CN202649015U - Dynamic standard gas generator - Google Patents
Dynamic standard gas generator Download PDFInfo
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- CN202649015U CN202649015U CN 201220273322 CN201220273322U CN202649015U CN 202649015 U CN202649015 U CN 202649015U CN 201220273322 CN201220273322 CN 201220273322 CN 201220273322 U CN201220273322 U CN 201220273322U CN 202649015 U CN202649015 U CN 202649015U
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- mass flow
- flow controller
- solenoid valve
- standard gas
- gas generator
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Abstract
The utility model provides a dynamic standard gas generator. The dynamic standard gas generator comprises a small-flow mass flow controller and a large-flow mass flow controller. The small-flow mass flow controller and the large-flow mass flow controller are connected through pipelines in double-pipeline parallel connection mode, and the dynamic standard gas generator further comprises a back pressure valve which is connected with the double-pipeline parallel-connection pipeline. The dynamic standard gas generator has the advantages that after the structure is adopted, standard gas with different standard substance contents can be obtained through various standard substance permeation tubes; and the dynamic standard gas generator can be used to dilute bottled high-concentration standard gas, and trace amounts of standard substances of the standard gas can be obtained.
Description
Technical field
The utility model relates to a kind of dynamic standard gas generator.
Background technology
Existing calibrating gas generator can only be used for the calibrating gas that standard substance osmos tube mode obtains this standard substance of different content; The calibrating gas that the calibrating gas diluter can only be used for bottled high concentration dilutes the micro-content standard material that obtains this calibrating gas; And need to be equipped with ultra-pure gas.
The utility model content
The utility model proposes a kind of dynamic standard gas generator, it can overcome the shortcoming of dynamic standard gas generator in the prior art effectively, and it utilizes various standard substance osmos tubes can obtain the calibrating gas of this standard substance of different content; And can the calibrating gas of bottled high concentration be diluted, can obtain the micro-content standard material of this calibrating gas.
The technical solution of the utility model is achieved in that a kind of dynamic standard gas generator, it comprises a low discharge mass flow controller and a large flow mass flow controller, described low discharge mass flow controller and large flow mass flow controller also comprise the counterbalance valve that is connected with the two-way parallel pipeline by the mode that pipeline adopts two-way to be connected in parallel.
As preferably, described low discharge mass flow controller pipeline comprises the first solenoid valve, low discharge mass flow controller, infiltration chamber, the second solenoid valve that connects successively by pipeline.
As preferably, described large flow mass flow controller pipeline comprises by pipeline and connects successively the 3rd solenoid valve, purifier, large flow mass flow controller, the 4th solenoid valve.
As preferably, the other end of described counterbalance valve is connected with the 5th solenoid valve and spinner-type flowmeter.
As preferably, between low discharge mass flow controller pipeline and large flow mass flow controller pipeline, be connected with the 6th solenoid valve.
As preferably, after an end of described the 6th solenoid valve is connected in the first solenoid valve on the low discharge mass flow controller pipeline, after its other end is connected in purifier on the large flow mass flow controller pipeline.
The beneficial effects of the utility model are: after adopting said structure, dynamic standard gas generator of the present utility model utilizes various standard substance osmos tubes can obtain the calibrating gas of this standard substance of different content; Also can the calibrating gas of bottled high concentration be diluted, can obtain the micro-content standard material of this calibrating gas.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, the accompanying drawing of required use was done to introduce simply during the below will describe embodiment, apparently, accompanying drawing in the following describes only is one of them embodiment of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is the structural representation of the utility model embodiment.
Embodiment
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is one of them embodiment of the present utility model, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that obtains under the creative work prerequisite, all belong to the scope of the utility model protection.
As shown in Figure 1, a kind of dynamic standard gas generator, it comprises a low discharge mass flow controller 2 and a large flow mass flow controller 3, described low discharge mass flow controller 2 and large flow mass flow controller 3 also comprise the counterbalance valve 4 that is connected with the two-way parallel pipeline by the mode that pipeline adopts two-way to be connected in parallel.Described low discharge mass flow controller pipeline comprises the first solenoid valve 1, low discharge mass flow controller 2, infiltration chamber 5, the second solenoid valve 6 that connects successively by pipeline.Described large flow mass flow controller pipeline comprises by pipeline and connects successively the 3rd solenoid valve 7, purifier 8, large flow mass flow controller 3, the 4th solenoid valve 9.The other end of described counterbalance valve 4 is connected with the 5th solenoid valve 10 and spinner-type flowmeter 11.Between low discharge mass flow controller pipeline and large flow mass flow controller pipeline, be connected with the 6th solenoid valve 12.
In the present embodiment, after an end of described the 6th solenoid valve 12 is connected in the first solenoid valve 1 on the low discharge mass flow controller pipeline, after its other end is connected in purifier 8 on the large flow mass flow controller pipeline.
Dynamic standard gas generator in the utility model adopts built-in small-sized efficient purifier to remove the impurity such as water in nitrogen or the argon gas, oxygen, carbon dioxide, obtains zero gas; Adopt inside and outside polishing 316L stainless steel pipes and inside and outside polishing 316L stainless steel manufacturing infiltration chamber 5, prevent the pollution to gas; Infiltration chamber 5 places in the water-bath stove 13, and water-bath stove 13 temperature are controlled at design temperature ± 0.1 ℃ by solid-state relay; The two-way mass flow controller is adopted in the adjusting of gas flow, reduces the impact of temperature, pressure versus flow amount; Employing is switched as the gas flow process without the solenoid valve of external leakage; Adopt counterbalance valve 4 to stablize the generator internal gas pressure; Utilize automatically 5 kinds of gas circuit patterns of conversion of switch.
The gas circuit pattern of this dynamic standard gas generator is:
(1) zero gas pattern: bottled nitrogen enters the small-sized efficient purifier through the 3rd solenoid valve 7 and obtains zero gas, by large flow mass flow controller 3, again through the 4th solenoid valve 9, counterbalance valve 4 outputs.
(2) osmos tube high content mode: bottled nitrogen enters the small-sized efficient purifier through the 3rd solenoid valve 7, by solenoid valve V3, low discharge mass flow controller 2, infiltration chamber 5, obtain the calibrating gas of high-load osmos tube material, again through the second solenoid valve 6, counterbalance valve 4 outputs.
(3) bottled Standard Gases low discharge pattern: bottled Standard Gases enters through the first solenoid valve 1, does not place osmos tube by low discharge mass flow controller 2, infiltration chamber 5(), 4 outputs of the second solenoid valve 6, counterbalance valve.
(4) bottled Standard Gases dilution mode: bottled Standard Gases enters through the first solenoid valve 1, do not place osmos tube by low discharge mass flow controller 2, infiltration chamber 5(), the second solenoid valve 6 enters the small-sized efficient purifier with bottled nitrogen through the 3rd solenoid valve 7, the zero gas that obtains through large flow mass flow controller 3, the 4th solenoid valve 9 mixes, calibrating gas after obtaining to dilute, again through counterbalance valve 4 outputs, larger such as tolerance, can be with portion gas through the 5th solenoid valve 10, spinner-type flowmeter 11 emptying.
(5) osmos tube low content pattern: bottled nitrogen enters the small-sized efficient purifier through the 3rd solenoid valve 7, by the 3rd solenoid valve 7, low discharge mass flow controller 2, infiltration chamber 5 obtains the calibrating gas of high-load osmos tube material, enter small-sized efficient purifier with bottled nitrogen through the 3rd solenoid valve 7 through the second solenoid valve 6 again, by large flow mass flow controller 3, the zero gas that the 4th solenoid valve 9 obtains mixes, calibrating gas after obtaining to dilute, finally by counterbalance valve 4 outputs, larger such as tolerance, can be with portion gas through the 5th solenoid valve 10, spinner-type flowmeter 11 emptying.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all within spirit of the present utility model and principle, any modification of doing, be equal to replacement, improvement etc., all should be included within the protection domain of the present utility model.
Claims (6)
1. dynamic standard gas generator, it is characterized in that: it comprises a low discharge mass flow controller and a large flow mass flow controller, described low discharge mass flow controller and large flow mass flow controller also comprise the counterbalance valve that is connected with the two-way parallel pipeline by the mode that pipeline adopts two-way to be connected in parallel.
2. dynamic standard gas generator according to claim 1 is characterized in that: described low discharge mass flow controller pipeline comprises the first solenoid valve, low discharge mass flow controller, infiltration chamber, the second solenoid valve that connects successively by pipeline.
3. dynamic standard gas generator according to claim 2 is characterized in that: described large flow mass flow controller pipeline comprises by pipeline and connects successively the 3rd solenoid valve, purifier, large flow mass flow controller, the 4th solenoid valve.
4. dynamic standard gas generator according to claim 1, it is characterized in that: the other end of described counterbalance valve is connected with the 5th solenoid valve and spinner-type flowmeter.
5. dynamic standard gas generator according to claim 3 is characterized in that: be connected with the 6th solenoid valve between low discharge mass flow controller pipeline and large flow mass flow controller pipeline.
6. dynamic standard gas generator according to claim 5, it is characterized in that: after an end of described the 6th solenoid valve is connected in the first solenoid valve on the low discharge mass flow controller pipeline, after its other end is connected in purifier on the large flow mass flow controller pipeline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220273322 CN202649015U (en) | 2012-06-11 | 2012-06-11 | Dynamic standard gas generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220273322 CN202649015U (en) | 2012-06-11 | 2012-06-11 | Dynamic standard gas generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202649015U true CN202649015U (en) | 2013-01-02 |
Family
ID=47418107
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220273322 Expired - Lifetime CN202649015U (en) | 2012-06-11 | 2012-06-11 | Dynamic standard gas generator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202649015U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105396476A (en) * | 2015-10-22 | 2016-03-16 | 中国计量科学研究院 | Ultrahigh-purity gas dilution system |
| CN107607676A (en) * | 2017-09-07 | 2018-01-19 | 中国计量科学研究院 | System occurs for traces of moisture standard in gas |
| CN111928119A (en) * | 2020-08-06 | 2020-11-13 | 欧科能源技术(天津)有限公司 | Mine gas safety mixing system and gas mixing ratio control method |
-
2012
- 2012-06-11 CN CN 201220273322 patent/CN202649015U/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105396476A (en) * | 2015-10-22 | 2016-03-16 | 中国计量科学研究院 | Ultrahigh-purity gas dilution system |
| CN105396476B (en) * | 2015-10-22 | 2018-01-05 | 中国计量科学研究院 | A kind of ultra-pure gases dilution system |
| CN107607676A (en) * | 2017-09-07 | 2018-01-19 | 中国计量科学研究院 | System occurs for traces of moisture standard in gas |
| CN111928119A (en) * | 2020-08-06 | 2020-11-13 | 欧科能源技术(天津)有限公司 | Mine gas safety mixing system and gas mixing ratio control method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C56 | Change in the name or address of the patentee | ||
| CP02 | Change in the address of a patent holder |
Address after: 401336 Chongqing city Tongliang Industrial Park Pu Lu Fei Road No. 26 cloud Street Office Patentee after: Chongqing Rising Gas Co., Ltd. Address before: Xinhua Village eight town 401336 Dadukou District of Chongqing 10. Patentee before: Chongqing Rising Gas Co., Ltd. |
|
| CX01 | Expiry of patent term | ||
| CX01 | Expiry of patent term |
Granted publication date: 20130102 |