CN105021308B - A kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method - Google Patents
A kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method Download PDFInfo
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- CN105021308B CN105021308B CN201510412704.4A CN201510412704A CN105021308B CN 105021308 B CN105021308 B CN 105021308B CN 201510412704 A CN201510412704 A CN 201510412704A CN 105021308 B CN105021308 B CN 105021308B
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Abstract
A kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method.It is related in the film modified making enhanced fiber grating temperature sensor manufacture method of fiber grating surface aluminum metal.The present invention solves the problems, such as that traditional fiber grating temperature sensor sensitivity is relatively low and causes resolving power relatively low.In fiber grating surface deposition of aluminum film, fiber grating of the application of vacuum with aluminium film under the conditions of higher than 660 DEG C~700 DEG C, it is in molten condition to make aluminium film, and keeps one section of temperature constant state to cool down again, fine and close integrated aluminium film is obtained, and then improves the repeatability and stability of the swollen characteristic of temperature line of aluminium film.By the use of the glass capillary of plated film as 360 ° of lay photoetching mask plates, using photolithography method is rotated by 360 °, realizes and photoresist mask protection is carried out to the aluminium film on fiber grating surface.The detection sensitivity and resolving power of enhanced fiber grating temperature sensor can be improved with the inventive method, improves temperature detecting precision.
Description
Technical field
Fibre optical sensor manufacturing field of the present invention, the more particularly to sensitivity of enhancing fiber-optical grating temperature sensor, one
Kind aluminium modification enhanced fiber grating temperature sensor manufacture method.
Background technology
Temperature sensor is widely used in industry, agricultural and scientific instrument.Fiber-optical grating temperature sensor uses
Grating self-characteristic measures, and not by the interference of electromagnetic field, and does not need power supply, can realize passive measurement, thus some
Complicated applications show advantage.
Fiber-optical grating temperature sensor is thus relatively low to temperature detecting precision because sensitivity is low.In the market,
At 0.3 DEG C or so, the fiber optic temperature of 5mm Bragg gratings passes the fibre optic temperature sensor accuracy of detection of 3mm Bragg gratings
Sensor accuracy of detection is at 0.2 DEG C or so, and the fibre optic temperature sensor accuracy of detection of 10mm Bragg gratings is at 0.15 DEG C or so.
Harbin Institute of Technology application chemistry major Master degree candidate Zhang Wenyu in 2006 thesis；" fiber grating
Surface metalation technical study " encapsulates for fiber-optic grating sensor, creep, aging for macromolecule adhesive " short-lived " etc.
Performance seriously constrains the performance of fiber-optic grating sensor endurance quality, and fiber grating is passed using without the method that glue metallizes
Sensor is packaged, and can avoid the generation of above mentioned problem.
Thesis " the optical fiber Bragg light of power engineering Master postgraduate homogeneous China of East China University of Science in 2013
Grid surface metalation and high temp sensitive performance study " causes it to be directly used in temperature for the low characteristic of optical fiber grating temperature sensitivity
Sensitivity and resolution ratio are low during degree sensing, are splashed using the method for magnetron sputtering on the Fiber Bragg Grating FBG surface by pretreatment
The metallic film such as titanium (Ti), chromium (Cr), silver-colored (Ag), molybdenum (Mo) is penetrated to improve Characteristics of Fiber Bragg Gratings.
The patent of application number 03804115.4 discloses a kind of coating metal optical fiber, and on optical fibre core surface, formation is by thickness
The bottom that 0.01~0.5 μm of non-electrolytic Ni coating 2 is formed, in being made up of the electrolysis Ni coating 3 that thickness is 0.5~4.0 μm
Interbed, and the outermost layer being made up of the electrolysis Au coating 4 that thickness is 0.05~1 μm.
The patent of application number 201310626267.7 discloses a kind of optical fiber surface method for metallising, the optical fiber of surface metalation
And its application, using in the first plating solution and the second plating solution, reacted under microwave radiation, obtain the optical fiber of surface metalation.
The patent of application number 200710041504.8 discloses the method in fiber optic sensor end-face depositing metal membrane layer, the party
Method step is self-assembled modified including being carried out to fiber end face, obtains a self-assembled molecule layer, the self-assembled molecule layer has direction
Amino terminal outside face；This fiber bottom end is soaked in the Nano sols such as AU, AG or PD or metal ion salt solution at normal temperatures
Middle carry out catalytic activation, forms the catalytic center of chemical plating, finally fiber bottom end is dipped in the plating solution of chemical plating, in optical fiber end
Deposition obtains metal-plated film layer on face.
The metallic diaphragm that above paper and patent either physical deposition method or chemical deposition are formed, microcosmic
All existing defects, hole, failure crack, graininess, this film are hardly formed integration without molten condition heat treatment in aspect
Film, its physics linear expansion coefficient meeting deviation theory value, and it is difficult to ensure that the stable state of linear expansion coefficient.
The content of the invention
It is an object of the invention to provide a kind of resolving power that can improve fiber-optical grating temperature sensor and accuracy of detection,
Aluminium modifies enhanced fiber grating temperature sensor manufacture method.
A kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method, comprises the following steps：
Step 1：Using quartzy Bragg gratings, coat is peeled off, removes the organic media of cladding surface, organic solvent is clear
Wash, pure water cleaning；
Step 2：Using physical deposition method, aluminium film is deposited on fiber grating surface；
Step 3：Using vacuum heat treatment process, the heat that molten condition is carried out to fiber grating surface deposition aluminium film is steady
Determining processing；
Step 4：Using metal-coated membrane thin-walled capillary glass tube as 360 ° of masks, using being rotated by 360 ° photolithography method,
Realize and photoresist protection is carried out to the aluminium film being covered on Bragg grating surfaces, other parts photoresist removes；
Step 5：Using wet corrosion technique, corrode and remove the aluminium film beyond covering Bragg gratings；
Step 6：Remaining photoresist is removed using except film, pure water cleans until cleaning soluble impurity repeatedly；
Step 7：Using optical fiber laminating machine coating polyimide material, encapsulate by the exposed Bragg light of aluminum metal film
Grid；
Step 8：Form enhanced fiber grating temperature sensor.
A kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method, can also include：
1st, physical deposition method is used to deposit aluminium film on fiber grating surface as sputtering method, film plating process in step 2
Or thick film firing method.
2nd, used in step 3 vacuum heat treatment process for：The application of vacuum band aluminium film under the conditions of higher than 660 DEG C~700 DEG C
Fiber grating, it is in molten condition to make aluminium film, and keeps a period of time temperature constant state to cool down again, obtains aluminium film.
Beneficial effect：
The beneficial effect of the inventive method is：Using the Bragg light of the film modified fiber-optical grating temperature sensor of metallic aluminium
Grid, higher than aluminium melting temperature vacuum heat aluminium film, aluminium film can be caused to generate fine and close integrated film, eliminated due to physics and change
The defects of deposition is formed, hole, failure crack or graininess aluminium film are learned, and then improves the repeatability of the swollen characteristic of temperature line of aluminium film
And stability, on the basis of the resolving power of fiber-optical grating temperature sensor is effectively improved, improve fiber-optical grating temperature sensor
Repeatability and accuracy of detection.
Aluminium modifies enhanced fiber grating temperature sensor manufacture method, it is characterised in that fiber grating surface deposition of aluminum
Film, fiber grating of the application of vacuum with aluminium film under the conditions of higher than 660 DEG C~700 DEG C, it is in molten condition to make aluminium film, and keeps one
Section time temperature constant state cools down again, obtains fine and close integrated aluminium film, so improve the swollen characteristic of temperature line of aluminium film repeatability and
Stability, the hot linear expansion coefficient purpose of increase fiber grating is realized, effectively improve the resolving power of fiber-optical grating temperature sensor
And accuracy of detection.
Aluminium modifies enhanced fiber grating temperature sensor manufacture method, it is characterised in that utilizes the glass capillary of plated film
As 360 ° of lay photoetching mask plates, the deficiency supplemented with current plane lay photoetching mask plate.
Aluminium modifies enhanced fiber grating temperature sensor manufacture method, it is characterised in that using being rotated by 360 ° photoetching side
Method, realize and protection is masked to the aluminium film on fiber grating surface.
Brief description of the drawings
Fig. 1 is that aluminium modifies enhanced fiber grating temperature sensor manufacturing process block flow diagram；
Fig. 2 is the fiber-optical grating temperature sensor schematic diagram that aluminium modifies Bragg gratings；
The aluminium modification fiber-optical grating temperature sensor schematic diagram of Fig. 3 covering overlays.
Embodiment
The present invention is described in further details below in conjunction with accompanying drawing.
The invention aims to solve problems with existing for fiber-optical grating temperature sensor：(1) optical fiber grating temperature
Transducer sensitivity is low, causes the resolution capability of sensor weak；(2) the poor repeatability of traditional fiber grating metal-modified method, and
The problem of causing fiber-optical grating temperature sensor accuracy of detection low.
It is described in detail below in conjunction with accompanying drawing：Fig. 1 aluminium modifies fiber-optical grating temperature sensor manufacturing process flow block diagram；Fig. 2
The fiber-optical grating temperature sensor schematic diagram of the film modified Bragg gratings of metallic aluminium, the aluminium modification fiber grating of Fig. 3 covering coverings
Temperature sensor.
Accompanying drawing 1 is explained：Aluminium modification enhanced fiber grating temperature sensor manufacture work step, fiber grating removing protecting pipe-
Removing cladding surface organic media-organic solvent cleaning-in fiber grating surface physics deposition of aluminum film-vacuum heat-photoetching
Mask-wet etching remove aluminium film beyond covering grating-except film remove photoresist-pure water cleans-cover polyimides encapsulated membranes-formation
Enhanced fiber grating temperature sensor-filler test；
Accompanying drawing 2 is explained：Fiber core 1, Bragg gratings 2, metal aluminium film 3, polyimides covering 4.
Accompanying drawing 3 is explained：Polyimides covering 4.
The object of the present invention is achieved like this：
A, using quartzy Bragg gratings, polyimide coating layer is peeled off, removes the organic media of cladding surface, You Jirong
Agent is cleaned, pure water cleaning；
B, using physical deposition method, aluminium film is deposited on fiber grating surface；
C, using vacuum heat treatment process, fiber grating surface deposition aluminium film is carried out at the thermostabilization of molten condition
Reason；
D, using photolithography method is rotated by 360 °, realized as 360 ° of masks using metal-coated membrane thin-walled capillary glass tube
Photoresist protection is carried out to the aluminium film being covered on Bragg grating surfaces, other parts photoresist removes；
E, using wet corrosion technique, corrode and remove the aluminium film beyond covering Bragg gratings；
F, remaining photoresist is removed using except film, pure water cleans until cleaning soluble impurity repeatedly；
G, using optical fiber laminating machine coating polyimide material, encapsulate by the exposed Bragg gratings of aluminum metal film；
H, enhanced fiber grating temperature sensor is formed, through filler test, qualified optical fiber grating temperature is selected and passes
Sensor product.
The present invention can also include such Some features：
1st, deposited metal aluminium method, can be sputtering method, film plating process or thick film firing method.
2nd, the metal film for modifying Bragg gratings can be that aluminium film or linear expansion coefficient are higher than silica fibre material
The alloy of the tin film of low-temperature melting point, lead film and low melting point.
The present invention is to provide aluminium to modify enhanced fiber grating temperature sensor manufacture method, and it is related in optical fiber light
Grid surface aluminum metal is film modified to make enhanced fiber grating temperature sensor manufacture method.The present invention solves traditional fiber
Grating temperature sensor sensitivity is relatively low and the problem of causing resolving power relatively low.The manufacture method of the present invention is by following work step group
Into：Fiber grating removes protecting pipe-removing cladding surface organic media-organic solvent cleaning-and sunk in fiber grating surface physics
Product aluminium film-vacuum heat-mask-wet etching remove aluminium film beyond covering grating-except film removes photoresist-pure water is clear
Wash-cover polyimides encapsulated membranes-formation enhanced fiber grating temperature sensor-filler test.Produced with the inventive method
Enhanced fiber grating temperature sensor can effectively improve enhanced fiber grating temperature sensor detection sensitivity and resolution
Power, improve temperature detecting precision.
Embodiment is as follows：
A, using quartzy Bragg gratings, grating length 3mm, 5mm, 7mm, 10mm, 20mm etc., directly shelled using peeling plier
Overlay is removed, then dust-free paper dips in alcohol and wiped clean；Or soaked with paint stripper, then dipping in alcohol with dust-free paper will soak
Overlay is erased.The organic media of cladding surface is removed, finally respectively with organic solvent-acetone and alcohol washes, pure water with repeatedly
Cleaning more than 3 times, to cleaning up；
B, using physical deposition method, using physical deposition process such as sputtering unit, coating machines, deposited on fiber grating surface
Aluminium film；
C, using vacuum heat treatment process, thermostabilization processing, heat treatment are carried out to fiber grating surface deposition aluminium film
660~700 DEG C of temperature.To metal material tin, the lead of low melting point, and low-melting alloy, the vacuum higher than fusing point should be also used
Thermostabilization handling process；
D, using the glass capillary of 0.1mm wall thickness and diameter of bore 0.1mm metal-coated membrane as 360 ° of masks
Version, using photolithography method is rotated by 360 °, realize to carrying out photoresist protection to the aluminium film being covered on Bragg grating surfaces,
Other parts photoresist removes；
E, using wet corrosion technique, corrosive agent can use hydrochloric acid, nitric acid, sulfuric acid or its mixed liquor, remove covering Bragg
Aluminium film beyond grating；
F, remaining photoresist is removed using special photoresist membrane removal agent, pure water cleans until cleaning soluble impurity repeatedly；
G, using optical fiber laminating machine coating polyimide material, encapsulate by the exposed Bragg gratings of aluminum metal film；
H, enhanced fiber grating temperature sensor is formed, through filler test, qualified optical fiber grating temperature is selected and passes
Sensor product.
The principle of aluminium modification sensitivity of optical fiber grating temperature sensor enhancing provided by the invention：According to metallic aluminum material
Thermal coefficient of expansion is 230 × 10-7/ DEG C, the thermal coefficient of expansion of silica fibre is 5.5 × 10-7/ DEG C, when the temperature is changed, metal
The stroke of the quartzy Bragg gratings of aluminium film modification is greater than the quartzy Bragg gratings not being modified, aluminium film modification grating
Afterwards, the hot linear expansion coefficient of fiber grating is effectively increased, improves the clever lightness and resolving power of fibre optic temperature sensor, and then
Improve the accuracy of detection of fibre optic temperature sensor.
Temperature in the range of applicable -55 DEG C~280 DEG C of fiber-optical grating temperature sensor of aluminium modification provided by the invention is surveyed
Amount, the fibre optic temperature sensor accuracy of detection of 3mm Bragg gratings bring up to 0.2 DEG C or so, the optical fiber of 5mm Bragg gratings
Temperature sensor accuracy of detection is at 0.1 DEG C or so, and the fibre optic temperature sensor accuracy of detection of 10mm Bragg gratings is at 0.07 DEG C
Left and right.Suitable for the demand in the field such as industry, agriculture, scientific research.
Claims (3)
1. a kind of aluminium modifies enhanced fiber grating temperature sensor manufacture method, it is characterised in that：Comprise the following steps：
Step 1：Using Bragg gratings, coat is peeled off, removes the organic media of cladding surface, organic solvent cleaning, pure water
Cleaning；
Step 2：Using physical deposition method, in fiber grating surface deposition of aluminum film；
Step 3：Using vacuum heat treatment process, at the thermostabilization that molten condition is carried out to fiber grating surface deposition of aluminum film
Reason；Fiber grating surface deposition of aluminum film, fiber grating of the application of vacuum with aluminium film under the conditions of 660 DEG C~700 DEG C make the aluminium film be in
Molten condition, and keep a period of time temperature constant state to cool down again, fine and close integrated aluminium film is obtained, and then improve the temperature line of aluminium film
The repeatability and stability of swollen characteristic, the hot linear expansion coefficient purpose of increase fiber grating is realized, effectively improves fiber grating temperature
Spend the resolving power and accuracy of detection of sensor；
Step 4：Using metal-coated membrane thin-walled capillary glass tube as 360 ° of masks, using photolithography method is rotated by 360 °, realize
Photoresist protection is carried out to the aluminium film being covered on Bragg grating surfaces, other parts photoresist removes；
Step 5：Using wet corrosion technique, corrode and remove the aluminium film beyond covering Bragg gratings；
Step 6：Remaining photoresist is removed using except film, pure water cleans until cleaning soluble impurity repeatedly；
Step 7：Using optical fiber laminating machine coating polyimide material, encapsulate by the exposed Bragg gratings of aluminium film；
Step 8：Form enhanced fiber grating temperature sensor.
2. a kind of aluminium modification enhanced fiber grating temperature sensor manufacture method according to claim 1, its feature exist
In：Used in described step two physical deposition method fiber grating surface deposition of aluminum film for sputtering method, film plating process or
Person's thick film firing method.
3. a kind of aluminium modification enhanced fiber grating temperature sensor manufacture method according to claim 1, its feature exist
In：Used in described step three vacuum heat treatment process for：Light of the application of vacuum with aluminium film under the conditions of 660 DEG C~700 DEG C
Fine grating, it is in molten condition to make aluminium film, and keeps a period of time temperature constant state to cool down again, obtains aluminium film.
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| CN107607218B (en) * | 2017-09-02 | 2020-06-09 | 重庆黄葛树智能传感器研究院有限公司 | FBG (fiber Bragg Grating) hydrogen sensor for simultaneously measuring temperature and concentration and preparation method thereof |
| CN113203703A (en) * | 2021-04-29 | 2021-08-03 | 闽江学院 | Optical fiber sensor for detecting trivalent arsenic ions |
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| CN100478660C (en) * | 2007-09-27 | 2009-04-15 | 天津大学 | High sensitivity optical fiber temperature sensor |
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