CN107607676A - System occurs for traces of moisture standard in gas - Google Patents
System occurs for traces of moisture standard in gas Download PDFInfo
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- CN107607676A CN107607676A CN201710801046.7A CN201710801046A CN107607676A CN 107607676 A CN107607676 A CN 107607676A CN 201710801046 A CN201710801046 A CN 201710801046A CN 107607676 A CN107607676 A CN 107607676A
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Abstract
The invention belongs to traces of moisture standard generation technique field, system, including gas piping occur for the traces of moisture standard in a kind of gas that discloses, and one end is connected with high-purity gas source, and gas piping is provided with pressure-reducing valve, purifier and pressure maintaining valve；Tie point, connect in one end of gas piping, which is provided with the first mass flow controller, moisture content detection device and first flowmeter；Second branch road, connected with one end of gas piping, which is provided with the second mass flow controller, magnetic suspension balance and the first counterbalance valve；At least one dilution pipeline, one end can connect with the second branch road, and the other end is communicated with two branch lines, wherein a branch line connects with tie point, another branch line is provided with second flowmeter, and dilution pipeline is provided with the 3rd mass flow controller.Said structure can generate traces of moisture standard of the moisture less than 1 μm of ol/mol, and precise dew-point hygrometer or moisture monitor are calibrated, improve the degree of accuracy of calibration.
Description
Technical field
The present invention relates to traces of moisture standard generation technique field, more particularly to traces of moisture standard occurs in a kind of gas
System.
Background technology
Among current gas industrial chain, the application of ultra-pure gases is more and more extensive, particularly in electronics and information industry,
Part ultra-pure gases are super large-scale integration, flat panel display device, compound semiconductor device, solar cell, light
The electronics industries such as fibre produce indispensable raw material, are used for the techniques such as film, etching, doping, vapour deposition, diffusion.This
Outside, ultra-pure gases also have certain application in fields such as nuclear industry, national defence.It is right with the fast development of China's high technology industry
The demand more and more higher of ultra-pure gases quality, the particularly detection to micro- trace impurity in ultra-pure gases be particularly concerned about,
In trace impurity analysis, trace water analysis is that analysis is most difficult in all gas analysis, but is also one of most important index.
When carrying out trace water analysis, it will usually analyzed using precise dew-point hygrometer or moisture monitor, for checking
The reliability of instrument, instrument using it is preceding it is calibrated it is then extremely important.Domestic existing moisture standards at present fill
Moisture standards of the content higher than 1 μm of ol/mol can be produced by putting, but for measuring the usual measurement range of dew point hygrometer of traces of moisture
In 1 μm of below ol/mol, moisture standards generating means can not cover the scope of 1 μm of below ol/mol at present, lead to not pair
This quasi-instrument is calibrated.Therefore, it is badly in need of a kind of traces of moisture standard that can be continuously generated moisture and be less than 1 μm of ol/mol
Generation system.
The content of the invention
It is an object of the invention to provide traces of moisture standard in a kind of gas to occur system, can continuously generate moisture and contain
Traces of moisture standard of the amount less than 1 μm of ol/mol.
To use following technical scheme up to this purpose, the present invention：
System occurs for traces of moisture standard in a kind of gas, including：
Gas piping, one end are connected with the high-purity gas source equipped with high-purity gas, and the gas piping is along high-purity gas
Outflow direction is disposed with pressure-reducing valve, purifier and pressure maintaining valve；
Tie point, connects one end that the high-purity gas source is not connected with the gas piping, in the tie point
Provided with the first mass flow controller, moisture content detection device and first flowmeter；
Second branch road, one end that the high-purity gas source is not connected with the gas piping connect, on second branch road
The second mass flow controller, magnetic suspension balance and the first counterbalance valve, the magnetic suspension are sequentially provided with along gas circulating direction
Water penetration pipe is provided with balance；
Pipeline is diluted, is provided with least one, described dilution pipeline one end can connect and be located at second branch road
Between the magnetic suspension balance and the first counterbalance valve, the other end is communicated with two and is all provided with valvular branch line, wherein one
Branch line is connected with the tie point, and another branch line is provided with second flowmeter, and the dilution pipeline is provided with
3rd mass flow controller.
Preferably, also including the 3rd branch road, at least one dilution pipeline is communicated in one end of the 3rd branch road, institute
The other end for stating the 3rd branch road is communicated in second branch road and between the magnetic suspension balance and the first counterbalance valve.
Preferably, being additionally provided with triple valve on the branch line provided with second flowmeter, the triple valve is arranged on described
Between second flowmeter and the valve.
Preferably, the dilution pipeline is provided with two, and the 3rd mass flow control on two articles of dilution pipelines
The range of device processed is different.
Preferably, the wherein one article range for diluting the 3rd mass flow controller on pipeline and second quality stream
The range of amount controller is identical.
Preferably, the range of the 3rd mass flow controller on wherein one article dilution pipeline is another article of dilution pipeline
On the 3rd mass flow controller range 1/8-1/10.
Preferably, being additionally provided with blowdown piping in the tie point, the blowdown piping is arranged on first mass
Between flow controller and first flowmeter, and the blowdown piping is provided with the second counterbalance valve.
Preferably, the blowdown piping is provided with first pressure table, for detecting the pressure on the blowdown piping.
Preferably, the tie point is provided with second pressure gauge, the second pressure gauge is arranged on first matter
Measure between flow controller and the pressure maintaining valve.
Preferably, second branch road is provided with the 3rd pressure gauge, the 3rd pressure gauge is arranged on first back of the body
Between pressure valve and the 3rd branch road.
The present invention can give birth to the traces of moisture standard that moisture is (0.01-1) μm ol/mol by said structure, and
And precise dew-point hygrometer or moisture monitor can be calibrated, improve the degree of accuracy of calibration.Also can be that development is micro- simultaneously
The producer for measuring water analyzer provides traces of moisture standard of the moisture less than 1 μm of ol/mol.And the said structure of the present invention,
The automatic calibration of its mass flow controller can be realized, further increases and school is carried out to precise dew-point hygrometer or moisture monitor
Accurate precision.
Brief description of the drawings
Fig. 1 is the principle schematic that system occurs for traces of moisture standard in gas of the present invention.
In figure：
1st, gas piping；2nd, tie point；3rd, the second branch road；4th, the 3rd branch road；5th, branch line；6th, blowdown piping；7、
High-purity gas source；8th, pressure-reducing valve；9th, purifier；10th, pressure maintaining valve；11st, the first mass flow controller；12nd, moisture content detection device；
13rd, first flowmeter；14th, the second counterbalance valve；15th, first pressure table；16th, second pressure gauge；17th, the second mass flow controls
Device；18th, magnetic suspension balance；19th, the first counterbalance valve；20th, water penetration pipe；21st, second flowmeter；22nd, the 3rd mass flow controls
Device；23rd, the first dilution pipeline；24th, the second dilution pipeline；25th, the first valve；26th, the second valve；27th, the 3rd valve；28th,
Four valves；29th, the 3rd pressure gauge；30th, triple valve.
Embodiment
Further illustrate technical scheme below in conjunction with the accompanying drawings and by embodiment.
As shown in figure 1, the present invention, which provides traces of moisture standard in a kind of gas, occurs system, gas piping 1, the should be included
One branch road 2, the second branch road 3, the 3rd branch road 4, dilution pipeline, branch line 5 and blowdown piping 6, wherein：
The one end of above-mentioned gas pipeline 1 is connected with the high-purity gas source 7 equipped with high-purity gas, specifically, the high-purity gas has
Body refers to the rare gas such as the nitrogen of high-purity, and the present embodiment preferentially selects high pure nitrogen.Above-mentioned high-purity gas source 7 can be multiple
High-purity gas tank, multiple high-purity gas tanks are commonly connected to one end of the gas piping 1 by pipeline.
On above-mentioned gas pipeline 1 pressure-reducing valve 8, purifier 9 and voltage stabilizing are disposed with along high-purity gas outflow direction
Valve 10, wherein pressure-reducing valve 8 are used to be depressurized the high-purity gas that high-purity gas source 7 is flowed out, and purifier 9 is used for the height to outflow
Pure gas carries out purifying and goes the removal of impurity, and above-mentioned pressure maintaining valve 10 is used for the high-purity gas voltage stabilizing by purified device 9 after purification, avoids height
Pure gas pressure transient.
What one end that above-mentioned gas pipeline 1 is not connected with high-purity gas source 7 connected is provided with above-mentioned tie point 2 and second
Road 3, specifically interconnected between above-mentioned tie point 2, the second branch road 3 and the three of gas piping 1.Through the voltage stabilizing of pressure maintaining valve 10
High-purity gas afterwards can be shunted by the branch road 3 of tie point 2 and second, for trace of the follow-up moisture less than 1 μm of ol/mol
The generation of moisture standards provides basis.
Along gas circulating direction is sequentially provided with the first mass flow controller 11, water content detection fills in above-mentioned tie point 2
12 and first flowmeter 13 are put, the high-purity gas stream in tie point 2 can be adjusted by the first mass flow controller 11
Logical flow, it can be detected by first flowmeter 13 and show the flow in tie point 2, in the present embodiment, above-mentioned first
Flowmeter 13 is high precision flow, can accurately detect the flow of high-purity gas in tie point 2.
Above-mentioned moisture content detection device 12 is precise dew-point hygrometer or moisture monitor, passes through the precise dew-point hygrometer or micro-moisture
Instrument, the traces of moisture in high-purity gas in the tie point 2 can be detected in real time, it is ensured that generate required moisture and be less than 1 μ
Mol/mol traces of moisture standard.It is understood that above-mentioned precise dew-point hygrometer or moisture monitor may be replaced by treating school
Accurate precise dew-point hygrometer or moisture monitor, ensuring that generation has moisture less than 1 μm of ol/mol trace in tie point 2
After moisture standards, by precise dew-point hygrometer to be calibrated or moisture monitor connection in tie point 2, pass through precision to be calibrated
The analysis result of dew point hygrometer or moisture monitor, you can calibrated to it.
In the present embodiment, blowdown piping 6 is additionally provided with above-mentioned tie point 2, the blowdown piping 6 is arranged on the first quality stream
Between amount controller 11 and moisture content detection device 12, and blowdown piping 6 is provided with the second counterbalance valve 14.Height in tie point 2
Pure gas can be divided into two parts, and a part passes through above-mentioned moisture content detection device 12 and first flowmeter 13, another part
It can be vented by blowdown piping 6, by the blowdown piping 6, when the flow of the high-purity gas in tie point 2 changes
When, partial pressure can be discharged by the blowdown piping 6, and then cause the flow into the high-purity gas of moisture content detection device 12
It will not change, to realize the calibration to the trace water analysis of high-purity gas or to precise dew-point hygrometer or moisture monitor.
First pressure table 15 is provided with above-mentioned blowdown piping 6, process can be detected in real time by the first pressure table 15
The pressure of the high-purity gas of blowdown piping 6.Second pressure gauge 16 is additionally provided with above-mentioned tie point 2, the second pressure gauge 16
Be arranged between the first mass flow controller 11 and pressure maintaining valve 10, for detect from pressure maintaining valve 10 flow into tie point 2 in and
The pressure of the high-purity gas of the first mass flow controller 11 is not flowed into.
In the present embodiment, above-mentioned second branch road 3 is sequentially provided with the second mass flow controller 17, magnetic along gas circulating direction
The counterbalance valve 19 of suspension balance 18 and first, wherein water penetration pipe 20 is provided with magnetic suspension balance 18, above-mentioned water penetration pipe
20 can recur certain density moisture, and can be carried by the high-purity gas entered in magnetic suspension balance 18.
Above-mentioned 3rd branch road 4 is also communicated with the second branch road 3, the 3rd branch road 4 is arranged on magnetic suspension balance 18 and
Between one counterbalance valve 19, and two dilution pipelines being communicated with, one end of this two articles dilution pipelines connects with the 3rd branch road 4,
And the other end of two dilution pipelines is communicated with two branch lines 5, wherein a branch line 5 connects with tie point 2,
Another branch line 5 is provided with second flowmeter 21, and dilution pipeline is provided with the 3rd mass flow controller 22.Above-mentioned two
Valve is equipped with bar branch line 5, for controlling the break-make of branch line 5, in the present embodiment, above-mentioned valve is preferably barrier film
Valve.Specifically, wherein one dilution pipeline is arranged to the first dilution pipeline 23 by the present embodiment, another dilution pipeline is set
For the second dilution pipeline 24, wherein in two branch lines 5 connected with the first dilution pipeline 23, will be connected with tie point 2
Branch line 5 on valve be arranged to the first valve 25, the valve on the branch line 5 provided with second flowmeter 21 is arranged to
Second valve 26；Diluted with second in two branch lines 5 that pipeline 24 connects, the branch line 5 that will be connected with tie point 2
On valve be arranged to the 3rd valve 27, the valve on the branch line 5 provided with second flowmeter 21 is arranged to the 4th valve 28.
In the present embodiment, above-mentioned first dilution pipeline 23 and second dilutes the 3rd mass flow controller 22 on pipeline 24
Range it is different, in order to according to the different flows for requiring control and flowing through the high-purity gas of the 3rd mass flow controller 22, adjust
Adjusting range is more extensive, can produce traces of moisture standard of the moisture less than 1 μm of ol/mol.Above-mentioned first dilution pipeline 23
On the range of the 3rd mass flow controller 22 be the range of the 3rd mass flow controller 22 on the second dilution pipeline 24
1/8-1/10, by the setting of the range, life of a variety of moistures less than 1 μm of ol/mol traces of moisture standard can be realized
Into formation range is more extensive.
In the present embodiment, further, the range and the of the 3rd mass flow controller 22 on the first dilution pipeline 23
The range of two mass flow controllers 17 is identical.
It is understood that above-mentioned dilution pipeline is not limited only to two, can also be arranged as required to as one or
It is more a plurality of, to realize generation of more kinds of moistures less than 1 μm of ol/mol traces of moisture standard.
After the high-purity gas after the voltage stabilizing of pressure maintaining valve 10 flows into the second branch road 3, the second mass flow controller can be passed through
17 carry out Flow-rate adjustment (flow immobilizes after regulation), subsequently enter in magnetic suspension balance 18, above-mentioned water penetration pipe 20 can connect
Supervention gives birth to certain density moisture, and by entering the high-purity gas carrier band in magnetic suspension balance 18 after, a part passes through the 3rd
Road 4 flows into above-mentioned two dilutions pipeline, and another part then flows through the first counterbalance valve 19 and is vented.Height in above-mentioned two dilutions pipeline
The flow of pure gas can be controlled by the 3rd mass flow controller 22, then the high-purity gas one in every dilution pipeline
Divide and tie point 2 is flowed into by a branch line 5 therein, and mixed with the high-purity gas in tie point 2, needed for formation
Traces of moisture standard of the moisture less than 1 μm of ol/mol, another part then passes through the branched pipe provided with second flowmeter 21
The outflow emptying of road 5.
In the present embodiment, the 3rd pressure gauge 29 is additionally provided with the second branch road 3, the 3rd pressure gauge 29 is arranged on the 3rd
Between the counterbalance valve 19 of road 4 and first, the pressure for the high-purity gas being vented through the second branch road 3 can be detected by the 3rd pressure gauge 29
Power, in order to the pressure detected according to the 3rd pressure gauge 29, the second branch road 3 is adjusted into by the second mass flow controller 17
High-purity gas flow.
Further, triple valve 30 is additionally provided with the branch line 5 provided with second flowmeter 21, the one end of triple valve 30
Branch line 5 is communicated in, the other end is communicated in second flowmeter 21, and the 3rd end is then vented setting., can by setting triple valve 30
To select the flow direction of the high-purity gas in the branch line 5, such as in the range for needing the 3rd mass flow controller 22 of progress
During calibration, the branch line 5 is connected with second flowmeter 21 by triple valve 30, when the 3rd mass flow control need not be carried out
During the range calibration of device 22 processed, the high-purity gas in the branch line 5 is vented by triple valve 30.It is above-mentioned in the present embodiment
Second flowmeter 21 is also high precision flow, more accurately to detect the flow in the branch line 5.
Traces of moisture standard occurs system and is carrying out moisture less than 1 μm of ol/mol's in the above-mentioned gas of the present embodiment
During the generation of traces of moisture standard, first, the high-purity gas in high-purity gas source 7 can depressurize by pressure-reducing valve 8 successively, purifier
After 9 purifying and the voltage stabilizing of pressure maintaining valve 10, it is divided into two-way and flows to the branch road 3 of tie point 2 and second respectively, wherein flowing to tie point
2 high-purity gas carries out flow control by the first mass flow controller 11, flows to the high-purity gas of the second branch road 3 then by second
After mass flow controller 17 carries out flow control, magnetic suspension balance 18 is flowed into, and after carrying the production moisture of water penetration pipe 20
It is divided into two-way, flows through the 3rd pressure gauge 29 all the way and the first counterbalance valve 19 is vented, another way then flows into above-mentioned two dilution pipeline,
After the high-purity gas flowed into two dilution pipelines controls flow by respective 3rd mass flow controller 22, a-road-through
Cross a branch line 5 and be connected to tie point 2, and mixed with the high-purity gas in tie point 2, another way passes through another
Branch line 5 is vented.It is above-mentioned to flow to water content detection by branch line 5 and the mixed high-purity gas part of tie point 2
Device 12 and first flowmeter 13, traces of moisture standard of the required moisture less than 1 μm of ol/mol is generated, and can passed through
Moisture content detection device 12 detects the traces of moisture in high-purity gas, and another part is then vented by blowdown piping 6.
, only need to be by precise dew-point hygrometer to be calibrated or micro- when needing to carry out the calibration of precise dew-point hygrometer or moisture monitor
Amount Moisture Meter is replaced with original standard moisture content detection device 12, can then be analyzed according to the moisture content detection device 12 of standard
As a result the analysis result of the precise dew-point hygrometer to be calibrated with this or moisture monitor contrasts, you can realizes precise dew-point hygrometer or micro
The calibration of Moisture Meter.
System, which occurs, for traces of moisture standard in the above-mentioned gas of the present embodiment can also realize above-mentioned each mass flow control
The calibration of device processed, specifically：
When carrying out the calibration of the first mass flow controller 11, the first valve 25 and the 3rd valve 27 are closed, is now changed
The arranges value become in the range ability of the first mass flow controller 11, then can be by first flowmeter 13 to first mass
Each value is calibrated in the range of flow controller 11.
When carrying out the calibration of the second mass flow controller 17, due to the 3rd mass flow on the first dilution pipeline 23
The range of controller 22 is identical with the range of second mass flow controller 17, can now close the first counterbalance valve 19, first
Valve 25, the 3rd valve 27 and the 4th valve 28, the second valve 26 is opened, by triple valve 30 by branch line 5 and second
Gauge 21 connects, and then diluting the 3rd mass flow controller 22 on pipeline 23 by first is arranged to full opening mode, by this
Second flowmeter 21, you can realize the calibration to the second mass flow controller 17.
When the calibration for carrying out the 3rd mass flow controller 22 on the first dilution pipeline 23, now the 3rd quality stream
It is lower range and high range two amounts journey pattern (to adapt to trace of the different in moisture content less than 1 μm of ol/mol that amount controller 22, which divides,
Measuring the generation of moisture standards needs), (two branched pipes now connected with the second dilution pipeline 24 when carrying out lower range calibration
Road 5 is connected state), the first valve 25 is closed, opens the second valve 26, and by triple valve 30 by branch line 5 and the
Two flowmeters 21 connect, by setting in the range of the lower range of the 3rd mass flow controller 22 on the first dilution pipeline 23
Flow value, then pass through second flowmeter 21, you can realize to the 3rd mass flow controller 22 on the first dilution pipeline 23
The calibration of lower range.When carrying out high range calibration, the first valve 25, the 3rd valve 27, the 4th valve 28 are closed, opens second
Valve 26, then branch line 5 is connected with second flowmeter 21 by triple valve 30, passes through the second flowmeter 21, you can
Realize the calibration to the high range of the 3rd mass flow controller 22 on the first dilution pipeline 23.
When the calibration for carrying out the 3rd mass flow controller 22 on the second dilution pipeline 24, the 3rd valve is first shut off
27, the 4th valve 28 is opened, while connected branch line 5 with second flowmeter 21 by triple valve 30, pass through the second
Gauge 21, you can realize the calibration to the 3rd mass flow controller 22 on the second dilution pipeline 24.
In the present embodiment, above-mentioned each mass flow controller can be controlled by software, and each flowmeter of calibration is equal
It can also be gathered in real time by computer using the data of high precision flow, and high precision flow, magnetic suspension balance
18 can monitor the changing value of water penetration pipe 20 in real time, so as to calculate the permeability of water penetration pipe 20, by permeability with each
The flow of individual mass flow controller can be calculated into the moisture in the high-purity gas of moisture content detection device 12, by changing
Become the setting of each mass flow controller, the traces of moisture standard that moisture is (0.01-1) μm ol/mol, energy can occur
The calibration of precise dew-point hygrometer or trace moisture analysis instrument is enough in, can also be provided for the producer of development micro-moisture analyzer above-mentioned
Traces of moisture standard of the moisture less than 1 μm of ol/mol.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating example of the present invention, and it is pair to be not
The restriction of embodiments of the present invention.For those of ordinary skill in the field, may be used also on the basis of the above description
To make other changes in different forms.There is no necessity and possibility to exhaust all the enbodiments.It is all this
All any modification, equivalent and improvement made within the spirit and principle of invention etc., should be included in the claims in the present invention
Protection domain within.
Claims (10)
1. system occurs for traces of moisture standard in a kind of gas, it is characterised in that including：
Gas piping (1), one end are connected with the high-purity gas source (7) equipped with high-purity gas, and the gas piping (1) is along high-purity
Gas stream outgoing direction is disposed with pressure-reducing valve (8), purifier (9) and pressure maintaining valve (10)；
Tie point (2), connect the gas piping (1) be not connected with the high-purity gas source (7) one end, described first
Road (2) is provided with the first mass flow controller (11), moisture content detection device (12) and first flowmeter (13)；
Second branch road (3), one end that the high-purity gas source (7) is not connected with the gas piping (1) connect, described second
On road (3) the second mass flow controller (17), magnetic suspension balance (18) and first back of the body are sequentially provided with along gas circulating direction
Pressure valve (19), the magnetic suspension balance (18) is interior to be provided with water penetration pipe (20)；
Pipeline is diluted, is provided with least one, described dilution pipeline one end can connect with second branch road (3) and be located at institute
To state between magnetic suspension balance (18) and the first counterbalance valve (19), the other end is communicated with two and is all provided with valvular branch line (5),
Wherein a branch line (5) connects with the tie point (2), and another branch line (5) is provided with second flowmeter
(21), the dilution pipeline is provided with the 3rd mass flow controller (22).
2. system occurs for traces of moisture standard in gas according to claim 1, it is characterised in that also including the 3rd branch road
(4), at least one dilution pipeline is communicated in one end of the 3rd branch road (4), the other end connection of the 3rd branch road (4)
In second branch road (3) and between the magnetic suspension balance (18) and the first counterbalance valve (19).
3. system occurs for traces of moisture standard in gas according to claim 1, it is characterised in that provided with second flowmeter
(21) be additionally provided with triple valve (30) on branch line (5), the triple valve (30) be arranged on the second flowmeter (21) with
Between the valve.
4. system occurs for traces of moisture standard in gas according to claim 1, it is characterised in that the dilution pipeline is set
Two are equipped with, and the range of the 3rd mass flow controller (22) on two articles of dilution pipelines is different.
5. system occurs for traces of moisture standard in gas according to claim 4, it is characterised in that a wherein dilution tube
The range of the 3rd mass flow controller (22) on road is identical with the range of second mass flow controller (17).
6. system occurs for traces of moisture standard in gas according to claim 5, it is characterised in that a wherein dilution tube
The range of the 3rd mass flow controller (22) on road is the 3rd mass flow controller (22) on another article of dilution pipeline
Range 1/8-1/10.
7. system occurs for traces of moisture standard in gas according to claim 1, it is characterised in that the tie point
(2) blowdown piping (6) is additionally provided with, the blowdown piping (6) is arranged on first mass flow controller (11) and first
Between flowmeter (13), and the blowdown piping (6) is provided with the second counterbalance valve (14).
8. system occurs for traces of moisture standard in gas according to claim 7, it is characterised in that the blowdown piping
(6) first pressure table (15) is provided with, for detecting the pressure on the blowdown piping (6).
9. system occurs for traces of moisture standard in gas according to claim 1, it is characterised in that the tie point
(2) be provided with second pressure gauge (16), the second pressure gauge (16) be arranged on first mass flow controller (11) with
Between the pressure maintaining valve (10).
10. system occurs for traces of moisture standard in gas according to claim 2, it is characterised in that second branch road
(3) the 3rd pressure gauge (29) is provided with, the 3rd pressure gauge (29) is arranged on first counterbalance valve (19) and the described 3rd
Between branch road (4).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109060931A (en) * | 2018-09-10 | 2018-12-21 | 广州赛宝计量检测中心服务有限公司 | Vapour analysis instrument calibrating installation and calibration method |
| CN110850024A (en) * | 2018-08-21 | 2020-02-28 | 中国计量科学研究院 | Water detection calibration system, detection model establishing method and water detection method |
| CN117871436A (en) * | 2023-12-01 | 2024-04-12 | 江苏南大光电材料股份有限公司 | Permeation tube analysis device and method for verifying Gao Chunte gas trace moisture meter |
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