CN108827898A - A kind of infrared microscopy optical enhancement system and method for continuous vari-focus - Google Patents
A kind of infrared microscopy optical enhancement system and method for continuous vari-focus Download PDFInfo
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- CN108827898A CN108827898A CN201810346551.1A CN201810346551A CN108827898A CN 108827898 A CN108827898 A CN 108827898A CN 201810346551 A CN201810346551 A CN 201810346551A CN 108827898 A CN108827898 A CN 108827898A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 72
- 238000004971 IR microspectroscopy Methods 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 23
- 239000000463 material Substances 0.000 claims abstract description 16
- 230000001052 transient effect Effects 0.000 claims abstract description 11
- 230000002708 enhancing effect Effects 0.000 claims abstract description 7
- 238000005259 measurement Methods 0.000 claims description 6
- 230000008020 evaporation Effects 0.000 claims description 4
- 238000001704 evaporation Methods 0.000 claims description 4
- 230000000149 penetrating effect Effects 0.000 claims description 4
- 230000011514 reflex Effects 0.000 claims description 2
- 238000010025 steaming Methods 0.000 claims description 2
- 238000004080 punching Methods 0.000 claims 1
- 238000002310 reflectometry Methods 0.000 claims 1
- 238000005057 refrigeration Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- 238000011160 research Methods 0.000 description 3
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- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000009527 percussion Methods 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B17/00—Systems with reflecting surfaces, with or without refracting elements
- G02B17/08—Catadioptric systems
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- G—PHYSICS
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Abstract
A kind of infrared microscopy optical enhancement system of continuous vari-focus of disclosure of the invention, belongs to the transient temperature measuring field of engineering material.The present invention includes reflective system, refraction type system and focusing auxiliary system；Reflective system is for realizing the operating distance for increasing infrared optics enhancing system, including laser, the first reflecting mirror, optical path adjusting case, the second reflecting mirror；The refraction type system is for realizing continuous vari-focus microscopic function；Auxiliary system of focusing is used for real focus function, including infrared light supply and the first reflecting mirror.Invention additionally discloses a kind of adjustment methods of the infrared microscopy optical enhancement system for the continuous vari-focus realized based on the system.The technical problem to be solved by the present invention is to：The infrared microscopy optical enhancement system and focus operation of a kind of continuous vari-focus described in realizing also have the advantages that increase infrared optical system operating distance, realize the transient temperature measuring under high speed impact in material in tiny area in deformation and failure procedure.
Description
Technical field
The present invention relates to a kind of infrared microscopy camera opticals of continuous vari-focus to enhance system and method, in particular to a kind of base
In the system and method that the infrared microscopy of refrigeration mode high speed IR detector images, belong to the transient temperature measuring neck of engineering material
Domain.
Background technique
The deformation process Yu failure mechanism of material are increasingly subject to the attention of researcher under high speed impact, are Solid Mechanics
One of research hotspot in direction has important scientific meaning and engineering application value.The high-speed impact property of material is tested
Need to be applied to high speed infrared temperature measuring device in the process, and domestic high speed infrared temperature measuring device lagging in development, cannot it expire
The current test request of foot.And external high speed infrared temperature measuring device is forbidden preventing domestic scientific research from working home sale
It is engaged in military related application research.Therefore in order under China's high speed impact the deformation of material and the further investigation of failure mechanism establish
Basis needs to break external technology blockage, develops high speed infrared temperature measuring device with independent intellectual property rights.In high speed infrared
In the development of temperature measuring device, it is an important hinge that infrared optics, which enhances system, it can make light signal strength improve, have
Conducive to the acquisition and transmission of optical signal, to realize the record of the distribution of material surface temperature under high speed impact.Particularly, in height
Speed impacts the width that failed areas occurs for lower material and only has 20~50 μm, the space of current high speed IR detector respectively rate (>
50 μm) it is not able to satisfy the distribution record in temperature field in failed areas.Therefore it needs using infrared microscopy optical enhancement system, and shows
The zoom capabilities of micro- infrared optics enhancing system embody the application power of high speed infrared temperature measuring device.
The main amplification mode for using refraction type at present, but since focusing behaviour can not be carried out by way of infrared imaging
Make, limits refraction type system and apply on refrigeration mode high speed IR detector.Simultaneously as object is deposited in high-speed percussion experiment
Winged problem is being hit, therefore the refraction type system of short object distance is not suitable for surveying using material surface transient temperature under high speed impact
Amount.
Summary of the invention
For the deficiency of prior art：(1) it cannot achieve temperature field measurement in tiny area；(2) can not by it is infrared at
The mode of picture carries out focus operation, and limiting refraction type system can not apply on refrigeration mode high speed IR detector；(3) short object
Away from refraction type system be not suitable for using material surface transient temperature measuring under high speed impact.One kind of disclosure of the invention is continuous
The infrared microscopy optical enhancement system and method technical problems to be solved of zoom are：Realize a kind of the aobvious of continuous vari-focus
Micro- infrared optics enhancing system and focus operation, also have the advantages that increase infrared optical system operating distance, and then can be real
Transient temperature measuring under existing high speed impact in material in tiny area in deformation and failure procedure.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of infrared microscopy optical enhancement system of continuous vari-focus of disclosure of the invention, including reflective system, refraction
Formula system and focusing auxiliary system.Reflective system and focusing auxiliary system share the first reflecting mirror.
The reflective system is for realizing the operating distance for increasing infrared optics enhancing system, including laser, first
Reflecting mirror, optical path adjusting case, the second reflecting mirror.The optical path adjusting case is used to adjust the center of optical path, in same side pair
Title opens up two through-holes, as right light modulation mouth and left light modulation mouth.Minor adjustment frame, convex is placed in the case of the optical path adjusting case
Face mirror, big adjusting bracket and concave mirror.Optical path adjusting case is fixed in fixed plate by lifting and fixing device.Minor adjustment frame and convex surface
Mirror is fixedly connected, for adjusting the position of convex mirror.Big adjusting bracket is fixedly connected with concave mirror, for adjusting the position of concave mirror
It sets.
The vertex of the convex mirror is located at the focal point of concave mirror, so that light is projected along left light modulation mouth center；
The convex mirror and concave mirror surface evaporation film, the steaming film need to guarantee there is high reflection in infrared band
Rate, the high reflectance digital reflex rate is 90% or more.
Preferably, the convex mirror and concave mirror surface evaporation thickness is preferably 1000 angstroms of golden film.
The refraction type system is for realizing continuous vari-focus microscopic function, the refraction type system with continuous vari-focus
The front focus of system is overlapped with the rear focus of reflective system.
The focusing auxiliary system is used for real focus function, including infrared light supply and the first reflecting mirror.
The laser and infrared light supply is mounted on the first sliding rail；First reflecting mirror is mounted on the first sliding rail
On；The grating target is mounted on the second sliding rail, and the first sliding rail and the second sliding rail right angle are fixedly connected；The infrared phase
Machine, the second reflecting mirror and refraction type system are mounted on third sliding rail；First sliding rail, the second sliding rail and third sliding rail are mounted on solid
On fixed board.
The laser that the laser issues is sequentially passed through grating target and right light modulation mouth after the reflection of the first reflecting mirror, then
It is projected from optical path adjusting case by left light modulation mouth is passed through after concave mirror and convex mirror, is finally reflected by the second reflecting mirror
Afterwards, it is acquired by refraction type system by infrared camera, realizes a kind of infrared microscopy optical enhancement system of continuous vari-focus
Continuous vari-focus and infrared microscopy optical enhancement, and then can be realized deformation and failure under high speed impact in material in tiny area
Transient temperature measuring in the process.
The infrared light spot that the infrared light supply issues is passed through optical path adjusting case after the reflection of the first reflecting mirror, passes through refraction
The convergence of formula system is acquired after projecting by infrared camera, adjusts refraction type system and infrared camera under different multiplying by third sliding rail
The distance between, realize a kind of infrared microscopy optical enhancement system focus operation of continuous vari-focus.
Preferably, first reflecting mirror realizes the middle component for rotating and realizing whole system using rotating device
It is accurately positioned and the focal length of refraction type system determines.The component include optical path adjusting case, infrared light supply, the second reflecting mirror,
Refraction type system and infrared camera.
One kind that a kind of infrared microscopy optical enhancement system of continuous vari-focus based on disclosure of the invention is realized is continuous to be become
The adjustment method of burnt infrared microscopy optical enhancement system, includes the following steps：
Step 1：The height of laser, and the laser tune issued by laser are adjusted by the laser that laser issues
The angle and height of whole first reflecting mirror, it is ensured that laser facula is injected from right light modulation mouth central point；Rotate the angle of the first reflecting mirror
Degree, adjusts the height and angle of infrared light supply, it is ensured that the hot spot that infrared light supply is launched is injected from right light modulation mouth central point.
Step 2：Make center of the laser facula after reflection from left light modulation mouth by the big adjusting bracket of adjusting, minor adjustment frame
Point projects.
Step 3：Adjusting the height of refraction type system and angle according to hot spot point ensures laser facula from refraction type system
Central point is injected；Then the height and angle for adjusting infrared camera, so that hot spot is just in the center of infrared target surface.
Step 4：Grating target is taken away before measurement, refraction type system is adjusted at a distance from infrared camera by third sliding rail,
So that infrared camera receives according to this through the infrared of the first reflecting mirror, optical path adjusting case and the second reflecting mirror and refraction type system
Light energy maximum is to realize a kind of infrared microscopy optical enhancement system focus operation of continuous vari-focus.
Step 5：Grating target is put on the second sliding rail, the height for adjusting grating target makes infrared light spot pass through grating target
Center.
Step 6：The hot spot that infrared light supply issues is sequentially passed through grating target and right light modulation mouth after the reflection of the first reflecting mirror,
Then passed through left light modulation mouth after concave mirror and convex mirror to project from optical path adjusting case, it is finally anti-by the second reflecting mirror
After penetrating and penetrating refraction type system, grating figure is recorded by infrared camera.Realize a kind of infrared microscopy light of continuous vari-focus
Enhancing system is learned to the function of measurement by magnification in tiny area, refrigeration mode high speed IR detector is replaced into infrared camera and then energy
Enough realize the transient temperature measuring in the deformation and failure procedure under high speed impact in material in tiny area.
Beneficial effect：
1, the infrared microscopy optical enhancement system and method for a kind of continuous vari-focus of disclosure of the invention, passes through refraction type system
The object distance of system is overlapped with the image distance of reflective system, can be realized continuous vari-focus microscopic function, and can apply and freeze
On type high speed IR detector, the transient temperature in the deformation and failure procedure under high speed impact in material in tiny area is realized
Measurement.
2, the infrared microscopy optical enhancement system and method for a kind of continuous vari-focus of disclosure of the invention, passes through single infrared light
Source and single infrared camera realize the focus adjustment of whole system, reduce the cumbersome approaches of focusing, simple to operation, improve test effect
Rate.
3, the infrared microscopy optical enhancement system and method for a kind of continuous vari-focus of disclosure of the invention, utilizes reflective system
System is capable of increasing the operating distance of infrared optical system, guarantees the safety of instrument.
Detailed description of the invention
Fig. 1 is a kind of structural principle signal of the infrared microscopy optical enhancement system of continuous vari-focus of disclosure of the invention
Figure；
Fig. 2 is a kind of overall structure signal of the infrared microscopy optical enhancement system of continuous vari-focus of disclosure of the invention
Figure；
Fig. 3 is a kind of flow chart of the infrared microscopy optical enhancement method of continuous vari-focus of disclosure of the invention.
Wherein：Wherein：1- laser；2- infrared light supply；3- rotating device；The first reflecting mirror of 4-；5- grating target；6- ditty
Save frame；The right light modulation mouth of 7-；8- convex mirror；9- optical path adjusting case；10- concave mirror；The big adjusting bracket of 11-；The left light modulation mouth of 12-；13- tool
There is the refraction type system of continuous vari-focus；14- infrared camera；The second reflecting mirror of 15-；The first sliding rail of 16-；The second sliding rail of 17-；18-
Third sliding rail；19- fixed plate.
Specific embodiment
Now in conjunction with attached drawing, specific embodiments of the present invention will be further explained；
One kind disclosed in the present embodiment can continuous vari-focus infrared microscopy optical enhancement system, as shown in Figure 1, 2, system master
It to include laser 1, infrared light supply 2, rotating device 3, the first reflecting mirror 4, optical path adjusting case 9, the refraction with continuous vari-focus
Formula system 13, infrared camera 14, the second reflecting mirror 15, fixed plate 19；
The optical path adjusting case 9 symmetrically opens up two through-holes in same side, and through hole is equipped with organic glass of cross
Glass, as right light modulation mouth 7 and left light modulation mouth 12, for adjusting the center of optical path；It is placed in the case of the optical path adjusting case 9
Minor adjustment frame 6, convex mirror 8, big adjusting bracket 11 and concave mirror 10；Optical path adjusting case 9 is fixed on fixation by lifting and fixing device
On plate 19；Minor adjustment frame 6 is fixedly connected with convex mirror 8, for adjusting the position of convex mirror 8；Big adjusting bracket 11 and concave mirror 10
It is fixedly connected, for adjusting the position of concave mirror 10；Laser 1, infrared light supply 2 and first reflecting mirror 4 is mounted on
On one sliding rail 16；First reflecting mirror 4 is mounted on the first sliding rail 16 by rotating device 3；The grating target 5 is installed
On the second sliding rail 17；First sliding rail 16 is fixedly connected with 17 right angle of the second sliding rail；The refraction type with continuous vari-focus
Formula system 13, infrared camera 14 and the second reflecting mirror 15 are mounted on third sliding rail 18, the first sliding rail 16, the second sliding rail 17 and
Three sliding rails 18 are mounted in fixed plate 19；
13 front focus of the refraction type system is overlapped with the rear focus of reflective system；The refraction type system
Enlargement ratio be 0.5,1,2 and 3；
The reflective system realizes that the long reach of continuous vari-focus infrared microscopy optical enhancement system is 140mm；
The refraction type system 13 will be on the Image relaying Jing Guo reflecting system to infrared camera 14；
First reflecting mirror 4 realizes rotation using rotating device 3 and the accurate of middle component for realizing whole system is determined
The focal length of position and refraction type system 13 determines.The component include optical path adjusting case 7, infrared light supply 3, the second reflecting mirror 15,
Refraction type system 13 and infrared camera 14
The vertex of the convex mirror 8 is located at the focal point of concave mirror 10, and light can be made along left 12 center of light modulation mouth
It projects；
The golden film that a layer thickness is 1000 angstroms is deposited in the convex mirror 8 and 10 surface of concave mirror；
It is carved with 50 lines/mm grating in 5 surface of grating target；
One kind that infrared microscopy optical enhancement system based on a kind of continuous vari-focus disclosed in the present embodiment is realized is continuous
The adjustment method of the infrared microscopy optical enhancement system of zoom, the specific implementation steps are as follows：
Step 1, the adjusting of component height：The height and first of laser 1 is adjusted by the laser that laser 1 issues
The angle and height of reflecting mirror 4, it is ensured that laser facula is injected from right 7 central point of light modulation mouth；Rotate the angle of the first reflecting mirror 4
Degree adjusts the height and angle of infrared light supply 2, it is ensured that the hot spot that infrared light supply 3 is launched is injected from right 7 central point of light modulation mouth；
Step 2, the adjusting of optical path adjusting case：Make laser facula through anti-by the big adjusting bracket 11 of adjusting, minor adjustment frame 6
It is projected after penetrating from the central point of left light modulation mouth 12；
Step 3, the adjusting of refraction type system and infrared camera：According to hot spot point adjust refraction type system 13 height and
Angle ensures that laser facula is injected from the central point of refraction type system；Then the height and angle of infrared camera 14 are adjusted, so that
Hot spot is just in the center of infrared target surface；
Step 4, the adjusting of refraction type system focal length：Grating target 5 is taken away before experiment, is adjusted and is reflected by third sliding rail
Formula system 13 is at a distance from infrared camera 14, so that infrared camera 14 receives according to this through the first reflecting mirror 6, optical path adjusting case
9 and second reflecting mirror 15 and refraction type system 13 infrared energy it is maximum；
Step 5, the adjusting of grating target height：50 lines/mm grid line grating target 5 is contained on surface and is put into the second sliding rail 17
On, adjust the center that the height of grating target 5 makes infrared light spot pass through grating target 5；
Step 6, infrared image acquisition：The hot spot that infrared light supply 2 issues is sequentially passed through light after the reflection of the first reflecting mirror 3
Grid target 5 and right light modulation mouth 7 are penetrated from optical path adjusting case 9 after then being reflected by concave mirror 10 and convex mirror 8 by left light modulation mouth 12
Out, finally after the second reflecting mirror 15 reflects and penetrates refraction type system 13, grid line image is recorded by infrared camera 14.
Above-described specific descriptions have carried out further specifically the purpose of invention, technical scheme and beneficial effects
It is bright, it should be understood that the above is only a specific embodiment of the present invention, the protection model being not intended to limit the present invention
It encloses, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should be included in the present invention
Protection scope within.
Claims (5)
1. a kind of infrared microscopy optical enhancement system of continuous vari-focus, it is characterised in that：Including reflective system, refraction type system
With focusing auxiliary system；Reflective system and focusing auxiliary system share the first reflecting mirror (2)；
The reflective system is for realizing the operating distance for increasing infrared optics enhancing system, including laser (1), first are instead
Penetrate mirror (2), optical path adjusting case (9), the second reflecting mirror (15)；The optical path adjusting case (9) is used to adjust the center of optical path,
Same side symmetrically opens up two through-holes, as right light modulation mouth (7) and left light modulation mouth (12)；The optical path adjusting case (9)
Minor adjustment frame (6), convex mirror (8), big adjusting bracket (11) and concave mirror (10) are placed in case；Optical path adjusting case (9) passes through liter
Fixed device is dropped to be fixed on fixed plate (19)；Minor adjustment frame (6) is fixedly connected with convex mirror (8), for adjusting convex mirror (8)
Position；Big adjusting bracket (11) is fixedly connected with concave mirror (10), for adjusting the position of concave mirror (10)；
The vertex of the convex mirror (8) is located at the focal point of concave mirror (10), so that light is penetrated along left light modulation mouth (12) center
Out；
The convex mirror (8) and concave mirror (10) surface evaporation film, the steaming film need to guarantee there is height in infrared band
Reflectivity, the high reflectance digital reflex rate is 90% or more；
The refraction type system (13) is for realizing continuous vari-focus microscopic function, the refraction type system with continuous vari-focus
The front focus of system is overlapped with the rear focus of reflective system；
The focusing auxiliary system is used for real focus function, including infrared light supply (2) and the first reflecting mirror (4).
2. a kind of infrared microscopy optical enhancement system of continuous vari-focus as described in claim 1, it is characterised in that：Described swashs
Light device (1) and infrared light supply (2) are mounted on the first sliding rail；First reflecting mirror (4) is mounted on the first sliding rail (16)；
The grating target (5) is mounted on the second sliding rail (17), and the first sliding rail (16) is fixedly connected with the second sliding rail (17) right angle；Institute
Infrared camera (14), the second reflecting mirror (15) and the refraction type system (13) stated are mounted on third sliding rail (18)；First sliding rail
(16), the second sliding rail (17) and third sliding rail (18) are mounted on fixed plate (19)；
The laser that the laser (1) issues is sequentially passed through grating target and right light modulation mouth after the first reflecting mirror (4) reflection
(7), it is then projected from optical path adjusting case (9) after concave mirror (10) and convex mirror (8) reflection by left light modulation mouth (12), most
Afterwards after the second reflecting mirror (15) reflection, is acquired by refraction type system (13) by infrared camera (14), realize described one kind
The continuous vari-focus and infrared microscopy optical enhancement of the infrared microscopy optical enhancement system of continuous vari-focus, and then can be realized high-speed punching
Hit the transient temperature measuring in the deformation and failure procedure in lower material in tiny area；
The infrared light spot that the infrared light supply (2) issues is passed through optical path adjusting case (9) after the first reflecting mirror (4) reflection, is led to
Superrefraction formula system (13) convergence is acquired after projecting by infrared camera (14), is adjusted by third sliding rail (18) and is rolled under different multiplying
The distance between formula system (13) and infrared camera (14) are penetrated, realize a kind of infrared microscopy optical enhancement of continuous vari-focus
System focus operation.
3. a kind of infrared microscopy optical enhancement system of continuous vari-focus as claimed in claim 1 or 2, it is characterised in that：It is described
The first reflecting mirror (3) using rotating device (4) realize rotate and realize whole system middle component accurate positionin and refraction
The focal length of formula system determines；The component includes optical path adjusting case (7), infrared light supply (3), the second reflecting mirror (15), refraction
Formula system (13) and infrared camera (14).
4. a kind of infrared microscopy optical enhancement system of continuous vari-focus as claimed in claim 1 or 2, it is characterised in that：It is described
Convex mirror (8) and concave mirror (10) surface evaporation thickness be selected as 1000 angstroms of golden film.
5. based on a kind of a kind of company that the infrared microscopy optical enhancement system of continuous vari-focus is realized as claimed in claim 1 or 2
The adjustment method of the infrared microscopy optical enhancement system of continuous zoom, it is characterised in that：Include the following steps：
Step 1：Swash by the height for laser adjustment laser (1) that laser (1) issues, and by what laser (1) issued
Light adjusts the angle and height of the first reflecting mirror (4), it is ensured that laser facula is injected from right light modulation mouth (7) central point；Rotation first
The angle of reflecting mirror (4) adjusts the height and angle of infrared light supply (2), it is ensured that the hot spot that infrared light supply (3) is launched is from right tune
Optical port (7) central point is injected；
Step 2：By adjusting big adjusting bracket (11), minor adjustment frame (6) makes laser facula after reflection from left light modulation mouth (12)
Central point project；
Step 3：Adjusting the height of refraction type system (13) and angle according to hot spot point ensures laser facula from refraction type system
(13) central point is injected；Then the height and angle of infrared camera (14) are adjusted, so that hot spot is just in infrared target surface
Heart position；
Step 4：Grating target (5) is taken away before measurement, adjusts refraction type system (13) and infrared camera by third sliding rail (18)
(14) distance, so that infrared camera (14) receives passes through the first reflecting mirror (6), optical path adjusting case (9) and second instead according to this
The infrared energy maximum for penetrating mirror (15) and refraction type system (13) realizes a kind of infrared microscopy light of continuous vari-focus
Learn enhancing system focus operation；
Step 5：Grating target (5) is put on the second sliding rail (17), the height for adjusting grating target (5) passes through infrared light spot
The center of grating target (5)；
Step 6：The hot spot that infrared light supply (2) issues is sequentially passed through grating target (5) and right tune after the first reflecting mirror (3) reflection
Optical port (7) is then penetrated from optical path adjusting case (9) after concave mirror (10) and convex mirror (8) reflection by left light modulation mouth (12)
Out, after finally reflecting by the second reflecting mirror (15) and penetrate refraction type system (13), grating figure is recorded by infrared camera (14)；
Realize that a kind of infrared microscopy optical enhancement system of continuous vari-focus to the function of measurement by magnification in tiny area, will freeze
Type high speed IR detector replaces infrared camera (14) and then can be realized the deformation under high speed impact in material in tiny area
With the transient temperature measuring in failure procedure.
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