CN108998764B - Evaporation source device - Google Patents
Evaporation source device Download PDFInfo
- Publication number
- CN108998764B CN108998764B CN201810947012.3A CN201810947012A CN108998764B CN 108998764 B CN108998764 B CN 108998764B CN 201810947012 A CN201810947012 A CN 201810947012A CN 108998764 B CN108998764 B CN 108998764B
- Authority
- CN
- China
- Prior art keywords
- evaporation source
- vacuum
- cavity
- evaporation
- pipeline
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001704 evaporation Methods 0.000 title claims abstract description 115
- 230000008020 evaporation Effects 0.000 title claims abstract description 114
- 230000001360 synchronised effect Effects 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 13
- 230000005540 biological transmission Effects 0.000 claims description 8
- 238000005086 pumping Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 12
- 238000000034 method Methods 0.000 abstract description 10
- 238000010438 heat treatment Methods 0.000 abstract description 7
- 239000000945 filler Substances 0.000 abstract description 4
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000000576 coating method Methods 0.000 abstract description 3
- 230000009347 mechanical transmission Effects 0.000 abstract description 2
- 230000003028 elevating effect Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides an evaporation source device including a vacuum chamber and an evaporation source switching device, the vacuum chamber including: the vacuum valve is arranged on the side wall of the cavity, and the vacuum pipeline is arranged on the side wall of the cavity; the evaporation source switching device includes: the evaporation source is designed into a plurality of independent evaporation sources with independent vacuum systems, and a method of switching the evaporation sources by adopting a mechanical transmission device is adopted, so that the process flows of feeding, vacuumizing, heating and heating the evaporation source by opening a cavity in the prior art are omitted, the sustainable production of evaporation coating is realized, the influence of evaporation coating filler on production is greatly reduced, the production period is further shortened, and the equipment productivity is improved.
Description
Technical Field
The invention relates to the technical field of display, in particular to an evaporation source device.
Background
Compared with the existing liquid crystal display technology, the OLED display technology has the advantages of wide color gamut, high contrast, energy conservation, lightness and thinness, and gradually replaces the traditional display in mobile intelligent devices such as smart phones, tablet computers and smart watches. When the organic light emitting layer is prepared, a vacuum evaporation process is usually adopted, that is, a film material is heated and gasified by generating high temperature through an evaporation source in a vacuum chamber and is plated on a glass substrate.
In the traditional evaporation process, because the volume of an evaporation source is limited, after organic materials in the evaporation source are consumed, an evaporation device needs to be opened, the organic materials are added into a crucible, a crystal oscillator and a lining are replaced, vacuumizing, heating and the like are performed, so that the production period is prolonged, and the capacity of the device is seriously influenced.
In conclusion, the evaporation source in the prior art has long production period and low equipment productivity. Therefore, it is necessary to provide an evaporation source device capable of continuous production to solve the problems of the prior art.
Disclosure of Invention
The invention provides an evaporation source device, which is used for solving the technical problems of long production period and low equipment productivity in the prior art.
The invention provides an evaporation source device, comprising: a vacuum chamber and an evaporation source switching device;
the vacuum chamber includes:
the vacuum pump comprises a cavity, a vacuum valve arranged on the side wall of the cavity, and a vacuum breaking pipeline and a vacuum pumping pipeline which are arranged on the side wall of the cavity;
the evaporation source switching device includes:
the device comprises at least two evaporation source carrying discs, evaporation sources arranged on the evaporation source carrying discs and a transmission mechanism used for transmitting the evaporation sources.
According to a preferred embodiment of the present invention, the vacuum chamber further comprises a filler pipe for adding an evaporation source material.
According to a preferred embodiment of the present invention, a door assembly for opening and closing the vacuum chamber is disposed on the sidewall of the vacuum chamber.
According to a preferred embodiment of the present invention, the door assembly includes a gate valve.
According to a preferred embodiment of the present invention, the transmission mechanism comprises: servo motor, hold-in range, the evaporation source carries the dish to be installed on the hold-in range.
According to a preferred embodiment of the present invention, the timing belt is annularly distributed.
According to a preferred embodiment of the present invention, the transmission mechanism comprises: servo motor, hold-in range and elevating platform, the evaporation source carries the dish to be installed on the hold-in range.
According to a preferred embodiment of the present invention, the synchronous belts are linearly arranged and include a first synchronous belt and a second synchronous belt which are arranged in parallel.
According to a preferred embodiment of the present invention, the first timing belt is disposed at the top of the vacuum chamber, the second timing belt is disposed in the vacuum chamber, and the elevating table is disposed at both sides of the timing belt.
According to a preferred embodiment of the present invention, the evaporation source carrying tray is formed with a groove matching with the bottom of the evaporation source.
The invention has the beneficial effects that: compared with the prior art, the evaporation source device provided by the invention has the advantages that the evaporation source is designed into a plurality of independent evaporation sources with independent vacuum systems, the process flow of cavity opening feeding is omitted, the evaporation sustainable production is realized, the influence of evaporation fillers on the production is greatly reduced, the production period is further shortened, and the equipment productivity is improved.
Drawings
In order to illustrate the embodiments or the technical solutions in the prior art more clearly, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the invention, and it is obvious for a person skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic structural diagram of an evaporation apparatus provided by the present invention.
Fig. 2 is a schematic structural diagram of a first evaporation apparatus according to an embodiment of the present invention;
fig. 3 is a schematic structural diagram of a second exemplary embodiment of an evaporation apparatus according to the present invention.
Detailed Description
The following description of the various embodiments refers to the accompanying drawings that illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [ upper ], [ lower ], [ front ], [ rear ], [ left ], [ right ], [ inner ], [ outer ], [ side ], are only referring to the directions of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention. In the drawings, elements having similar structures are denoted by the same reference numerals.
As shown in fig. 1, an evaporation source apparatus according to the present invention includes: a chamber 106, a vacuum valve 104 on the chamber 106, and a vacuum line 105 disposed on the chamber 106, which form a vacuum chamber with an independent vacuum system. The evaporation source 107 is provided with a heating device for heating the evaporation source material to achieve evaporation. When the evaporation source 107 and the evaporation source 108 are switched, gas is evacuated from the chamber 106 through the vacuum line 105, and the chamber is switched to a vacuum environment corresponding to the main chamber, and the evaporation sources are switched by the transfer device.
The evaporation source switched to the outside of the vacuum chamber is transported to a predetermined evaporation position by a transport device, and the evaporation source 107 is heated to vaporize the evaporation material in the evaporation source 107, thereby evaporating the evaporation material on the glass substrate 102. The vacuum chamber is arranged in the main chamber 101, and the vacuum environment in the chamber is controlled through a main chamber vacuum pipeline 103.
The first embodiment is as follows:
the evaporation source device provided by the embodiment comprises: a synchronous belt 206, an evaporation source stage 204 provided on the synchronous belt 206, and a vacuum chamber having an independent vacuum system provided on the synchronous belt 206. The vacuum chamber comprises a chamber body 201, a vacuum valve 202 arranged on the chamber body 201, a vacuum breaking pipeline 203, a vacuum pumping pipeline 209, a filling pipeline 208 and a door body assembly 207 arranged on the side wall of the chamber body 201, wherein the vacuum pipeline of the evaporation source device is formed by the vacuum breaking pipeline and the vacuum pumping pipeline 209.
Specifically, the process of switching the evaporation source device is as follows: the vacuum-pumping pipeline 209 of the evaporation source device pumps out the air in the cavity 201 to form a vacuum environment consistent with the environment of the main cavity; the door body assemblies 207 arranged on the two sides of the cavity are opened, and the synchronous belt 206 is started through the control device to drive the evaporation source carrying platform 204 and the evaporation source 205 which are positioned on the transmission belt; when the evaporation source 205 with used evaporation material is conveyed to a designated position, the door body assembly 207 is closed, the vacuum breaking pipeline 203 injects air into the cavity 201 to form an air pressure environment consistent with the outside, the filling pipeline fills the evaporation source with the evaporation material, the evaporation source filled with the evaporation material is moved to a designated evaporation area to be heated, and the evaporation material is evaporated on the glass substrate.
The door body assembly 207 in this embodiment includes a gate valve, and the gate valve can realize the function of opening and closing the cavity 201. In addition, the door assembly 207 may also be implemented by other mechanical assemblies capable of being automatically opened or closed. For example, the device comprises a driving device, a transmission device and a door body.
The synchronous belt 206 in this embodiment is set to be annular, a guide rail is arranged in the middle of the synchronous belt 206, the evaporation source carrying platform 204 is driven by the servo motor to slide along the guide rail, and the synchronous belt is used for conveying the evaporation source to perform different process flows such as evaporation coating, filling and the like.
In addition, the volume of the main chamber is larger than that of the evaporation source device, so that the evaporation source device is arranged in the main chamber; the number of evaporation sources should be at least 2 to ensure continuous production of the evaporation sources.
Example two:
the evaporation source apparatus provided in this embodiment employs the vacuum chamber provided in the first embodiment, and is different from the evaporation source switching apparatus.
The evaporation source switching device provided by the embodiment comprises: the evaporation source device comprises a first synchronous belt 309 and a second synchronous belt 304 which are arranged in parallel relatively, an evaporation source carrying platform 311 arranged on the synchronous belts, and a first lifting platform 301 and a second lifting platform 308 arranged on two sides of the synchronous belts.
Specifically, the evaporation source switching process provided by this embodiment is: the vacuum pumping pipeline 306 and the vacuum valve 307 work to pump out the gas in the cavity 305, so as to form a vacuum environment consistent with the main cavity; the door body assembly 302 arranged on the side wall of the cavity 305 is opened; the evaporation source 310 with the used evaporation material is conveyed to the first lifting platform 301 by driving the first synchronous belt 309 by a servo motor; the first elevating platform 301 conveys the evaporation source 310 to the right side of the second elevating platform 304 positioned below in the vertical direction; meanwhile, the second lifting platform 308 positioned on the left side conveys the evaporation source 310 filled with the evaporation material to the left side of the first synchronous belt 309 positioned above; after the evaporation source 310 is conveyed to the cavity 305, the door assembly 302 is closed, the vacuum breaking pipeline 303 injects gas into the cavity 305 to form an atmosphere consistent with the outside, and then the evaporation source 310 is filled with evaporation materials through the filling pipeline.
Specifically, the first timing belt 309 and the second timing belt 304 are both linear, the first timing belt 309 is disposed above the cavity 305, and the second timing belt 304 is disposed in the cavity 305.
According to the invention, the evaporation source is designed into a plurality of independent evaporation sources with independent vacuum systems, and a method for switching the evaporation sources by adopting a mechanical transmission device is adopted, so that the process flows of feeding, vacuumizing, heating and heating the evaporation source by opening a cavity in the prior art are omitted, the sustainable production of evaporation is realized, the influence of evaporation filler on the production is greatly reduced, the production period is further shortened, and the equipment productivity is improved.
In summary, although the present invention has been described with reference to the preferred embodiments, the above-described preferred embodiments are not intended to limit the present invention, and those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, therefore, the scope of the present invention shall be determined by the appended claims.
Claims (9)
1. An evaporation source device, characterized in that: the evaporation source device includes: the evaporation source switching device comprises a main cavity, a vacuum cavity and an evaporation source switching device, wherein the vacuum cavity is arranged in the main cavity, a main cavity vacuum pipeline is arranged on the main cavity, and the main cavity controls the vacuum environment of the main cavity through the main cavity vacuum pipeline;
the vacuum chamber includes:
the vacuum valve is arranged on the side wall of the cavity, and the vacuum pipeline is arranged on the side wall of the cavity, and the cavity adjusts the vacuum environment of the cavity through the vacuum pipeline;
the filling pipeline is arranged on the side wall of the cavity and used for adding an evaporation source material;
the evaporation source switching device includes:
the device comprises at least two evaporation source carrying discs, evaporation sources arranged on the evaporation source carrying discs and a transmission mechanism used for conveying the evaporation sources.
2. The evaporation source apparatus according to claim 1, wherein: and the vacuum chamber is provided with a door body assembly for opening and closing the vacuum chamber.
3. The evaporation source apparatus according to claim 2, wherein: the door body component comprises a gate valve.
4. The evaporation source apparatus according to claim 1, wherein: the vacuum pipeline consists of a vacuum breaking pipeline and a vacuum pumping pipeline.
5. The evaporation source apparatus according to claim 1, wherein: the transmission mechanism includes: servo motor, hold-in range, the evaporation source carries the dish to be installed on the hold-in range.
6. The evaporation source apparatus according to claim 5, wherein: the synchronous belts are distributed annularly.
7. The evaporation source apparatus according to claim 5, wherein: the transmission mechanism further comprises a lifting table.
8. The evaporation source apparatus according to claim 7, wherein: the synchronous belt is in linear distribution and comprises a first synchronous belt and a second synchronous belt which are arranged in parallel relatively.
9. The evaporation source apparatus according to claim 8, wherein: the first synchronous belt is arranged at the top of the vacuum chamber, the second synchronous belt is arranged in the vacuum chamber, and the lifting platform is arranged on two sides of the synchronous belts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810947012.3A CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810947012.3A CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108998764A CN108998764A (en) | 2018-12-14 |
| CN108998764B true CN108998764B (en) | 2020-12-08 |
Family
ID=64593279
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810947012.3A Active CN108998764B (en) | 2018-08-20 | 2018-08-20 | Evaporation source device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108998764B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110172672B (en) * | 2019-07-03 | 2024-04-09 | 江苏壹光科技有限公司 | Vacuum system of OLED evaporation equipment and working method thereof |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3662874B2 (en) * | 2001-10-26 | 2005-06-22 | 松下電工株式会社 | Vacuum deposition apparatus and vacuum deposition method |
| CN201678729U (en) * | 2010-05-06 | 2010-12-22 | 东莞宏威数码机械有限公司 | Circulating evaporation mechanism |
| CN103526164B (en) * | 2013-10-23 | 2015-09-09 | 京东方科技集团股份有限公司 | A kind of evaporated device |
| CN104593731B (en) * | 2015-02-04 | 2017-05-03 | 深圳市华星光电技术有限公司 | Vapor deposition-replacement integrated apparatus and application method thereof |
| CN108330438B (en) * | 2018-03-12 | 2019-11-29 | 昆山国显光电有限公司 | OLED evaporation coating device and system |
-
2018
- 2018-08-20 CN CN201810947012.3A patent/CN108998764B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN108998764A (en) | 2018-12-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20070137793A1 (en) | Processing apparatus | |
| CN108998764B (en) | Evaporation source device | |
| CN104328377B (en) | Evaporation source, film-forming apparatus and its film build method | |
| KR20140104112A (en) | Chemical vapor deposition apparatus for flat display | |
| US20110132755A1 (en) | In-line system for manufacturing solar cell | |
| US20140318456A1 (en) | Horizontal-type atomic layer deposition apparatus for large-area substrates | |
| CN104593731B (en) | Vapor deposition-replacement integrated apparatus and application method thereof | |
| CN106756850A (en) | A kind of efficiency compact high magnetic control film coating device and method | |
| CN106319451A (en) | Evaporation equipment and evaporation method | |
| US20190048457A1 (en) | Evaporation source | |
| CN206308412U (en) | A kind of efficiency compact high magnetic control film coating device | |
| CN111383900A (en) | Film forming apparatus, film forming method, and method for manufacturing electronic device | |
| CN104498889B (en) | Automatic continuous antifouling film coating device | |
| CN101501238A (en) | Film deposition apparatus, film deposition system, and film deposition method | |
| CN202022972U (en) | Substrate film coating processing equipment | |
| CN103866295A (en) | Apparatus used for reaction chamber substrate heating and transmission | |
| US20210348260A1 (en) | Device for vapor depositing metal | |
| CN208240622U (en) | For loading and unloading the load lock chamber and array base plate processing system of carried base board | |
| CN102034725B (en) | Automatic substrate positioning and loading device | |
| KR20090031616A (en) | Deposition apparatus, deposition system and deposition method | |
| CN201956333U (en) | Substrate para position uploading device | |
| CN204369984U (en) | Automatization continous way anti-soil film film coating apparatus | |
| US11730045B2 (en) | Sintering apparatus, packaging system for organic light emitting diode device and sintering method | |
| CN103789732A (en) | Evaporator and evaporation method | |
| CN104593730B (en) | Crucible capable of preventing splitting decomposition of organic light emitting diode (OLED) material |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee after: TCL China Star Optoelectronics Technology Co.,Ltd. Address before: 9-2 Tangming Avenue, Guangming New District, Shenzhen City, Guangdong Province Patentee before: Shenzhen China Star Optoelectronics Technology Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder |