CN107663029A - A kind of grey low radiation coated glass in Europe - Google Patents
A kind of grey low radiation coated glass in Europe Download PDFInfo
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- CN107663029A CN107663029A CN201610599825.9A CN201610599825A CN107663029A CN 107663029 A CN107663029 A CN 107663029A CN 201610599825 A CN201610599825 A CN 201610599825A CN 107663029 A CN107663029 A CN 107663029A
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- layer
- glass
- zinc oxide
- thickness
- silicon nitride
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- 239000011521 glass Substances 0.000 title claims abstract description 72
- 230000005855 radiation Effects 0.000 title claims abstract description 21
- 239000010410 layer Substances 0.000 claims abstract description 208
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims abstract description 58
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 42
- 239000011241 protective layer Substances 0.000 claims abstract description 39
- 239000002346 layers by function Substances 0.000 claims abstract description 32
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 30
- 239000011787 zinc oxide Substances 0.000 claims abstract description 29
- 239000010949 copper Substances 0.000 claims abstract description 20
- 229910052802 copper Inorganic materials 0.000 claims abstract description 15
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052709 silver Inorganic materials 0.000 claims abstract description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000004332 silver Substances 0.000 claims abstract description 13
- KBEVZHAXWGOKCP-UHFFFAOYSA-N zinc oxygen(2-) tin(4+) Chemical compound [O--].[O--].[O--].[Zn++].[Sn+4] KBEVZHAXWGOKCP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 10
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims description 15
- 238000004544 sputter deposition Methods 0.000 claims description 6
- 229910018487 Ni—Cr Inorganic materials 0.000 claims description 5
- 238000000151 deposition Methods 0.000 claims description 4
- 230000003647 oxidation Effects 0.000 claims description 3
- 238000007254 oxidation reaction Methods 0.000 claims description 3
- GZCWPZJOEIAXRU-UHFFFAOYSA-N tin zinc Chemical compound [Zn].[Sn] GZCWPZJOEIAXRU-UHFFFAOYSA-N 0.000 claims description 2
- 238000002310 reflectometry Methods 0.000 abstract description 8
- 239000005344 low-emissivity glass Substances 0.000 abstract description 7
- 238000006124 Pilkington process Methods 0.000 abstract description 5
- 230000000007 visual effect Effects 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 38
- 229910001120 nichrome Inorganic materials 0.000 description 18
- -1 28.1nm Inorganic materials 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 9
- 239000002184 metal Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 9
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 9
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 239000000047 product Substances 0.000 description 8
- 239000011248 coating agent Substances 0.000 description 7
- 238000005507 spraying Methods 0.000 description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 229910007717 ZnSnO Inorganic materials 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 239000005329 float glass Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 239000011701 zinc Substances 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 229910052786 argon Inorganic materials 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 238000004040 coloring Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 230000003287 optical effect Effects 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 244000174681 Michelia champaca Species 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 229910003978 SiClx Inorganic materials 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 238000000137 annealing Methods 0.000 description 2
- 239000012298 atmosphere Substances 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000012299 nitrogen atmosphere Substances 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000000197 pyrolysis Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000010923 batch production Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- VQCBHWLJZDBHOS-UHFFFAOYSA-N erbium(III) oxide Inorganic materials O=[Er]O[Er]=O VQCBHWLJZDBHOS-UHFFFAOYSA-N 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001755 magnetron sputter deposition Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000006396 nitration reaction Methods 0.000 description 1
- 239000006132 parent glass Substances 0.000 description 1
- 238000011056 performance test Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3626—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer one layer at least containing a nitride, oxynitride, boronitride or carbonitride
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3639—Multilayers containing at least two functional metal layers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3644—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the metal being silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3649—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer made of metals other than silver
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/34—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
- C03C17/36—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
- C03C17/3602—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer
- C03C17/3657—Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal the metal being present as a layer the multilayer coating having optical properties
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a kind of grey low radiation coated glass in Europe, the glass film layers structure is followed successively by:Glass substrate, first layer prime coat silicon nitride layer, second layer protective layer nicr layer, third layer dielectric layer zinc oxide tin layers, the 4th layer of Seed Layer zinc oxide film, layer 5 functional layer layers of copper, layer 6 protective layer nicr layer, layer 7 dielectric layer silicon nitride layer, the 8th layer of dielectric layer zinc oxide tin layers, the 9th layer of Seed Layer zinc oxide film, the tenth one functional layer silver layer, eleventh floor protective layer nicr layer, Floor 12 medium protective layer silicon nitride layer.Low emissivity glass a* manufactured by the present invention is that 1.5~1.5, b* is 2.5~0, and transmitance is 30~43%, glass surface reflectivity is 4.0~6.5%, grey is still presented through color compared to existing grey glass, glass of the invention is in muted color through color, meets Visual Aesthetics demand.This glass is used for building curtain wall, can replace the use of float glass process Europe gray glass, and can meet the daylighting of building, aesthetic, power conservation requirement very well.
Description
Technical field
The present invention relates to off-line coated glass technology field, more particularly to a kind of offline European low-emission coated glass of grey
Glass.
Background technology
Low radiation coated glass (" Low-E " glass) is that a kind of infrared ray to 4.5~25 μm of wavelength has compared with high reflectance
Coated glass.This coated glass has high light transmittance to visible ray, ensure that the daylighting of interior, and has to far red light
High reflectivity, so as to accomplish to prevent heat outside glass absorption chamber to produce heat radiation again by the incoming interior of heat, and by indoor object
Caused heat reflects, and reaches the purpose for the heat radiation throughput for reducing glass.Building heating system is reduced so as to realize
Cold energy consumption.
The European smoked glass of prior art manufacture is largely body-tinted glass either on-line coating glass, and this two
The European smoked glass of kind method production has been widely used for building curtain wall, glass door and window and vehicle glass industry.Body
Color glass is in parent glass composition, by introducing colouring agent (nickel, chromium, iron, titanium, cobalt etc.) and Special controlling in production
To form the glass of color of object and performance.Chinese patent application CN101462826A discloses Fe2O3、CoO、Se、Er2O3Make
Smoked glass is prepared for colouring agent, between 62%-67%, surface reflectivity is less than 6.5% for its transmitance.In order to strengthen glass
Absorption of the glass to ultraviolet and infrared ray, the iron of a large amount of proportions is added in glass ingredient.Consequently, it is possible to blueness can be presented in glass
Or the characteristics of green and low transmitance, its application are limited.Conversely, reducing the introducing of iron, glass is difficult to reach preferable section again
Energy effect, does not meet the energy-saving theory of modern architecture.On the other hand because the coloring agent component of mass colouring introducing is more, than
Example is unmanageable, and long preparation period, efficiency are low.Such as technical scheme disclosed in Chinese patent application CN101300201A
In, the colorant assortment that it is introduced is up to as many as 12 kinds, and preparation section is many cumbersome including dry, heating, annealing, cooling etc.
Process, batch production technique is difficult to simplify.The method complex manufacturing, cycle length, and during the introducing of colouring agent, easily
Inside glass unbalanced stress is caused, causes glass to be ruptured in transportation.
On-line coating is in glass surface plated film in the production process of float glass using high temperature pyrolysis spraying coating process
A kind of method, its plated film mode are high temperature pyrolysis spraying film forming.The spraying work that Chinese patent application CN101003419A is reported
Skill needs pressure, the flow of spraying and the distance of spraying when the temperature of strict control glass surface, atomization.Its technique is more
Complexity, cost is high, and involved smoked glass transmitance is low, reflectivity is high, it is difficult to which popularization and application, the difficult point of this method is also
It is the control for spraying formula of liquid, the influence control of spray gun spraying speed, quantity for spray to thickness and uniformity, the temperature of annealing kiln
Influence control of the structural stress to film performance and outward appearance in degree and former piece production process.
In addition, building the European grey float glass used at present, it is not belonging to energy-conserving product.It synthesizes hollow product
Afterwards, the U values of product are more than 2.3W/m2K, shading coefficient are more than 0.5, and product photo-thermal is less than 1.2 than LSG.Hollow product every
Hot property is poor, it is impossible to the effective energy consumption for reducing building refrigerating thermal-insulation.
The content of the invention
It is an object of the invention to overcome in the prior art European smoked glass do not have Low emissivity energy-saving effect and manufacture
The deficiency of complex process, there is provided a kind of grey low radiation coated glass in Europe, the low emissivity glass reflectivity and reflected colour with it is general
The grey glass in logical float glass process Europe is consistent, through color ratio float glass process ash glass closer to muted color, it is seen that light transmission rate is high, and energy-efficient performance is strong.
In order to realize foregoing invention purpose, the invention provides following technical scheme:
A kind of grey low radiation coated glass in Europe, the glass film layers structure are followed successively by:Glass substrate, first layer prime coat nitrogen
SiClx layer, second layer protective layer nicr layer, third layer dielectric layer zinc oxide tin layers, the 4th layer of Seed Layer zinc oxide film, layer 5
Functional layer layers of copper, layer 6 protective layer nicr layer, layer 7 dielectric layer silicon nitride layer, the 8th layer of dielectric layer zinc oxide tin layers,
Nine layers of Seed Layer zinc oxide film, the tenth one functional layer silver layer, eleventh floor protective layer nicr layer, Floor 12 medium protective layer nitrogen
SiClx layer.
Further, above-mentioned low radiation coated glass is made of offline magnetron sputtering or atomic deposition technique plated film.
Further, the thickness of above-mentioned first layer prime coat silicon nitride layer is between 25nm to 35nm, layer 7 dielectric layer
Silicon nitride layer thickness is between 20nm to 30nm, and Floor 12 medium protective layer silicon nitride layer thickness is between 30nm to 48nm.
In this programme, according to the needs of different instances, silicon nitride layer can be the Si according to stoichiometric proportion3N4Or contain
The silicon nitride layer of rich Si types.In general, the Si of stoichiometric proportion3N4, its refractive index is 2.02~2.04, and is rich in Si
Silicon nitride, for its refractive index between 2.05~2.1, the silicon nitride of high index of refraction contributes to the raising of visible light transmissivity.
In this programme, silicon nitride layer contains aluminium (Al) element of 0~10wt% ratios, and the deposition of nitration case is existed by Si targets or SiAl
Generation is sputtered under the conditions of argon gas and nitrogen atmosphere.
Further, the thickness of above-mentioned second layer protective layer nicr layer is between 7.5nm to 8.5nm, layer 6 protective layer
Nicr layer thickness is between 2.5nm to 4nm, and eleventh floor protective layer nicr layer thickness is between 1.5nm to 3.5nm.Protective layer
Be usually located on functional layer, between functional layer and dielectric layer SiNx, protective layer in this programme for NiCr or
NiCrNx, its can not only defencive function layer silver layer and layers of copper with from oxidation, also have in contacting external air it is certain
Absorption, certain adjustment effect is played in terms of product colour.Protective layer is by NiCr alloy target materials under straight argon atmosphere
Progress sputtering sedimentation, Ni and Cr ratio are 80%: 20%, and the protective layer containing N is sputtered under argon gas and nitrogen atmosphere,
NiCrNxThe content of N element is 0~12wt% in film layer.
Further, the thickness of above-mentioned third layer dielectric layer zinc oxide tin layers is between 25nm to 35nm, the 8th layer of medium
The thickness of layer zinc oxide tin layers is between 15nm to 34nm.As intermediate interlayer, zinc-tin oxide can not only be exempted from defencive function layer
It is damaged, can also effectively improves chemical durability of layers.Zinc oxide tin layers are by ZnSn alloys targets in argon gas and oxygen atmosphere
Under sputtered, Zn and Sn ratio is 50: 50.
Further, the thickness of above-mentioned 4th layer of Seed Layer zinc oxide film is between 4nm to 10nm, the 9th layer of Seed Layer oxygen
Change the thickness of zinc layers between 4nm to 10nm.Zinc oxide can improve the flatness of whole film layer, in order to functional layer Ag and Cu
Deposition growing, smooth continuous Ag layers and Cu layers are favorably improved the infrared reflectivity of whole film layer, reduce the face electricity of film layer
Resistance.The zinc oxide film realized in this programme contains 1~10wt% Al elements, and the addition of Al elements can suppress Zn big crystalline substance
Grain growth, this contributes to the protection to functional layer Ag layers and Cu layers, while can reduce film layer surface resistance.Above-mentioned zinc oxide film leads to
The Zn metals for crossing the element containing Al sputter generation under argon gas and oxygen atmosphere.
Further, the thickness range of above-mentioned layer 5 functional layer layers of copper is between 4.9nm to 6.1nm.
Further, the thickness range of above-mentioned tenth one functional layer silver layer is between 8nm to 13nm.
Silverskin and copper film in such scheme thickness range can form continuous film, and transparent, can so allow most of
Visible light-transmissive, and most infrared light can be reflected away.For the effect of assurance function layer, must grow on a functional
Layer protective layer.
In above-mentioned technical proposal, due to thering is single silver film system and single copper film system to be superimposed upon one in the grey coated low-emissivity glass in Europe
Rise, so that the radiance of whole film layer is lower, while the transmitance of visible ray is decreased.Layer 5 functional layer layers of copper
The sheet resistance of whole membrane system is controlled with the tenth one functional layer silver layer, determines the radiance of membrane system, and directly affect the saturating of membrane system
Penetrate than and reflectivity, functional film layer can reflect away the heat radiation in most of solar energy, play Low emissivity energy-saving effect.But by
It is soft in function film quality, not wear-resisting and also poor with the combination degree of glass basis, generally increase deielectric-coating in functional membrane both sides.
First layer bottoming dielectric layer improves adhesive force of the film layer to glass substrate surface;The second layer, layer 6 and the 11st
Layer protective layer nicr layer can prevent functional layer from aoxidizing and improve work(as the barrier layer between functional layer and outer dielectric layer
The membranous layer binding force of ergosphere and outer dielectric layer, it is blocking to prevent that functional layer from condensing in sputter procedure, makes functional layer serialization, together
When can effectively improve the chemistry and mechanical stability of film layer;4th layer and the 9th layer of zinc oxide film function primarily as work(
The Seed Layer of ergosphere;Third layer and the 8th layer of dielectric layer zinc oxide tin layers are as dielectric layer on the inside of functional layer, it is possible to increase function
The bond strength of layer and glass substrate surface, while have the effect of regulation membrane system optical property and color concurrently;Layer 7 and the tenth
Two layer medium layer silicon nitride layer can improve the mechanical performance of film layer, can effectively prevent from scratching, and have higher refractive index,
It is advantageously used for the raising of visible light transmissivity.
The low emissivity glass being coated with using said sequence film layer, adjust thicknesses of layers, thus it is possible to vary to visible between film layer
Transmission, absorption and the reflection ratio of light.Optical principle can lead to visible ray, it is known that when the thin-film material of different-thickness combines
After crossing film layer, reflected light interferes phenomenon.Inventor is had found in experimental study from above-mentioned film material, according to certain
Order carries out plated film, in the range of above-mentioned thicknesses of layers, adjusts the thickness of film, can obtain the natural light of each wavelength period
Suitable reflection, transmittance, glass show the grey outward appearance in Europe.
Compared with prior art, beneficial effects of the present invention:
The present invention is set by the way that different film materials are combined with thicknesses of layers, manufactured low radiation coated glass
Visible ray chromaticity coordinates a* (representing red green degree, its value is more negative, and color is greener, on the contrary then redder) is between -1.5~1.5, b*
(representing champac degree, its value is more negative, and color is more blue, on the contrary then more yellow) between -2.5~0, transmitance 30%~43% it
Between, glass surface reflectivity is between 4.0~6.5%.Grey is still presented through color compared to existing grey glass simultaneously, the present invention realizes
Grey glass through color be in muted color, meet Visual Aesthetics demand.On the other hand film layer configuration is relatively simple needed for the present invention, is plating
Required target is more prone to arrange when film produces, and is advantageous to the lifting of production efficiency.By product produced by the present invention, it can be with
Synthesize double glazing to use, and the U values of double glazing finished product are less than 1.7W/m2K, shading coefficient are less than 0.29, product photo-thermal
It is more than 1.75 than LSG.This glass is used for building curtain wall, can replace the use of float glass process Europe gray glass, and can meet very well
The daylighting of building, aesthetic, power conservation requirement.
Brief description of the drawings
Fig. 1 is the structural representation of the grey coated low-emissivity glass in Europe of the present invention.
Marked in figure:1- first layer prime coat silicon nitride layers, 2- second layer protective layer nicr layers, 3- third layer dielectric layer oxygen
Change zinc-tin layer, the 4th layer of Seed Layer zinc oxide film of 4-, 5- layer 5 functional layer layers of copper, 6- layer 6 protective layer nicr layers, 7- the
Seven layers of dielectric layer silicon nitride layer, the 8th layer of dielectric layer zinc oxide tin layers of 8-, the 9th layer of Seed Layer zinc oxide film of 9-, the tenth layer of 10-
Functional layer silver layer, 11- eleventh floor protective layer nicr layers, 12- Floor 12 medium protective layer silicon nitride layers, 13- glass substrates.
Embodiment
With reference to test example and embodiment, the present invention is described in further detail.But this should not be understood
Following embodiment is only limitted to for the scope of the above-mentioned theme of the present invention, it is all that this is belonged to based on the technology that present invention is realized
The scope of invention.
In the present invention, L* represents bright-dark degree, and a*, b* are reddish blue degree coordinate, and+a* represents red, and-a* represents green
Color ,+b* represent yellow, and-b* represents blueness, a*t:The red green degree of transmitted light, b*t:The champac degree of transmitted light, a*g:
The red green degree of reflection light, b*g:The champac degree of reflection light.
Embodiment 1
Using the offline magnetic-controlled sputtering coating equipment of vacuum, on the high-quality float glass substrates of 6mm, it is coated with successively from inside to outside
Prime coat silicon nitride Si3N430.5nm, coat of metal nickel chromium triangle NiCr8.0nm, dielectric layer zinc-tin oxide ZnSnO30.6nm, oxidation
Zinc ZnO5nm, functional layer copper Cu5.5nm, nichrome protective layer NiCr3.3nm, dielectric layer silicon nitride Si3N425nm, dielectric layer
Zinc-tin oxide ZnSnO20.4nm, Seed Layer zinc oxide ZnO5nm, functional layer silver Ag10.2nm, metal nichrome protective layer
NiCr3.1nm, medium protective layer Si3N437.5nm。
Embodiment 2
Using the offline magnetic-controlled sputtering coating equipment of vacuum, on the high-quality float glass substrates of 6mm, it is coated with successively from inside to outside
Prime coat silicon nitride Si3N4, 33.2nm, coat of metal nickel chromium triangle NiCr, 8.1nm, dielectric layer zinc-tin oxide ZnSnO, 28.1nm,
Zinc oxide ZnO, 5.9nm, functional layer copper Cu, 5.7nm, nichrome protective layer NiCr, 2.9nm, dielectric layer silicon nitride Si3N4,
24.9nm, dielectric layer zinc-tin oxide ZnSnO, 19nm, Seed Layer zinc oxide ZnO, 5.6nm, functional layer silver Ag, 10.4nm, metal
Nichrome protective layer NiCr, 2.2nm, medium protective layer Si3N4, 36.4nm.
Embodiment 3
Using the offline magnetic-controlled sputtering coating equipment of vacuum, on the high-quality float glass substrates of 6mm, it is coated with successively from inside to outside
Prime coat silicon nitride Si3N4, 34nm, coat of metal nickel chromium triangle NiCr8.5nm, dielectric layer zinc-tin oxide ZnSnO, 29nm, zinc oxide
ZnO, 6nm, functional layer copper Cu, 5.8nm, nichrome protective layer NiCr, 2.9nm, dielectric layer silicon nitride Si3N4, 25.4nm, it is situated between
Matter layer zinc-tin oxide ZnSnO, 20nm, Seed Layer zinc oxide ZnO, 5nm, functional layer silver Ag, 11.2nm, the protection of metal nichrome
Layer NiCr, 1.5nm, medium protective layer Si3N4, 36nm.
Embodiment 4
Using the offline magnetic-controlled sputtering coating equipment of vacuum, on the high-quality float glass substrates of 6mm, it is coated with successively from inside to outside
Prime coat silicon nitride Si3N4, 27.5nm, coat of metal nickel chromium triangle NiCr, 7.5nm, dielectric layer zinc-tin oxide ZnSnO, 30.8nm,
Zinc oxide ZnO, 6.8nm, functional layer copper Cu, 5.1nm, nichrome protective layer NiCr, 3.3nm, dielectric layer silicon nitride Si3N4,
30nm, dielectric layer zinc-tin oxide ZnSnO, 28.1nm, Seed Layer zinc oxide ZnO, 9.8nm, functional layer silver Ag, 12.4nm, metal
Nichrome protective layer NiCr, 1.8nm, medium protective layer Si3N439nm。
Performance test
The Optical Parametric of the obtained grey low radiation coated glass in Europe of above-described embodiment 1 is determined according to GB/T18915.1-2013
Number, contrasts commercially available certain producer 6mm Europe gray glass original piece, the results are shown in Table 1.
The optical parametric of the grey Low-E glass in the Europe of table 1 and the grey glass original piece in float glass process Europe contrasts
As shown by data, the outdoor observation face color of low emissivity glass prepared by embodiment 1 is in European grey, is approached through color
Neutrality, grey is still presented through color compared to the European former piece of ash, the neutrality of low emissivity glass more conforms to Visual Aesthetics through color to be needed
Ask.
Claims (8)
1. a kind of grey low radiation coated glass in Europe, it is characterised in that the glass film layers structure is followed successively by:Glass substrate, first
Layer prime coat silicon nitride layer, second layer protective layer nicr layer, third layer dielectric layer zinc oxide tin layers, the 4th layer of Seed Layer zinc oxide
Layer, layer 5 functional layer layers of copper, layer 6 protective layer nicr layer, layer 7 dielectric layer silicon nitride layer, the 8th layer of dielectric layer oxidation
Zinc-tin layer, the 9th layer of Seed Layer zinc oxide film, the tenth one functional layer silver layer, eleventh floor protective layer nicr layer, Floor 12 are situated between
Quality guarantee sheath silicon nitride layer.
2. low radiation coated glass according to claim 1, it is characterised in that the low radiation coated glass uses offline magnetic
Control sputtering or atomic deposition technique plated film are made.
3. low radiation coated glass according to claim 1, it is characterised in that the thickness of the first layer prime coat silicon nitride layer
Degree is between 25nm to 35nm, and layer 7 dielectric layer silicon nitride layer thickness is between 20nm to 30nm, Floor 12 media protection
Layer silicon nitride layer thickness is between 30nm to 48nm.
4. low radiation coated glass according to claim 1, it is characterised in that the thickness of the second layer protective layer nicr layer
Between 7.5nm to 8.5nm, layer 6 protective layer nicr layer thickness is between 2.5nm to 4nm, eleventh floor protective layer nickel chromium triangle
Thickness degree is between l_5nm to 3.5nm.
5. low radiation coated glass according to claim 1, it is characterised in that the third layer dielectric layer zinc oxide tin layers
Thickness is between 25nm to 35nm, and the thickness of the 8th layer of dielectric layer zinc oxide tin layers is between 15nm to 34nm.
6. low radiation coated glass according to claim 1, it is characterised in that the thickness of the 4th layer of Seed Layer zinc oxide film
Degree is between 4nm to lOnm, and the thickness of the 9th layer of Seed Layer zinc oxide film is between 4nm to lOnm.
7. low radiation coated glass according to claim 1, it is characterised in that the thickness model of the layer 5 functional layer layers of copper
It is trapped among between 4.9nm to 6.1nm.
8. low radiation coated glass according to claim 1, it is characterised in that the thickness model of the tenth one functional layer silver layer
It is trapped among between 8nm to 13nm.
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Cited By (4)
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CN109650743A (en) * | 2019-01-17 | 2019-04-19 | 吴江南玻华东工程玻璃有限公司 | Through the grey three silver medal LOW-E glass of crystal and preparation method thereof of color neutrality |
CN110588102A (en) * | 2019-07-11 | 2019-12-20 | 中国航发北京航空材料研究院 | Lightweight vehicle window for high-speed train and manufacturing method thereof |
CN113173712A (en) * | 2021-05-25 | 2021-07-27 | 广东旗滨节能玻璃有限公司 | Low-emissivity coated glass and preparation method thereof |
CN115611526A (en) * | 2022-09-26 | 2023-01-17 | 吴江南玻华东工程玻璃有限公司 | Low-emissivity glass capable of being thermally processed and preparation method thereof |
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US20110262726A1 (en) * | 2010-04-22 | 2011-10-27 | Hartmut Knoll | Coated article having low-E coating with absorber layer(s) |
CN202390316U (en) * | 2011-12-23 | 2012-08-22 | 林嘉宏 | Low-radiation coated glass |
CN204222313U (en) * | 2014-11-12 | 2015-03-25 | 揭阳市宏光镀膜玻璃有限公司 | A kind of gold three silver medal LOW-E glass of high transmission rate |
CN205838842U (en) * | 2016-07-28 | 2016-12-28 | 四川南玻节能玻璃有限公司 | Off-line Europe ash low radiation coated glass |
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US20110262726A1 (en) * | 2010-04-22 | 2011-10-27 | Hartmut Knoll | Coated article having low-E coating with absorber layer(s) |
CN202390316U (en) * | 2011-12-23 | 2012-08-22 | 林嘉宏 | Low-radiation coated glass |
CN204222313U (en) * | 2014-11-12 | 2015-03-25 | 揭阳市宏光镀膜玻璃有限公司 | A kind of gold three silver medal LOW-E glass of high transmission rate |
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CN109650743A (en) * | 2019-01-17 | 2019-04-19 | 吴江南玻华东工程玻璃有限公司 | Through the grey three silver medal LOW-E glass of crystal and preparation method thereof of color neutrality |
CN110588102A (en) * | 2019-07-11 | 2019-12-20 | 中国航发北京航空材料研究院 | Lightweight vehicle window for high-speed train and manufacturing method thereof |
CN113173712A (en) * | 2021-05-25 | 2021-07-27 | 广东旗滨节能玻璃有限公司 | Low-emissivity coated glass and preparation method thereof |
CN115611526A (en) * | 2022-09-26 | 2023-01-17 | 吴江南玻华东工程玻璃有限公司 | Low-emissivity glass capable of being thermally processed and preparation method thereof |
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