CN203908827U - Corrosive gas sampling device - Google Patents

Corrosive gas sampling device Download PDF

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Publication number
CN203908827U
CN203908827U CN201420310503.4U CN201420310503U CN203908827U CN 203908827 U CN203908827 U CN 203908827U CN 201420310503 U CN201420310503 U CN 201420310503U CN 203908827 U CN203908827 U CN 203908827U
Authority
CN
China
Prior art keywords
pipeline
sampling bottle
valve
corrosive gas
way valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201420310503.4U
Other languages
Chinese (zh)
Inventor
吉妮妮
翁博丰
程远梅
童孟
魏立波
刘亚南
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shaanxi Tianhong Silicon Material Co Ltd
Original Assignee
Shaanxi Tianhong Silicon Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shaanxi Tianhong Silicon Material Co Ltd filed Critical Shaanxi Tianhong Silicon Material Co Ltd
Priority to CN201420310503.4U priority Critical patent/CN203908827U/en
Application granted granted Critical
Publication of CN203908827U publication Critical patent/CN203908827U/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Abstract

The utility model discloses a corrosive gas sampling device which comprises a sampling bottle, a first three-way valve, a second three-way valve and an absorption cell, wherein the first three-way valve and the second three-way valve are respectively positioned at two sides of the sampling bottle; three end openings of the first three-way valve are respectively connected into a quick connector, the inlet end of a second pipeline and the inlet end of the sampling bottle; three end openings of the second three-way valve are respectively connected into the outlet end of the second pipeline, the outlet end of the sampling bottle and the inlet end of a third pipeline; and the absorption cell is connected with the outlet end of the third pipeline. When the corrosive gas sampling device is used for sampling corrosive gases, the atmosphere is not polluted, the threat to personnel safety is avoided and the pipelines are not corroded. In addition, the corrosive gas sampling device is low in cost, long in service life and high in operability.

Description

A kind of etchant gas sampling apparatus
Technical field
The utility model relates to a kind of etchant gas sampling apparatus, is a kind of device for Quick Acquisition corrosive gas.
Background technology
Offline inspection corrosive gas must first gather corrosive gas, if deal with corrosive gas in gatherer process improperly, may cause the problems such as atmospheric pollution, personal security and corrosive pipeline.
Corrosive gas collection at present just gathers with gas sampling bottle, and during displacement sampling bottle, etchant gas cannot reclaim direct discharge, and then atmosphere is polluted, and sample collector's safety is threatened simultaneously.Be necessary to design a kind of etchant gas sampling apparatus for this reason, make the collection of corrosive gas can atmosphere not polluted with personal security and be threatened.
Utility model content
The technical problems to be solved in the utility model is to provide a kind of etchant gas sampling apparatus, and the collection of corrosive gas can not pollute atmosphere, and personal security threatens, can corrosion pipeline yet, and its cost is low, long service life, and workable.
For achieving the above object, the technical solution of the utility model is as follows:
An etchant gas sampling apparatus, comprising:
One sampling bottle,
One lays respectively at the first T-valve and second T-valve of sampling bottle both sides,
Three ports of described the first tee ball valve access respectively rapid-acting coupling, the inlet end of second pipe and the entrance point of sampling bottle,
Three ports of described the second tee ball valve access respectively the endpiece of second pipe, the endpiece of sampling bottle, and the inlet end of the 3rd pipeline,
And the absorption cell being connected with the endpiece of described the 3rd pipeline.
In a preferred embodiment of the present utility model, one end of the inlet end of described sampling bottle and described the first tee ball valve arranges the first valve, and one end of the endpiece of described sampling bottle and described the second tee ball valve arranges the second valve.
By technique scheme, the beneficial effects of the utility model are:
The utility model can not pollute atmosphere the collection of corrosive gas, and personal security threatens, can corrosion pipeline yet, and its cost is low, long service life, and workable.
Accompanying drawing explanation
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to the accompanying drawing of required use in embodiment or description of the Prior Art be briefly described below, obviously, accompanying drawing in the following describes is only embodiment more of the present utility model, for those of ordinary skills, do not paying under the prerequisite of creative work, can also obtain according to these accompanying drawings other accompanying drawing.
Fig. 1 is structural representation of the present utility model.
400----rapid-acting coupling, 100----sampling bottle, 200----the first tee ball valve,
300----the second tee ball valve, 500----absorption cell, 130----the first valve,
The entrance point of 140----the second valve, 110----sampling bottle 100, the endpiece of 120----sampling bottle 100,410----the first pipeline, 510----the 3rd pipeline, 600---the second pipeline,
210,220 and three ports of 230-----the first tee ball valve,
310,320 and three ports of 330-----the second tee ball valve.
Embodiment
For technological means, creation characteristic that the utility model is realized, reach object and effect is easy to understand, below in conjunction with concrete diagram, further set forth the utility model.
With reference to Fig. 1, a kind of etchant gas sampling apparatus, comprising: a sampling bottle 100, lays respectively at the first T-valve 200 and second T-valve 300 of sampling bottle 100 both sides;
Wherein the first port 210 of the first tee ball valve 200 is by the inlet end of the first pipeline 410 access rapid-acting coupling 400, the second port 220 access second pipes 600, the entrance point 110 of the 3rd port 230 access sampling bottles 100;
Wherein the first port 310 of the second tee ball valve 300 is equipped with the absorption cell of absorption liquid, the endpiece of the second port access 320 access second pipes 600, the endpiece 120 of the 3rd port 330 access sampling bottles 110 by the 3rd pipeline 510 accesses;
In actual production technique, the first port 210 of the first tee ball valve 200 and the 3rd pipeline 510 of the second tee ball valve 300 are the common port of tee ball valve separately.
In addition, between the 3rd port 230 of the inlet end 110 of sampling bottle 100 and described the first tee ball valve, the first valve 130 is set as required, between the 6th port 330 of the endpiece 120 of described sampling bottle 100 and described the second tee ball valve, the second valve 140 is set; This first valve 130 and the second valve 140 are for controlling the break-make of sampling bottle inside.
While gathering corrosive gas, the first step purges system with nitrogen, and second step purges system with etchant gas, and the 3rd step gathers corrosive gas, and the 4th step purges pipeline with nitrogen.
Concrete operations are as follows:
The first step purges system with nitrogen: first rapid-acting coupling 400 is connected to nitrogen pipeline, again by regulating the first tee ball valve 200 that the first pipeline 410 is connected with sampling bottle 100, open sampling bottle valve 130 and 140, regulate the second tee ball valve 300 that the 3rd pipeline 510 is connected with sampling bottle 100, open nitrogen system is purged;
Second step purges system with etchant gas: first rapid-acting coupling 400 is connected to etchant gas pipeline, pipeline connects consistent with the first step, according to gathered etchant gas physico-chemical property, in absorption cell, add corresponding absorption liquid in addition, open corrosive gas pipeline system is purged;
The 3rd step gathers corrosive gas: after corrosive gas purges system, close sampling bottle valve 140 and carry out etchant gas collection;
The 4th step purges pipeline with nitrogen: after etchant gas collection completes, rapid-acting coupling 400 is connected to nitrogen pipeline again, regulate the first tee ball valve 200 that the first pipeline 410 is connected with the second pipeline 600 simultaneously, regulate the second tee ball valve 300 that the second pipeline 600 is connected with the 3rd pipeline 510, open nitrogen pipeline is purged.
The utility model can not pollute atmosphere the collection of corrosive gas, and personal security threatens, can corrosion pipeline yet, and its cost is low, long service life, and workable.
More than show and described ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; that in above-described embodiment and instructions, describes just illustrates principle of the present utility model; do not departing under the prerequisite of the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.

Claims (2)

1. an etchant gas sampling apparatus, is characterized in that, comprising:
One sampling bottle,
One lays respectively at the first T-valve and second T-valve of sampling bottle both sides,
Three ports of described the first tee ball valve access respectively rapid-acting coupling, the inlet end of second pipe and the entrance point of sampling bottle,
Three ports of described the second tee ball valve access respectively the endpiece of second pipe, the endpiece of sampling bottle, and the inlet end of the 3rd pipeline,
And the absorption cell being connected with the endpiece of described the 3rd pipeline.
2. a kind of etchant gas sampling apparatus according to claim 1, it is characterized in that, one end of the inlet end of described sampling bottle and described the first tee ball valve arranges the first valve, and one end of the endpiece of described sampling bottle and described the second tee ball valve arranges the second valve.
CN201420310503.4U 2014-06-12 2014-06-12 Corrosive gas sampling device Expired - Fee Related CN203908827U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201420310503.4U CN203908827U (en) 2014-06-12 2014-06-12 Corrosive gas sampling device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201420310503.4U CN203908827U (en) 2014-06-12 2014-06-12 Corrosive gas sampling device

Publications (1)

Publication Number Publication Date
CN203908827U true CN203908827U (en) 2014-10-29

Family

ID=51783090

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201420310503.4U Expired - Fee Related CN203908827U (en) 2014-06-12 2014-06-12 Corrosive gas sampling device

Country Status (1)

Country Link
CN (1) CN203908827U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107631912A (en) * 2017-11-13 2018-01-26 江苏星亚迪环境科技有限公司 One kind exempts from purging from the emptying liquid closed sampler of self-closing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107631912A (en) * 2017-11-13 2018-01-26 江苏星亚迪环境科技有限公司 One kind exempts from purging from the emptying liquid closed sampler of self-closing

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C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20141029

Termination date: 20200612