CN108998764A - A kind of evaporation source - Google Patents
A kind of evaporation source Download PDFInfo
- Publication number
- CN108998764A CN108998764A CN201810947012.3A CN201810947012A CN108998764A CN 108998764 A CN108998764 A CN 108998764A CN 201810947012 A CN201810947012 A CN 201810947012A CN 108998764 A CN108998764 A CN 108998764A
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- synchronous belt
- vacuum
- vacuum chamber
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 102
- 230000008020 evaporation Effects 0.000 title claims abstract description 102
- 230000005540 biological transmission Effects 0.000 claims abstract description 11
- 239000000945 filler Substances 0.000 claims abstract description 7
- 230000001360 synchronised effect Effects 0.000 claims description 35
- 239000000463 material Substances 0.000 claims description 12
- 238000009826 distribution Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 abstract description 13
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000010924 continuous production Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000010025 steaming Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of evaporation source, and the evaporation source includes vacuum chamber and evaporation source switching device, and the vacuum chamber includes: cavity, the vacuum valve being set on the cavity wall and the vacuum line being set on the cavity wall；The evaporation source switching device includes: at least two evaporation source load plates, the evaporation source being set on the evaporation source load plate and the transmission mechanism for transporting the evaporation source, pass through the multiple independent evaporation sources for being designed as evaporation source there is independent vacuum system, and using the method for mechanical driving device switching evaporation source, save begin to speak to feed to evaporation source in the prior art, vacuumize, heat up heating process flow, realize the sustainable production of vapor deposition, influence of the vapor deposition filler to production is greatly reduced, and then shorten the production cycle, improve equipment productivity.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of evaporation sources.
Background technique
Compared to existing LCD technology, OLED display technology is with colour gamut is wide, contrast is high, energy saving and frivolous
The advantages of, traditional display is gradually replaced in the intelligent movables equipment such as smart phone, tablet computer, smartwatch.OLED
Display screen usually need to pass through evaporation source that is, in vacuum chamber using vacuum evaporation process when carrying out organic luminous layer preparation
High temperature is generated, membrane material is heated and is allowed to gasify, is plated in glass substrate.
In traditional evaporation process, because of the limited volume of evaporation source, needed after the organic material in consumption evaporation source
Evaporated device is begun to speak, organic material is added into crucible, then replaces crystal oscillator, liner, then vacuumized, heated up, is led
It causes the period of production elongated, seriously affects the production capacity of equipment.
In conclusion the evaporation source production cycle of the prior art is long, equipment capacity is lower.Therefore, it is necessary to providing one kind can
Continuous production evaporation source, to solve the problems of prior art.
Summary of the invention
The present invention provides a kind of evaporation source, for solving the technology that the prior art production cycle is long, equipment capacity is low
Problem.
A kind of evaporation source provided by the invention, comprising: vacuum chamber and evaporation source switching device；
The vacuum chamber includes:
Cavity, the vacuum valve being set on the cavity wall and the vacuum breaker pipe being set on the cavity wall
Road and vacuum-pumping pipeline；
The evaporation source switching device includes:
At least two evaporation source load plates, the evaporation source being set on the evaporation source load plate and for transmitting the evaporation
The transmission mechanism in source.
According to one preferred embodiment of the present invention, the vacuum chamber further includes the loading pipe for adding evaporation source material
Road.
According to one preferred embodiment of the present invention, the vacuum chamber side wall is equipped with for opening and being closed the vacuum chamber
The door body assembly of room.
According to one preferred embodiment of the present invention, the door body assembly includes slide valve.
According to one preferred embodiment of the present invention, the transmission mechanism includes: servo motor, synchronous belt, and the evaporation source carries
Disk is mounted on the synchronous belt.
According to one preferred embodiment of the present invention, the synchronous belt is distributed in a ring.
According to one preferred embodiment of the present invention, the transmission mechanism includes: servo motor, synchronous belt and lifting platform, institute
Evaporation source load plate is stated to be mounted on the synchronous belt.
According to one preferred embodiment of the present invention, the synchronous belt is of a straight line type distribution, including relatively disposed in parallel first
Synchronous belt and the second synchronous belt.
According to one preferred embodiment of the present invention, first synchronous belt is set at the top of the vacuum chamber, and second is synchronous
Band is set in the vacuum chamber, and the lifting platform is set to the synchronous belt two sides.
According to one preferred embodiment of the present invention, it is formed on the evaporation source load plate and cooperates with the evaporation source bottom
Groove.
The invention has the benefit that the evaporation source of one kind provided by the invention, evaporation source is designed as having only
Multiple independent evaporation sources of vertical vacuum system save the process flow for charging of beginning to speak, realizing vapor deposition can hold compared with the prior art
Continuous production is greatly reduced influence of the vapor deposition filler to production, and then shortens the production cycle, improves equipment productivity.
Detailed description of the invention
It, below will be to embodiment or the prior art in order to illustrate more clearly of embodiment or technical solution in the prior art
Attached drawing needed in description is briefly described, it should be apparent that, the accompanying drawings in the following description is only some of invention
Embodiment for those of ordinary skill in the art without creative efforts, can also be attached according to these
Figure obtains other attached drawings.
Fig. 1 is the structural schematic diagram of evaporation coating device provided by the invention.
Fig. 2 is the structural schematic diagram of evaporation coating device embodiment one provided by the invention；
Fig. 3 is the structural schematic diagram of evaporation coating device embodiment two provided by the invention.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
Evaporation source provided by the invention, as described in Figure 1, comprising: cavity 106, vacuum valve 104 on cavity 106 with
And it is set to the vacuum line 105 on cavity 106, above-mentioned component forms the vacuum chamber with independent vacuum system.Evaporation source
It is equipped with heating device in 107, to heating evaporation source material, realizes vapor deposition.In cutting for the source that is evaporated 107 and evaporation source 108
When changing, by the gas bleeding out of cavity 106 of vacuum line 105, switch to the consistent vacuum environment of main chamber, pass through transmission
Device realizes the switching of evaporation source.
The evaporation source switched to outside vacuum chamber is transported to specified vapor deposition position by transmission device, passes through heating evaporation
Source 107 makes the evaporation material in evaporation source 107 gasify, on vapor deposition to glass substrate 102.The vacuum chamber is set to main chamber
In room 101, pass through the intracorporal vacuum environment of 103 control chamber of main chamber's vacuum line.
Embodiment one:
Evaporation source provided in this embodiment, comprising: synchronous belt 206, the evaporation source being set on the synchronous belt 206
Microscope carrier 204, and the vacuum chamber with independent vacuum system being set on the synchronous belt 206.The vacuum chamber packet
Include: cavity 201, the vacuum valve 202 being set on the cavity 201, vacuum breaker pipeline 203 and vacuum-pumping pipeline 209, which are constituted, steams
The vacuum line of source arrangement, filler pipeline 208 and the door body assembly 207 being set on 201 side wall of cavity.
Specifically, the process of evaporation source for evaporation device switching are as follows: the vacuum-pumping pipeline 209 of evaporation source is by cavity
Air extraction in 201, forms and the consistent vacuum environment of main chamber room environmental；The door body assembly 207 for being set to cavity two sides is beaten
It opens, synchronous belt 206 is started by control device, drives the evaporation source microscope carrier 204 and evaporation source 205 being located on transmission belt；Work as steaming
The complete evaporation source 205 of plating materials'use is transmitted to designated position, and door body assembly 207 is closed, and vacuum breaker pipeline 203 is to cavity 201
Interior injection air forms and has been loaded with vapor deposition with extraneous consistent air pressure environment, the interior filling evaporation material of loading pipe road direction evaporation source
The evaporation source of material is then moved to specified vapor deposition region, is heated, and makes on evaporation material vapor deposition to glass substrate.
Door body assembly 207 in the present embodiment includes slide valve, and slide valve may be implemented to open and close the function of cavity 201
Energy.In addition, door body assembly 207 mechanical component that can also can be automatically opened or be closed using other is realized.For example, packet
Include driving device, transmission device and door body.
Synchronous belt 206 in the present embodiment is set as annular, is provided with guide rail, evaporation source microscope carrier 204 among synchronous belt 206
It is driven by servo motor and is slided along guide rail, synchronous belt is deposited for transporting evaporation source, the different process flow such as filler.
In addition, the volume of main chamber room should be greater than the volume of the evaporation source, so that evaporation source is set to
In main chamber；The quantity of evaporation source should be at least 2, to guarantee the continuous production of evaporation source.
Embodiment two:
Evaporation source provided by the present embodiment, uses vacuum chamber provided by embodiment one, and difference is to adopt
Evaporation source switching device is different.
Evaporation source switching device provided in this embodiment includes: that the first synchronous belt 309 and second relatively disposed in parallel is same
Band 304, and the evaporation source microscope carrier 311 being set on the synchronous belt are walked, the first lifting of the synchronous belt two sides is set to
Platform 301 and the second lifting platform 308.
Specifically, evaporation source handoff procedure provided in this embodiment are as follows: vacuum-pumping pipeline 306 and vacuum valve 307 work, will
Gas extraction in cavity 305, forms and the consistent vacuum environment of main chamber；It is set to the door body assembly 302 of 305 side wall of cavity
It opens；Drive the first synchronous belt 309 that evaporation material is transported to the first lifting platform using complete evaporation source 310 using servo motor
On 301；First lifting platform 301 is transported to underlying second lifting platform, 304 right side in the vertical direction, by evaporation source 310；
Simultaneously, the evaporation source 310 of populated evaporation material is then transported to by the second lifting platform 308 positioned at left side is located above
First synchronous belt, 309 left side；After evaporation source 310 is transported to cavity 305, door body assembly 302 is closed, and vacuum breaker pipeline 303 is to chamber
Gas, formation and extraneous consistent air pressure environment are injected in body 305, and vapor deposition is then filled to evaporation source 310 by filler pipeline
Material.
Specifically, the first synchronous belt 309 and the second synchronous belt 304 are linear type, and the first synchronous belt setting 309 is set to
305 top of cavity, the second synchronous belt 304 are set in cavity 305.
The present invention is passed by multiple independent evaporation sources for being designed as evaporation source to have independent vacuum system, and using mechanical
The method of dynamic device switching evaporation source, save begin to speak feed to evaporation source in the prior art, vacuumize, heat up the technique stream heated
Journey realizes the sustainable production of vapor deposition, influence of the vapor deposition filler to production is greatly reduced, and then shorten the production cycle, raising is set
Standby productivity.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of evaporation source, it is characterised in that: the evaporation source includes: vacuum chamber and evaporation source switching dress
It sets；
The vacuum chamber includes:
Cavity, the vacuum valve being set on the cavity wall and the vacuum line being set on the cavity wall；
The evaporation source switching device includes:
At least two evaporation source load plates, the evaporation source being set on the evaporation source load plate and for transporting the evaporation source
Transmission mechanism.
2. evaporation source as described in claim 1, it is characterised in that: the vacuum chamber further includes for adding evaporation source
The filler pipeline of material.
3. evaporation source as claimed in claim 2, it is characterised in that: the vacuum chamber is equipped with for opening and being closed
The door body assembly of the vacuum chamber.
4. evaporation source as claimed in claim 3, it is characterised in that: the door body assembly includes slide valve.
5. evaporation source as described in claim 1, it is characterised in that: the vacuum line is by vacuum breaker pipeline and vacuumizes
Pipeline composition.
6. evaporation source as described in claim 1, it is characterised in that: the transmission mechanism includes: servo motor, synchronization
Band, the evaporation source load plate are mounted on the synchronous belt.
7. evaporation source as claimed in claim 6, it is characterised in that: the synchronous belt is distributed in a ring.
8. evaporation source as claimed in claim 6, it is characterised in that: the transmission mechanism further includes lifting platform.
9. evaporation source as claimed in claim 8, it is characterised in that: the synchronous belt is of a straight line type distribution, including opposite
First synchronous belt and the second synchronous belt disposed in parallel.
10. evaporation source as claimed in claim 9, it is characterised in that: first synchronous belt is set to the vacuum chamber
Ceiling portion, second synchronous belt are set in the vacuum chamber, and the lifting platform is set to the synchronous belt two sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810947012.3A CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810947012.3A CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108998764A true CN108998764A (en) | 2018-12-14 |
| CN108998764B CN108998764B (en) | 2020-12-08 |
Family
ID=64593279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810947012.3A Active CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108998764B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110172672A (en) * | 2019-07-03 | 2019-08-27 | 江苏壹光科技有限公司 | The vacuum system and its working method of OLED evaporated device |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003129224A (en) * | 2001-10-26 | 2003-05-08 | Matsushita Electric Works Ltd | Apparatus and process for vacuum deposition |
| CN201678729U (en) * | 2010-05-06 | 2010-12-22 | 东莞宏威数码机械有限公司 | Circulating evaporation mechanism |
| CN103526164A (en) * | 2013-10-23 | 2014-01-22 | 京东方科技集团股份有限公司 | Evaporation equipment |
| CN104593731A (en) * | 2015-02-04 | 2015-05-06 | 深圳市华星光电技术有限公司 | Vapor deposition-replacement integrated apparatus and application method thereof |
| CN108330438A (en) * | 2018-03-12 | 2018-07-27 | 昆山国显光电有限公司 | OLED evaporation coating devices and system |
-
2018
- 2018-08-20 CN CN201810947012.3A patent/CN108998764B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003129224A (en) * | 2001-10-26 | 2003-05-08 | Matsushita Electric Works Ltd | Apparatus and process for vacuum deposition |
| CN201678729U (en) * | 2010-05-06 | 2010-12-22 | 东莞宏威数码机械有限公司 | Circulating evaporation mechanism |
| CN103526164A (en) * | 2013-10-23 | 2014-01-22 | 京东方科技集团股份有限公司 | Evaporation equipment |
| CN104593731A (en) * | 2015-02-04 | 2015-05-06 | 深圳市华星光电技术有限公司 | Vapor deposition-replacement integrated apparatus and application method thereof |
| CN108330438A (en) * | 2018-03-12 | 2018-07-27 | 昆山国显光电有限公司 | OLED evaporation coating devices and system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110172672A (en) * | 2019-07-03 | 2019-08-27 | 江苏壹光科技有限公司 | The vacuum system and its working method of OLED evaporated device |
| CN110172672B (en) * | 2019-07-03 | 2024-04-09 | 江苏壹光科技有限公司 | Vacuum system of OLED evaporation equipment and working method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108998764B (en) | 2020-12-08 |
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| CP01 | Change in the name or title of a patent holder |
Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |