CN105806899A - Production and application of Pt-SnO2 oxide semiconductor carbon monoxide sensor - Google Patents
Production and application of Pt-SnO2 oxide semiconductor carbon monoxide sensor Download PDFInfo
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Abstract
A production method of a Pt-SnO2 oxide semiconductor carbon monoxide sensor and application thereof in detecting carbon monoxide concentration in a mine and atmospheric environment belong to the technical field of gas sensors. The sensor comprises a commercially-available Al2O3 insulating ceramic tube with two circular gold electrodes on the outer surface, Pt-SnO2 oxide semiconductor sensitive material applied to the outer surfaces of the circular gold electrodes and Al2O3 insulating ceramic tube, and a nickel-candidum alloy heating coil passing through the Al2O3 insulating ceramic tube. The sensor has good linearity for carbon monoxide of low concentration (lower limit of detection 10 ppm), and these characteristics enable this sensor to be well applied to the detection of carbon monoxide in the atmospheric environment and mine, and further, mine safety and environment safety can be judged through the detection of carbon monoxide concentration.
Description
Technical field
The invention belongs to gas sensor technical field, be specifically related to Pt-SnO2Oxide semiconductor carbon monoxide
Transducer production method and application in terms of carbonomonoxide concentration in detection mine and atmospheric environment thereof.
Background technology
Carbon monoxide (CO) is a kind of colourless, tasteless and the gas of odorless, is the composition of carbon containing flow control three in air,
It is only second to CO2And CH4, it is a kind of important gas in global carbon research.At emission source skewness
Under situation, causing global atmosphere CO concentration is obvious spatial and temporal distributions difference, the most often by as greenhouse sources and sinks
Tracer important in research.1949, by the CO that the research of solar spectrum is found that in air, profit
Achieve the measurement first of CO concentration in air by spectrometer method；Hereafter, related research institutes is carried out successively
A lot of CO concentration observational studies.Although CO is not greenhouse gases, but it can be by sending out with OH free radical
Third contact of a total solar or lunar eclipse chemical reaction affects the oxidability of air, thus affects Atmospheric CO2And CH4Concentration.Therefore, CO
It is one indirectly greenhouse gases.Remote-effects distribution and the change of air concentration in an atmosphere, and then right
Global climate produces significant impact.Trace gaseous components change in air is affected the most greatly, the most preferably by CO
Solve the source remittance distribution characteristics of CO, the change in time and space of other relevant minimum gas could have been estimated more accurately, because of
The observational study work of this Atmospheric CO concentration is the most necessary.
In the later stage sixties 20th century, various countries scientist starts the source remittance research of troposphere Atmospheric CO.Robins
The analysis of global CO distribution has been done for the first time Deng (1974) such as (1968) and Seiler.Research confirms CO
Concentration at two hemisphere all with seasonal variations.Atmospheric CO concentration data is analyzed again and source remittance research has the heaviest
The effect wanted.In air, the source of CO mainly includes combustion of fossil fuel and biomass combustion and CH4With
The oxidation of NMHC causes global atmosphere CO concentration to be obvious spatial and temporal distributions difference.Measure background air at present
The method of CO concentration also has a lot, and Atmospheric CO mainly has sampling and online two kinds of observed patterns.
At present, both at home and abroad to the research work of Low Level Carbon Monoxide gas sensor all in starting degree, pin
The dedicated sensor of Low Level Carbon Monoxide gas is also formed without effective industrialization.Limit sensors with auxiliary electrode
It is higher relatively low with sensitivity that a practical principal element is exactly the Monitoring lower-cut of sensor.In order to make sensor
Can have low-detection lower limit and high sensitivity, it is possible to use high performance sensitive material realizes.
Summary of the invention
It is an object of the invention to provide a kind of Pt-SnO utilizing microwave hydrothermal method to prepare2Oxide semiconductor one
Carbonoxide transducer production method and application in terms of carbonomonoxide concentration in detection mine and atmospheric environment thereof.
Semi-conducting material is doped by the present invention by precious metals pt, can reduce the Monitoring lower-cut of sensor, increases
The sensitivity of sensor, promotes the practicality of carbonomonoxide concentration detection in mine and atmospheric environment of this kind of sensor
Change.
Sensor obtained by the present invention is in addition to having high sensitivity, low-detection lower limit, and has good weight
Renaturation.The Monitoring lower-cut of this sensor is 10ppm, therefore can be used for carbon monoxide in mine and atmospheric environment and contains
The detection of amount, and then judge the safety in mine and atmospheric environment.
As it is shown in figure 1, Pt-SnO of the present invention2Oxide semiconductor carbon monoxide transducer, by commercially available
Outer surface is from the Al with 2 annular gold electrodes (5)2O3Insulating ceramics pipe (1), be coated in annular gold electrode
And Al (5)2O3The quasiconductor sensitive material (2) of insulating ceramics pipe (1) outer surface, through Al2O3Insulation
Earthenware (1) nickel-cadmium heating coil (3) composition；Simultaneous with 2 on each annular gold electrode (5)
Bar platinum line (4), can obtain the resistance between two golden annular electrodes, according to spirit by measuring the resistance between platinum line
The defined formula of sensitivity S i.e. S=Ra/Rg, through can be calculated the sensitivity of sensor.It is characterized in that:
Utilize Pt doping SnO2Oxide semiconductor, as sensitive material, on the one hand mixes Pt and changes SnO2Urge
Change ability, can provide more reactivity site, and this can be greatly improved the reaction efficiency of gas and sensitive material,
And then improve the sensitivity of sensor.On the other hand Pt and SnO2Substantial amounts of hetero-junctions can be formed between granule, this
The appearance of a little hetero-junctions can provide more reactivity site, and these two aspects all can be greatly improved gas with sensitive
The reaction efficiency of material, and then improve the sensitivity of sensor.Additionally, the sensor of tubular structure and oxide
The processing technology of quasiconductor is simple, the most industrial batch production.
Pt-SnO of the present invention2The concrete manufacturing process of oxide semiconductor carbon monoxide transducer is:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml NaOH(0.2
M), 10ml water stirs 10 minutes and forms homogeneous solution, certain H2PtCl6Put into above-mentioned solution and continue stirring 10
Minute so that the mass ratio of element Pt and element S n is 3.0wt%；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into microwave hydrothermal system
System, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C, constant temperature 180 DEG C
One hour, terminate rear Temperature fall to room temperature, after centrifugal to sample collection ethanol and deionized water, be put into cultivation
In ware, 80 DEG C keep individual 10 hours, collect sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtains gas sensitive material,
This sensitive material and deionized water are mixed into pasty state, are then coated uniformly on commercially available outer surface from 2
The insulation Al of annular gold electrode (5)2O3Earthenware (1) surface, the sensitive material forming 10～40 microns is thin
Film (2), a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm, and
Make sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3Pottery
Pipe (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated coil (3)
Through insulation Al2O3Earthenware (1) is internal as heater strip, finally by above-mentioned device according to general heater-type gas
Quick element welds and encapsulates, thus obtains carbon monoxide transducer of the present invention.
Pt-SnO2The sensitive mechanism of oxide semiconductor carbon monoxide transducer is: when oxygen molecule and sensor
During contact, absorption is on sensitive material surface, and oxygen molecule is from SnO2Conduction band is captured electronics, forms O-, such as formula
(1)-(3)。
(1), (2) reaction occur when temperature is less than 150 DEG C, and the oxygen molecule of absorption is with O2 -Form exists；Work as temperature
Spend 150-400 DEG C of scope, (1), (2) and (3) reaction, Pt-SnO occur2Oxide semiconductor one
The operating temperature of carbonoxide sensor is at 100 DEG C, so the oxygen molecule of absorption is with O2 -Form exists.Work as oxide
Can carry curved during oxygen in semi-conducting material ingress of air, and form depletion layer, the electricity of sensor on surface
Resistance raises.When sensor contacts with carbon monoxide, carbon monoxide can be with the O on semi-conducting material2 -Occur as follows
Reaction (4)
2C O+O 2 -→2C O 2+e- (4)
The electrons before seized by oxygen molecule discharges, and comes back to SnO2Conduction band in, quasiconductor material
The curved degree that can carry in material reduces, and forms depletion layer disappearance before, and the resistance of sensor reduces.RaFor passing
Sensor contacts the resistance after oxygen, R in atmospheregFor the resistance after sensor contacts carbon monoxide, measure sensing
Device resistance in air and carbon monoxide by the sensitivity S defined formula of sensor: S=Ra/Rg, meter
Calculate the sensitivity of available sensor.
Advantages of the present invention:
(1) sensor utilizes common semi-conducting material SnO2, it has good electrical conductivity and chemical stability；
(2) utilization is doped with the SnO of Pt2The sensitivity that can make sensor significantly improves, and promotes that it is practical；
(3)Pt-SnO2Being to utilize microwave hydrothermal method and one-step synthesis, method is simple, cheap beneficially batch
The commercial production changed.
Accompanying drawing explanation
Fig. 1: Pt-SnO2The structural representation of oxide semiconductor carbon monoxide transducer；
In Fig. 2: comparative example, embodiment 1, embodiment 2 and embodiment 3, sensor is in different operating temperature pair
The Sensitivity comparison figure of 100ppm carbon monoxide.
The standard work song of the concentration-sensitivity of Fig. 3: comparative example, embodiment 1, embodiment 2 and embodiment 3
Line.
As it is shown in figure 1, each component names is: Al2O3Insulating ceramics pipe (1), quasiconductor sensitive material (2),
Nickel-cadmium coil (3), platinum line (4), annular gold electrode (5)；
Fig. 2 is the sensitivity to 100ppm carbon monoxide of the device made by comparative example and embodiment 1,2,3
Change curve with operating temperature.It can be seen that the optimum temperature of comparative example is more than 225 DEG C, spirit
Sensitivity is 1.4.Embodiment 2 optimum working temperature is 225 DEG C, and now sensitivity is 3.0 Hes；Embodiment 1
Being 225 DEG C with the optimum working temperature of embodiment 3, sensitivity now is respectively 2.1 and 2.6.As can be seen here,
The reaction efficiency of sensitive material and carbon monoxide can be improved by doping Pt, and then obtained one there is Gao Ling
The Pt-SnO of sensitivity2Oxide semiconductor carbon monoxide transducer.
Fig. 3 is that comparative example and embodiment 1, embodiment 2, embodiment 3 are in the one of optimum working temperature 225 DEG C
The standard working curve of carbonoxide concentration-sensitivity.Sensitivity test method: first sensor is put into gas cabinet,
Recorded the resistance at now platinum line two ends by the ammeter being connected with sensor, obtain the aerial electricity of sensor
Resistance i.e. Ra；Then use microsyringe to inject the carbon monoxide of 10-200ppm in gas cabinet, pass through
Measure and obtain the sensor i.e. R of the resistance value in variable concentrations carbon monoxideg, according to the defined formula of sensitivity S
S=Ra/Rg, by being calculated the sensitivity of variable concentrations lower sensor, finally give carbonomonoxide concentration-spirit
The standard working curve of sensitivity.It can be seen that the Monitoring lower-cut of embodiment 2 sensor is 10ppm,
Sensitivity now is 1.7；When carbonomonoxide concentration is 200ppm, sensitivity now is 4.1.Actual survey
R can be recorded by above-mentioned way during amounta、Rg, obtain the mark with carbonomonoxide concentration-sensitivity after Sensitirity va1ue
Quasi-working curve contrasts, thus obtains the carbon monoxide content in human body respiration.It addition, as shown in the figure
(10ppm-200ppm), transducer sensitivity linear preferably, these features make Pt-SnO2Oxide is partly led
Body carbon monoxide transducer can be good at being applied to Carbon Monoxide Detection in mine and atmospheric environment.
Detailed description of the invention
Comparative example 1:
With SnO2Heater-type carbon monoxide transducer is made, its concrete manufacturing process as sensitive material:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml NaOH(0.2
M), 10ml water stirs 10 minutes and forms homogeneous solution；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into microwave hydrothermal system
System, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C, constant temperature 180 DEG C
One hour, terminate rear Temperature fall to room temperature, after centrifugal to sample collection ethanol and deionized water, be put into cultivation
In ware, 80 DEG C keep individual 10 hours, collect sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtains gas sensitive material,
This sensitive material and deionized water are mixed into pasty state, are then coated uniformly on commercially available outer surface from 2
The insulation Al of annular gold electrode (5)2O3Earthenware (1) surface, the sensitive material forming 10～40 microns is thin
Film (2), a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm, and
Make sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3Pottery
Pipe (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated coil (3)
Through insulation Al2O3Earthenware (1) is internal as heater strip, finally by above-mentioned device according to general heater-type gas
Quick element welds and encapsulates, thus obtains carbon monoxide transducer of the present invention.
Embodiment 1:
The mass ratio of element Pt/Sn in the reactant Pt-SnO as 0.015:12Oxide semiconductor is as sensitivity
Material makes heater-type carbon monoxide transducer, its concrete manufacturing process:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml NaOH(0.2
M), 10ml water stirs 10 minutes and forms homogeneous solution, certain H2PtCl6Put into above-mentioned solution and continue stirring 10
Minute so that the mass ratio of element Pt and element S n is 1.5wt%；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into microwave hydrothermal system
System, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C, constant temperature 180 DEG C
One hour, terminate rear Temperature fall to room temperature, after centrifugal to sample collection ethanol and deionized water, be put into cultivation
In ware, 80 DEG C keep individual 10 hours, collect sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtains gas sensitive material,
This sensitive material and deionized water are mixed into pasty state, are then coated uniformly on commercially available outer surface from 2
The insulation Al of annular gold electrode (5)2O3Earthenware (1) surface, the sensitive material forming 10～40 microns is thin
Film (2), a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm, and
Make sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3Pottery
Pipe (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated coil (3)
Through insulation Al2O3Earthenware (1) is internal as heater strip, finally by above-mentioned device according to general heater-type gas
Quick element welds and encapsulates, thus obtains carbon monoxide transducer of the present invention.
Embodiment 2:
The mass ratio of element Pt/Sn in the reactant Pt-SnO as 0.030:12Oxide semiconductor is as sensitivity
Material makes heater-type carbon monoxide transducer, its concrete manufacturing process:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml NaOH(0.2
M), 10ml water stirs 10 minutes and forms homogeneous solution, certain H2PtCl6Put into above-mentioned solution and continue stirring 10
Minute so that the mass ratio of element Pt and element S n is 3.0wt%；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into microwave hydrothermal system
System, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C, constant temperature 180 DEG C
One hour, terminate rear Temperature fall to room temperature, after centrifugal to sample collection ethanol and deionized water, be put into cultivation
In ware, 80 DEG C keep individual 10 hours, collect sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtains gas sensitive material,
This sensitive material and deionized water are mixed into pasty state, are then coated uniformly on commercially available outer surface from 2
The insulation Al of annular gold electrode (5)2O3Earthenware (1) surface, the sensitive material forming 10～40 microns is thin
Film (2), a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm, and
Make sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3Pottery
Pipe (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated coil (3)
Through insulation Al2O3Earthenware (1) is internal as heater strip, finally by above-mentioned device according to general heater-type gas
Quick element welds and encapsulates, thus obtains carbon monoxide transducer of the present invention.
Embodiment 3:
The mass ratio of element Pt/Sn in the reactant Pt-SnO as 0.045:12Oxide semiconductor is as sensitivity
Material makes heater-type carbon monoxide transducer, its concrete manufacturing process:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml NaOH(0.2
M), 10ml water stirs 10 minutes and forms homogeneous solution, certain H2PtCl6Put into above-mentioned solution and continue stirring 10
Minute so that the mass ratio of element Pt and element S n is 4.5wt%；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into microwave hydrothermal system
System, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C, constant temperature 180 DEG C
One hour, terminate rear Temperature fall to room temperature, after centrifugal to sample collection ethanol and deionized water, be put into cultivation
In ware, 80 DEG C keep individual 10 hours, collect sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtains gas sensitive material,
This sensitive material and deionized water are mixed into pasty state, are then coated uniformly on commercially available outer surface from 2
The insulation Al of annular gold electrode (5)2O3Earthenware (1) surface, the sensitive material forming 10～40 microns is thin
Film (2), a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm, and
Make sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3Pottery
Pipe (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated coil (3)
Through insulation Al2O3Earthenware (1) is internal as heater strip, finally by above-mentioned device according to general heater-type gas
Quick element welds and encapsulates, thus obtains carbon monoxide transducer of the present invention.
Claims (5)
1. a Pt-SnO2Oxide semiconductor carbon monoxide transducer, by outer surface with 2 annular gold electrodes
(5) Al2O3Insulating ceramics pipe (1), it is coated in annular gold electrode (5) and Al2O3Insulating ceramics
The quasiconductor sensitive material (2) of pipe (1) outer surface, through Al2O3Insulating ceramics pipe (1) inside
Nickel-cadmium heating coil (3) and platinum line (4) composition for conduction；It is characterized in that: quasiconductor
Sensitive material (2) is Pt-SnO2Oxide semiconductor, this sensitive material is to use microwave hydrothermal technology
Preparation, through calcining, is coated in annular gold electrode (5) and Al2O3Insulating ceramics pipe (1) outer surface.
2. Pt-SnO as claimed in claim 12Oxide semiconductor carbon monoxide transducer, it is characterised in that:
A length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, and internal diameter is 0.8～1.0mm.
3. a kind of Pt-SnO described in claim 12The preparation method of oxide semiconductor carbon monoxide transducer,
Its step is as follows:
(1) first by 0.9g SnCl2·2H2O、2.94g Na3C6H5O7·2H2O、10ml
NaOH (0.2M), 10ml water stir 10 minutes and form homogeneous solution, certain H2PtCl6Put into above-mentioned
Solution continues stirring 10 minutes so that the mass ratio of element Pt and element S n is 3.0wt%；
(2) (1) mixed solution is put in 100ml polytetrafluoroethylkettle kettle and seal, put into Microwave Water
Hot systems, microwave parameters is provided that peak power 300W, within first 10 minutes, is heated to 180 DEG C,
Constant temperature 180 DEG C one hour, terminates rear Temperature fall to room temperature, by sample collection ethanol and deionized water
It is put in culture dish 80 DEG C after Li Xin to keep 10 hours, collects sample；
(3) above-mentioned nano gas sensitive material is calcined 2 hours at 500 DEG C, obtain gas sensitization
Material, is mixed into pasty state by this sensitive material and deionized water, is then coated uniformly on commercially available outer surface
From the insulation Al with 2 annular gold electrodes (5)2O3Earthenware (1) surface, forms 10～40 micro-
The sensitive material film (2) of rice, a length of the 4 of earthenware～4.5mm, external diameter is 1.2～1.5mm, interior
Footpath is 0.8～1.0mm, and makes sensitive material that annular gold electrode (5) is completely covered；
(4) toast about 15 minutes under infrared lamp, treat that sensitive material is dried, insulation Al2O3
Earthenware (1) is calcined 2 hours at 400 DEG C；Then the NI-G that resistance value is 30～40 Ω is heated
Coil (3) passes insulation Al2O3Earthenware (1) is internal as heater strip, is finally pressed by above-mentioned device
Weld according to general heater-type gas sensor and encapsulate, thus obtain carbon monoxide of the present invention sensing
Device.
4. a kind of Pt-SnO described in claim 12Oxide semiconductor carbon monoxide transducer, it is characterised in that:
One step fabricated in situ Pt-SnO2Oxide semiconductor, as sensitive material, on the one hand mixes Pt and changes
SnO2Catalytic capability, more reactivity site can be provided, this can be greatly improved gas with sensitive
The reaction efficiency of material, on the other hand Pt and SnO2Can form substantial amounts of hetero-junctions between granule, these are different
The appearance of matter knot can provide more reactivity site, additionally it is possible to tying by band of regulation and control oxide semiconductor
Structure, these two aspects all can be greatly improved the reaction efficiency of gas and sensitive material, and then improve sensor
Sensitivity.
5. a kind of Pt-SnO as claimed in claim 42Oxide semiconductor carbon monoxide transducer is at mine gas
Application with atmospheric environment detection, it is characterised in that: it is used for detecting carbonomonoxide concentration.
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| CN105911105A (en) * | 2016-04-26 | 2016-08-31 | 武汉大学 | CO sensing material of SnO2 doped catalyst and preparation method and application of CO sensing material |
| CN107132254A (en) * | 2017-06-22 | 2017-09-05 | 云南大学 | A kind of high sensitivity CO gas sensitive material and preparation method and application |
| CN108195894A (en) * | 2017-12-26 | 2018-06-22 | 桂林理工大学 | Air-sensitive coating for monitoring CO, NO2 content in alcohol-based fuel tail gas in real time and preparation method thereof |
| RU188989U1 (en) * | 2019-02-15 | 2019-05-06 | Акционерное общество "Научно-исследовательский институт точной механики" | SEMICONDUCTOR GAS SENSOR FOR DETECTING CARBON MONOXIDE |
| CN110031514A (en) * | 2019-04-25 | 2019-07-19 | 吉林大学 | SnO is adulterated based on Pd2The H of nano sensitive material2S and NO2Sensor, preparation method and applications |
| CN110411973A (en) * | 2019-08-30 | 2019-11-05 | 中国科学院大学 | A kind of method of non-methane total hydrocarbons concentration in detection gas |
| CN111157590A (en) * | 2020-01-21 | 2020-05-15 | 复旦大学 | Semiconductor type carbon monoxide sensor |
| CN114235903A (en) * | 2020-09-09 | 2022-03-25 | 中国科学院苏州纳米技术与纳米仿生研究所 | Gas sensor and manufacturing method thereof |
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