CN103730206B - The method preparing transparent conducting film based on nano material - Google Patents

The method preparing transparent conducting film based on nano material Download PDF

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Publication number
CN103730206B
CN103730206B CN201210385813.8A CN201210385813A CN103730206B CN 103730206 B CN103730206 B CN 103730206B CN 201210385813 A CN201210385813 A CN 201210385813A CN 103730206 B CN103730206 B CN 103730206B
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conducting film
base material
nano material
transparent conducting
nano
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CN103730206A (en
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傅丽
孙彩明
苏文浩
李凯
李秋石
林德熙
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Nano and Advanced Materials Institute Ltd
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Nano and Advanced Materials Institute Ltd
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Abstract

The present invention relates to prepare nesa coating based on nano material especially nano silver wire.The present invention includes using high-energy flashlamp to make the annealing of described conducting film and the single step of patterning without post processing, to improve electric conductivity and to produce the pattern being not generally visible on the membrane, thus for contact panel or display manufacturing industry.

Description

The method preparing transparent conducting film based on nano material
Technical field
The method that the present invention relates to prepare nesa coating based on nano material, especially nano silver wire.This Invention include use high-energy flashlamp make in the case of need not post processing conducting film annealing and patterning Single step, to improve electric conductivity and to produce the most not on the film of industry preparing for touch panel or display Visible pattern.
Background technology
The conventional method preparing nano silver wire is by solution process, and by various coating processes by nanometer Line is coated on base material (U.S. Patent application of Publication No. 2011/0192633).By conventional method system Standby film based on nano silver wire needs through post processing or post growth annealing to obtain higher electric conductivity.Allusion quotation The post processing of type is that film is heated to high temperature, such as between 100-150 DEG C, enabling remove nano silver wire table Non-conducting material on face, and nano wire itself has nearer contact each other.Use such height It is possible to damage film base material and conductive region that temperature carries out the first problem of post processing.Use high-temperature post-treatment also Need relatively long time and higher cost.Described method also needs to etch process subsequently with removing unit Divide the step of material.High temperature is also unfavorable for any patterning of film.Typically require use index-matching material, Such as, when using indium tin oxide (ITO) as nesa coating, after etching-film, need tool There is the material that the refractive index with ITO matches so that described pattern is invisible.In the ink of coating Light-sensitive material is at high temperature thermally degradated, and this destroys nano silver wire network, thus reduces the conduction in destroyed district Property.If described destroyed district is through UV optical processing, those light-sensitive materials are degraded further, thus lead Electricity is worse.On the other hand, nano silver wire is the most non-degradable, and thus conduction is more preferably.Use is passed through Limit the conduction patterning preferably with the conventional method in the poor region of conduction and cause low optical property difference, by This will not produce sightless pattern in nesa coating.
In view of the above problems, need to utilize less processing step and contribute to film patterning prepare transparent leading The new method of electrolemma, especially in terms of preparing touch panel and other figuratum display of tool.
Summary of the invention
The method that the first aspect of the invention relates to preparing conducting film based on nano material, it is characterised in that By using high-energy flashlamp to use a step annealing and Patternized technique.The method comprise the steps that with at least 3 kinds of different solvent cleaned base materials;It is dried described base material first time period at the first temperature;By described base Material is immersed in the second time period in the isopropanol (IPA) of boiling;Described base material is at high temperature further dried Three time periods;And the ink containing nano material is coated on base material formation painting cloth base material, wherein said Nano material is dissolved in organic solvent.After using microscope to observe described painting cloth base material, when described coating When base material is exposed under high-energy flashlamp, by physical mask, painting cloth base material is sheltered.Make in the process Nano material be nano silver wire.High-energy flashlamp used can produce wavelength from 240nm to 1000nm The light of high impulse.Peak power density during each pulse can be up to the pact to its average power density 1000 times.Conducting film prepared by the method for the present invention need not temperature-curable, but uses high-energy flashlamp to exist On painting cloth base material, photocuring is carried out during one step annealing and Patternized technique.Has figuratum physical mask quilt For being placed between painting cloth base material and high-energy flashlamp, to conduct electricity during a step annealing and Patternized technique Pattern is produced on film.In the case of there is physical mask, after high-energy flashlamp exposes, in described coating Corresponding pattern is formed on base material.Regions of those exposures become conduction, and other sheltered by physical mask Region becomes non-conductive.A step annealing and Patternized technique by the present invention can be formed the most invisible Pattern, it is to avoid those conventional methods being known in the art etch any heat on the conducting film caused Destroy or chemical depletion.
The second aspect of the invention relates to the conducting film prepared by the method for the present invention.The conducting film of the present invention Mainly include base material and the coating containing multiple nano materials.The nano material of the present invention is nano silver wire.This The nano wire of invention can be linear, granular, spherical or cylinder.Exemplary embodiment party Case is linear, and length is about 10-15 μm and diameter about 70nm, or draw ratio is more than 150.More excellent Selection of land, draw ratio is more than 200.
Accompanying drawing explanation
Fig. 1: the photo shot under an optical microscope, depicts and is cut into 12 pieces according to square net With further through the painting cloth base material of high-energy flashlamp exposure.
Fig. 2: the absorbance (%) of the conducting film of photocuring front and rear under high-energy flashlamp.
Fig. 3: schematic diagram describe how on described conducting film use high-energy flashlamp realize a step annealing and Patternized technique: 3a (left figure) shows and physical mask 302 is placed in high-energy flashlamp 301 and conducting film Example between 303;3b (right figure) is shown and is made on conducting film by a step annealing and Patternized technique The size of standby pattern 304.
Fig. 4: the conductivity crossing mask border measured by conducting atomic force microscopy (c-AFM) is changed.
Fig. 5: utilize the thin layer between the exposed region at conducting film and the non exposed region of 4 point probes measurements Resistance (Rs).
Fig. 6: the SEM image (upper figure) through the inclination of the nano silver wire of photocuring does not dodges with at high energy Through the SEM image (figure below) of inclination of nano silver wire of photocuring under the exposure of light modulation.
Detailed description of the invention
(A) cleaning of base material before coating
The preferred base material of applied nano material is polyethylene terephthalate (PET) plate.It is being coated with Before cloth nano material, make PET sheet through cleaning procedure as herein described: (i) uses cleaning agent wiping PET sheet; (ii) deionized water rinsing PET sheet is used;(iii) acetone rinsing PET sheet is used;(iv) it is dried in the baking box of 70 DEG C PET sheet about 5 minutes;V PET sheet is immersed in the isopropanol of boiling about 10 minutes by ();(vi) by PET Plate rinses with fresh isopropanol;(vii) in the baking box of 70 DEG C, it is dried PET sheet about 15 minutes.Also Can be according at Adv.Mater.2011, the method described in 23,2905-2910 cleans the base material of the present invention, The disclosure of which is incorporated herein by.
(B) preparation of cloth base material it is coated with
First 10g/L nano silver wire is dissolved in 90%v/v isopropanol/alcohol solvent with preparation containing silver nanoparticle The ink of line.Then with apparatus for coating, the ink containing nano silver wire is applied on PET sheet.A reality Executing in scheme, described apparatus for coating is Meyer (Mayer) rod coater.The rod of Meyer rod is sized to Coating weight change as required.Each rod size has the rod number specified, such as rod 4-20.Rod 4-20 Can be used in the present invention.More specifically, use rod 4-10.In exemplary embodiment, use advanced in years Rod number 4 is the coating ink containing nano silver wire on base material.In preferred embodiments, Meyer is used Described ink is coated on base material at 34 DEG C by rod number 4.Mobile interpolation ink along with Meyer rod.One In individual embodiment, the mobile holding 120cm per minute of Meyer rod.Under the auxiliary of syringe pump, at base material The speed of upper ink is controlled and maintained under the constant rate of speed of about 2-5ml/min.Actual speed rate is limited by The size of base material.Other conventional coating techniques, such as spraying or intaglio printing can also be used, if its energy Enough generations and equal in quality of the present invention and the painting cloth base material of quantity.Ink containing nano silver wire is being coated on After on base material, then the base material of coating is dried about 5 minutes in the baking box of 70 DEG C.Then at optical microphotograph Microscopic observation dried painting cloth base material.It is divided into less block to enter one with square net by being coated with cloth base material Step processes (as shown in Figure 1).Described further process includes but not limited to photocuring, annealing and/or optical masking. In an exemplary embodiment, by making the cloth base material that is coated with cutting into smaller piece pass through sintering system based on xenon, Carry out photocuring, annealing and photoetching in a single step.
(C) step annealing on conducting film and patterning
Use high energy, air cooling flash lamp to provide high energy pulse in the present invention.Exemplary embodiment party In case, use high energy xenon lamp to provide the broad-spectrum light of 240nm to 1000nm.Further preferred embodiment makes Spectrum by the narrower range of 370nm to 1000nm.The average power density being exposed to painting cloth base material is about 10W/cm2.The pulsation rate of the flash of light that described flash lamp produces is 2 pulses the most per second, or more specifically pulse Persistent period is about 0.52ms.Peak power density during each pulse is about the 1000 of average power density Times.The continuous light source of identical high-caliber power density can be produced as the present invention it is optionally possible to use High-energy flashlamp.
After high-energy flashlamp exposes, measure conducting film absorbance and with not through the conduction of exposure of flash lamp The absorbance of film compares.Fig. 2 shows compared with the conducting film not having exposure, through exposure of flash lamp about 1-120 The conducting film of second has identical transmittance percentage changing pattern, and (absorbance is at wavelength 320nm to 800nm Optical transport under measure).It is shown that exposure to flash lamp and does not affect the absorbance of conducting film.
Fig. 3 a and 3b is the schematic diagram how carrying out annealing and patterning while using high-energy flashlamp. In fig. 3 a, physical mask 302 along light transmission route between flash lamp 301 and conducting film 303. Physical mask can be different on shape, pattern, size and thickness.The material of physical mask includes but does not limits In glass or metal.Fig. 3 b is the example of the pattern 304 on film, and this pattern is corresponding corresponding to physical mask Pattern.In this example embodiment, physical mask is used for sheltering film to produce on conducting film under the exposure of flash lamp The raw pattern 304 with substantially the same size and shape, physical mask has by a long 10mm and width Two big pads that the fillet of 2mm connects.The average power density used in this example embodiment is 10W/cm2。 Sheet resistance (Rs) about 15 Ω/ through the conducting film of exposure of flash lamp.As shown in Figure 2, lead after exposure The percentage transmittance of electrolemma is (light transmission measurement based on 400-800nm, and deduct PET base more than 80% Material back end).
(D) judge that electric conductivity changes by conducting atomic force microscopy
In order to confirm the change of the electric conductivity of conducting film, use conducting atomic force microscopy (c-AFM), and Changing shown in Figure 4 by the electric conductivity of the electric current by c-AFM probe, described c-AFM probe is from conduction The unshielded region of film arrives the masking regional of conducting film through mask border.The region table of shade in Fig. 4 Showing and sheltering the transition region 401 of edge, the electric conductivity of film significantly changes herein.The bias of 2V is applied So that electric current conducts to conducting film from probe on c-AFM probe.Result shows when c-AFM probe passes When sheltering transition region 401 (i.e. the shadow region in Fig. 4) on border, the electric current of measurement is remarkably decreased.Work as survey When measuring the electric current through c-AFM probe, obtain the c-AFM image of a series of scannings through mask border. The distance of every 100 μm of route moved along c-AFM probe obtains 2 μ m 2 μm scanograms.According to The number of acquired image, estimates that the distance of transition region 401 is about 200 μm.Terms used herein " mistake Cross district " it is defined as the region at mask border, when above mask is placed in film so that be exposed to flash of light Forming the conductive region of correspondence on the film of lamp, wherein conducting film becomes nonconductive regions from conduction region.
(E) according to the quantitatively characterizing of the electric conductivity of 4 point probe methods:
In order to provide the quantitatively characterizing of electric conductivity to pattered region on the conducting film after exposure of flash lamp, I Employ the scanning reading of 4 detecting probe method record every 0.5mm region sheet resistance (Rs).Fig. 5 shows Show Rs reading between (or unshielded) region exposed and unexposed (or sheltering) region Significant difference.Shadow region in Figure 5 represents mask border or the transition region as alleged by Fig. 4 401. When 4 probes from (or unshielded) region exposed along mask border to unexposed (or sheltering) When region is moved, Rs reading dramatically increases (minimum and add almost 1000 times between high scale). It is (unmasked to exposed by exposure of flash lamp that Rs reading the most significantly increases the electric conductivity disclosing film ) region carries out photocuring and significantly improve.
(F) Morphological Characterization of conducting film:
The form of conducting film is observed under scanning electron microscope (SEM).Fig. 6 a shows and is coated on base material But not with after the most mutually pile up through the nano silver wire of exposure of flash lamp.These nano wires are insulated Polyvinylpyrrolidone (PVP) residue around and contact point between described nano wire form high knot electricity Resistance.On the other hand, it is coated on base material and is subsequently exposed to the nano silver wire of high-energy flashlamp of the present invention Create more complete nano wire networking as shown in Figure 6 b.Nano wire quilt after high-energy flashlamp exposes Fuse together the structure forming network sample.Interior-heat between the nano wire that exposure of flash lamp produces is substantially reduced Junction resistance so that (or unshielded) region of exposure becomes more to conduct electricity than the film using conventional method. The PVP residue of the insulation in film is by the high-energy flashlamp of present invention photocuring simultaneously.Therefore, in the present invention Need not extra heat cure or etching step.
It is possible if desired to different order and/or carry out difference in functionality discussed herein simultaneously with each other.Separately Outward, if it is desired, one or more above-mentioned function can be optional or can be combined.
Although describing the different aspect of the present invention in the independent claim, the other side of the present invention includes Other groups of feature from feature and the independent claims of described embodiment and/or dependent claims Close, and be not only the combination being expressly recited in the claims.
Although being also noted that the exemplary being explained above the present invention in this article, these explanations Should not regard determinate implication as.On the contrary, multiple change can be carried out and change without departing from such as institute The scope of the present invention that attached claim is limited.
Industrial applicibility
Method disclosed by the invention can be used for preparing the thin film of contact panel and other display, because by making The number of steps producing high energy pulse with high-energy flashlamp as source and reduce can the cost-effective and time.? The heat cure or the chemosetting that are avoided by etching in post processing also are able to keep the structure of nano wire and improve thin The electric conductivity of film.The pattern generated by the method for the present invention matches with film substrate not using to have In the case of the material of predetermined refractive index the most invisible.

Claims (22)

1. the method preparing transparent conducting film based on nano material, including
A () cleaning is as the base material of conducting film carrier;
B () provides the ink containing nano material;
C () is coated with the described ink containing nano material on the substrate and is coated with cloth base material to be formed;
D () shelters described coating base material by physical mask in one or more desired region;
E described painting cloth base material is exposed to high-energy flashlamp source and with annealing and patterns described painting cloth base material by (), thus when described conducting film solidifies under described high-energy flashlamp source, formed and have figuratum conducting film;
Wherein said nano material is nano wire based on silver, and described nano wire is linear.
A kind of method preparing transparent conducting film based on nano material, the draw ratio of wherein said nano wire is more than 150.
A kind of method preparing transparent conducting film based on nano material, a length of 10-15 μm of wherein said nano wire, diameter is about 70nm.
A kind of method preparing transparent conducting film based on nano material, wherein said base material is polyethylene terephthalate.
A kind of method preparing transparent conducting film based on nano material, wherein said cleaning comprises the following steps:
A () uses base material described in cleaning agent wiping;
B () uses base material described in deionized water rinsing;
C () uses base material described in acetone rinsing;
D () is dried described base material about 5 minutes at 70 DEG C;
E described base material is immersed in the isopropanol of boiling about 10 minutes by ();
F described base material is rinsed by () with fresh isopropanol;With
G () is dried described base material about 5 minutes at 70 DEG C.
A kind of method preparing transparent conducting film based on nano material, wherein said nano wire based on silver is multiple nano wires based on silver, and the described ink containing nano material also comprises the solvent of about 90%v/v isopropanol/ethanol.
A kind of method preparing transparent conducting film based on nano material, wherein said multiple nano wires based on silver are dissolved in described solvent with concentration 10g/L.
A kind of method preparing transparent conducting film based on nano material, wherein said coating is carried out by having the apparatus for coating of Meyer rod.
A kind of method preparing transparent conducting film based on nano material, wherein said Meyer rod is No. 4 Meyer rods.
A kind of method preparing transparent conducting film based on nano material, wherein said being coated at about 34 DEG C is carried out.
A kind of 11. methods preparing transparent conducting film based on nano material, with the help of wherein said coating further includes at syringe pump, with described in the mobile interpolation of Meyer rod containing the ink of nano material, adding rate is 2-5ml/min or adding rate is proportional to the size of base material.
A kind of 12. methods preparing transparent conducting film based on nano material, the movement of wherein said Meyer rod is controlled and maintained at the constant speed of 120cm the most per minute.
A kind of 13. methods preparing transparent conducting film based on nano material, wherein said coating further includes at before physical mask is supplied to described painting cloth base material, at about 70 DEG C, it is dried described painting cloth base material about 5 minutes, then described painting cloth base material is divided into less block.
A kind of 14. methods preparing transparent conducting film based on nano material, wherein said physical mask has the pattern corresponding to described desired region, in described desired region, when described physical mask along horizontal level between described high-energy flashlamp source and described painting cloth base material time, the high energy optical pulses produced from described high-energy flashlamp source is sheltered by described physical mask, it is non-conductive for making described desired region, and other region do not sheltered by described physical mask is conduction.
A kind of 15. methods preparing transparent conducting film based on nano material, wherein said high-energy flashlamp source is to produce the wavelength flash lamp based on xenon from 240nm to 1000nm light.
A kind of 16. methods preparing transparent conducting film based on nano material, wherein said light has the wavelength of 370nm to 1000nm.
A kind of 17. methods preparing transparent conducting film based on nano material, wherein said painting cloth base material is exposed to the about 1-120 second under described high-energy flashlamp source, and wherein average power density is about 10W/cm2, pulsation rate is 2 pulses per second, or the pulse duration is about 0.52ms.
A kind of 18. methods preparing transparent conducting film based on nano material, wherein said high-energy flashlamp source produces peak power density during each pulse, and it is about 1000 times of average power density.
Nesa coating prepared by 19. 1 kinds of methods according to claim 1.
20. nesa coatings as claimed in claim 19, wherein said nesa coating has the sheet resistance of about 15 Ω/ and the absorbance more than 80%.
21. nesa coatings as claimed in claim 19, wherein said nesa coating has the border around described desired region of width about 200 μm.
22. nesa coatings as claimed in claim 19, nano material in other region of the described nesa coating wherein do not sheltered by described physical mask after described exposure forms the nanometer line network of the junction resistance with reduction, and other polymer residue in same area is by photocuring, making described nesa coating have the most sightless pattern, described pattern is corresponding to described desired region and does not has masked region.
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US10088931B2 (en) * 2015-11-16 2018-10-02 Samsung Electronics Co., Ltd. Silver nanowires, production methods thereof, conductors and electronic devices including the same
KR101913282B1 (en) * 2017-12-29 2018-10-30 (주)아이테드 Fabrication method of transparent electorde
CN109493734B (en) * 2018-10-26 2020-09-08 深圳市华星光电半导体显示技术有限公司 Manufacturing method of pixel electrode and display panel
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