CN109000553A - A kind of film-type strain gauge production method - Google Patents
A kind of film-type strain gauge production method Download PDFInfo
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- CN109000553A CN109000553A CN201810565025.4A CN201810565025A CN109000553A CN 109000553 A CN109000553 A CN 109000553A CN 201810565025 A CN201810565025 A CN 201810565025A CN 109000553 A CN109000553 A CN 109000553A
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- Prior art keywords
- film
- machine
- foil
- strain gauge
- production method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a kind of film-type strain gauge production method, include the following steps: Yi Wen foil being cut into 100mm*100mm specification, natural cooling after keeping the temperature 8 hours at 375 degree using vacuum heat treatment furnace；Yi Wen foil is put into supersonic wave cleaning machine and cleans grease with cleaning agent, the Yi Wen foil surrounding after cleaning is fixed on slide glass with adhesive tape；Peek film is cut into 100mm*100mm size, supersonic wave cleaning machine is put into and is cleaned with cleaning agent, the peek film after cleaning is put into after plasma machine is surface-treated, gluing is carried out to peek film with multiple spot glue spreader, is then got rid of with centrifuge flat；Peek film and Yi Wen foil are bonded in advance, is pressurizeed and is clamped with pressuring machine after being clipped with fixture, be put into heat-treatment furnace and solidified, after solidification, carries out annealing heat-treatment.The present invention uses peek film to substitute traditional substrate glue as the carrier of foil and insulating layer, avoids worker direct labor and applies on strain gage adhesive to Yi Wen foil, ensure that product is integrally uniform, thin and thick is consistent, improves the quality of product.
Description
Technical field
The present invention relates to resistance strain gauge technology field more particularly to a kind of film-type strain gauge production methods.
Background technique
In strain gage adhesive binding material and its application field, common strain gage adhesive have epoxy type, phenol aldehyde type, polyimide type with
And compound type etc., the technique on foil using a ply strain glue is smeared, one layer of base of self-assembling formation after then toasting
Ground insulating layer.But there are significant drawbacks for the technique: the technique that 1. techniques use frictioning, it is desirable that worker has very high technology water
Flat, concentration, gluing temperature, the worker's gimmick of bondline thickness and glue have very big association, not can guarantee the consistency of product；2.
The ply strain glue smeared because of poor fluidity, it is difficult to ensure that it is whole uniformly, it may appear that thin and thick is different or even bubble point, excessively thin
Or to will lead to insulation bad for bubble, and it is blocked up to will lead to mechanical hysteresis and creep becomes larger, influence product accuracy；3. traditional glue pair
The stickup of metal foil is bad, and foil is easy to fall off, and strain gauge is caused to fail, and seriously affects product quality；4. tradition strain
Glue is easy the moisture absorption, influences very big, especially big regional of humidity or without good humidity after the moisture absorption on the performance of strain gauge
The workshop of control, strain gauge performance are highly unstable；5. material internal stress is larger, the accuracy of strain gauge is influenced.
Summary of the invention
In view of this, being substituted the purpose of the present invention is to provide a kind of film-type strain gauge production method using peek film
Carrier and insulating layer of traditional substrate glue as foil avoid worker direct labor and apply on strain gage adhesive to Yi Wen foil, protect
It is integrally uniform product is demonstrate,proved, thin and thick is consistent, improves the quality of product, extends the service life of product.
The present invention is achieved through the following technical solutions: the present invention provides a kind of film-type strain gauge production method, including
Following step:
S01, Yi Wen foil is cut into 100mm*100mm specification, keeps the temperature 8 hours at 375 degree using vacuum heat treatment furnace
Natural cooling afterwards；Yi Wen foil after heat treatment is put into supersonic wave cleaning machine and cleans grease with cleaning agent, after cleaning
Yi Wen foil surrounding is fixed on slide glass with adhesive tape；
S02, peek film is cut into 100mm*100mm size, is put into supersonic wave cleaning machine and is cleaned with cleaning agent, it will
Peek film after cleaning is put into after plasma machine is surface-treated, and is carried out gluing to peek film with multiple spot glue spreader, is then used
Centrifuge gets rid of flat；
S03, peek film and Yi Wen foil are bonded in advance, are pressurizeed and is clamped with pressuring machine after being clipped with fixture, be put into true
Empty heat-treatment furnace is solidified at 190 degree, after solidification, is carried out annealing heat-treatment, is after the completion taken semi-finished product from slide glass
Under, grinding process is carried out to the one side of non-pad pasting, it is clean to be then placed in supersonic wave cleaning machine alcohol washes；After cleaning will half at
Product are once again secured on slide glass, allow non-pad pasting one side upward；
Negative photoresist is coated on S04, the surface upward, got rid of with centrifuge it is flat, be then placed in oven drying, put after drying
Enter exposure machine, required model is selected to be exposed, developing machine is entered after exposure and is developed, is then cleaned；
S05, the semi-finished product to have developed are put into etching machine corrode, according to different model and parameter, adjust corresponding
Chemical concentration and etching time, are neutralized after corrosion with cleaning solution, are then cleaned with pure water；
S06, the semi-finished product corroded are impregnated and cleaned with the liquid medicine that removes photoresist, the photoresist on surface is removed, is then placed in super
The cleaning of sound wave cleaning machine；
S07, semi-finished product that will be clean carry out resistance trimming, to meet accurate resistance value needed for product, by resistance trimming finish half at
Product surface pasting protective film, prevents electrical resistance wire grid from damaging；
S08, it semi-finished product is put into automatic detecting machine detects, it is ensured that resistance value is adjusted in place, and is rejected defective products, will be closed
Lattice product are put into the size specification that automatic cutting machines is cut into model requirement, manually carry out final inspection to appearance, and qualified product is directly packaged
Encapsulation.
It in a preferred embodiment of the present invention, is got rid of in the step S02 with centrifuge flat, it is ensured that glue is in peek film table
One layer of uniform, thickness is adhered in the coating of 10 microns in face.
In a preferred embodiment of the present invention, plasma machine treatment conditions in the step S02 are as follows: temperature 25-30
DEG C, radio-frequency power supply power 400-450W handles time 20-30min.
In a preferred embodiment of the present invention, the step S01 is alcohol with cleaning agent used in step S02 and goes
Ionized water.
In a preferred embodiment of the present invention, the revolving speed of centrifuge is 600-800 in the step S02/ step S04
Rev/min, rotational time 0.5-1min.
In a preferred embodiment of the present invention, the temperature of oven is 80 DEG C -90 DEG C in the step S04, baking time
For 5-10min.
In a preferred embodiment of the present invention, it is put into supersonic wave cleaning machine in the step S06 and is cleaned using pure water.
In a preferred embodiment of the present invention, resistance trimming is carried out to semi-finished product in the step S07 and uses manual type tune
Resistance.
In a preferred embodiment of the present invention, liquid medicine is that ferric trichloride adds hydrochloric acid in the step S05, with weight percent
Than meter, corrode 30s when chemical concentration is 57%, chemical concentration is in 40-70%, etching time 20-40s.
In a preferred embodiment of the present invention, the liquid medicine that removes photoresist in the step S06 be negative photoresist clean liquid medicine or
Petroleum ether.
Compared with prior art, the invention has the following beneficial effects:
1. peek film is used to substitute traditional substrate glue as the carrier of foil and insulating layer, worker direct labor is avoided
It applies on strain gage adhesive to Yi Wen foil, ensure that product is integrally uniform, thin and thick is consistent, improves the quality of product, extends product
Service life.
2. pre-processing using ultrasonic wave and cleaning agent to peek film, best surface cleaning and pretreatment can be obtained；
Using plasma surface treatment technology, peek film surface is handled, its surface Electronic Speculum pattern can be improved, increase its surface
Activity.
3. getting rid of flat glue using centrifuge high speed rotation, guarantee that entirety is uniform, thin and thick is consistent, bubble-free point, insulation performance
It is good, improve product accuracy.
Specific embodiment
The following detailed description of a specific embodiment of the invention, as part of this specification, by embodiment come
Illustrate that the principle of the present invention, other aspects of the present invention, feature and its advantage will become apparent by the detailed description.
Film-type strain gauge production method of the invention, specifically include the following steps:
S01, Yi Wen foil is cut into 100mm*100mm specification, is heat-treated using vacuum heat treatment furnace, is heat-treated
Condition be: temperature be 375 degree, heat preservation 8 hours, natural cooling；Yi Wen foil after heat treatment is put into supersonic wave cleaning machine
It is middle to clean grease with alcohol and deionized water, the Yi Wen foil surrounding after cleaning is fixed on slide glass with adhesive tape；Using
Vacuum heat treatment furnace is heat-treated primarily to adjusting the temperature-coefficient of electrical resistance of foil；
S02, peek film is cut into 100mm*100mm size, be put into supersonic wave cleaning machine alcohol and deionized water into
Row cleaning, it is 25-30 DEG C, radio-frequency power supply power 400-450W that the peek film after cleaning, which is put into plasma machine in temperature, is carried out
Surface treatment, processing time are 20-30min, carry out gluing to peek film with multiple spot glue spreader, then with centrifuge in 600-
0.5-1min is rotated under 800 revs/min and gets rid of flat, so that it is guaranteed that glue adheres in peek film surface, one layer uniform, thickness is micro- 10
The coating of rice or so；
S03, peek film and Yi Wen foil are bonded in advance, are pressurizeed and is clamped with pressuring machine after being clipped with fixture, be put into true
Empty heat-treatment furnace is solidified at 190 degree, is allowed after glue curing, and annealing heat-treatment is carried out, after the completion by semi-finished product from slide glass glass
It is removed on glass, grinding process is carried out to the one side of non-pad pasting, it is clean to be then placed in supersonic wave cleaning machine alcohol washes；After cleaning
Semi-finished product are once again secured on slide glass, allow non-pad pasting one side upward；
Negative photoresist is coated on S04, the surface upward, is rotated 0.5-1min under 600-800 revs/min with centrifuge and is got rid of
It is flat, it is then placed in oven, the temperature for adjusting oven is 80 DEG C -90 DEG C, is put into exposure machine after baking 5-10min is to be dried, selects
Required model is exposed, and developing machine is entered after exposure and is developed, is then cleaned；
S05, the semi-finished product to have developed are put into etching machine corrode, according to different model and parameter, select tri-chlorination
Iron adds hydrochloric acid to corrode 30s when chemical concentration is 57%, chemical concentration is in 40- by weight percentage for corrosion liquid medicine
70%, etching time 20-40s are neutralized with cleaning solution after corrosion, are then cleaned with pure water；
S06, liquid medicine or petroleum ether immersion are cleaned with negative photoresist and cleans the semi-finished product corroded, by the photoetching on surface
Glue removal, is then placed in supersonic wave cleaning machine and is cleaned with pure water；
S07, clean semi-finished product are subjected to manual type resistance trimming, it is to meet accurate resistance value needed for product, resistance trimming is complete
Complete surface of semi-finished pasting protective film, prevents electrical resistance wire grid from damaging；
S08, it semi-finished product is put into automatic detecting machine detects, it is ensured that resistance value is adjusted in place, and is rejected defective products, will be closed
Lattice product are put into the size specification that automatic cutting machines is cut into model requirement, manually carry out final inspection to appearance, and qualified product is directly packaged
Encapsulation.
Wherein, negative photoresist cleaning liquid medicine is market purchase.
The above is a preferred embodiment of the present invention, cannot limit the right model of the present invention with this certainly
It encloses, it is noted that for those skilled in the art, without departing from the principle of the present invention, may be used also
To make several improvement and variation, these, which improve and change, is also considered as protection scope of the present invention.
Claims (10)
1. a kind of film-type strain gauge production method, which is characterized in that include the following steps:
S01, Yi Wen foil is cut into 100mm*100mm specification, after keeping the temperature 8 hours at 375 degree using vacuum heat treatment furnace certainly
It is so cooling；Yi Wen foil after heat treatment is put into supersonic wave cleaning machine and cleans grease with cleaning agent, by the Yi Wen after cleaning
Foil surrounding is fixed on slide glass with adhesive tape；
S02, peek film is cut into 100mm*100mm size, is put into supersonic wave cleaning machine and is cleaned with cleaning agent, will be cleaned
Peek film afterwards is put into after plasma machine is surface-treated, and gluing is carried out to peek film with multiple spot glue spreader, then with centrifugation
Machine gets rid of flat；
S03, peek film and Yi Wen foil are bonded in advance, are pressurizeed and clamped with pressuring machine after being clipped with fixture, is put into Vacuum Heat
Treatment furnace is solidified at 190 degree, after solidification, is carried out annealing heat-treatment, is after the completion removed semi-finished product from slide glass, right
The one side of non-pad pasting carries out grinding process, and it is clean to be then placed in supersonic wave cleaning machine alcohol washes；After cleaning again by semi-finished product
It is secondary to be fixed on slide glass, allow non-pad pasting one side upward；
Negative photoresist is coated on S04, the surface upward, got rid of with centrifuge it is flat, be then placed in oven drying, exposure is put into after drying
Ray machine, selects required model to be exposed, and developing machine is entered after exposure and is developed, is then cleaned；
S05, the semi-finished product to have developed are put into etching machine corrode, according to different model and parameter, adjust corresponding liquid medicine
Concentration and etching time, are neutralized after corrosion with cleaning solution, are then cleaned with pure water；
S06, the semi-finished product corroded are impregnated and cleaned with the liquid medicine that removes photoresist, the photoresist on surface is removed, ultrasonic wave is then placed in
Cleaning machine cleaning；
S07, semi-finished product that will be clean carry out resistance trimming, to meet accurate resistance value needed for product, semi-finished product table that resistance trimming is finished
Face paste protective film, prevents electrical resistance wire grid from damaging；
S08, it semi-finished product is put into automatic detecting machine detects, it is ensured that resistance value is adjusted in place, and defective products is rejected, by qualified product
It is put into the size specification that automatic cutting machines is cut into model requirement, final inspection manually is carried out to appearance, qualified product is directly packaged encapsulation.
2. film-type strain gauge production method as described in claim 1, which is characterized in that use centrifuge in the step S02
It gets rid of flat, it is ensured that glue adheres to one layer of uniform, thickness in the coating of 10 microns in peek film surface.
3. film-type strain gauge production method as described in claim 1, which is characterized in that plasma machine in the step S02
Treatment conditions are as follows: temperature is 25-30 DEG C, radio-frequency power supply power 400-450W, handles time 20-30min.
4. film-type strain gauge production method as described in claim 1, which is characterized in that in the step S01 and step S02
The cleaning agent used is alcohol and deionized water.
5. film-type strain gauge production method as described in claim 1, which is characterized in that in the step S02/ step S04
The revolving speed of centrifuge is 600-800 revs/min, rotational time 0.5-1min.
6. film-type strain gauge production method as described in claim 1, which is characterized in that the temperature of oven in the step S04
Degree is 80 DEG C -90 DEG C, baking time 5-10min.
7. film-type strain gauge production method as described in claim 1, which is characterized in that be put into ultrasound in the step S06
Wave cleaning machine is cleaned using pure water.
8. film-type strain gauge production method as described in claim 1, which is characterized in that semi-finished product in the step S07
It carries out resistance trimming and uses manual type resistance trimming.
9. film-type strain gauge production method as described in claim 1, which is characterized in that liquid medicine is three in the step S05
Iron chloride adds hydrochloric acid, by weight percentage, corrodes 30s when chemical concentration is 57%, chemical concentration in 40-70%,
Etching time is 20-40s.
10. film-type strain gauge production method as described in claim 1, which is characterized in that remove photoresist liquid medicine in the step S06
Liquid medicine or petroleum ether are cleaned for negative photoresist.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810565025.4A CN109000553A (en) | 2018-06-04 | 2018-06-04 | A kind of film-type strain gauge production method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810565025.4A CN109000553A (en) | 2018-06-04 | 2018-06-04 | A kind of film-type strain gauge production method |
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| Publication Number | Publication Date |
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| CN109000553A true CN109000553A (en) | 2018-12-14 |
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ID=64573307
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
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| CN201810565025.4A Pending CN109000553A (en) | 2018-06-04 | 2018-06-04 | A kind of film-type strain gauge production method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111006695A (en) * | 2019-12-02 | 2020-04-14 | 广东微应变传感科技有限公司 | Processing method of strainometer with self-adhesive |
| US20210396608A1 (en) * | 2020-06-23 | 2021-12-23 | Vishay Advanced Technologies, Ltd. | Method of manufacture of a strain gage or flexible polyimide-based resistor |
| CN115942642A (en) * | 2022-12-30 | 2023-04-07 | 中山市中力衡传感科技有限公司 | Resistance foil type sensor processing method and resistance foil type sensor |
-
2018
- 2018-06-04 CN CN201810565025.4A patent/CN109000553A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111006695A (en) * | 2019-12-02 | 2020-04-14 | 广东微应变传感科技有限公司 | Processing method of strainometer with self-adhesive |
| US20210396608A1 (en) * | 2020-06-23 | 2021-12-23 | Vishay Advanced Technologies, Ltd. | Method of manufacture of a strain gage or flexible polyimide-based resistor |
| CN115942642A (en) * | 2022-12-30 | 2023-04-07 | 中山市中力衡传感科技有限公司 | Resistance foil type sensor processing method and resistance foil type sensor |
| CN115942642B (en) * | 2022-12-30 | 2024-03-12 | 中山市中力衡传感科技有限公司 | Resistive foil sensor processing method and resistive foil sensor |
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Application publication date: 20181214 |
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