CN109052990A - Through color it is neutral can temperable di-silver low-emissivity coated glass and preparation method thereof - Google Patents
Through color it is neutral can temperable di-silver low-emissivity coated glass and preparation method thereof Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3618—Coatings of type glass/inorganic compound/other inorganic layers, at least one layer being metallic
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3652—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the coating stack containing at least one sacrificial layer to protect the metal from oxidation
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
- C03C17/366—Low-emissivity or solar control coatings
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2218/00—Methods for coating glass
- C03C2218/10—Deposition methods
- C03C2218/15—Deposition methods from the vapour phase
- C03C2218/154—Deposition methods from the vapour phase by sputtering
- C03C2218/156—Deposition methods from the vapour phase by sputtering by magnetron sputtering
Abstract
The present invention relates to it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass and preparation method thereof, coated glass includes the composite film that glass matrix and plating are set to one side surface of glass matrix, the composite film includes the first medium layer being sequentially depositing outwardly from the glass matrix, first protective layer, first low radiation functions layer, second protective layer, first heat-resistant fireproof layer, second dielectric layer, third protective layer, second low radiation functions layer, 4th protective layer, second heat-resistant fireproof layer, third dielectric layer, the first low radiation functions layer and the second low radiation functions layer are Ag-Cu alloy-layer, the present invention passes through optimization film layer structure and thicknesses of layers parameter, better protective effect can be played to low radiation functions film layer, improve the heat-resisting ability of composite film entirety, so that final obtained Glass product permeability is more preferable, more neutral through color, has lower radiance and higher selection coefficient relative to single silver LOW-E coated glass.
Description
Technical field
The present invention relates to field of glass production technology, and in particular to it is a kind of through color it is neutral can the double silver low radiations platings of tempering
Film glass and preparation method thereof.
Background technique
Low radiation coated glass, which refers to, deposits one layer of metallic silver as functional layer, in sunlight in Float Glass Surface
Far infrared near infrared ray and living environment plays reflex, so that absorption and radiance of the glass to infrared ray are reduced,
Such glass can be not only used for family's window, it can also be used to shop, the glass curtain wall of office building and high-grade hotel and other needs
Place.
Low radiation coated glass and its hollow product have ideal heat preservation and insulation and reasonable market price at present
Lattice are widely adopted in all kinds of buildings at home and abroad.Can high-temperature heat treatment low radiation coated glass can carry out it is curved
Shape processing, therefore the configuration design theory of building can be preferably expressed, it on the other hand can also significantly reduce production and processing
Cost, thus be a kind of product relatively conventional on the market.Although with can the building of rigidifying coated glass seeing at a distance
It varies in color when examining, but in short distance, more apparent, the unified bluish-green or yellow green (chromatic value of transmitted light is all presented
A* < -5, b* > 5), it is difficult to show its advanced sense.With the continuous transformation of aesthetic angle, market is to coated product through color
Demand also becomes diversification, it is clear that a kind of transmitted light color be muted color (chromatic value 5 > a* > -5,5 > b* > -5) can
Tempered and low-radiation coated glass product is that have the stronger market demand.
Cause can tempering coated product through color obviously partially green reason is, the composite Nano film layer plated need through
By the high temperature (by taking common single chamber annealing furnace as an example, about 670 DEG C of glass temperature, average 7 minutes of duration of being heated) of long period, because
This film material must protect Low emissivity silver layer using enough protective layers (such as silicon nitride layer or nicr layer).These
Protective layer selectively penetrates green light, and further cause on the market it is common can tempering coated product penetrate the face of color
Color is in light green, (penetrating color a* < -5).In order to change this phenomenon, coated glass product generally may be used in the realization through color
To have special selection absorbing material come repairing through color to product by the material for selecting different refractivity, or/and selection
Just.But in the prior art when introducing metallic copper or copper alloy alternatively in the case where property absorbing material, although metallic copper or
Its nanometer of film layer of copper alloy layer is in warm tones through color, can neutralize it is existing can tempering pair silver products transmission color, but still
There is a problem of can the double silver products of tempering oxidation resistances during High temperature tempered it is insufficient, especially when copper have multiple prices (+
1 and+2) in the case where, a small amount of oxygen atom migration can also cause the high-temperature oxydation of film layer to destroy, and Copper uptakie is larger causes to produce
Product transmitance is relatively low.
Summary of the invention
The present invention provide it is a kind of be able to solve the above problem through color it is neutral can temperable di-silver low-emissivity coated glass.
In order to achieve the above objectives, the technical solution adopted by the present invention is that: it is a kind of through color it is neutral can the low spokes of the double silver of tempering
Coated glass is penetrated, the composite film of one side surface of glass matrix, the composite film are set to including glass matrix and plating
Including the first medium layer, the first protective layer, the first low radiation functions layer, the second guarantor being sequentially depositing outwardly from the glass matrix
Sheath, the first heat-resistant fireproof layer, second dielectric layer, third protective layer, the second low radiation functions layer, the 4th protective layer, second
Heat-resistant fireproof layer, third dielectric layer, the first low radiation functions layer and the second low radiation functions layer are that Ag-Cu is closed
Layer gold, the first low radiation functions layer with a thickness of 5-15nm, the second low radiation functions layer with a thickness of 8-20nm.
Further, the first medium layer and the second dielectric layer are in ZnOx layers, ZnSnOx layers and SiNx layer
Any one layer or any multilayer composite layer.
Further, the first medium layer with a thickness of 13-60nm;The second dielectric layer with a thickness of 45-75nm.
Further, the third dielectric layer is SiNx layer, SiOx layers, any one layer in SiNxOy layers and TiOx layers
Or the composite layer of any multilayer.
Further, the third dielectric layer with a thickness of 25-70nm.
Further, first protective layer, second protective layer, the third protective layer and the 4th protection
Layer is NiCrOx layers.
Further, first protective layer, second protective layer, the third protective layer and the 4th protection
Layer with a thickness of 0.4-6nm.
Further, the first heat-resistant fireproof layer and the second heat-resistant fireproof layer are SbOx layers.
Further, the first heat-resistant fireproof layer with a thickness of 20-60nm;The thickness of the second heat-resistant fireproof layer
Degree is 30-60nm.
The present invention also provides it is a kind of it is above-mentioned through color it is neutral can temperable di-silver low-emissivity coated glass preparation method, packet
Include following steps:
(1) magnetron sputtering plating mode is used, plating sets the first medium layer in a side surface of the glass collective;
(2) magnetron sputtering plating mode is used, sets first protective layer in the outer surface plating of the first medium layer;
(3) magnetron sputtering plating mode is used, sets first Low emissivity in the outer surface plating of first protective layer
Functional layer;
(4) magnetron sputtering plating mode is used, sets described second in the outer surface plating of the first low radiation functions layer
Protective layer;
(5) magnetron sputtering plating mode is used, sets first high temperature resistant in the outer surface plating of second protective layer
Flame-retardant layer;
(6) magnetron sputtering plating mode is used, sets described second in the outer surface plating of the first heat-resistant fireproof layer
Dielectric layer;
(7) magnetron sputtering plating mode is used, sets the third protective layer in the outer surface plating of the second dielectric layer;
(8) magnetron sputtering plating mode is used, sets second Low emissivity in the outer surface plating of the third protective layer
Functional layer;
(9) magnetron sputtering plating mode is used, sets the described 4th in the outer surface plating of the second low radiation functions layer
Protective layer;
(10) magnetron sputtering plating mode is used, sets second high temperature resistant in the outer surface plating of the 4th protective layer
Flame-retardant layer;
(11) magnetron sputtering plating mode is used, sets the third in the outer surface plating of the second heat-resistant fireproof layer
Dielectric layer.
After the above technical solution is adopted, the invention has the following advantages over the prior art: the present invention passes through optimization film
Layer structure and thicknesses of layers parameter, better protective effect can be played to low radiation functions film layer, it is whole to improve composite film
The heat-resisting ability of body, so that final glass product permeability obtained is more preferable, it is more neutral through color, relative to single silver LOW-E
Coated glass has lower radiance and higher selection coefficient, and since copper processing is cheap, can reduce production cost.
Detailed description of the invention
Attached drawing 1 be it is of the invention through color it is neutral can temperable di-silver low-emissivity coated glass structural schematic diagram.
Wherein,
100, glass matrix;
200, composite film;
201, first medium layer;202, the first protective layer;203, the first low radiation functions layer;204, the second protective layer;
205, the first heat-resistant fireproof layer;206, second dielectric layer;207, third protective layer;208, the second low radiation functions layer;209,
4th protective layer;210, the second heat-resistant fireproof layer;211, third dielectric layer.
Specific embodiment
Below in conjunction with the accompanying drawings and embodiment the invention will be further described.
As shown in Figure 1, it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, including glass matrix 100 with
And plating is set to the composite film 200 of 100 1 side surface of glass matrix, composite film 200 include from glass matrix 100 outwardly successively
The first medium layer 201 of deposition, the first protective layer 202, the first low radiation functions layer 203, the second protective layer 204, the first resistance to height
Warm flame-retardant layer 205, second dielectric layer 206, third protective layer 207, the second low radiation functions layer 208, the 4th protective layer 209,
Two heat-resistant fireproof layers 210, third dielectric layer 211.
It is specific as follows:
First low radiation functions layer 203 and the second low radiation functions layer 208 are Ag-Cu alloy-layer, the first Low emissivity function
Ergosphere 203 with a thickness of 5-15nm, the second low radiation functions layer 208 with a thickness of 8-20nm.First Low emissivity function of the invention
Ergosphere 203 and the second low radiation functions layer 208 use Ag-Cu alloy, and the thickness parameter by optimizing Ag-Cu alloy-layer,
It can make after tempering that finally obtained glass product permeability is higher, color is limpider and it is beautiful to dazzle, to be promoted outside glass curtain wall
Quality is seen, Ag-Cu alloy is lower relative to pure Ag price.
First medium layer 201 and second dielectric layer 206 be ZnOx layers, ZnSnOx layers and any one layer in SiNx layer or
The composite layer of any multilayer.First medium layer 201 with a thickness of 13-60nm;Second dielectric layer 206 with a thickness of 45-75nm.
Third dielectric layer 211 is SiNx layer, SiOx layers, any one layer in SiNxOy layers and TiOx layers or any multilayer
Composite layer, third dielectric layer 211 with a thickness of 25-70nm.Film material selected by third dielectric layer 211 has superior
Physical property and resist chemical performance, the film layer being coated with have very strong anticorrosive, resistance to mechanical scuffing, property resistant to high temperatures
Can, so that the properties for follow and service life of glass product can be improved.
First protective layer 202, the second protective layer 204, third protective layer 207 and the 4th protective layer 209 are NiCrOx layers.
First protective layer 202, the second protective layer 204, third protective layer 207 and the 4th protective layer 209 with a thickness of 0.4-6nm.The
One protective layer 202, the second protective layer 204, third protective layer 207 and the 4th protective layer 209 Thickness ness can it is identical or
It is different.NiCrOx layers have preferable affinity when higher temperature carries out tempering processing, to the oxygen of partial penetration, can be effective
Capture oxygen molecule, preferably protect the first low radiation functions layer 203 and the second low radiation functions layer 208.In addition, due to
The part NiCrOx is closed with oxidation, be can be further improved the visible light transmittance of product, is improved the permeability of product.
When being coated with NiCrOx layers using magnetron sputtering coating method, it is preferred to use pure oxygen is sputtered, in this way can be true
The purity for protecting NiCrOx layers reduces the impurity of film layer doping, keeps film layer structure more complete, binding force is higher, to guarantee film
It is layer compact structure, smooth, product ability resistant to high temperature is improved, the forward and backward film layer of tempering is secured, can effectively ensure that production
Stability.
First heat-resistant fireproof layer 205 and the second heat-resistant fireproof layer 210 are SbOx layers.First heat-resistant fireproof layer 205
With a thickness of 20-60nm;Second heat-resistant fireproof layer 210 with a thickness of 30-60nm.
The present invention uses film material of the SbOx as the first heat-resistant fireproof layer 205 and the second heat-resistant fireproof layer 210
The protective effect to the first low radiation functions layer 203 and the second low radiation functions layer 208 can be improved, while improving composite membrane
Layer 200 whole heat resistance and high temperature impact resistance ability, can effectively reduce glass product open defect after tempering, solve glass and produce
The higher problem of product radiance.
It is a kind of it is above-mentioned through color it is neutral can temperable di-silver low-emissivity coated glass preparation method, include the following steps:
(1) magnetron sputtering plating mode is used, plating sets first medium layer 201 in a side surface of glass collective;
(2) magnetron sputtering plating mode is used, sets the first protective layer 202 in the outer surface plating of first medium layer 201;
(3) magnetron sputtering plating mode is used, sets the first low radiation functions layer in the outer surface plating of the first protective layer 202
203;
(4) magnetron sputtering plating mode is used, sets the second protective layer in the outer surface plating of the first low radiation functions layer 203
204;
(5) magnetron sputtering plating mode is used, sets the first heat-resistant fireproof layer in the outer surface plating of the second protective layer 204
205;
(6) magnetron sputtering plating mode is used, sets second dielectric layer in the outer surface plating of the first heat-resistant fireproof layer 205
206;
(7) magnetron sputtering plating mode is used, sets third protective layer 207 in the outer surface plating of second dielectric layer 206;
(8) magnetron sputtering plating mode is used, sets the second low radiation functions layer in the outer surface plating of third protective layer 207
208;
(9) magnetron sputtering plating mode is used, sets the 4th protective layer in the outer surface plating of the second low radiation functions layer 208
209;
(10) magnetron sputtering plating mode is used, sets the second heat-resistant fireproof in the outer surface plating of the 4th protective layer 209
Layer 210;
(11) magnetron sputtering plating mode is used, sets third medium in the outer surface plating of the second heat-resistant fireproof layer 210
Layer 211.
Automatically into tempering processing is carried out in annealing furnace after the completion of being coated with, heated back and forth, the heating temperature of coated surface
Degree is 680~690 DEG C, and the heating temperature of the non-coated surface of glass matrix 100 is low compared with coated surface temperature, is 670~680 DEG C,
Because film layer be it is low-emission coated, performance determines that the heat absorption capacity of film layer is strong not as good as non-coated surface, in order to ensure coated surface
It is consistent with the heat absorption of non-coated surface, avoid tempering from being burnt when handling curved, the temperature of coated surface need to be higher than non-coated surface.When tempering processing
Between be 570~590s.
The following are specific embodiments.
Embodiment 1
Through color it is neutral can temperable di-silver low-emissivity coated glass its composite film 200 structure are as follows: ZnO layer/
NiCrOx layers/Ag-Cu alloy-layer/NiCrOx layers/SbOx layers/SiNx layer/NiCrOx layers/Ag-Cu alloy-layer/NiCrOx layers/
SbOx layers/SiNx layer, the thickness of above each film layer are as follows: 29.6nm/1.4nm/8.6nm/1.4nm/25.2nm/74.3nm/
1.5nm/12.8nm/1.5nm/37.3nm/36.7nm。
Above-mentioned glass product the preparation method comprises the following steps:
(1) magnetron sputtering technique is used, plating sets first medium layer 201 on glass matrix 100: in midfrequent AC power supply
Under control, zinc-aluminium target sputtering sedimentation under oxygen atmosphere, power 55Kw, depositional coating is with a thickness of 29.6nm;Obtained
One dielectric layer 201 is ZnO layer;
(2) magnetron sputtering technique is used, plating sets the first protective layer 202 on first medium layer 201: utilizes planar cathode,
Under the control of DC power supply, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 1.8Kw, depositional coating with a thickness of
1.4nm, the first obtained protective layer 202 are NiCrOx layers;
(3) magnetron sputtering technique is used, plating sets the first functional layer on the first protective layer 202: using planar cathode, straight
Under the control in galvanic electricity source, yellow gold target sputtering sedimentation in argon atmosphere, power 10Kw, depositional coating is with a thickness of 8.6nm;
Obtained low radiation functions film layer is Ag-Cu alloy-layer;
(4) magnetron sputtering technique is used, plating sets the second protective layer 204 in the first functional layer: using planar cathode, straight
Under the control in galvanic electricity source, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 1.8Kw, depositional coating is with a thickness of 1.4nm, institute
Second protective layer 204 obtained is NiCrOx layers;
(5) magnetron sputtering technique is used, plating sets the first heat-resistant fireproof layer 205 on the second protective layer 204: utilizes rotation
Cathode, under the control of intermediate frequency power supply, Sb target sputtering sedimentation under oxygen atmosphere, power 35Kw, depositional coating with a thickness of
25.2nm;The first obtained heat-resistant fireproof layer 205 is SbOx layers;
(6) magnetron sputtering technique is used, plating sets second dielectric layer 206 on the first heat-resistant fireproof layer 205: is handed in intermediate frequency
Under the control in galvanic electricity source, sial target sputtering sedimentation in a nitrogen atmosphere, multiple target general powers are 186Kw, depositional coating with a thickness of
76.3nm;The second obtained dielectric layer is SiNx layer;
(7) magnetron sputtering technique is used, plating sets third protective layer 207 in second dielectric layer 206: utilizes planar cathode,
Under the control of DC power supply, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 2Kw, depositional coating with a thickness of 1.5nm,
Obtained third protective layer 207 is NiCrOx layers;
(8) magnetron sputtering technique is used, plating sets the second functional layer on third protective layer 207: using planar cathode, straight
Under the control in galvanic electricity source, yellow gold target sputtering sedimentation in argon atmosphere, power 15Kw, depositional coating with a thickness of
12.8nm;The second obtained functional layer is Ag-Cu alloy-layer;
(9) magnetron sputtering technique is used, plating sets the 4th protective layer 209 in the second functional layer: using planar cathode, straight
Under the control in galvanic electricity source, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 2Kw, depositional coating is made with a thickness of 1.5nm
The 4th protective layer 209 obtained is NiCrOx layers;
(10) magnetron sputtering technique is used, plating sets the second heat-resistant fireproof layer 210 on the 4th protective layer 209: utilizes rotation
Turn out cloudy pole, under the control of intermediate frequency power supply, Sb target sputtering sedimentation under oxygen atmosphere, power 45Kw, depositional coating with a thickness of
37.3nm;The second obtained heat-resistant fireproof layer 210 is SbOx layers;
(11) magnetron sputtering technique is used, plating sets third dielectric layer 211 on the second heat-resistant fireproof layer 210: utilizes rotation
Turn out cloudy pole, under the control of intermediate frequency power supply, Si target sputtering sedimentation under nitrogen atmosphere, power 88Kw, depositional coating with a thickness of
36.7nm;Obtained third dielectric layer 211 is SiNx layer.
Color before and after glass product tempering obtained above is as shown in table 1.
Table 1
Embodiment 2:
Through color it is neutral can temperable di-silver low-emissivity coated glass its composite film 200 structure are as follows: SiNx layer/
NiCrOx layers/Ag-Cu alloy-layer/NiCrOx layers/SbOx layers/ZnOx layers/NiCrOx layers/Ag-Cu alloy-layer/NiCrOx layers/
SbOx layers/SiOxNy layers, the thickness of above each film layer are as follows: 47nm/1.2nm/6.2nm/1.2nm/21.2nm/63.2nm/
2.1nm/13.6nm/2.2nm/34.2nm/38.6nm。
Above-mentioned glass product the preparation method comprises the following steps:
(1) magnetron sputtering technique is used, plating sets first medium layer 201 on glass matrix 100: in midfrequent AC power supply
Under control, sputtering sedimentation, multiple target general powers are 121Kw to sial target in a nitrogen atmosphere, and depositional coating is with a thickness of 47nm;It is made
The first medium layer 201 obtained is SiNx layer;
(2) magnetron sputtering technique is used, plating sets the first protective layer 202 on first medium layer 201: utilizes planar cathode,
Under the control of DC power supply, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 1.6Kw, depositional coating with a thickness of
1.2nm, the first obtained protective layer 202 are NiCrOx layers;
(3) magnetron sputtering technique is used, plating sets the first functional layer on the first protective layer 202: using planar cathode, straight
Under the control in galvanic electricity source, yellow gold target sputtering sedimentation in argon atmosphere, power 8Kw, depositional coating is with a thickness of 6.2nm;
The first obtained functional layer is Ag-Cu alloy-layer;
(4) magnetron sputtering technique is used, plating sets the second protective layer 204 in the first functional layer: using planar cathode, straight
Under the control in galvanic electricity source, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 1.6Kw, depositional coating is with a thickness of 1.2nm, institute
Second protective layer 204 obtained is NiCrOx layers;
(5) magnetron sputtering technique is used, plating sets the first heat-resistant fireproof layer 205 on the second protective layer 204: utilizes rotation
Cathode, under the control of intermediate frequency power supply, Sb target sputtering sedimentation under oxygen atmosphere, power 30Kw, depositional coating with a thickness of
21.2nm;The first obtained heat-resistant fireproof layer 205 is SbOx layers;
(6) magnetron sputtering technique is used, plating sets second dielectric layer 206 on the first heat-resistant fireproof layer 205: is handed in intermediate frequency
Under the control in galvanic electricity source, zinc-aluminium target sputtering sedimentation under oxygen atmosphere, multiple target general powers be 157Kw, depositional coating with a thickness of
63.2nm;Obtained second dielectric layer 206 is ZnOx layers;
(7) magnetron sputtering technique is used, plating sets third protective layer 207 in second dielectric layer 206: utilizes planar cathode,
Under the control of DC power supply, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 3.6Kw, depositional coating with a thickness of
2.1nm, obtained third protective layer 207 are NiCrOx layers;
(8) magnetron sputtering technique is used, plating sets the second functional layer on third protective layer 207: using planar cathode, straight
Under the control in galvanic electricity source, yellow gold target sputtering sedimentation in argon atmosphere, power 16Kw, depositional coating with a thickness of
13.6nm;The second obtained functional layer is Ag-Cu alloy-layer;
(9) magnetron sputtering technique is used, plating sets the 4th protective layer 209 in the second functional layer: using planar cathode, straight
Under the control in galvanic electricity source, NiCr target sputtering sedimentation in argon oxygen atmosphere, power 3.8Kw, depositional coating is with a thickness of 2.2nm, institute
4th protective layer 209 obtained is NiCrOx layers;
(10) magnetron sputtering technique is used, plating sets the second heat-resistant fireproof layer 210 on the 4th protective layer 209: utilizes rotation
Turn out cloudy pole, under the control of intermediate frequency power supply, Sb target sputtering sedimentation under oxygen atmosphere, power 41Kw, depositional coating with a thickness of
34.2nm;The second obtained heat-resistant fireproof layer 210 is SbOx layers;
(11) magnetron sputtering technique is used, plating sets third dielectric layer 211 on the second heat-resistant fireproof layer 210: utilizes rotation
It turns out cloudy pole, under the control of intermediate frequency power supply, Si target sputtering sedimentation under the mixed atmosphere of nitrogen and oxygen, power 92Kw sinks
Product thicknesses of layers is 38.6nm;Obtained third dielectric layer 211 is SiOxNy layers.
Color before and after glass product tempering obtained above is as shown in table 2.
Table 2
It can be seen from embodiment 1 and embodiment 2 it is of the invention through color it is neutral can the double silver low-emissivity coated glass of tempering
Permeability is good, more neutral through color after glass tempering.
The above embodiments merely illustrate the technical concept and features of the present invention, and its object is to allow person skilled in the art
Scholar cans understand the content of the present invention and implement it accordingly, and it is not intended to limit the scope of the present invention.It is all according to the present invention
Equivalent change or modification made by Spirit Essence, should be covered by the protection scope of the present invention.
Claims (10)
1. it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, including glass matrix and plating be set to the glass
The composite film of one side surface of matrix, it is characterised in that: the composite film includes being sequentially depositing outwardly from the glass matrix
First medium layer, the first protective layer, the first low radiation functions layer, the second protective layer, the first heat-resistant fireproof layer, second medium
Layer, third protective layer, the second low radiation functions layer, the 4th protective layer, the second heat-resistant fireproof layer, third dielectric layer, described
One low radiation functions layer and the second low radiation functions layer are Ag-Cu alloy-layer, the thickness of the first low radiation functions layer
Degree be 5-15nm, the second low radiation functions layer with a thickness of 8-20nm.
2. it is according to claim 1 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The first medium layer and the second dielectric layer are ZnOx layers, ZnSnOx layers and any one layer in SiNx layer or any more
The composite layer of layer.
3. it is according to claim 2 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The first medium layer with a thickness of 13-60nm;The second dielectric layer with a thickness of 45-75nm.
4. it is according to claim 1 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The third dielectric layer be SiNx layer, SiOx layers, any one layer in SiNxOy layers and TiOx layers or any multilayer it is compound
Layer.
5. it is according to claim 4 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The third dielectric layer with a thickness of 25-70nm.
6. it is according to claim 1 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
First protective layer, second protective layer, the third protective layer and the 4th protective layer are NiCrOx layers.
7. it is according to claim 6 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
First protective layer, second protective layer, the third protective layer and the 4th protective layer with a thickness of 0.4-
6nm。
8. it is according to claim 1 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The first heat-resistant fireproof layer and the second heat-resistant fireproof layer are SbOx layers.
9. it is according to claim 8 it is a kind of through color it is neutral can temperable di-silver low-emissivity coated glass, it is characterised in that:
The first heat-resistant fireproof layer with a thickness of 20-60nm;The second heat-resistant fireproof layer with a thickness of 30-60nm.
10. a kind of claim 1 to 9 it is described in any item through color it is neutral can temperable di-silver low-emissivity coated glass preparation
Method, which comprises the steps of:
(1) magnetron sputtering plating mode is used, plating sets the first medium layer in a side surface of the glass collective;
(2) magnetron sputtering plating mode is used, sets first protective layer in the outer surface plating of the first medium layer;
(3) magnetron sputtering plating mode is used, sets first low radiation functions in the outer surface plating of first protective layer
Layer;
(4) magnetron sputtering plating mode is used, sets second protection in the outer surface plating of the first low radiation functions layer
Layer;
(5) magnetron sputtering plating mode is used, sets first heat-resistant fireproof in the outer surface plating of second protective layer
Layer;
(6) magnetron sputtering plating mode is used, sets the second medium in the outer surface plating of the first heat-resistant fireproof layer
Layer;
(7) magnetron sputtering plating mode is used, sets the third protective layer in the outer surface plating of the second dielectric layer;
(8) magnetron sputtering plating mode is used, sets second low radiation functions in the outer surface plating of the third protective layer
Layer;
(9) magnetron sputtering plating mode is used, sets the 4th protection in the outer surface plating of the second low radiation functions layer
Layer;
(10) magnetron sputtering plating mode is used, sets second heat-resistant fireproof in the outer surface plating of the 4th protective layer
Layer;
(11) magnetron sputtering plating mode is used, sets the third medium in the outer surface plating of the second heat-resistant fireproof layer
Layer.
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CN111606578A (en) * | 2020-06-29 | 2020-09-01 | 吴江南玻华东工程玻璃有限公司 | Temperable low-reflection double-silver low-radiation coated glass and preparation method thereof |
CN112777945A (en) * | 2019-11-07 | 2021-05-11 | 中国南玻集团股份有限公司 | Three-silver glass |
CN114349367A (en) * | 2021-12-27 | 2022-04-15 | 吴江南玻华东工程玻璃有限公司 | Preparation method of energy-saving toughened glass with neutral color |
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