CN109005662A - 芯片安装系统以及芯片安装方法 - Google Patents
芯片安装系统以及芯片安装方法 Download PDFInfo
- Publication number
- CN109005662A CN109005662A CN201810201941.XA CN201810201941A CN109005662A CN 109005662 A CN109005662 A CN 109005662A CN 201810201941 A CN201810201941 A CN 201810201941A CN 109005662 A CN109005662 A CN 109005662A
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- semiconductor structure
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- 238000000034 method Methods 0.000 title claims abstract description 20
- 239000004065 semiconductor Substances 0.000 claims abstract description 106
- 239000000758 substrate Substances 0.000 claims abstract description 66
- 238000004020 luminiscence type Methods 0.000 claims description 97
- 238000000926 separation method Methods 0.000 claims description 41
- 238000001514 detection method Methods 0.000 claims description 17
- 210000004209 hair Anatomy 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 7
- 230000008054 signal transmission Effects 0.000 claims description 6
- 229910052594 sapphire Inorganic materials 0.000 claims description 4
- 239000010980 sapphire Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 239000010453 quartz Substances 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 235000021384 green leafy vegetables Nutrition 0.000 claims 2
- 229910002601 GaN Inorganic materials 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 230000003760 hair shine Effects 0.000 description 5
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000009286 beneficial effect Effects 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 241001062009 Indigofera Species 0.000 description 2
- 239000003086 colorant Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
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- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
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- H01L33/0095—Post-treatment of devices, e.g. annealing, recrystallisation or short-circuit elimination
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CN113745145A (zh) * | 2020-05-29 | 2021-12-03 | 台湾爱司帝科技股份有限公司 | 芯片移转系统以及芯片移转方法 |
CN113777465A (zh) * | 2020-06-09 | 2021-12-10 | 台湾爱司帝科技股份有限公司 | 芯片检测方法、芯片检测结构以及芯片承载结构 |
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US11302561B2 (en) | 2019-11-12 | 2022-04-12 | Palo Alto Research Center Incorporated | Transfer elements that selectably hold and release objects based on changes in stiffness |
CN113496936B (zh) * | 2020-04-08 | 2023-10-10 | 台湾爱司帝科技股份有限公司 | 发光二极管芯片结构以及芯片移转系统与方法 |
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US10304991B2 (en) | 2019-05-28 |
US20180358508A1 (en) | 2018-12-13 |
TW201904015A (zh) | 2019-01-16 |
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