limit specifically, it will be understood by those skilled in the art that the gas can be mentioned with concentration control unit for sample to be tested
For being suitable for the gas concentration of the different range of sample to be tested.It specifically, can be by regulation gas and concentration control unit
The flow proportional of air pipe line and standard air pipe regulates and controls gas concentration；Or by regulation gas and concentration control unit
The evaporation rate of air pipe line and liquid vaporising unit regulates and controls gas concentration.Preferably, the gas and concentration control unit
The lower limit of the gas concentration of offer is 1ppb, and the upper limit is pure gas.
Preferred embodiment according to the present invention, the humidity controlling unit are the gas that gas and concentration control unit are prepared
Body provide different range humidity, it will be understood by those skilled in the art that its can be had according to the difference of sample to be tested it is different
Selection.Specifically, it can regulate and control to be provided with the air pipe line of humidity controlling unit in gas and concentration control unit and be not provided with
The flow proportional of the air pipe line of humidity controlling unit regulates and controls the humidity of gas.Preferably, at through the humidity controlling unit
The relative humidity of gas after reason is within the scope of 0%-100%RH.
Preferred embodiment according to the present invention, the optical wavelength and intensity control unit include light source, are not had to the light source
It is specific to limit, any light source or light for being capable of providing specific band or wavelength can be known to the skilled in the art
The combination in source and corresponding optical instrument.Preferably, the light source be high-power mode light source or low-power mode light source, it is described
High-power mode light source is the light source that Single wavelength LED light and combinations thereof array provides, the low-power mode light source be xenon lamp and
The light source that the integrated mode of optical filter provides.
Preferred embodiment according to the present invention, the optical wavelength and intensity control unit are in test sample system to test sample
Product provide the light of incidence angles degree, varying strength, different capacity, different wave length or wave band.Preferably, the optical wavelength and strong
Degree control unit can provide the light of all-wave spectrum, specific band or Single wavelength.
Preferred embodiment according to the present invention, the optical wavelength and intensity control unit are the sample stage in test sample system
The distance between do not limit specifically, it will be understood by those skilled in the art that the conditions such as intensity of the light irradiated as needed,
It can choose different distances.For the light for making full use of light source to generate, it is preferable that the optical wavelength is with intensity control unit
The distance between sample stage in test sample system is less than 30cm, such as can be 5cm, 10cm or 20cm.
Preferred embodiment according to the present invention, temperature control unit setting position do not limit specifically, this field skill
Art personnel are appreciated that the position of the temperature control unit setting can be the test sample system, i.e., the described sample room
Heat and not disturbed specimen room atmosphere are provided.
Preferred embodiment according to the present invention, the temperature control unit do not limit specifically, and those skilled in the art can
To understand, any temperature control unit that can pass through heat for the test sample system can be.Preferably,
The temperature control unit is selected from one of resistance wire, resistance furnace, tube furnace, silicon carbide rod furnace and electric hot plate.If described
When temperature control unit is selected from one of resistance wire, resistance furnace, tube furnace and silicon carbide rod furnace, the temperature control unit is surround
It is arranged in the sample room surrounding.If the temperature control unit selects electric hot plate, the temperature control unit is preferably provided at
The bottom of the sample stage inside the sample room, is preferably also arranged at the bottom of the sample stage immediately below quartzy plate.
Preferred embodiment according to the present invention, the heating temperature of the temperature control unit do not limit specifically, this field
Technical staff be appreciated that its can the temperature according to required for sample to be tested be adjusted.Preferably, the temperature control is single
Member can provide 0-1400 DEG C of thermostatic control for the test sample system, it is further preferred that the temperature control unit
0-600 DEG C of thermostatic control can be provided for the test sample system.
Preferred embodiment according to the present invention, electrical signal source acquisition unit include DC source table and/or alternating current source table,
For testing and acquiring the electrical signal source of sample to be tested；One end of electrical signal source acquisition unit is connected by coaxial shielding
Wiring is connected with the electrode input/output unit in test sample system, and the other end passes through converting interface and control and data collection list
Member is connected, and realizes control and signal acquisition.
The current error of preferred embodiment according to the present invention, electrical signal source acquisition unit is lower than 0.1%, signal source
Acquire 30 time/second of speed highest or more.
Preferred embodiment according to the present invention, whole pipelines in the simulating test device are all made of typical double card set
(Swagelok) formula metal sealing connects, and the air inlet and air outlet of the sample room in the test sample system are logical using tradition
Metal and seal with elastometic washer device, which are realized, to be sealed.The purpose is to prevent organic-inorganic volatile matter bring atmosphere from polluting.
The control model of preferred embodiment according to the present invention, the control and data collection module does not limit specifically,
It can be any control model well known in the prior art.Preferably, the control mould of the control and data collection module
Formula includes the mode that MANUAL CONTROL mode and automatic control mode combine, and the MANUAL CONTROL mode is using general temperature controller
Table realization manually controls temperature, and the automatic control mode is to realize digitlization control using being connected by data line with computer
System.
Preferred embodiment according to the present invention, the sample to be tested are electricity component, and the electricity component includes sensor, light
At least one of electric explorer and field effect transistor；The quantity of the electricity component does not limit specifically, can be one
It is a or multiple, when if multiple electricity components, do not connected between multiple electricity component.
Preferred embodiment according to the present invention, the simulating test device is resistance, electricity based on above-mentioned electricity component
The monitoring to the electricity component is realized in stream, voltage, impedance or the variation of capacitor.
[application of simulating test device]
As previously mentioned, the present invention also provides above-mentioned simulating test devices in sensor, photodetector and field effect transistor
Application in pipe.
As previously mentioned, the application the present invention also provides above-mentioned simulating test device in electricity device evaluation and test.
Present invention will be further explained below with reference to specific examples.It should be understood that these embodiments are merely to illustrate the present invention
Rather than it limits the scope of the invention.Furthermore, it is to be understood that after having read content disclosed in this invention, ability
Field technique personnel can make various changes or modifications the present invention, and such equivalent forms equally fall within protection defined by the present invention
Within the scope of.
Experimental method used in following embodiments is conventional method unless otherwise specified；Institute in following embodiments
Reagent, material etc., are commercially available unless otherwise specified.
The control of 1 air humidity photo-thermal of embodiment, three sample translocations
Tubular type furnace temperature controls 25,100 and 200 DEG C, and light source combines realization with visible light wave range optical filter using xenon lamp
420-790nm visible waveband, vertical irradiation, apart from sample 20cm, with 1ppm acetone Standard Gases, 1ppm benzene Standard Gases and 1ppm first
Benzene Standard Gases are initial gas, realize various concentration (10ppb- by gas and concentration control unit and humidity controlling unit
1ppm), the variety classes gas (gaseous mixture or three kinds of gas of one of acetone, benzene and toluene gas or any two kinds of gas
The gaseous mixture of body) under the conditions of different humidity (0-100RH%) atmosphere simulation, using three DC source tables simultaneously to three two
Electrode chemistry resistor-type gas sensor applies 1V DC voltage, and computer is collected simultaneously three device current variations.It realizes different
The environmental simulation of temperature plus visible light and dark condition, various concentration and humidity gas, the visible optical driving type room of research a new generation
Temperature-low temperature gas sensing mechanism.
The control of 2 air humidity photo-thermal of embodiment, three sample translocations
Tubular type furnace temperature control 25,50,75 and 100 DEG C, light source using LED light realize single-wavelength light (254,275,280,
295、313、320、325、334、350、365、380、400、405、420、450、475、500、520、550、600、630、650、
670 and 850nm), vertical irradiation, apart from sample 10cm, with the VOCs of 100ppm (acetone, benzene, toluene, ethylbenzene, meta-xylene,
Trimethylbenzene), the toxic and harmful gas (H of 100ppm2S, CO, NO2, SO2) and 100ppm flammable explosive gas (NH3, H2) standard
Gas is initial gas, realizes variety classes (one in above-mentioned standard gas by gas and concentration control unit and humidity controlling unit
Kind or it is a variety of), various concentration gas (100ppb-100ppm) under the conditions of different humidity (0-100RH%) atmosphere simulation, three
Platform DC source table applies 1V DC voltage to three two electrode chemistry resistor-type gas sensors simultaneously, and computer is collected simultaneously three
Device current variation.Realize the environmental simulation of different temperatures, different single-wavelength lights, variety classes, concentration and humidity gas, research
Complex environment photodetection, optical drive room temperature air-sensitive and wet sensitive mechanism of new generation.
The control of 3 gas photo-thermal of embodiment, three sample translocations
Light source combines realization < 380nm ultraviolet band, vertical irradiation, apart from sample with ultraviolet band optical filter using xenon lamp
10cm is realized using 100ppm nitrogen dioxide Standard Gases as initial gas by gas and concentration control unit and humidity controlling unit
Atmosphere simulation under the conditions of various concentration (100ppb-100ppm), tubular type furnace temperature select 25 and 100 DEG C, and three DC source tables are same
The Shi Xiangsan two electrode chemistry resistor-type room temperature gas sensors based on perovskite material apply 5V DC voltage, and computer is simultaneously
Collect three device current variations.The environmental simulation for realizing different temperatures plus ultraviolet light and dark condition, various concentration gas, grinds
Study carefully free radical type room temperature-low temperature gas sensing mechanism of new generation.
The control of the wet photo-thermal of embodiment 4, three sample translocations
Resistant heating band is wrapped in sample room outer layer, and temperature controls 25,100 and 200 DEG C, and light source is using xenon lamp and purple
Outside, the combination of visible and infrared band optical filter realizes that different-waveband light source, vertical irradiation pass through humidity apart from sample 20cm
Control unit controls the simulated atmosphere under the conditions of different humidity (0-100RH%), and two DC source tables control two two electricity simultaneously
Electrode resistance type dew cell applies 1V DC voltage, and an alternating current source table controls a two electrode resistance type proton conducting elements,
Computer is collected simultaneously three element currents, impedance variations.Realize different temperatures plus different-waveband light and dark condition, different humidity
The environmental simulation of gas, research a new generation is wet to disturb photodetection, wet sensitive and proton conduction mechanism.
The control of 5 air humidity photo-thermal of embodiment, three sample field effect transistor translocations
Tubular type furnace temperature controls 25,100 and 200 DEG C, and light source combines realization with visible light wave range optical filter using xenon lamp
420-790nm visible waveband, vertical irradiation are first with 1ppm acetone, 1ppm benzene and 1ppm toluene Standard Gases apart from sample 20cm
Beginning gas, by gas and concentration control unit and humidity controlling unit realize various concentration (10ppb-1ppm), variety classes (on
State one of Standard Gases or a variety of) simulation of atmosphere under the conditions of different humidity (0-100RH%), three DC source tables are simultaneously
Apply 1-5V DC voltage to three field effect transistor source-drain electrodes, direct grid current voltage change is from -40V-40V, and computer is simultaneously
Collect three device current variations.Realize the ring of different temperatures plus different-waveband light and dark condition, various concentration and humidity gas
Border simulation, the visible optical driving type room temperature of research a new generation-low temperature field effect transistor gas sensing mechanism, photodetection mechanism, crystal
Tube effect Regulation Mechanism.
6 air humidity thermal control of embodiment, three sample translocations
Tubular type furnace temperature controls 25,50,75 and 100 DEG C, with 100ppm VOCs (acetone, benzene, toluene, ethylbenzene, diformazan
Benzene, trimethylbenzene), 100ppm toxic and harmful gas (H2S, CO, NO2, SO2) and 100ppm flammable explosive gas (NH3, H2) Standard Gases
For initial gas, variety classes (one of above-mentioned standard gas is realized by gas and concentration control unit and humidity controlling unit
Or it is a variety of), various concentration gas (100ppb-100ppm) under the conditions of different humidity (0-100RH%) atmosphere simulation, three
DC source table applies 1V DC voltage to three two electrode chemistry resistor-type gas sensors simultaneously, and computer is collected simultaneously three devices
Part curent change.It realizes the environmental simulation of different temperatures, variety classes, concentration and humidity gas, studies complex environment of new generation
Room temperature-low temperature air-sensitive, wet sensitive and expiration detection mechanism.
More than, embodiments of the present invention are illustrated.But the present invention is not limited to above embodiment.It is all
Within the spirit and principles in the present invention, any modification, equivalent substitution, improvement and etc. done should be included in guarantor of the invention
Within the scope of shield.
Claims (10)
1. a kind of simulating test device comprising: environmental simulation system, test sample system and acquisition and control system；
The test sample system includes the sample room being electromagnetically shielded and the electrode input and output being arranged in inside the sample room
Device；
The environmental simulation system includes gas and concentration control unit；And/or humidity controlling unit；And/or optical wavelength and strong
Spend control unit；And/or temperature control unit；
The acquisition and control system includes electrical signal source acquisition unit and control and data collection module；The electricity
Signal source acquisition unit is electrically connected with the electrode input/output unit；The control and data collection module and the environment mould
Quasi- system is connected with the test sample system signal.
2. simulating test device according to claim 1, which is characterized in that the test sample system further includes that setting exists
Quartzy plate at the top of the sample room, the sample for being arranged in inside the sample room and being located at immediately below the quartzy plate
Platform；
Preferably, the gas and concentration control unit are used to provide the gas of certain concentration for test sample system；
Preferably, the humidity controlling unit is used to provide the gas of specified moisture for test sample system；
Preferably, the optical wavelength and intensity control unit, for providing the light of specific wavelength and intensity for test sample system；
Preferably, the temperature control unit, for providing specific temperature for test sample system；
Preferably, electrical signal input and acquisition of the electrical signal source acquisition unit for sample to be tested, to test its electricity
The performances such as, photoelectricity, photo-thermal；
Preferably, the control and control and data collection of the data collection module for realizing each system.
Preferably, the simulating test device further includes vent gas treatment and exhaust unit, the vent gas treatment and exhaust unit with
The test sample system is connected, the exhaust gas generated for collecting and handling the test sample system；
Preferably, the vent gas treatment and exhaust unit include water-soluble treatment fluid (for example, water), oil-soluble treatment fluid (such as
For diesel oil and/or kerosene), acid-base reaction treatment fluid (for example, sodium hydroxide solution).
3. simulating test device according to claim 1 or 2, which is characterized in that the sample room of the electromagnetic shielding is gold
Belong to the sample room of faraday cup package；
Preferably, the material of the sample room is selected from least one of corundum, metal and quartz glass；
Preferably, the shape of the sample room can be hollow cylinder, at least one of square hollow and hollow shaped pipe；
Preferably, the sample stage is rotating sample platform, i.e. sample stage rotates in sample room, and the angle of rotation meets sample
The angle for the light that platform and optical wavelength and intensity control unit issue is within the scope of -90 ° to 90 °；
Preferably, the front end of the sample room is provided with air inlet, the air inlet and gas and concentration control unit and/or wet
Control unit connection is spent, the gas of the certain concentration for issuing gas and concentration control unit introduces the test specimens strain
In system, and/or the gas of the specified moisture for issuing humidity controlling unit is introduced into the test sample system, as institute
It states test sample system and air humidity atmosphere is provided；
Preferably, the rear end of the sample room is provided with gas outlet, and the gas outlet is connected to vent gas treatment with exhaust unit, uses
The sample room is discharged in the gas that will be reacted or not react；
Preferably, the gas outlet of the sample room rear end, the electrode input and output are arranged in the electrode input/output unit
One end of device is electrically connected with sample to be tested；The other end of the electrode input/output unit and electrical signal source acquisition unit phase
Even.
4. simulating test device according to any one of claim 1-3, which is characterized in that the gas and concentration control
Unit is in such a way that Standard Gases are mixed with air through flowmeter, or uses boil-off gas and air through flowmeter hybrid mode；
Preferably, the mode for using Standard Gases to mix with air through flowmeter is setting at least one standard air pipe and extremely
A few air pipe line, and humidity controlling unit is provided at least one in the air pipe line, the standard tracheae
Road is for inputting Standard Gases；The air pipe line is used for input air；Standard Gases in at least one standard air pipe can
With identical or different；
Preferably, the mode for using Standard Gases to mix with air through flowmeter is two standard air pipes of setting and two sky
Air pipe, and humidity controlling unit is provided on an air pipe line wherein；Standard Gases in two standard air pipes
It can be identical or different；
Preferably, the mode for using boil-off gas to mix with air through flowmeter is setting at least one steam pipework and at least
One air pipe line, and it is provided with humidity controlling unit at least one in the air pipe line, described at least one
Liquid vaporising unit is set on steam pipework, and the liquid vaporising unit is for providing the steam of target liq, the steam pipe
Road is used to input the steam of target liq, and the air pipe line is used for input air；
Preferably, the mode for using boil-off gas to mix with air through flowmeter is one steam pipework of setting and two air
Pipeline, and liquid vaporising unit is set on the steam pipework, humidity controlling unit is set in a wherein air pipe line；
Preferably, the humidity controlling unit includes humidity generator, and the humidity generator uses ultrapure water Bubbling method, is made
The air of 100% relative humidity；
Preferably, the humidity generator includes micro porous aeration head, can body, air inlet pipe and an air outlet pipe；It is further preferred that the micropore
The material of aeration head is all-metal or is full glass；It is further preferred that the all-metal tank micro porous aeration head is burnt using titanium valve
Form type, is connect with air inlet pipe using double card set all-metal；Alternatively, the full glass microporous aeration head is sintered using glass sand core
Molding, with air inlet pipe direct sintering.
5. simulating test device described in any one of -4 according to claim 1, which is characterized in that the gas and concentration control
The lower limit for the gas concentration that unit provides is 1ppb, and the upper limit is pure gas；
Preferably, the relative humidity through the humidity controlling unit treated gas is in 0%-100% RH range.
6. simulating test device according to any one of claims 1-5, which is characterized in that the optical wavelength and intensity control
Unit processed includes light source, and the light source is high-power mode light source and low-power mode light source, and the high-power mode light source is
The light source that Single wavelength LED light and combinations thereof array provides, the low-power mode light source are the integrated mode of xenon lamp and optical filter
The light source of offer；
Preferably, the optical wavelength and intensity control unit can provide the light of all-wave spectrum, specific band or Single wavelength；
Preferably, the optical wavelength is less than with intensity control unit for the distance between the sample stage in test sample system
30cm, such as can be 5cm, 10cm or 20cm.
7. simulating test device according to claim 1 to 6, which is characterized in that the temperature control unit is set
Set the bottom in the sample room；Preferably, the sample stage inside the sample room is arranged in the temperature control unit
Bottom, it is further preferred that the bottom of the sample stage immediately below quartzy plate is arranged in the temperature control unit；
Preferably, the temperature control unit is circumferentially positioned at the sample room surrounding；
Preferably, the temperature control unit is selected from one of resistance wire, resistance furnace, tube furnace, silicon carbide rod furnace and electric hot plate
Or it is a variety of；
Preferably, the temperature control unit can provide 0-1400 DEG C of thermostatic control for the test sample system, into one
Preferably, the temperature control unit can provide 0-600 DEG C of thermostatic control to step for the test sample system.
8. simulating test device described in any one of -7 according to claim 1, which is characterized in that the electrical signal source acquisition
Unit includes DC source table and/or alternating current source table, for testing and acquiring the electrical signal source of sample to be tested；The electrical signal
One end of source acquisition unit is connected by coaxial shielding connecting line with the electrode input/output unit in test sample system, another
End is connected by converting interface with control and data collection module, realizes control and signal acquisition；
Preferably, the current error of electrical signal source acquisition unit is lower than 0.1%, signal source acquire speed highest 30 times/
Second or more；
Preferably, the control includes that MANUAL CONTROL mode is mutually tied with automatic control mode with the control model of data collection module
The mode of conjunction, the MANUAL CONTROL mode are to be manually controlled using the realization of general temperature control instrument to temperature, the automatic control
Mode is to realize Digital Control using being connected by data line with computer；
Preferably, the sample to be tested is electricity component, and the electricity component includes that sensor, photodetector and field-effect are brilliant
At least one of body pipe；The quantity of the electricity component is one or more, when if multiple electricity components, multiple electricity
It is not connected between element；
Preferably, the simulating test device is resistance, electric current, voltage, impedance or capacitor based on above-mentioned electricity component
Variation, realize monitoring to the electricity component.
9. simulating test device of any of claims 1-8 is in sensor, photodetector and field effect transistor
In application.
10. application of the simulating test device of any of claims 1-8 in electricity device evaluation and test.
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