CN109001018A - 一种易氧化材料的透射样品制备及二维材料加固方法 - Google Patents
一种易氧化材料的透射样品制备及二维材料加固方法 Download PDFInfo
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- CN109001018A CN109001018A CN201810745568.4A CN201810745568A CN109001018A CN 109001018 A CN109001018 A CN 109001018A CN 201810745568 A CN201810745568 A CN 201810745568A CN 109001018 A CN109001018 A CN 109001018A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/34—Purifying; Cleaning
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
- G01N23/2255—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident ion beams, e.g. proton beams
- G01N23/2258—Measuring secondary ion emission, e.g. secondary ion mass spectrometry [SIMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/286—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q involving mechanical work, e.g. chopping, disintegrating, compacting, homogenising
- G01N2001/2873—Cutting or cleaving
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4077—Concentrating samples by other techniques involving separation of suspended solids
- G01N2001/4083—Concentrating samples by other techniques involving separation of suspended solids sedimentation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
- G01N2223/054—Investigating materials by wave or particle radiation by diffraction, scatter or reflection small angle scatter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/081—Investigating materials by wave or particle radiation secondary emission incident ion beam, e.g. proton
- G01N2223/0816—Investigating materials by wave or particle radiation secondary emission incident ion beam, e.g. proton incident ion beam and measuring secondary ion beam [SIMS]
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- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Molecular Biology (AREA)
- Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810745568.4A CN109001018A (zh) | 2018-07-09 | 2018-07-09 | 一种易氧化材料的透射样品制备及二维材料加固方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810745568.4A CN109001018A (zh) | 2018-07-09 | 2018-07-09 | 一种易氧化材料的透射样品制备及二维材料加固方法 |
Publications (1)
Publication Number | Publication Date |
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CN109001018A true CN109001018A (zh) | 2018-12-14 |
Family
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Family Applications (1)
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CN201810745568.4A Pending CN109001018A (zh) | 2018-07-09 | 2018-07-09 | 一种易氧化材料的透射样品制备及二维材料加固方法 |
Country Status (1)
Country | Link |
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CN (1) | CN109001018A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110553885A (zh) * | 2019-10-14 | 2019-12-10 | 长江存储科技有限责任公司 | 采用fib制备测试样品的方法以及测试样品 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102052906A (zh) * | 2009-11-10 | 2011-05-11 | 中芯国际集成电路制造(上海)有限公司 | 用于透射电子显微镜的器件绝缘隔离区观测样品制备方法 |
CN105136539A (zh) * | 2015-08-26 | 2015-12-09 | 上海华力微电子有限公司 | 一种制备tem芯片样品的方法 |
CN105334086A (zh) * | 2014-08-13 | 2016-02-17 | 中芯国际集成电路制造(上海)有限公司 | Tem样品的制备方法及tem样品 |
CN105806679A (zh) * | 2016-05-17 | 2016-07-27 | 上海华力微电子有限公司 | 一种tem样品的制备方法 |
-
2018
- 2018-07-09 CN CN201810745568.4A patent/CN109001018A/zh active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102052906A (zh) * | 2009-11-10 | 2011-05-11 | 中芯国际集成电路制造(上海)有限公司 | 用于透射电子显微镜的器件绝缘隔离区观测样品制备方法 |
CN105334086A (zh) * | 2014-08-13 | 2016-02-17 | 中芯国际集成电路制造(上海)有限公司 | Tem样品的制备方法及tem样品 |
CN105136539A (zh) * | 2015-08-26 | 2015-12-09 | 上海华力微电子有限公司 | 一种制备tem芯片样品的方法 |
CN105806679A (zh) * | 2016-05-17 | 2016-07-27 | 上海华力微电子有限公司 | 一种tem样品的制备方法 |
Non-Patent Citations (1)
Title |
---|
梁雪 等: "FIB在锆合金氧化膜截面透射样品制备上的应用", 《实验室研究与探索》 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110553885A (zh) * | 2019-10-14 | 2019-12-10 | 长江存储科技有限责任公司 | 采用fib制备测试样品的方法以及测试样品 |
CN110553885B (zh) * | 2019-10-14 | 2022-04-12 | 长江存储科技有限责任公司 | 采用fib制备测试样品的方法以及测试样品 |
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Inventor after: Qu Di Inventor after: Bai Guoren Inventor after: Chen Mo Inventor after: Ji Jingyuan Inventor after: Song Xueying Inventor before: Qu Di Inventor before: Bai Guoren Inventor before: Chen Mo Inventor before: Ji Jingyuan Inventor before: Song Xueying |
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Application publication date: 20181214 |