CN108933151A - A kind of encapsulating structure and packaging method of image sensing chip - Google Patents

A kind of encapsulating structure and packaging method of image sensing chip Download PDF

Info

Publication number
CN108933151A
CN108933151A CN201810832360.6A CN201810832360A CN108933151A CN 108933151 A CN108933151 A CN 108933151A CN 201810832360 A CN201810832360 A CN 201810832360A CN 108933151 A CN108933151 A CN 108933151A
Authority
CN
China
Prior art keywords
image sensing
sensing chip
cylindrical sidewall
contact jaw
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810832360.6A
Other languages
Chinese (zh)
Other versions
CN108933151B (en
Inventor
王之奇
胡津津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
China Wafer Level CSP Co Ltd
Original Assignee
China Wafer Level CSP Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by China Wafer Level CSP Co Ltd filed Critical China Wafer Level CSP Co Ltd
Priority to CN201810832360.6A priority Critical patent/CN108933151B/en
Publication of CN108933151A publication Critical patent/CN108933151A/en
Application granted granted Critical
Publication of CN108933151B publication Critical patent/CN108933151B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14601Structural or functional details thereof
    • H01L27/14625Optical elements or arrangements associated with the device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/14Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
    • H01L27/144Devices controlled by radiation
    • H01L27/146Imager structures
    • H01L27/14683Processes or apparatus peculiar to the manufacture or treatment of these devices or parts thereof

Abstract

The invention discloses the encapsulating structures and packaging method of a kind of image sensing chip, image sensing chip is separately fixed at the two sides of the light passing window by technical solution of the present invention with the supporting structure for being used to install lens module, in this way, on the one hand, the front of image sensing chip is directly fixed with the surface of package substrate, the front of image sensing chip is preferable relative to back side flatness, directly it can realize that fixed and circuit interconnects by welding procedure and package substrate, the thickness of fixing layer between the front and package substrate of image sensing chip can be more accurately controlled, in order to accurately control image-forming range of the lens module relative to image sensing chip;It on the other hand, can be using the light passing window as reference position, so that lens module can be arranged with image sensing chip with face.Therefore technical solution of the present invention can improve the image quality of encapsulating structure with accurate contraposition lens module and image sensing chip.

Description

A kind of encapsulating structure and packaging method of image sensing chip
Technical field
The present invention relates to chip encapsulation technology fields, more specifically, being related to a kind of encapsulating structure of image sensing chip And packaging method.
Background technique
With being constantly progressive for science and technology, more and more electronic equipments with image collecting function are widely applied In daily life and work, huge convenience is brought for daily life and work, becomes and works as The indispensable important tool of moderns.Electronic equipment realizes that the main component of image collecting function is image sensing chip, is Guarantee the reliability of image sensing chip, service life and external factor is avoided to damage, image sensing chip needs to carry out Packaging protection.
Image sensing chip needs and lens module is packaged protection together, in the prior art, to image sensing chip It is usually existing to bind image sensing chip on circuit boards and when lens module progress integral packaging, then in circuit board The same side be fixedly installed with the bracket of lens module.The prior art, can not be accurate when being packaged to image sensing chip Align image sensing chip and lens module.
Summary of the invention
To solve the above-mentioned problems, technical solution of the present invention provides the encapsulating structure and envelope of a kind of image sensing chip The aligning accuracy of lens module Yu image sensing chip can be improved in dress method, improves the encapsulating structure of image sensing chip Image quality.
To achieve the goals above, the invention provides the following technical scheme:
A kind of encapsulating structure of image sensing chip, the encapsulating structure include:
Package substrate, the package substrate has opposite first surface and second surface, and runs through first table The light passing window in face and the second surface;The package substrate also has interconnection circuit, and the interconnection circuit is outer for connecting Portion's circuit;
Image sensing chip, the image sensing chip bonding cover the light passing window in the first surface;Institute Image sensing chip is stated to be arranged with photosensitive region, the photosensitive region and the light passing window face;
Supporting structure, the supporting structure are fixed on the second surface;
Lens module, the lens module is mounted on the supporting structure, and light passing window described in face.
Preferably, in above-mentioned encapsulating structure, the interconnection circuit includes:
First contact jaw of the first surface is set, and first contact jaw is for connecting the external circuit;
Second contact jaw of the first surface is set, and second contact jaw is for connecting the image sensing core Piece, second contact jaw are connect by the first wired circuit with first contact jaw.
Preferably, in above-mentioned encapsulating structure, the first wired circuit setting on the first surface, or is located at Between the first surface and the second surface.
Preferably, in above-mentioned encapsulating structure, the supporting structure includes:
First cylindrical sidewall, first cylindrical sidewall is fixed on the second surface, and surrounds the light passing window;
The lens module is fixed on the inside of first cylindrical sidewall;
Wherein, first cylindrical sidewall and binding that are equipped with the lens module have the institute of the image sensing chip It states package substrate and forms first annular seal space body.
Preferably, in above-mentioned encapsulating structure, the supporting structure further include:
Second cylindrical sidewall, second cylindrical sidewall have top opening and bottom opening;
Binding has the package substrate of the image sensing chip to be located in second cylindrical sidewall;
The top opening of second cylindrical sidewall has roof, and the roof has outer with first cylindrical sidewall The fixed opening in side, the split ring is around the outside of first cylindrical sidewall;
The bottom opening is used for and circuit board is fixed, and the circuit board has the external circuit;
When the bottom opening and the fixed circuit board, second cylindrical sidewall and the circuit board form second Seal cavity.
Preferably, in above-mentioned encapsulating structure, the circuit board is PCB or FPC.
Preferably, in above-mentioned encapsulating structure, second cylindrical sidewall is an integral molding structure with the roof;
Or, second cylindrical sidewall and the roof are separation unit, the roof is fixed on second tubular side The top opening of wall.
Preferably, in above-mentioned encapsulating structure, further includes:
Optical filter between the lens module and the image sensing chip.
Preferably, in above-mentioned encapsulating structure, the optical filter is fixed on the second surface, and covers the light passing window Mouthful.
It preferably, further include the anti-reflecting layer that the optical filter surface is set in above-mentioned encapsulating structure.
Preferably, in above-mentioned encapsulating structure, the interconnection circuit further include:
The third contact jaw of the second surface is set, and the third contact jaw is for binding plug-in element;
The third contact jaw passes through the second wired circuit being arranged in the package substrate and contacts with corresponding first End connection.
The present invention also provides a kind of packaging method, the packaging method includes:
A package substrate is provided, the package substrate has opposite first surface and second surface, the encapsulation base Plate has multiple chip bonding regions, has cutting channel, the chip bonding between the two neighboring chip bonding region Region has the light passing window through the first surface and the second surface, and the chip bonding region also has interconnection electricity Road, the interconnection circuit is for connecting external circuit;
Image sensing chip is bound in the chip bonding region, the image sensing chip bonding is in first table Face, and cover the light passing window;The image sensing chip has photosensitive region, the photosensitive region and the light passing window Face setting;
Divide the package substrate based on the cutting channel, forms multiple isolated chip bonding regions, the chip Binding region binding has the image sensing chip;
Lens module, the lens module are set away from the side of the image sensing chip in the chip bonding region It is mounted on the supporting structure, and light passing window described in face, the supporting structure is fixed on the second surface.
Preferably, in above-mentioned packaging method, the interconnection circuit includes: the first contact that the first surface is arranged in End, first contact jaw is for connecting the external circuit;Second contact jaw of the first surface is set, described second Contact jaw passes through the first wired circuit and first contact jaw for connecting the image sensing chip, second contact jaw Connection.
Described in chip bonding region binding image sensing chip includes: by the image sensing chip and described the The welding of two contact jaws.
Preferably, in above-mentioned packaging method, the first wired circuit setting on the first surface, or is located at Between the first surface and the second surface.
Preferably, in above-mentioned packaging method, the supporting structure includes:
First cylindrical sidewall, first cylindrical sidewall is fixed on the second surface, and surrounds the light passing window;
The lens module is fixed on the inside of first cylindrical sidewall;
Wherein, first cylindrical sidewall and binding that are equipped with the lens module have the institute of the image sensing chip It states package substrate and forms first annular seal space body.
Preferably, in above-mentioned packaging method, the supporting structure further include:
Second cylindrical sidewall, second cylindrical sidewall have top opening and bottom opening;
Binding has the package substrate of the image sensing chip to be located in second cylindrical sidewall;
The top opening of second cylindrical sidewall has roof, and the roof has outer with first cylindrical sidewall The fixed opening in side, the split ring is around the outside of first cylindrical sidewall;
The bottom opening is used for and circuit board is fixed, and the circuit board has the external circuit;
When the bottom opening and the fixed circuit board, second cylindrical sidewall and the circuit board form second Seal cavity.
Preferably, in above-mentioned packaging method, the packaging method further include:
It is solid away from the side of the image sensing chip in the chip bonding region before the supporting structure is installed Determine optical filter, the optical filter covers the light passing window.
Preferably, in above-mentioned packaging method, the fixed optical filter before dividing the package substrate.
Preferably, in above-mentioned packaging method, the optical filter surface is provided with anti-reflecting layer.
Preferably, in above-mentioned packaging method, the interconnection circuit further include: the third that the second surface is arranged in connects Contravention, the third contact jaw is for binding plug-in element;The third contact jaw is by being arranged in the package substrate Second wired circuit is connected with corresponding first contact jaw.
The packaging method further include: before installing the supporting structure, described in the binding of the chip bonding region Plug-in element, the plug-in element are arranged in the second surface.
As can be seen from the above description, the encapsulating structure for the image sensing chip that technical solution of the present invention provides and encapsulation side In method, image sensing chip is separately fixed to the two sides of the light passing window with the supporting structure for being used to install lens module, Thus it is possible, on the one hand, the front of image sensing chip is directly fixed with the surface of package substrate, the front of image sensing chip is opposite In the back side, flatness is preferable, directly can realize that fixed and circuit interconnects by welding procedure and package substrate, can be more It is accurately controlled the thickness of fixing layer between the front and package substrate of image sensing chip, in order to accurately control lens module Image-forming range relative to image sensing chip;It on the other hand, can be using the light passing window as reference position, so that camera lens Mould group can be arranged with image sensing chip with face.Therefore technical solution of the present invention can be with accurate contraposition lens module and image sensing Chip improves the image quality of encapsulating structure.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis The attached drawing of offer obtains other attached drawings.
Fig. 1 is a kind of encapsulation schematic illustration of image sensing chip in the prior art;
Fig. 2 is a kind of schematic diagram of the encapsulating structure of image sensing chip provided in an embodiment of the present invention;
Fig. 3 is the schematic diagram of the encapsulating structure of another image sensing chip provided in an embodiment of the present invention;
Fig. 4 is the schematic diagram of the encapsulating structure of another image sensing chip provided in an embodiment of the present invention;
Fig. 5-Fig. 9 is a kind of flow diagram of the packaging method of image sensing chip provided in an embodiment of the present invention;
Figure 10-Figure 14 is the process signal of the packaging method of another image sensing chip provided in an embodiment of the present invention Figure;
Figure 15 is a kind of structural schematic diagram of image sensing chip provided in an embodiment of the present invention;
Figure 16-Figure 18 is a kind of production method flow chart of image sensing chip provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other Embodiment shall fall within the protection scope of the present invention.
As shown in FIG. 1, FIG. 1 is a kind of encapsulation schematic illustration of image sensing chip in the prior art, image sensing cores Piece 13 needs and lens module 11 is packaged protection together, in the prior art, to image sensing chip 13 and lens module When 11 progress integral packaging, image sensing chip 13 is bound on usually present circuit board 15, then in the same of circuit board 15 Bracket 12 is fixed in side, and lens module 11 is installed on the bracket 12.Wherein, in mode shown in Fig. 1 left figure, image sensing chip 13 are fixed on 15 surface of circuit board by glue-line, and front weld pad is connect by conducting wire 14 with the interconnection circuit on circuit board, mutually Connection circuit with external circuit for connecting;In mode shown in right figure, image sensing chip is overleaf formed with back by TSV technique Face electricity interconnection architecture, the back side electricity interconnection architecture are connect with 13 front weld pad of image sensing chip, are mutually coupled by back side electricity Structure is connect with the interconnection circuit on circuit board.
As shown in Figure 1, when the prior art carries out integral packaging to image sensing chip 13 and camera lens 11, on the one hand, nothing Method accurately controls the thickness of fixing layer between the back side of image sensing chip 13 and circuit board 15, in this way, perpendicular to circuit board The spacing of image sensing chip 13 Yu lens module 11 can not be accurately controlled on 15 direction, therefore can not accurately adjust lens module 11 image-forming range relative to image sensing chip 13;Another side, lens module 11 be usually between being directly anchored on 12, and It is fixed with circuit board 15 again afterwards, in this way, lens module can not be accurately controlled after binding image sensing chip 13 on circuit board 15 The 11 face settings on the direction perpendicular to circuit board 15 with image sensing chip 12.
Therefore, the prior art, can not 13 He of accurate contraposition image sensing chip when being packaged to image sensing chip Lens module mould group 11, the encapsulating structure image quality that will lead to image sensing chip 13 are poor.
To solve the above-mentioned problems, the embodiment of the invention provides a kind of encapsulating structure of image sensing chip and encapsulation Image sensing chip is separately fixed at the two sides of the light passing window by method with the supporting structure for being used to install lens module, Thus it is possible, on the one hand, the front of image sensing chip is directly fixed with the surface of package substrate, the front of image sensing chip is opposite In the back side, flatness is preferable, directly can realize that fixed and circuit interconnects by welding procedure and package substrate, can be more It is accurately controlled the thickness of fixing layer between the front and package substrate of image sensing chip, in order to accurately control lens module Image-forming range relative to image sensing chip;It on the other hand, can be using the light passing window as reference position, so that camera lens Mould group can be arranged with image sensing chip with face.Therefore technical solution of the present invention can be with accurate contraposition lens module and image sensing Chip improves the image quality of encapsulating structure.
In order to make the foregoing objectives, features and advantages of the present invention clearer and more comprehensible, with reference to the accompanying drawing and specific real Applying mode, the present invention is described in further detail.
With reference to Fig. 1, Fig. 1 is a kind of schematic diagram of the encapsulating structure of image sensing chip provided in an embodiment of the present invention, should Encapsulating structure includes: package substrate 24, image sensing chip 23, supporting structure 22 and lens module 21.
The package substrate 24 has opposite first surface and second surface, and through the first surface and described The light passing window K of second surface.The package substrate 24 also has interconnection circuit, and the interconnection circuit is for connecting external electrical Road.In order to avoid the image quality for the reflection image sensing chip 23 that the sidewall surfaces of light passing window K are formed, institute can be set The sidewall surfaces for stating light passing window K have antireflective film.
The image sensing chip 23 is bundled in the first surface, and covers the light passing window K.The image sensing Chip 23 has photosensitive region 231, and the photosensitive region 231 is arranged with the light passing window K face.The image sensing chip 23 have opposite front and back, and the photosensitive region 231 is located at the front.The image sensing chip 23 front with The first surface is fixed.Optionally, the image sensing chip 23 can be fixed by welding procedure and the first surface Connection, thus it is possible, on the one hand, image sensing chip 23 and the package substrate 24 can be made relatively fixed, another side can make Image sensing chip 23 is obtained to be electrically connected with interconnection circuit realization.
The supporting structure 22 is fixed on the second surface.The lens module 21 is mounted on the supporting structure 22 On, and light passing window K described in face.
In encapsulating structure described in the embodiment of the present invention, by image sensing chip 23 and the bracket for being used to install lens module 21 Structure 22 is separately fixed at the two sides of the light passing window K, thus it is possible, on the one hand, image sensing chip 23 front directly with envelope The surface of dress substrate 24 is fixed, and the front of image sensing chip 23 is preferable relative to back side flatness, can directly pass through welding Technique and package substrate 24 realize that fixed and circuit interconnects, can more be accurately controlled the front of image sensing chip 23 with The thickness of fixing layer between package substrate 24, in order to accurately control imaging of the lens module 21 relative to image sensing chip 23 Distance;It on the other hand, can be using the light passing window K as reference position, so that lens module 21 and image sensing chip 23 It can be arranged with face.Therefore encapsulating structure described in the embodiment of the present invention can be with accurate contraposition lens module 21 and image sensing chip 23, improve the image quality of encapsulating structure.
As shown in Fig. 2, the interconnection circuit includes: the first contact jaw 241 that the first surface is arranged in, described first Contact jaw 241 is for connecting the external circuit;Second contact jaw 242 of the first surface, second contact are set For connecting the image sensing chip 23, second contact jaw 242 passes through the first wired circuit 243 and described the at end 242 The connection of one contact jaw 241.Optionally, first wired circuit 243 setting on the first surface, or is located at described the Between one surface and the second surface.In the exemplary embodiment illustrated in fig. 2, first wired circuit 243 is arranged described Between second surface and the second surface, that is to say, that be disposed at the inside of the package substrate 24, avoid its by Damage.
In encapsulating structure described in the embodiment of the present invention, the structure of the image sensing chip 23 is as shown in figure 15, Tu15Wei The front of a kind of structural schematic diagram of image sensing chip provided in an embodiment of the present invention, the image sensing chip 23 has sense Light region 231, front are additionally provided with the multiple weld pads 232 connecting with the photosensitive region 231.The weld pad 232 with it is described Second contact jaw 242 welding, so that the image sensing chip 23 is connect with the interconnection circuit.The image sensing chip 23 front is also covered with protective layer 200, for protecting to the photosensitive region 231.It can be right in the protective layer 200 Answer the position of the weld pad 232 that opening is set, to expose the weld pad 232, in order to which the weld pad 232 is contacted with described second 242 welding of end or the protective layer 200 cover the weld pad 232, and having the protective layer 200 is relatively thin film, Ke Yitong The temperature crossed in welding procedure directly melts the protective layer 200, so that weld pad 232 and second contact jaw 242 connect It connects.
As shown in Fig. 2, the supporting structure 22 includes: the first cylindrical sidewall in encapsulating structure described in the embodiment of the present invention 221, first cylindrical sidewall 221 is fixed on the second surface, and surrounds the light passing window K;The lens module 21 It is fixed on the inside of first cylindrical sidewall 221;Wherein, first cylindrical sidewall of the lens module 21 is installed 221 have the package substrate 24 of the image sensing chip 23 to form first annular seal space body with binding.The lens module 21 With at least one lens element and fixing seat, the lens element is located in the fixing seat.The fixing seat with it is described It is threadably secured between first cylindrical sidewall 221, is passed in order to accurately adjust the lens module 21 relative to the image The image-forming range of sense chip 23.In other modes, the setting fixing seat also may not need, it directly will at least one described lens Element is fixed on the inner wall of first cylindrical sidewall 221, described in the groove fixation by 221 inside of the first cylindrical sidewall Lens element.
By the first annular seal space body can to the image sensing chip 23 front with the lens module 21 it Between space be sealed protection, avoid the space from tarnishing.It is formed in order to avoid the inner surface of the first cylindrical sidewall 221 The image quality of reflection image sensing chip 23, the inner surface that first cylindrical sidewall 221 can be set have antireflective film.
With reference to Fig. 3, Fig. 3 is the schematic diagram of the encapsulating structure of another image sensing chip provided in an embodiment of the present invention, Fig. 3 illustrated embodiment is that Fig. 3 illustrated embodiment further includes optical filter 25 with Fig. 2 illustrated embodiment difference.The filter Mating plate 25 is arranged between the lens module 21 and the image sensing chip 23.The optical filter 25 can be arranged in institute Second surface is stated, and covers the light passing window K.There is the space spacing of setting between lens module 21 and first surface, with So that it has the image-forming range of setting with respect to image sensing chip 23, it is multiplexed the space spacing and the optical filter 25, nothing is set The thickness of encapsulating structure need to be increased.The optical filter 25 is used to filter out other except the image sensing chip induction optical band Light wave avoids influence of other light waves to image quality.
Optionally, the encapsulating structure further include: the anti-reflecting layer on 25 surface of optical filter is set.Do not show in Fig. 3 The anti-reflecting layer out.The anti-reflecting layer avoids influence of the reflected light to image quality for reducing reflection.
In the encapsulating structure described in the embodiment of the present invention, the supporting structure 22 further include: the second cylindrical sidewall 222, institute The second cylindrical sidewall 222 is stated with top opening and bottom opening.Binding has the encapsulation of the image sensing chip 23 Substrate 24 is located in second cylindrical sidewall 222.The top opening of second cylindrical sidewall 222 has roof 223, described The opening that roof 223 has and the outside of first cylindrical sidewall 221 is fixed, the split ring is around first cylindrical sidewall 221 outside.
As shown in figure 4, Fig. 4 is the signal of the encapsulating structure of another image sensing chip provided in an embodiment of the present invention Scheme, in encapsulating structure described in the embodiment of the present invention, the bottom opening of second cylindrical sidewall 222 is used for and circuit board 26 is solid Fixed, the circuit board 26 has the external circuit.When the bottom opening and the fixed circuit board 26, described second Shape side wall 222 and the circuit board form the second seal cavity.The circuit board 26 is PCB or FPC.It is close by described second Envelope cavity can be sealed protection to the space of second cylindrical sidewall 222, and the space is avoided to tarnish.Described first Contact jaw 241 can be welded directly with the circuit board 26, so that interconnection circuit on the package substrate 24 and described outer Portion's circuit connection.The height of first contact jaw 241 is greater than the thickness of the image sensing chip 23, in order to described first Contact jaw 241 is welded and fixed with the circuit board 26.
Optionally, second cylindrical sidewall 222 is an integral molding structure with the roof 223;Or, second tubular Side wall 222 and the roof 223 are separation unit, and the top that the roof 223 is fixed on second cylindrical sidewall 222 is opened Mouthful.
Optionally, the interconnection circuit further include: the third contact jaw of the second surface, the third contact are set End is for binding plug-in element.The third contact jaw pass through the second wired circuit for being arranged in the package substrate 24 with it is right The first contact jaw 241 connection answered.The embodiment of the present invention is attached to be not shown in the figure the third contact jaw, second wired circuit And the plug-in element.The plug-in element may include one of resistance, capacitor, memory and compensatory light or more Kind.The plug-in element can be set in the outside of first cylindrical sidewall 221, and be located in second seal cavity. When the plug-in element includes the compensatory light, the position of the corresponding compensatory light of the roof 223 has light hole, So that compensation light outgoing.
As can be seen from the above description, in encapsulating structure described in the embodiment of the present invention, by image sensing chip 23 be used to pacify The supporting structure 22 of dress lens module 21 is separately fixed at the two sides of the light passing window K, thus it is possible, on the one hand, image sensing core Surface of the front directly with package substrate 24 of piece 23 is fixed, the front of image sensing chip 23 relative to back side flatness compared with It is good, it directly can realize that fixed and circuit interconnects by welding procedure and package substrate 24, can more be accurately controlled shadow As sensing chip 23 front and package substrate 24 between fixing layer thickness, in order to accurately control lens module 21 relative to The image-forming range of image sensing chip 23;It on the other hand, can be using the light passing window K as reference position, so that camera lens mould Group 21 can be arranged with image sensing chip 23 with face.Therefore encapsulating structure described in the embodiment of the present invention can be with accurate contraposition camera lens mould Group 21 and image sensing chip 23, improve the image quality of encapsulating structure.
In encapsulating structure described in the embodiment of the present invention, lens module 21 and image sensing chip 23 are separately positioned on described The package substrate 24 is arranged and corresponds in space in the image-forming range, reduces encapsulating structure by the two sides of package substrate 24 Thickness.When light passing window K be arranged optical filter 25 when, can to avoid when subsequent fixed supporting structure 22 to image sensing chip 23 are stained.
Based on above-mentioned encapsulating structure embodiment, another embodiment of the present invention additionally provides a kind of encapsulation of image sensing chip Method, for the packaging method as shown in Fig. 5-Fig. 9, Fig. 5-Fig. 9 is a kind of envelope of image sensing chip provided in an embodiment of the present invention The flow diagram of dress method, the packaging method include:
Step S11: as shown in figure 5, providing a package substrate 24.
The package substrate 24 has opposite first surface and second surface, and the package substrate 24 has multiple cores Piece binding region has cutting channel 100 between the two neighboring chip bonding region, and the chip bonding region, which has, to be passed through The light passing window K of the first surface and the second surface is worn, the chip bonding region also has interconnection circuit, described mutual Connection circuit is for connecting external circuit.
The interconnection circuit includes: the first contact jaw 241 that the first surface is arranged in, first contact jaw 241 For connecting the external circuit;Second contact jaw 242 of the first surface is set, and second contact jaw 242 is used for The image sensing chip 23 is connected, second contact jaw 242 passes through the first wired circuit 243 and first contact jaw 241 connections.
As above-mentioned, the setting of the first wired circuit 243 on the first surface, or be located at the first surface and Between the second surface.
Step S12: as shown in fig. 6, binding image sensing chip 23 in the chip bonding region.
The image sensing chip 23 is bundled in the first surface, and covers the light passing window K;The image sensing Chip 23 has photosensitive region 231, and the photosensitive region 231 is arranged with the light passing window K face.
In the step, it is described the chip bonding region binding image sensing chip 23 include: by the image sensing Chip 23 and second contact jaw 242 weld.
Step S13: as shown in fig. 7, dividing the package substrate 24 based on the cutting channel 100, multiple separation are formed Chip bonding region, chip bonding region binding has the image sensing chip 23.
Step S13: as shown in Figure 8 and Figure 9, deviate from the side of the image sensing chip 23 in the chip bonding region Lens module 21 is set.
The lens module 21 is mounted on the supporting structure 22, and light passing window K described in face, the supporting structure 22 are fixed on the second surface.The image sensing chip 23 can be as shown in figure 15, and details are not described herein.
As above-mentioned, the supporting structure 22 includes: the first cylindrical sidewall 221, and first cylindrical sidewall 221 is fixed on institute Second surface is stated, and surrounds the light passing window K;The lens module 21 is fixed on the inside of first cylindrical sidewall 221; Wherein, first cylindrical sidewall 221 and binding that are equipped with the lens module 21 have the institute of the image sensing chip 23 It states package substrate 24 and forms first annular seal space body.Optionally, the supporting structure 22 further include: opening and bottom opening;It ties up There is the package substrate 24 of the image sensing chip 23 to be located in second cylindrical sidewall 222 surely;Second tubular The top opening of side wall 222 has roof 223, and the roof 223 is fixed with the outside with first cylindrical sidewall 221 Opening, the split ring is around the outside of first cylindrical sidewall 221;The bottom opening is used for and circuit board is fixed, the electricity Road plate has the external circuit;When the bottom opening and the circuit board are fixed, second cylindrical sidewall and described Circuit board forms the second seal cavity.
By production method shown in Fig. 5-Fig. 9, encapsulating structure as shown in Figure 2 can be formed.In the packaging method, the mirror Head mould group 21 includes fixing seat, and the fixing seat is threadably secured with the supporting structure 22, therefore in the packaging method, can be with First in the fixed supporting structure 22 in the surface of the package substrate 24, then passes through screw thread and fix institute on the supporting structure 22 State lens module 21.In other modes, the lens module 21 can also be directly fixedly installed on the package substrate 24 Supporting structure 22.
With reference to Figure 10-Figure 14, Figure 10-Figure 14 provides the encapsulation of fixed another image sensing chip for the embodiment of the present invention The flow diagram of method, the packaging method be with above-mentioned packaging method difference, the packaging method further include:
Firstly, as shown in Figure 10, before installing the supporting structure 22, deviating from the shadow in the chip bonding region As the fixed optical filter 25 in the side of sensing chip 23, the optical filter 25 covers the light passing window K.Optionally, can divide The fixed optical filter 25 before cutting the package substrate 24.
Then, as shown in figure 11, the package substrate 24 is split.25 surface of optical filter is provided with antireflection Layer.
Again as shown in figure 12, the second surface fixing rack structure 22 of the package substrate 24 after singulation.
Again as shown in figure 13, fixed lens mould group 21 is installed in the bracket result 22.At this point it is possible to be formed such as Fig. 3 Shown in encapsulating structure.
Finally, as shown in figure 14, binding circuit board 26.At this point it is possible to form encapsulating structure as shown in Figure 4.
Such as above-mentioned, the interconnection circuit further include: the third contact jaw of the second surface, the third contact is arranged in End is for binding plug-in element;The third contact jaw pass through the second wired circuit for being arranged in the package substrate 24 with it is right The first contact jaw 241 connection answered.At this point, the packaging method further include: before installing the supporting structure 22, described The plug-in element is bound in chip bonding region, and the plug-in element is arranged in the second surface.
In the embodiment of the present invention, the production method of the image sensing chip 23 can as exemplified in figs, Figure 16- Figure 18 is a kind of production method flow chart of image sensing chip provided in an embodiment of the present invention, which includes:
Firstly, as shown in Figure 16 and Figure 17, Figure 17 is figure 1 in the sectional drawing in the direction PP ', a wafer 43 is provided.Wafer 43 have multiple chip areas 42, and each chip area 42 is used to form an image sensing chip 23.Between chip area 42 With cutting channel 41.Matcoveredn 200 is arranged in 43 surface of wafer.
Then, the image sensing chip 23 can be formed to this hair by dividing the wafer 43 based on cutting channel 41.
Packaging method described in bright embodiment is used to form encapsulating structure described in above-described embodiment, and processing step is simple, production It is at low cost, and can have preferable with lens module 21 described in accurate contraposition and the image sensing chip, the encapsulating structure of formation Image quality.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For being encapsulated disclosed in embodiment For method, since it is corresponding with encapsulating structure disclosed in embodiment, so being described relatively simple, related place is referring to envelope Assembling structure corresponding part explanation.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one The widest scope of cause.

Claims (20)

1. a kind of encapsulating structure of image sensing chip, which is characterized in that the encapsulating structure includes:
Package substrate, the package substrate have opposite first surface and second surface, and through the first surface and The light passing window of the second surface;The package substrate also has interconnection circuit, and the interconnection circuit is for connecting external electrical Road;
Image sensing chip, the image sensing chip bonding cover the light passing window in the first surface;The shadow As sensing chip has photosensitive region, the photosensitive region and light passing window face setting;
Supporting structure, the supporting structure are fixed on the second surface;
Lens module, the lens module is mounted on the supporting structure, and light passing window described in face.
2. encapsulating structure according to claim 1, which is characterized in that the interconnection circuit includes:
First contact jaw of the first surface is set, and first contact jaw is for connecting the external circuit;
Second contact jaw of the first surface is set, and second contact jaw is for connecting the image sensing chip, institute The second contact jaw is stated to connect by the first wired circuit with first contact jaw.
3. encapsulating structure according to claim 2, which is characterized in that first wired circuit is arranged in first table On face, or between the first surface and the second surface.
4. encapsulating structure according to claim 1, which is characterized in that the supporting structure includes:
First cylindrical sidewall, first cylindrical sidewall is fixed on the second surface, and surrounds the light passing window;
The lens module is fixed on the inside of first cylindrical sidewall;
Wherein, first cylindrical sidewall and binding that are equipped with the lens module have the envelope of the image sensing chip It fills substrate and forms first annular seal space body.
5. encapsulating structure according to claim 4, which is characterized in that the supporting structure further include:
Second cylindrical sidewall, second cylindrical sidewall have top opening and bottom opening;
Binding has the package substrate of the image sensing chip to be located in second cylindrical sidewall;
The top opening of second cylindrical sidewall has roof, and the roof has and the outside of first cylindrical sidewall is solid Fixed opening, the split ring is around the outside of first cylindrical sidewall;
The bottom opening is used for and circuit board is fixed, and the circuit board has the external circuit;
When the bottom opening and the fixed circuit board, second cylindrical sidewall and the circuit board form the second sealing Cavity.
6. encapsulating structure according to claim 5, which is characterized in that the circuit board is PCB or FPC.
7. encapsulating structure according to claim 5, which is characterized in that second cylindrical sidewall is integrated with the roof Molding structure;
Or, second cylindrical sidewall and the roof are separation unit, the roof is fixed on second cylindrical sidewall Top opening.
8. encapsulating structure according to claim 1, which is characterized in that further include:
Optical filter between the lens module and the image sensing chip.
9. encapsulating structure according to claim 8, which is characterized in that the optical filter is fixed on the second surface, and Cover the light passing window.
10. encapsulating structure according to claim 8, which is characterized in that further include that resisting for the optical filter surface is arranged in Reflecting layer.
11. encapsulating structure according to claim 2, which is characterized in that the interconnection circuit further include:
The third contact jaw of the second surface is set, and the third contact jaw is for binding plug-in element;
The third contact jaw passes through the second wired circuit being arranged in the package substrate and connects with corresponding first contact jaw It connects.
12. a kind of packaging method, which is characterized in that the packaging method includes:
A package substrate is provided, the package substrate has opposite first surface and second surface, the package substrate tool There are multiple chip bonding regions, there is cutting channel, the chip bonding region between the two neighboring chip bonding region With the light passing window for running through the first surface and the second surface, the chip bonding region also has interconnection circuit, The interconnection circuit is for connecting external circuit;
The chip bonding region bind image sensing chip, the image sensing chip bonding in the first surface, and Cover the light passing window;The image sensing chip has photosensitive region, the photosensitive region and the light passing window face Setting;
Divide the package substrate based on the cutting channel, forms multiple isolated chip bonding regions, the chip bonding Region binding has the image sensing chip;
Lens module, the lens module installation are set away from the side of the image sensing chip in the chip bonding region On the supporting structure, and light passing window described in face, the supporting structure are fixed on the second surface.
13. packaging method according to claim 12, which is characterized in that the interconnection circuit includes: setting described the First contact jaw on one surface, first contact jaw is for connecting the external circuit;It is arranged in the of the first surface Two contact jaws, second contact jaw pass through the first wiring electricity for connecting the image sensing chip, second contact jaw Road is connect with first contact jaw;
It is described the chip bonding region binding image sensing chip include: to connect the image sensing chip with described second Contravention welding.
14. packaging method according to claim 13, which is characterized in that first wired circuit is arranged described first On surface, or between the first surface and the second surface.
15. packaging method according to claim 12, which is characterized in that the supporting structure includes:
First cylindrical sidewall, first cylindrical sidewall is fixed on the second surface, and surrounds the light passing window;
The lens module is fixed on the inside of first cylindrical sidewall;
Wherein, first cylindrical sidewall and binding that are equipped with the lens module have the envelope of the image sensing chip It fills substrate and forms first annular seal space body.
16. packaging method according to claim 15, which is characterized in that the supporting structure further include:
Second cylindrical sidewall, second cylindrical sidewall have top opening and bottom opening;
Binding has the package substrate of the image sensing chip to be located in second cylindrical sidewall;
The top opening of second cylindrical sidewall has roof, and the roof has and the outside of first cylindrical sidewall is solid Fixed opening, the split ring is around the outside of first cylindrical sidewall;
The bottom opening is used for and circuit board is fixed, and the circuit board has the external circuit;
When the bottom opening and the fixed circuit board, second cylindrical sidewall and the circuit board form the second sealing Cavity.
17. packaging method according to claim 15, which is characterized in that the packaging method further include:
Before installing the supporting structure, in the chip bonding region away from the fixed filter in the side of the image sensing chip Mating plate, the optical filter cover the light passing window.
18. packaging method according to claim 17, which is characterized in that described in fixed before dividing the package substrate Optical filter.
19. packaging method according to claim 17, which is characterized in that the optical filter surface is provided with anti-reflecting layer.
20. packaging method according to claim 13, which is characterized in that the interconnection circuit further include: be arranged described The third contact jaw of second surface, the third contact jaw is for binding plug-in element;The third contact jaw is existed by setting The second wired circuit in the package substrate is connected with corresponding first contact jaw;
The packaging method further include: before installing the supporting structure, bound in the chip bonding region described plug-in Element, the plug-in element are arranged in the second surface.
CN201810832360.6A 2018-07-26 2018-07-26 Packaging structure and packaging method of image sensing chip Active CN108933151B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201810832360.6A CN108933151B (en) 2018-07-26 2018-07-26 Packaging structure and packaging method of image sensing chip

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201810832360.6A CN108933151B (en) 2018-07-26 2018-07-26 Packaging structure and packaging method of image sensing chip

Publications (2)

Publication Number Publication Date
CN108933151A true CN108933151A (en) 2018-12-04
CN108933151B CN108933151B (en) 2024-02-13

Family

ID=64444666

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810832360.6A Active CN108933151B (en) 2018-07-26 2018-07-26 Packaging structure and packaging method of image sensing chip

Country Status (1)

Country Link
CN (1) CN108933151B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110351460A (en) * 2019-06-22 2019-10-18 王之奇 A kind of camera encapsulation module and its packaging method
CN110416241A (en) * 2019-08-29 2019-11-05 苏州多感科技有限公司 Encapsulating structure, Image Acquisition mould group and intelligent mobile phone terminal
WO2021196221A1 (en) * 2020-04-03 2021-10-07 南昌欧菲光电技术有限公司 Photosensitive assembly, camera module and electronic device

Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117997A (en) * 1997-06-25 1999-01-22 Matsushita Electron Corp Image pickup unit
JP2002246574A (en) * 2001-02-15 2002-08-30 Citizen Electronics Co Ltd Semiconductor package and manufacturing method thereof
JP2004296453A (en) * 2003-02-06 2004-10-21 Sharp Corp Solid-state imaging device, semiconductor wafer, optical device module, method of manufacturing the solid-state imaging device, and method of manufacturing the optical device module
TW200513131A (en) * 2003-09-29 2005-04-01 Taiwan Carol Electronics Co Ltd Micro single-chip microphone and manufacturing method thereof
CN1694509A (en) * 2001-11-30 2005-11-09 松下电器产业株式会社 Solid state image pickup device and its manufacturing method
CN2773722Y (en) * 2005-02-04 2006-04-19 沈阳敏像科技有限公司 Microcamera mould set
TWI276209B (en) * 2005-11-30 2007-03-11 Acme System Technologies Corp Packaging method that improves assembly of image sensory chip on circuit board
CN101034710A (en) * 2006-03-07 2007-09-12 崴强科技股份有限公司 Method capable of adjusting sensing part lens deviation and its encapsulation structure
CN101170118A (en) * 2006-10-25 2008-04-30 鸿富锦精密工业(深圳)有限公司 Image sensor encapsulation, image sensor module and their making method
CN101197383A (en) * 2006-12-06 2008-06-11 台湾沛晶股份有限公司 Accurately locating image chip packaging structure
TW200840333A (en) * 2007-03-26 2008-10-01 Hon Hai Prec Ind Co Ltd Image sensor package and imageing device therewith
CN101285918A (en) * 2007-04-10 2008-10-15 鸿富锦精密工业(深圳)有限公司 Camera module group and its assembled method and portable electronic device
CN101297404A (en) * 2005-12-24 2008-10-29 崔显圭 Semiconductor package, method of fabricating the same and semiconductor package module for image sensor
CN101310381A (en) * 2005-11-16 2008-11-19 夏普株式会社 Semiconductor package, method of producing the same, semiconductor module, and electronic apparatus
CN101369593A (en) * 2007-06-07 2009-02-18 松下电器产业株式会社 Optical device and method for fabricating the same, camera module using optical device, and electronic equipment mounting camera module
US8049809B2 (en) * 2006-11-14 2011-11-01 Toppan Printing Co., Ltd. Solid-state image pickup device and electronic instruments
CN103956370A (en) * 2014-05-20 2014-07-30 苏州晶方半导体科技股份有限公司 Image sensor module and forming method thereof
CN105321973A (en) * 2015-09-25 2016-02-10 江西芯创光电有限公司 Flip-chip camera and preparation method thereof
US20180205857A1 (en) * 2015-07-09 2018-07-19 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules including overmold supporting an optical assembly
CN208538862U (en) * 2018-07-26 2019-02-22 苏州晶方半导体科技股份有限公司 A kind of encapsulating structure of image sensing chip

Patent Citations (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1117997A (en) * 1997-06-25 1999-01-22 Matsushita Electron Corp Image pickup unit
JP2002246574A (en) * 2001-02-15 2002-08-30 Citizen Electronics Co Ltd Semiconductor package and manufacturing method thereof
CN1694509A (en) * 2001-11-30 2005-11-09 松下电器产业株式会社 Solid state image pickup device and its manufacturing method
JP2004296453A (en) * 2003-02-06 2004-10-21 Sharp Corp Solid-state imaging device, semiconductor wafer, optical device module, method of manufacturing the solid-state imaging device, and method of manufacturing the optical device module
TW200513131A (en) * 2003-09-29 2005-04-01 Taiwan Carol Electronics Co Ltd Micro single-chip microphone and manufacturing method thereof
CN2773722Y (en) * 2005-02-04 2006-04-19 沈阳敏像科技有限公司 Microcamera mould set
CN101310381A (en) * 2005-11-16 2008-11-19 夏普株式会社 Semiconductor package, method of producing the same, semiconductor module, and electronic apparatus
TWI276209B (en) * 2005-11-30 2007-03-11 Acme System Technologies Corp Packaging method that improves assembly of image sensory chip on circuit board
CN101297404A (en) * 2005-12-24 2008-10-29 崔显圭 Semiconductor package, method of fabricating the same and semiconductor package module for image sensor
CN101034710A (en) * 2006-03-07 2007-09-12 崴强科技股份有限公司 Method capable of adjusting sensing part lens deviation and its encapsulation structure
CN101170118A (en) * 2006-10-25 2008-04-30 鸿富锦精密工业(深圳)有限公司 Image sensor encapsulation, image sensor module and their making method
US8049809B2 (en) * 2006-11-14 2011-11-01 Toppan Printing Co., Ltd. Solid-state image pickup device and electronic instruments
CN101197383A (en) * 2006-12-06 2008-06-11 台湾沛晶股份有限公司 Accurately locating image chip packaging structure
TW200840333A (en) * 2007-03-26 2008-10-01 Hon Hai Prec Ind Co Ltd Image sensor package and imageing device therewith
CN101285918A (en) * 2007-04-10 2008-10-15 鸿富锦精密工业(深圳)有限公司 Camera module group and its assembled method and portable electronic device
CN101369593A (en) * 2007-06-07 2009-02-18 松下电器产业株式会社 Optical device and method for fabricating the same, camera module using optical device, and electronic equipment mounting camera module
CN103956370A (en) * 2014-05-20 2014-07-30 苏州晶方半导体科技股份有限公司 Image sensor module and forming method thereof
US20180205857A1 (en) * 2015-07-09 2018-07-19 Heptagon Micro Optics Pte. Ltd. Optoelectronic modules including overmold supporting an optical assembly
CN105321973A (en) * 2015-09-25 2016-02-10 江西芯创光电有限公司 Flip-chip camera and preparation method thereof
CN208538862U (en) * 2018-07-26 2019-02-22 苏州晶方半导体科技股份有限公司 A kind of encapsulating structure of image sensing chip

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110351460A (en) * 2019-06-22 2019-10-18 王之奇 A kind of camera encapsulation module and its packaging method
CN110416241A (en) * 2019-08-29 2019-11-05 苏州多感科技有限公司 Encapsulating structure, Image Acquisition mould group and intelligent mobile phone terminal
WO2021196221A1 (en) * 2020-04-03 2021-10-07 南昌欧菲光电技术有限公司 Photosensitive assembly, camera module and electronic device

Also Published As

Publication number Publication date
CN108933151B (en) 2024-02-13

Similar Documents

Publication Publication Date Title
US6011294A (en) Low cost CCD packaging
TWI270707B (en) Module for optical devices, and manufacturing method of module for optical devices
TW536522B (en) Hermetic MEMS package with interlocking layers
CN108933151A (en) A kind of encapsulating structure and packaging method of image sensing chip
TWI253750B (en) Solid-state photographing apparatus and its manufacturing method
KR20180132684A (en) Camera module, its photosensitive part and method of manufacturing the same
US9986354B2 (en) Pre-mold for a microphone assembly and method of producing the same
TW200426422A (en) Module for optical device, and manufacturing method therefor
CN104094405A (en) Imaging unit and imaging apparatus
CN205792880U (en) The integral base assembly of camera module based on integral packaging technique
EP1708269A1 (en) Semiconductor device module and manufacturing method of semiconductor device module
JPH08306899A (en) Package for solid-state image pickup element and its preparation
WO1997005660A1 (en) Solid-state image pickup device and its manufacture
CN101409298A (en) Imaging apparatus and assembling method thereof
JP3417225B2 (en) Solid-state imaging device and camera using it
CN111123430B (en) Packaging method of phase-control optical waveguide chip
CN106031161A (en) Imaging unit and imaging device
CN107580170A (en) A kind of camera module and its method for packing
CN208538862U (en) A kind of encapsulating structure of image sensing chip
WO2021190141A1 (en) Packaging structure for chip and packaging method therefor
EP3962056A1 (en) Camera module and photosensitive assembly thereof, and electronic device and preparation method
CN109003950A (en) A kind of encapsulating structure and packaging method of ultrasonic fingerprint chip
CN109417081B (en) Chip packaging structure, method and electronic equipment
US20030001250A1 (en) TCP optical device
CN101563774A (en) IC chip mounting package and process for manufacturing the same

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant