CN113899509A - Method and system for detecting moisture influence resistance of packaging device - Google Patents
Method and system for detecting moisture influence resistance of packaging device Download PDFInfo
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- CN113899509A CN113899509A CN202111092412.9A CN202111092412A CN113899509A CN 113899509 A CN113899509 A CN 113899509A CN 202111092412 A CN202111092412 A CN 202111092412A CN 113899509 A CN113899509 A CN 113899509A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3236—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers
- G01M3/3272—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by monitoring the interior space of the containers for verifying the internal pressure of closed containers
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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Abstract
The disclosure relates to a method and a system for detecting the moisture influence resistance of a packaging device, wherein the method comprises the following steps: extracting gas in the sealed cavity to produce vacuum condition; the sealed cavity is internally provided with a to-be-tested packaging device; introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time to stabilize the air pressure in the sealed cavity at a target air pressure; monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, and stopping introducing the mixed gas; and monitoring the electrical performance data of the to-be-tested packaging device in real time to obtain an evaluation result of the to-be-tested packaging device for resisting the influence of water vapor. The method and the device are beneficial to the accelerated evaluation of a single water vapor influence failure mechanism, and the accuracy and the reliability of detecting the water vapor influence resistance of the packaging device are improved.
Description
Technical Field
The application relates to the technical field of airtight packaging device testing, in particular to a method and a system for detecting the moisture influence resistance of a packaging device.
Background
With the rapid development of science and technology, the reliability requirement of electronic packaging devices is higher and higher. However, the electronic components in the packaged device are affected by moisture to cause failure, which seriously threatens the reliability of the electronic product. The excessive water vapor content can bring serious influence on the performance, storage life and reliability of components. The water vapor can reduce the insulating performance of electronic devices, chips and components, cause corrosion of bonding points or inner leads inside the components, and induce or passivate defects in the devices, thereby seriously affecting the electrical performance and the service life of the devices, the chips and the components.
With the development of miniaturization and miniaturization of the components, the volume of the inner cavity of the device is also reduced. For small-sized devices, the inner cavity is small, and the gas in the inner cavity is little, so that little water vapor can cause the water vapor content in the inner cavity to be too high, and the reliability of the device is seriously influenced. However, currently, there are few studies on analysis methods and evaluation experiment methods for the water vapor influence failure mechanism. In order to avoid or alleviate the above drawbacks, it is necessary to test the degradation effect of moisture on devices, chips and components, so as to improve the design of the devices, chips and components and improve the reliability of the products. In the conventional technology, a tester often places a device above an open water tank, so that the traditional testing device is difficult to accurately control the atmosphere influenced by single water vapor, cannot control the specific content of the water vapor, and cannot comprehensively, accurately and quickly test the influence of the water vapor on the device.
Disclosure of Invention
In view of the above, it is desirable to provide a method and system for detecting moisture resistance of a packaged device. The technical scheme of the disclosure includes:
a method for detecting moisture resistance of a packaged device, comprising the steps of:
extracting gas in the sealed cavity to produce vacuum condition; the sealed cavity is internally provided with a to-be-tested packaging device;
introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time to stabilize the air pressure in the sealed cavity at a target air pressure;
monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration until the atmosphere environment in the sealed cavity reaches the characteristic parameters of a target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and water vapor content;
and monitoring the electrical performance data of the to-be-tested packaging device in real time, and obtaining an evaluation result of the to-be-tested packaging device, which is resistant to the influence of water vapor, according to the electrical performance data and the characteristic parameters of the target atmosphere.
In one embodiment, the extracting gas from the sealed cavity, and the creating vacuum includes:
determining the surface material of the peripheral circuit of the packaged device to be tested after the package is opened, and acquiring the characteristic parameters of the surface material;
obtaining target negative pressure according to preset detection accuracy and the characteristic parameters;
and pumping gas into the sealed cavity to reach the target negative pressure.
In one embodiment, the introducing a mixed gas of water vapor and an inert gas into the sealed cavity, and monitoring the gas pressure data in the sealed cavity in real time, so that the stabilizing of the gas pressure in the sealed cavity at the target gas pressure includes:
introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reaches a target air pressure;
when the air pressure data reach the target air pressure for the first time, the mixed gas of water vapor and inert gas is continuously introduced into the sealed cavity for a preset time.
In one embodiment, the characteristic parameters of the target atmosphere further include temperature, and the method further includes:
obtaining the current atmosphere temperature in the sealed cavity, and comparing the current atmosphere temperature with the temperature parameter of the target atmosphere;
and when the temperature of the atmosphere in the sealed cavity is less than the temperature parameter of the target atmosphere, heating the atmosphere environment in the sealed cavity.
In one embodiment, the method further comprises:
and monitoring the air pressure data in the sealed cavity in real time, and triggering to open a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to safe air pressure.
A system for detecting moisture resistance of a packaged device, comprising:
the sealed cavity comprises a test platform substrate and a cavity bell jar, the cavity bell jar covers the test platform substrate to form the sealed cavity, and a sample frame for arranging a to-be-tested packaging device is arranged on the test platform substrate;
the vacuum pump is communicated with the sealed cavity and is used for extracting gas in the sealed cavity to manufacture a vacuum environment;
the water vapor generating device is communicated with the air inlet of the sealed cavity and is used for outputting mixed gas of water vapor and inert gas;
the mass spectrometer is communicated with the sampling pipeline of the sealed cavity and is used for detecting the water vapor concentration in the sealed cavity;
the monitoring device is electrically connected with the to-be-detected packaging device and is used for detecting the electrical performance data of the to-be-detected packaging device in real time;
the air pressure detection element is arranged in the sealed cavity and used for detecting air pressure data in the sealed cavity;
the temperature detection element is arranged in the sealed cavity and used for detecting temperature data in the sealed cavity;
and the heating element is arranged on the inner side or the bottom of the sealed cavity and is used for heating the atmosphere environment in the sealed cavity.
In one embodiment, the sealed cavity is communicated with a one-way valve and a safety valve.
In one embodiment, the lower edge of the cavity bell is fixedly connected with the base of the test platform through a fastening bolt, and a sealing rubber ring is arranged at the joint of the lower edge of the cavity bell and the test platform.
In one embodiment, the device further comprises a driving module, the driving module is used for opening and closing the cavity bell jar, the driving module comprises a lifting rod and a stepping motor, one end of the lifting rod is fixedly connected with the top end of the inner side of the cavity bell jar, and the other end of the lifting rod is connected with the output end of the stepping motor.
In one embodiment, the system further includes a controller, the controller is electrically connected to the vacuum pump, the vapor generation device, the mass spectrometer, the monitoring device, the air pressure detection element, the temperature detection element and the heating element, respectively, the controller includes a memory and a processor, the memory stores a computer program, and the processor implements the steps of the method for detecting moisture impact resistance of the packaged device when executing the computer program.
The method and the system for detecting the moisture influence resistance of the packaging device have the beneficial effects that at least:
based on the water vapor generator and the sealed cavity, the invention combines the functions of extracting vacuum, flushing residual gas and preparing mixed gas of water vapor and inert gas, eliminates the influence of other gases, constructs the required single water vapor influence environment, simultaneously can accurately control the proportion and the content of the water nitrogen atmosphere in the sealed cavity, can control the gas pressure in the sealed cavity within the required range, is beneficial to the accelerated evaluation of the single water vapor influence failure mechanism, and improves the accuracy and the reliability of detecting the water vapor influence resistance of the packaging device.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or the conventional technologies of the present application, the drawings used in the descriptions of the embodiments or the conventional technologies will be briefly introduced below, it is obvious that the drawings in the following descriptions are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic flow chart illustrating a method for detecting moisture resistance of a packaged device according to an embodiment;
FIG. 2 is a schematic flow chart of the manufacturing of vacuum conditions provided in one embodiment;
FIG. 3 is a schematic flow chart illustrating an embodiment of stabilizing the air pressure within the sealed chamber to a target air pressure;
FIG. 4 is a schematic diagram of a system for detecting moisture resistance of a packaged device according to an embodiment;
FIG. 5 is a schematic diagram illustrating a logical structure of a system for detecting moisture resistance of a packaged device according to an embodiment;
FIG. 6 is a schematic diagram of a sealed chamber provided in one embodiment;
FIG. 7 is a flowchart illustrating operation of a system for detecting moisture resistance of a packaged device in accordance with an embodiment;
FIG. 8 is a block diagram of an apparatus for detecting moisture impact on a packaged device provided in an embodiment;
FIG. 9 is a block diagram of a computer device provided in an embodiment.
Detailed Description
To facilitate an understanding of the present application, the present application will now be described more fully with reference to the accompanying drawings. Embodiments of the present application are set forth in the accompanying drawings. This application may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein in the description of the present application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application.
It will be understood that when an element is referred to as being "connected" to another element, it can be directly connected to the other element or be connected to the other element through intervening elements. Further, "connection" in the following embodiments is understood to mean "electrical connection", "communication connection", or the like, if there is a transfer of electrical signals or data between the connected objects.
As used herein, the singular forms "a", "an" and "the" may include the plural forms as well, unless the context clearly indicates otherwise. It will be further understood that the terms "comprises/comprising," "includes" or "including," etc., specify the presence of stated features, integers, steps, operations, components, parts, or combinations thereof, but do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof. Also, in this specification, the term "and/or" includes any and all combinations of the associated listed items.
Referring to fig. 1, the present invention provides a method for detecting moisture impact resistance of a packaged device, comprising the following steps:
step S100: extracting gas in the sealed cavity to produce vacuum condition; wherein, a to-be-tested packaging device is arranged in the sealed cavity.
Through a sealed cavity, a reliable test environment is provided, when the influence of water vapor on the packaged device to be tested is evaluated, gas in the sealed cavity is firstly pumped out, so that the gas adsorbed on the inner wall of the sealed cavity is desorbed, and the interference of non-water vapor components in the air on the packaged device to be tested is eliminated. In this embodiment, in order to accurately measure the influence of moisture on the electronic component in the packaged device to be tested, the packaged device to be tested is subjected to unsealing treatment to expose the peripheral circuit.
Step S200: and introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time, so that the air pressure in the sealed cavity is stabilized at the target air pressure.
In this example, nitrogen is used as the inert gas. When the air is introduced into the sealed cavity, the air pressure data in the sealed cavity needs to be detected in real time so as to ensure that the air pressure of the sealed cavity is maintained at a target air pressure, wherein the target air pressure can be a preset constant value or an air pressure simulating the working environment of the packaged device to be detected.
Step S300: and monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration, stopping introducing the mixed gas until the atmosphere environment in the sealed cavity reaches the characteristic parameters of the target atmosphere, wherein the characteristic parameters of the target atmosphere comprise air pressure and water vapor content.
When the air is introduced into the sealed cavity, the water vapor concentration in the sealed cavity needs to be detected in real time, and the characteristic parameters of the target atmosphere are achieved by adjusting the flow rate of the mixed gas introduced into the sealed cavity and the water vapor content. The target atmosphere here may refer to a target atmosphere environment of a single moisture variable to be evaluated in evaluating the packaged device under test.
Step S400: and monitoring the electrical performance data of the to-be-tested packaging device in real time, and obtaining an evaluation result of the to-be-tested packaging device, which is resistant to the influence of water vapor, according to the electrical performance data and the characteristic parameters of the target atmosphere.
The electrical performance data may be voltage, current, etc. The influence of the current target atmosphere on the packaged device to be tested can be deduced through the electrical performance data of the packaged device to be tested, and the evaluation result is guaranteed to be influenced by single water vapor.
In the embodiment, a closed non-open evaluation environment is provided through the sealed cavity, the atmosphere in the sealed cavity is controlled, the interference of complex environmental factors on the to-be-tested packaging device is eliminated, the single steam influence is strictly ensured, and the accuracy of evaluating the to-be-tested packaging device against the steam influence is effectively improved.
Referring to fig. 2, in the above example, step S100 includes:
step S102: and determining the surface material of the peripheral circuit of the to-be-tested packaged device after the package is opened, and acquiring the characteristic parameters of the surface material.
The characteristic parameters of the surface material of the peripheral circuit after the encapsulation of the packaged device to be tested can be used for representing the strength and stability of the surface material of the peripheral circuit. The characteristic parameters may include a material attenuation index, and the time for the surface material to maintain a stable state in a set pressure environment may be obtained according to the material attenuation index. The vacuum environment is favorable for the subsequent manufacture of a single water vapor environment, the measurement of the water vapor resistance of the to-be-measured packaging device is improved, but the surface material of the peripheral circuit is in the vacuum environment for a long time, the surface material has surface gas desorption, the surface material defects are increased, and the electrical performance of the to-be-measured device is influenced. The defect increase of the surface material can be realized by measuring the low-frequency noise of the surface material and calculating the defect density of the surface material.
In this embodiment, a database may be constructed, where the database includes the surface material and the characteristic parameters corresponding to the surface material. After the surface material of the packaging device to be tested is determined, the characteristic parameters corresponding to the surface material in the database are read, and the time for the surface material to maintain a stable state in a set pressure environment is calculated according to the characteristic parameters.
For example, the surface material of the peripheral circuit has a number of defects per unit area, and is stable at room temperature and pressure. When the surface material is in a negative pressure state, surface molecules of the surface material are gradually desorbed due to thermal motion. The surface material defects are increased, and the defect density is increased. The defect density of the surface material is related to the material attenuation index, and the larger the material attenuation index is, the larger the defect density is along with the change of time. When the defect density of the surface material exceeds a set critical value, the peripheral circuit of the tested packaged device is unstable, and the electrical performance of the tested packaged device is negatively affected.
Step S104: and obtaining the target negative pressure according to preset detection accuracy and the characteristic parameters.
The detection accuracy may be the accuracy of the water vapor concentration in the sealed cavity when the mixed gas of water vapor and inert gas is subsequently introduced into the sealed cavity. Under ideal conditions, the accuracy of the water vapor concentration in the sealed cavity can reach 100% when the mixed gas of water vapor and inert gas is introduced into the sealed cavity under the condition of completely extracting vacuum.
The preset detection accuracy can be set according to actual requirements, for example, for a to-be-detected package device greatly influenced by water vapor, the detection accuracy can be set to be 90% -99.99%, and for a to-be-detected package device less influenced by water vapor, the detection accuracy can be set to be 80% -90%.
When the target negative pressure is obtained according to the preset detection accuracy and the characteristic parameter, the preset negative pressure corresponding to the preset detection accuracy may be calculated according to the preset detection accuracy. In actual detection, the formula can be used
The preset negative pressure is calculated. And calculating the time required for pumping the sealed cavity to the preset negative pressure by combining the performance parameters of the used vacuum pump. And judging whether the surface material of the packaging device to be tested is stable or not in the process of reaching a preset negative pressure condition according to the characteristic parameters of the surface material. If the judgment result is that the surface material can be maintained to be stable, the preset negative pressure is used as the target negative pressure; and if the judgment result is that the stability of the surface material can not be maintained, resetting the preset negative pressure, and repeating the step of obtaining the target negative pressure according to the preset detection accuracy and the characteristic parameters.
For example, a certain packaged device to be tested is greatly affected by moisture, and the detection accuracy is set to 99.99%. And obtaining the preset negative pressure of 10Pa according to calculation. Calculating the time T required for extracting the vacuum in the sealed cavity to 10Pa according to the performance of the used vacuum pump, calculating whether the defect density of the surface material is increased to a critical value in the process of extracting the vacuum in the sealed cavity to 10Pa according to the characteristic parameters, and if the defect density of the surface material is not increased to the critical value, judging that the surface material can be maintained stable in the process of reaching a preset negative pressure condition of the to-be-tested packaging device, wherein the target negative pressure is 10 Pa. And if the defect density of the surface material is increased to a critical value or exceeds the critical value in the process, judging that the stability of the surface material of the to-be-detected packaging device can not be maintained in the process of reaching a preset negative pressure condition, and resetting the preset detection accuracy.
Step S106: and pumping gas into the sealed cavity to reach the target negative pressure.
Vacuum generally refers to a state of gas below one atmospheric pressure in a given space, i.e., a negative pressure state. When the target negative pressure is reached in the sealed cavity during the manufacturing vacuum condition, the manufacturing vacuum condition can be determined to be achieved.
According to the embodiment, the target negative pressure is comprehensively calculated through the characteristic parameters of the surface material of the to-be-detected packaging device and the preset detection accuracy, the accuracy of the water vapor concentration is improved on the premise that the surface material of the peripheral circuit after the to-be-detected packaging device is opened is stable, the interference influence of the negative pressure on the to-be-detected packaging device is avoided, and the requirement of subsequent water vapor unicity is also met.
In some embodiments of the present disclosure, referring to fig. 3, the step 200 includes the steps of:
step S202: and introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reaches a target air pressure.
An air outlet pipeline is arranged on one side of the sealed cavity, a one-way valve is arranged at the tail end of the air outlet pipeline, when the one-way valve is opened, the sealed cavity is allowed to exhaust to the outside, and outside air is not allowed to flow back to the sealed cavity. The target pressure may be set to 1atm, i.e., standard atmospheric pressure.
Step S204: when the air pressure data reaches the target air pressure for the first time, mixed gas of water vapor and inert gas is introduced into the sealed cavity for a preset time.
When the air pressure in the sealed cavity is gradually increased from the negative pressure after vacuum extraction, when the monitored air pressure data reaches the target air pressure for the first time, the mixed gas of water vapor and inert gas is continuously introduced into the sealed cavity for a preset time, and the residual small amount of gas during vacuum extraction can be flushed by combining the one-way valve, so that interference in subsequent preparation of the target atmosphere is further eliminated.
In one embodiment, the characteristic parameters of the target atmosphere further include temperature, the method further comprising:
and obtaining the temperature of the atmosphere in the sealed cavity, comparing the temperature with the temperature parameter of the target atmosphere, and heating the atmosphere environment in the sealed cavity when the temperature of the atmosphere in the sealed cavity is less than the temperature parameter of the target atmosphere.
By adding the temperature which is a characteristic parameter of the target atmosphere, the influence of the water vapor concentration on the packaged device to be tested at a specific temperature can be prepared, the constant temperature can be kept, and the interference caused by the temperature change can be eliminated.
In one embodiment, the method further comprises:
and monitoring the air pressure data in the sealed cavity in real time, and triggering to open a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to the safe air pressure.
The safety valve can be a special valve which is in a normally closed state under the action of external force, and when the pressure of a medium in a system or a pipeline rises to exceed a specified value, the medium is discharged to the outside of the system to prevent the pressure of the medium in the pipeline or the system from exceeding the specified value, and the safety valve belongs to the automatic valve class. When the air pressure data of the safety valve is larger than or equal to the safe air pressure in the evaluation process, the safety valve timely exhausts air to the outside, and the experimental safety is guaranteed.
It should be understood that although the various steps in the flowcharts of fig. 1-3 are shown in order as indicated by the arrows, the steps are not necessarily performed in order as indicated by the arrows. The steps are not performed in the exact order shown and described, and may be performed in other orders, unless explicitly stated otherwise. Moreover, at least some of the steps in fig. 1-3 may include multiple steps or multiple stages, which are not necessarily performed at the same time, but may be performed at different times, which are not necessarily performed in sequence, but may be performed in turn or alternately with other steps or at least some of the other steps or stages. For example, the above steps S300 and S400 may be performed in tandem or simultaneously in order.
In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features of the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
With reference to fig. 4-6, in one embodiment, there is further provided a system for detecting moisture resistance of a packaged device, comprising:
the sealed cavity 1 comprises a test platform substrate 101 and a cavity bell jar 102, the cavity bell jar 102 covers the test platform substrate 101 to form the sealed cavity 1, and a sample holder 2 for arranging a packaged device 20 to be tested is arranged on the test platform substrate 101. The sealed chamber 1 may be made of stainless steel or glass with low outgassing rate. The sealed cavity 1 is composed of a test platform substrate 101 and a cavity bell jar 102, the cavity bell jar 102 is opened, the to-be-tested packaging device 20 can be arranged in the sealed cavity 1, the to-be-tested packaging device 20 is electrically connected with the monitoring device 21 outside the sealed cavity 1, and the cavity bell jar 102 is covered after the circuit connection.
The vacuum pump 3 is communicated with the sealed cavity 1 and used for extracting gas in the sealed cavity 1 to produce a vacuum environment, and the vacuum pump is communicated with the sealed cavity 1 through a first valve 10 of the vacuum pump 3.
And the water vapor generating device 4 is communicated with the air inlet of the sealed cavity 1, and the water vapor generating device 4 is used for outputting mixed gas of water vapor and inert gas. In this embodiment, the inert gas is nitrogen, so that the input end of the water vapor generation device 4 is connected with the nitrogen cylinder 5, and the second valve 11 is arranged between the nitrogen cylinder 5 and the water vapor generation device 4. The output end of the water vapor generating device 4 is connected with the air inlet 14 of the sealed cavity 1 through the third valve 12.
And the mass spectrometer 7 is communicated with the sampling pipeline of the sealed cavity 1 and is used for detecting the water vapor concentration in the sealed cavity 1. In this embodiment, the input end of the mass spectrometer 7 is communicated with a gas sampling device 6, and the gas sampling device 6 is connected with the gas outlet 15 of the seal cavity 1 through the fourth valve 13. The mass spectrometer 7, also known as a mass spectrometer, may refer to an instrument for separating and detecting different gases, in this embodiment for detecting water vapor concentration and nitrogen concentration. When the gas in the sealed cavity 1 needs to be detected, the fourth valve 13 is opened, so that the gas in the sealed cavity 1 flows into the gas sampling device 6, and the sampling detection of the mass spectrometer 7 is facilitated.
The monitoring device 21 is electrically connected to the to-be-tested package device 20, and is configured to detect electrical performance data, such as voltage, current, and the like, of the to-be-tested package device 20 in real time.
The air pressure detecting element 23 is disposed inside the sealed cavity 1 and configured to detect air pressure data in the sealed cavity 1, and the air pressure detecting element 23 may be specifically an air pressure sensor and transmits the detected air pressure data to the controller 22.
The temperature detecting element 24 is disposed inside the sealed cavity 1 and configured to detect temperature data in the sealed cavity 1, and the temperature detecting element 24 may be a temperature sensor and transmits the detected temperature data to the controller 22.
And the heating element 17 is arranged on the inner side or the bottom of the sealed cavity 1 and is used for heating the atmosphere environment in the sealed cavity 1.
The sealed cavity 1 is communicated with a one-way valve 8 and a safety valve 9, and the one-way valve 8 and the safety valve 9 are both communicated with the cavity bell 102.
In one embodiment, the lower edge of the chamber bell 102 is fixedly connected to the testing platform base 101 by the fastening bolt 18, and the joint of the lower edge of the chamber bell 102 and the testing platform base 101 is provided with the sealing rubber ring 19.
The system further comprises a driving module 16, the driving module 16 is used for opening and closing the cavity bell, the driving module 16 comprises a lifting rod 161 and a stepping motor 162, one end of the lifting rod 161 is fixedly connected with the top end of the inner side of the cavity bell 102, and the other end of the lifting rod 161 is connected with the output end of the stepping motor 162.
In one embodiment, the system further comprises a controller 22 electrically connected to the vacuum pump 3, the water vapor generation device 4, the mass spectrometer 7, the monitoring device 21, the gas pressure detection element 23, the temperature detection element 24, and the heating element 17, respectively.
The controller 22 comprises a memory storing a computer program and a processor implementing the steps of one of the above-described embodiments of the method of detecting the moisture resistance of a packaged device when the processor executes the computer program.
The stepping motor 162 is electrically connected to the controller 22, and is configured to receive a switch command from the controller 22 to drive the lifting rod 161 to extend and retract, so as to drive the cavity bell 102 to ascend, open, or descend and close. The drive module 16 further comprises limiting means provided at the respective limits of the chamber bell 102 for fully opening when rising and fully closing when falling.
The check valve 8, the safety valve 9, and the first to fourth valves are electrically connected to a controller 22, and the controller 22 controls the opening and closing of the check valve and the safety valve.
When the system is applied to an experiment for detecting the influence of water vapor on the packaging device, the working flow is as follows by combining the graph shown in FIG. 7:
the system is started, the sealed cavity 1 is opened through the controller 22, the packaging device 20 to be tested is arranged, the packaging device 20 to be tested is connected with the monitoring device 21 through the circuit, and then the sealed cavity 1 is closed. And then starting a vacuum pump 3 to extract vacuum, introducing mixed gas into the sealed cavity 1 to manufacture a target atmosphere environment, carrying out atmosphere monitoring by the mass spectrometer 7 in real time, monitoring the to-be-tested packaging device 20 by the monitoring device 21 in real time, finally obtaining an evaluation result, and finishing the experiment.
Based on the description of the method for detecting the moisture influence resistance of the packaging device, the disclosure also provides a device for detecting the moisture influence resistance of the packaging device. The apparatus may include systems (including distributed systems), software (applications), modules, components, servers, clients, etc. that use the methods described in embodiments of the present specification in conjunction with any necessary apparatus to implement the hardware. Based on the same innovative concept, the embodiments of the present disclosure provide an apparatus in one or more embodiments as described in the following embodiments. Since the implementation scheme of the apparatus for solving the problem is similar to that of the method, the specific implementation of the apparatus in the embodiment of the present specification may refer to the implementation of the foregoing method, and repeated details are not repeated. As used hereinafter, the term "unit" or "module" may be a combination of software and/or hardware that implements a predetermined function. Although the means described in the embodiments below are preferably implemented in software, an implementation in hardware, or a combination of software and hardware is also possible and contemplated.
Fig. 8 is a block diagram of an apparatus for detecting moisture resistance of a packaged device according to an exemplary embodiment. The device Z00 may be a terminal, a server, or a module, a component, a device, a unit, etc. integrated in the terminal. Referring specifically to fig. 8, the apparatus Z00 may include:
the vacuum module Z10 is used for extracting gas in the sealed cavity to produce vacuum conditions; the sealed cavity is internally provided with a to-be-tested packaging device;
the air pressure module Z20 is used for introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring air pressure data in the sealed cavity in real time to enable the air pressure in the sealed cavity to be stabilized at a target air pressure;
the water vapor module Z30 is used for monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration until the atmosphere environment in the sealed cavity reaches the characteristic parameters of a target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and the water vapor content;
and the monitoring module Z40 is used for monitoring the electrical performance data of the to-be-tested packaging device in real time and obtaining the evaluation result of the to-be-tested packaging device, which is resistant to the influence of water vapor, according to the electrical performance data and the characteristic parameters of the target atmosphere.
In an exemplary embodiment, the vacuum module Z10 includes:
the surface material unit is used for determining the surface material of the peripheral circuit after the encapsulation of the to-be-tested encapsulation device and acquiring the characteristic parameters of the surface material;
the target negative pressure unit is used for obtaining target negative pressure according to preset detection accuracy and the characteristic parameters;
and the extraction unit is used for extracting gas to the sealed cavity to reach the target negative pressure.
The vacuum module Z10 further includes a database, where the database stores surface materials and characteristic parameters corresponding to the surface materials.
In an exemplary embodiment, the air pressure module Z20 includes:
the check valve unit is used for introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a check valve on an air outlet pipeline of the sealed cavity when the air pressure data reaches a target air pressure;
and the maintaining unit is used for continuously introducing mixed gas of water vapor and inert gas into the sealed cavity for a preset time when the air pressure data reaches the target air pressure for the first time.
In an exemplary embodiment, the device further includes a safety valve module, configured to monitor air pressure data in the sealed cavity in real time, and trigger to open a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to a safe air pressure.
It should be noted that the above-mentioned apparatus may further include other embodiments according to the description of the method embodiment, and the specific implementation manner may refer to the description of the related method embodiment in the foregoing method for detecting moisture impact resistance of the packaged device, which is not described in detail herein. All or part of the modules of the device for detecting moisture influence of the packaging device can be realized by software, hardware and a combination thereof. The modules can be embedded in a hardware form or independent of a processor in a computer system, and can also be stored in a memory in the computer system in a software form, so that the processor can call and execute operations corresponding to the modules. It should be noted that, in the embodiment of the present application, the division of the module is schematic, and is only one logic function division, and there may be another division manner in actual implementation.
Based on the description of the embodiment of the method for detecting the moisture impact resistance of the packaged device, the present disclosure also provides a computer device, which includes a memory and a processor, wherein the memory stores a computer program, and the processor implements the steps of the method for detecting the moisture impact resistance of the packaged device in the above embodiment when executing the computer program.
FIG. 9 is a block diagram illustrating a computer device in accordance with an exemplary embodiment. For example, the device S00 may be a server. Referring to FIG. 9, device S00 includes a processing component S20 that further includes one or more processors and memory resources represented by memory S22 for storing instructions, e.g., applications, that are executable by processing component S20. The application program stored in the memory S22 may include one or more modules each corresponding to a set of instructions. Further, the processing component S20 is configured to execute instructions to perform the steps of the above-described method of detecting moisture impact resistance of a packaged device.
The device S00 may also include a power supply component S24 configured to perform power management of the device S00, a wired or wireless network interface S26 configured to connect the device S00 to a network, and an input-output (I/O) interface S28. The device S00 may operate based on an operating system stored in the memory S22, such as Windows Server, Mac OS X, Unix, Linux, FreeBSD, or the like.
Based on the foregoing description of the method embodiments, in another embodiment of the apparatus provided by the present disclosure, a computer program product is provided, which includes instructions that, when executed, can perform the steps of the method for detecting moisture impact resistance of a packaged device in the foregoing embodiments.
In another embodiment of the apparatus provided by the present disclosure based on the foregoing description of the method embodiments, a computer-readable storage medium is provided, on which a computer program is stored, and the computer program, when being executed by a processor, implements the steps of the method for detecting moisture impact resistance of a packaged device in the foregoing embodiments.
It will be understood by those skilled in the art that all or part of the processes of the methods of the embodiments described above can be implemented by hardware instructions of a computer program, which can be stored in a non-volatile computer-readable storage medium, and when executed, can include the processes of the embodiments of the methods described above. Any reference to memory, storage, database or other medium used in embodiments provided by the present disclosure may include at least one of non-volatile and volatile memory. Non-volatile Memory may include Read-Only Memory (ROM), magnetic tape, floppy disk, flash Memory, optical storage, or the like. Volatile Memory can include Random Access Memory (RAM) or external cache Memory. By way of illustration and not limitation, RAM can take many forms, such as Static Random Access Memory (SRAM) or Dynamic Random Access Memory (DRAM), among others.
In the description herein, references to the description of "some embodiments," "other embodiments," "desired embodiments," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, a schematic description of the above terminology may not necessarily refer to the same embodiment or example.
It is understood that the embodiments of the method described above are described in a progressive manner, and the same/similar parts of the embodiments are referred to each other, and each embodiment focuses on differences from the other embodiments. Reference may be made to the description of other method embodiments for relevant points.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features of the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present disclosure, and the description thereof is more specific and detailed, but not construed as limiting the claims. It should be noted that, for those skilled in the art, various changes and modifications can be made without departing from the concept of the present disclosure, and these changes and modifications are all within the scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the appended claims.
Claims (10)
1. A method for detecting moisture resistance of a packaged device, comprising the steps of:
extracting gas in the sealed cavity to produce vacuum condition; the sealed cavity is internally provided with a to-be-tested packaging device;
introducing mixed gas of water vapor and inert gas into the sealed cavity, and monitoring the air pressure data in the sealed cavity in real time to stabilize the air pressure in the sealed cavity at a target air pressure;
monitoring the water vapor concentration in the sealed cavity in real time, adjusting the flow rate and the water vapor content of the mixed gas according to the water vapor concentration until the atmosphere environment in the sealed cavity reaches the characteristic parameters of a target atmosphere, and stopping introducing the mixed gas, wherein the characteristic parameters of the target atmosphere comprise air pressure and water vapor content;
and monitoring the electrical performance data of the to-be-tested packaging device in real time, and obtaining an evaluation result of the to-be-tested packaging device, which is resistant to the influence of water vapor, according to the electrical performance data and the characteristic parameters of the target atmosphere.
2. The method of claim 1, wherein the extracting gas from the sealed cavity creates a vacuum condition comprising:
determining the surface material of the peripheral circuit of the packaged device to be tested after the package is opened, and acquiring the characteristic parameters of the surface material;
obtaining target negative pressure according to preset detection accuracy and the characteristic parameters;
and pumping gas into the sealed cavity to reach the target negative pressure.
3. The method of claim 1, wherein the step of introducing the mixed gas of water vapor and inert gas into the sealed cavity and monitoring the gas pressure data in the sealed cavity in real time so that the gas pressure in the sealed cavity is stabilized at the target gas pressure comprises the steps of:
introducing mixed gas of water vapor and inert gas into the sealed cavity to obtain air pressure data in the sealed cavity, and triggering and opening a one-way valve on an air outlet pipeline of the sealed cavity when the air pressure data reaches a target air pressure;
when the air pressure data reach the target air pressure for the first time, the mixed gas of water vapor and inert gas is continuously introduced into the sealed cavity for a preset time.
4. The method of claim 1, wherein the characteristic parameters of the target atmosphere further include a temperature, the method further comprising:
obtaining the current atmosphere temperature in the sealed cavity, and comparing the current atmosphere temperature with the temperature parameter of the target atmosphere;
and when the temperature of the atmosphere in the sealed cavity is less than the temperature parameter of the target atmosphere, heating the atmosphere environment in the sealed cavity.
5. The method of claim 1, wherein the method further comprises:
and monitoring the air pressure data in the sealed cavity in real time, and triggering to open a safety valve on an air outlet pipeline of the sealed cavity when the air pressure data is greater than or equal to safe air pressure.
6. A system for detecting moisture resistance of a packaged device, comprising:
the sealed cavity comprises a test platform substrate and a cavity bell jar, the cavity bell jar covers the test platform substrate to form the sealed cavity, and a sample frame for arranging a to-be-tested packaging device is arranged on the test platform substrate;
the vacuum pump is communicated with the sealed cavity and is used for extracting gas in the sealed cavity to manufacture a vacuum environment;
the water vapor generating device is communicated with the air inlet of the sealed cavity and is used for outputting mixed gas of water vapor and inert gas;
the mass spectrometer is communicated with the inside of the sealed cavity through a gas sampling device and is used for detecting the water vapor concentration in the sealed cavity;
the monitoring device is electrically connected with the to-be-detected packaging device and is used for detecting the electrical performance data of the to-be-detected packaging device in real time;
the air pressure detection element is arranged in the sealed cavity and used for detecting air pressure data in the sealed cavity;
the temperature detection element is arranged in the sealed cavity and used for detecting temperature data in the sealed cavity;
and the heating element is arranged on the inner side or the bottom of the sealed cavity and is used for heating the atmosphere environment in the sealed cavity.
7. The system of claim 6, wherein the sealed chamber is in communication with a one-way valve and a safety valve.
8. The system of claim 6, wherein the lower edge of the chamber bell is fixedly connected with the base of the test platform by fastening bolts, and a sealing rubber ring is arranged at the joint of the lower edge of the chamber bell and the test platform.
9. The system of claim 6, further comprising a driving module, wherein the driving module is used for opening and closing the cavity bell, the driving module comprises a lifting rod and a stepping motor, one end of the lifting rod is fixedly connected with the top end of the inner side of the cavity bell, and the other end of the lifting rod is connected with the output end of the stepping motor.
10. The system of any one of claims 6-9, further comprising a controller electrically connected to the vacuum pump, the moisture generating device, the mass spectrometer, the monitoring device, the gas pressure detecting element, the temperature detecting element, and the heating element, respectively, the controller comprising a memory and a processor, the memory storing a computer program that when executed by the processor performs the steps of the method of any one of claims 1-5.
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