CN108816669A - The automatically dropping glue curing system and automatically dropping glue curing method of silicon rod - Google Patents

The automatically dropping glue curing system and automatically dropping glue curing method of silicon rod Download PDF

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Publication number
CN108816669A
CN108816669A CN201810945753.8A CN201810945753A CN108816669A CN 108816669 A CN108816669 A CN 108816669A CN 201810945753 A CN201810945753 A CN 201810945753A CN 108816669 A CN108816669 A CN 108816669A
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CN
China
Prior art keywords
silicon rod
stationary fixture
substrate
automatically dropping
dropping glue
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201810945753.8A
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Chinese (zh)
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CN108816669B (en
Inventor
沈皓然
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Gaodengwei Technology Co Ltd
Suzhou Goldway Technologies Co Ltd
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Suzhou Gaodengwei Technology Co Ltd
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Priority to CN201810945753.8A priority Critical patent/CN108816669B/en
Publication of CN108816669A publication Critical patent/CN108816669A/en
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Publication of CN108816669B publication Critical patent/CN108816669B/en
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • B05C5/0212Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles only at particular parts of the articles

Abstract

The present invention provide a kind of silicon rod automatically dropping glue curing system and automatic curing method, including silicon rod ontology feeding device, substrate feeding device, stationary fixture feeding device, dispensing room, set on the indoor point glue equipment of dispensing, primary solidification device, the secondary curing device and control unit of secondary curing are carried out to the silicon rod after primary solidification device primary solidification, the substrate discharge end of substrate feeding device is close to stationary fixture feeding end, the automatically dropping glue curing system of silicon rod further includes installing the substrate of substrate discharge end to the second manipulator unit and disassembly grass-hopper on the stationary fixture at stationary fixture feeding end, second manipulator unit, dismantle grass-hopper with control unit communication connection;Make the process of entire silicon wafer without human intervention, to realize automatically dropping glue and the solidification of silicon rod, has saved human cost and can be avoided in process of production due to the damage of silicon wafer caused by artificial operation, caused damages;And stationary fixture can recycle.

Description

The automatically dropping glue curing system and automatically dropping glue curing method of silicon rod
Technical field
The present invention relates to a kind of monocrystalline silicon bonding machine more particularly to it is a kind of in unmanned workshop realize silicon rod from The automatically dropping glue curing system and automatically dropping glue curing method of the dynamic cured silicon rod of dispensing.
Background technique
When manufacturing silicon wafer, need to be used to fix the stationary fixture, substrate and silicon rod of silicon rod by glue by Sequence is bonded together.Currently, the bonding of the general stationary fixture, substrate and silicon rod is completed by manually, make Silicon wafer production efficiency is low, cost of labor is relatively high, be unfavorable for realizing the large-scale production of silicon wafer.
Meanwhile when the silicon wafer is just produced, glue not yet solidifies completely, at this point, being bonded in the silicon on substrate Piece is easy to the skew due to effect of external force (such as accidentally the touching of operating staff, the gently collision of handling process and other objects), Reduce the qualification rate of silicon wafer.
In view of this, it is necessary to provide the automatically dropping glue curing system and automatically dropping glue curing method of a kind of new silicon rod, To solve the above problems.
Summary of the invention
The purpose of the present invention is to provide the cured silicon rods of automatically dropping glue for realizing silicon rod in unmanned workshop Automatically dropping glue curing system and automatically dropping glue curing method.
For achieving the above object, the present invention adopts the following technical scheme that:A kind of automatically dropping glue curing system of silicon rod, Including providing the silicon rod ontology feeding device of silicon rod ontology, the substrate feeding device for providing substrate, providing the fixation of stationary fixture Fixture feeding device, the dispensing room the substrate being located in stationary fixture and silicon rod ontology to be bonded together into silicon rod, It is connected set on the indoor point glue equipment of the dispensing, with the point gel outlet of the dispensing room and tentatively solid to be carried out to silicon rod The primary solidification device of change, to after primary solidification device primary solidification silicon rod carry out secondary curing secondary curing device with And control unit, the substrate discharge end of the substrate feeding device close to stationary fixture feeding end, the silicon rod it is automatic Dispensing curing system further includes installing the substrate of the substrate discharge end to the fixing clamp at stationary fixture feeding end The second manipulator unit on tool and primary solidification outlet and the stationary fixture feeding set on the primary solidification device Disassembly grass-hopper between the stationary fixture feeding end of device, second manipulator unit, disassembly grass-hopper are and institute State control unit communication connection.
Technical solution as a further improvement of that present invention, the disassembly grass-hopper include by silicon rod and stationary fixture phase Disassembly and the silicon rod is delivered to the first manipulator unit of secondary curing device, the stationary fixture is delivered to it is described solid Clamp has first supply unit at feeding end, and first manipulator unit, the first supply unit are logical with described control unit News connection.
Technical solution as a further improvement of that present invention, first supply unit are to connect the primary solidification outlet With the roller line at stationary fixture feeding end.
Technical solution as a further improvement of that present invention, the silicon rod ontology feeding device include to detect the silicon The detection device of the relevant information of the number of segment and waypoint of stick ontology, the detection device and described control unit communication connect It connects.
Technical solution as a further improvement of that present invention, the detection device are that photographic device or infrared sensing fill It sets.
Technical solution as a further improvement of that present invention, the secondary curing device include having several to solidify consolidating for lattice Change room, the silicon rod in first manipulator unit is transferred to the indoor third manipulator unit of solidification, it is described Third manipulator unit and described control unit communication connection.
The automatically dropping glue curing system of technical solution as a further improvement of that present invention, the silicon rod further includes to sentence Sensor that whether disconnected silicon rod secondary curing is completed and the silicon rod after secondary curing is removed the 4th of the curing room the Manipulator unit;The sensor and the 4th manipulator unit with described control unit communication connection.
For achieving the above object, the present invention also provides a kind of the automatic of the automatically dropping glue curing system of above-mentioned silicon rod Dispensing curing method, the disassembly grass-hopper include that silicon rod is mutually dismantled and is delivered to the silicon rod secondary with stationary fixture First manipulator unit of solidification equipment, the first conveying that the stationary fixture is delivered to stationary fixture feeding end are single Member, the automatically dropping glue curing method include the following steps:
Stationary fixture, substrate are delivered in dispensing room and to glue spraying on the substrate, it is then that the silicon rod ontology is defeated It send in the dispensing room and forms silicon rod with the substrate bonding;
Stationary fixture with silicon rod is delivered to primary solidification device and carries out primary solidification;
After the completion of primary solidification, the stationary fixture with silicon rod is delivered on the first supply unit;
After first manipulator unit mutually dismantles silicon rod with the stationary fixture, first manipulator unit is by the silicon Stick is delivered on secondary curing device, and the stationary fixture is delivered to stationary fixture feeding by the first supply unit starting End.
Technical solution as a further improvement of that present invention starts in the first supply unit and is delivered to the stationary fixture Behind stationary fixture feeding end, the automatically dropping glue curing method further includes following steps:
The substrate of the second manipulator unit crawl substrate discharge end is controlled, and the substrate is installed to stationary fixture In the stationary fixture for expecting end.
Technical solution as a further improvement of that present invention, the silicon rod ontology feeding device include to detect the silicon The number of segment of stick ontology and the detection device of waypoint, the detection device and described control unit communication connection;Will be described Before forming silicon rod with the substrate bonding in silicon rod bulk transport to the dispensing room, the automatically dropping glue curing method is also wrapped Include following steps:
The number of segment of detection device detection silicon rod ontology and the relevant information of waypoint simultaneously feed back to described control unit;
Described control unit controls the point glue equipment dispensing according to above-mentioned relevant information.
The beneficial effects of the invention are as follows:The automatically dropping glue curing system of silicon rod of the invention is by being provided with to primary solidification Silicon rod afterwards carries out the secondary curing device of secondary curing and the silicon rod after primary solidification is transferred to secondary curing device Interior disassembly grass-hopper makes the process of entire silicon wafer without human intervention, to realize automatically dropping glue and the solidification of silicon rod, That is the full-automatic production of silicon wafer, having saved human cost and having can be avoided is caused due to artificial operation in process of production The damage for the silicon wafer just produced, causes damages;And the stationary fixture can be recycled and be recycled.
Detailed description of the invention
Fig. 1 is the schematic diagram of the automatically dropping glue curing system in the present invention.
Fig. 2 is the enlarged structure schematic diagram in Fig. 1 at A.
Fig. 3 is the structural schematic diagram for being loaded with the stationary fixture of silicon rod.
Fig. 4 is the structural schematic diagram for dismantling the unit of transmission device and the second manipulator.
Fig. 5 is the structural schematic diagram of the first manipulator unit in Fig. 4.
Specific embodiment
Hereinafter, the present invention will be described in detail with reference to various embodiments shown in the accompanying drawings, please refers to Fig. 1 to Fig. 5 institute Show, is better embodiment of the invention.
The present invention provides a kind of automatically dropping glue curing system 100 of silicon rod, to realize the full-automatic production of silicon wafer, from And reduce human cost and avoid leading to the damage of silicon wafer just produced due to artificial operation in process of production, it makes At loss.
The automatically dropping glue curing system 100 of the silicon rod includes the silicon rod ontology feeding device 1 for providing silicon rod ontology 11, mentions The substrate feeding device 2 of substrate 21, the stationary fixture feeding device 3 that stationary fixture 31 is provided, stationary fixture will be located at Substrate 21 and silicon rod ontology 11 in 31 are bonded together into the dispensing room 4 of silicon rod, the point mucilage binding in the dispensing room 4 It sets (not shown), be connected with the point gel outlet (not labeled) of the dispensing room 4 and to carry out the first of primary solidification to silicon rod Walk solidification equipment 5, to after 5 primary solidification of primary solidification device silicon rod carry out secondary curing secondary curing device 6 and Control unit, it is the silicon rod ontology feeding device 1, substrate feeding device 2, stationary fixture feeding device 3, point glue equipment, preliminary Solidification equipment 5, secondary curing device 6 with described control unit communication connection, to control the silicon by described control unit The operation of the automatically dropping glue curing system 100 of stick.
Described control unit is programmable logic controller (PLC) PLC, and certainly, described control unit is also possible to may be implemented to control Make other controllers of the operation of the automatically dropping glue curing system 100 of the silicon rod.
The silicon rod ontology feeding device 1 includes the correlation to the number of segment and waypoint that detect the silicon rod ontology 11 The detection device (not shown) of information, the detection device and described control unit communication connection, described control unit is according to institute The relevant information of the number of segment and waypoint of stating detection device feedback controls the dispensing curve of the point glue equipment, so that the point Adhesive dispenser be coated on the substrate on glue match with the silicon rod ontology 11, that is, make on the substrate 21 with the segmentation The corresponding position of point is everywhere in without gluey state, save the cost.
Further, the silicon rod ontology feeding device 1 further includes the sensing chamber to accommodate the silicon rod ontology 11, institute It states detection device and is set to the detection interior.
Specifically, the detection device is that perhaps infrared sensing device passes through photographic device or infrared biography to photographic device Induction device is detected as the prior art, and details are not described herein.
The automatically dropping glue curing system 100 of heretofore described silicon rod includes multiple dispensing rooms 4 arranged side by side, to realize The synchronization dispensing of multiple substrates 21, increases the production efficiency of silicon rod.
Further, the automatically dropping glue curing system of the silicon rod further includes the outlet for connecting the sensing chamber and multiple institutes The pipeline of dispensing room 4 is stated, with the silicon rod bulk transport that will test to corresponding dispensing room 4.
It will of course be understood that, in addition manipulator can be set be transferred to the silicon rod ontology 11 on pipeline accordingly In dispensing room 4.
After stationary fixture 31 with silicon rod is transported out from the dispensing room 4, on the primary solidification device 5 slowly Primary solidification outlet, i.e. completion primary solidification are reached after traveling 2h.
The stationary fixture 31 include bottom wall 311, set on 311 width direction of bottom wall opposite end side wall 312, It is detachable from several support rods 313 of the upward projection of the side wall, one end with the support rod 313 far from the side wall 312 The limitting casing 314 to limit the silicon rod of connection, be convexly equipped in 312 inside of the side wall to limit the substrate 21 Limited block 315 has the opening passed through for the silicon rod ontology 11 on the limitting casing 314.
After in by the installation to the stationary fixture 31 of substrate 21, the limited block 315 limits the movement of substrate 21, prevents Only the substrate 21 falls off from the stationary fixture 31, and is able to ascend the accuracy of point glue equipment.
It is transferred in the dispensing room 4 in the stationary fixture 31 for being equipped with substrate 21 and on the substrate 21 after gluing, The silicon rod ontology 11 is transferred in dispensing room 4 and the silicon rod ontology 11 is put into the stationary fixture from the opening It is mutually Nian Jie with the substrate 21 in 31.
Two sides on the length direction of the substrate 21 are recessed with multiple first grooves 211, are placed into the substrate 21 After in the stationary fixture 31, first groove 211 is open towards the outside of the stationary fixture 31, with can be by described First groove 211 grabs the silicon rod, separates the silicon rod with 31 phase of stationary fixture.
Further, the automatically dropping glue curing system 100 of the silicon rod further includes set on the first of the primary solidification device Step solidifies the disassembly grass-hopper 7 between outlet and the stationary fixture feeding end of the stationary fixture feeding device 3, the disassembly Grass-hopper 7 and described control unit communication connection.
The disassembly grass-hopper 7 includes dismantling silicon rod with 31 phase of stationary fixture and being delivered to the silicon rod secondary solid Makeup set 6 the first manipulator unit 71, the stationary fixture 31 after disassembly is delivered to stationary fixture feeding end First supply unit (not shown), first manipulator unit 71, the first supply unit (not shown) are single with the control First communication connection.
First supply unit is (not shown) to be exported and stationary fixture feeding end to connect the primary solidification Roller line, after the completion of being loaded with 31 primary solidification of stationary fixture of silicon rod, described control unit controls first supply unit Starting, and the stationary fixture 31 for being loaded with silicon rod after primary solidification be transferred on first supply unit after control described the One supply unit is shut down, and stays in the stationary fixture 31 for being loaded with silicon rod on first supply unit, convenient for described the One manipulator unit 71 separates the silicon rod with 31 phase of stationary fixture disassembly.
First manipulator unit 71 includes first support 711, the first driving group in the first support 711 Part 712, the picking unit for being fixed on first driving assembly 712 and being located above first supply unit (not shown) 73。
First driving assembly 712 include be fixed in the first support 711 and from first supply unit to The first rack gear 7121 that secondary curing device extends and the first guide plate 7122 that the first support 711 is slidably connected are fixed In the first actuator 7123 matched on first guide plate 7122 with first rack gear 7121, it is fixed on described first To the second actuator 7124 for driving the picking unit 73 to move up and down, the picking unit 73 and institute on guide plate 7122 The second actuator 7124 is stated to be connected.
Specifically, the first support 711 is equipped with raised line, and first guide plate 7122 is equipped with and the raised line phase The elongated slot of cooperation, thus, drive first guide plate 7122 along first rack gear in first actuator 7123 starting When 7121 movement, told raised line is matched with the elongated slot to limit first guide plate 7122, makes first guide plate 7122 move along first rack gear 7121, drive the picking unit in the secondary curing device 6 and first conveying Switch between unit (not shown).
Second actuator 7124 drives the picking unit 73 to move up and down, and to grab the silicon rod, makes the silicon Stick is separated with 31 phase of stationary fixture.
Specifically, first actuator 7123 and second actuator 7124 are motor.
The picking unit 73 includes the shape being fixed on second actuator 7124 and with the stationary fixture 31 The first fixed plate 731 for matching, set on 731 lower section of the first fixed plate several first claw groups 732, be set to described the The first fixing piece 733 to the fixation limitting casing 314 of the opposite sides of one fixed plate 731 in the width direction.
Further, the automatically dropping glue curing system 100 of the silicon rod further includes to position the stationary fixture 31 Locating piece (not shown), after the stationary fixture 31 for being loaded with the silicon rod is located on first supply unit (not shown), control Make the locating piece and position the stationary fixture 31, thus, enable the picking unit 73 synchronize the crawl silicon rod and The limitting casing 31.
Specifically, each first claw group 732 includes being fixed on 731 lower section of the first fixed plate and along the base First guiding rib of the width direction extension of plate 21, two the first claws being slidably connected on first guiding rib, it is described First claw is matched with the first groove 211 on the substrate 21, to grab the silicon rod.
Further, first manipulator unit 71 further includes to drive two in each first claw group First claw moves along first guiding rib 731 and positions the first driving motor of first claw, in crawl institute During stating silicon rod, controlling two the first claw reverse movements first keeps the distance between two described first claws big Generate interference with the silicon rod during the width of the silicon rod prevents first claw from grabbing, break silicon rod ontology or Person leads to not grab;Then controlling second actuator 8124 drives first fixed plate 731 to drive first card Pawl group 732 moves down, at the position where being moved to first groove 211 in the lower end of first claw after, control Two first claws move towards so that the lower end of first claw protrudes into first groove 211, finally control Making second actuator 8124 drives first fixed plate 731 that the first claw group 732 is driven to move up and can make Silicon rod is separated with the stationary fixture 31.
Meanwhile it moving towards controlling two first claws so that the lower end of first claw protrudes into described the After in one groove 211, described control unit controls the fixed limitting casing 314 of first fixing piece 733, thus in control institute When stating the second actuator 8,124 first fixed plate 731 being driven to move up, make the limitting casing 314 and the support rod 313 separated in synchronization stop the disengaging of the silicon rod Yu the stationary fixture 31 to prevent the limitting casing 314.
After the picking unit 73 grabs the silicon rod and the limitting casing 314, described control unit control described the The starting of one actuator 7123 drives the picking unit 73 to be moved at the position at 6 place of secondary curing device, then controls Two the first claw reverse movements of system are secondary solid silicon rod to be placed in progress at the position at 6 place of secondary curing device Change;Finally, control first actuator 7123 starts, the picking unit 73 is driven to be back to first supply unit After at position where (not shown), then controls second actuator 7124 starting and drive the picking unit 73 to moving down Dynamic, control first fixing piece 733 unclamps described after the limitting casing 314 is re-installed on the support rod 313 Limitting casing 314.
After first fixing piece 733 unclamps the limitting casing 314, described control unit controls the locating piece and stops And first supply unit starting (not shown) is controlled, the stationary fixture 31 is delivered to stationary fixture feeding end, Realize the reuse of the stationary fixture 31.
Specifically, the quantity of the first claw group 732 is two, grabs the silicon rod to improve the picking unit 73 Stability.
Further, first fixing piece 733 includes for being fixed in first fixed plate 731 and extending downwardly One mounting plate 7331, the second driving motor 7332 being fixed on first mounting plate 7331 and second driving motor 7332 be connected to the first clamping block 7333 for being matched with the limitting casing 314, second driving motor 7332 with Described control unit communication connection, to drive first clamping block 7333 close to the limitting casing 314 with the fixation limit Frame or the separate limitting casing 314 are to unclamp the limitting casing 314.
Specifically, first clamping block 7333 is equipped with and 314 phase of limitting casing towards the side of the limitting casing 314 The stage portion of cooperation, to enhance the stability of the fixed limitting casing 314 of first fixing piece 733.
Further, the substrate discharge end of the substrate feeding device 2 is close to stationary fixture feeding end, the silicon rod Automatically dropping glue curing system 100 further include to by the substrate 21 of substrate discharge end installation to the stationary fixture feeding The second manipulator unit 8 on the stationary fixture 31 at end, second manipulator unit 8 and described control unit communication connection.
Second manipulator unit 8 is identical as the structure of first manipulator unit 71, specifically, second machine Tool hand unit 8 includes second support 81, the second driving assembly 82 in the second support 81, is fixed on second drive Move the second fixed plate to match on component 82 and with the shape of the stationary fixture 31, below second fixed plate Several second claw groups for being matched with first groove 211, set on second fixed plate in the width direction opposite two The second fixing piece to the fixation limitting casing 314 of side.
Second driving assembly 82 include be fixed in the second support 81 and from stationary fixture feeding end to The second rack gear that substrate discharge end extends, is fixed on described second and leads the second guide plate being slidably connected with the second support The third actuator that matches on plate with second rack gear is fixed on second guide plate to drive described second The fourth drive member that fixed plate moves up and down, second fixed plate are connected with the fourth drive member.
The third actuator drives second fixed plate mobile in the substrate discharge end and the stationary fixture Feeding switches between end.
Specifically, each second claw group includes being fixed below second fixed plate and along the width of the substrate Second guiding rib of degree direction extension, two the second claws being slidably connected on second guiding rib, second claw It is matched with the first groove on the substrate 21, to grab the substrate 21, the substrate 21 is put into the stationary fixture In 31.
Further, second manipulator unit 8 further includes to drive two in each second claw group Second claw moves along second guiding rib and positions the third driving motor of second claw, is grabbing the base During plate 21, controlling two the second claw reverse movements first is greater than the distance between two described second claws The width of the substrate 21, which generates during preventing second claw from grabbing with the substrate 21, interferes, and leads to not grab It takes;Then controlling the fourth drive member drives second fixed plate that the second claw group is driven to move down, described After the lower end of second claw is moved at the position where first groove, two second claws of control are moved together to It protrudes into the lower end of second claw in first groove 211, finally controls fourth drive member driving described the Two fixed plates, which drive the second claw group to move up and control the third actuator, drives the second claw group mobile To stationary fixture feeding end, in order to which the substrate 21 is installed in the stationary fixture 31.
Meanwhile before controlling the third actuator and the second claw group is driven to be moved to the substrate discharging end, institute is controlled Stating fourth drive member drives second fixing piece to move down, and controls the fixed limitting casing 314 of second fixing piece, Then controlling the fourth drive member drives second fixing piece to move up, so that the limitting casing 314 and the support Then the separation of 313 phase of bar controls the third actuator again and the second claw group is driven to be moved to the substrate discharging end crawl base Plate 21, so that the substrate 21 will not be with the limitting casing 314 when the substrate 21 to be installed in the stationary fixture 31 Interference, convenient for the installation of the substrate 21.
It should be understood that having grabbed the substrate 21 in the second claw group and having switched to stationary fixture feeding end Afterwards, when the control fourth drive member drives second fixing piece to move down, while the peace of the substrate 21 is realized It is filled with and the assembling of the limitting casing 314 and the support rod 313.
Specifically, it after the stationary fixture 31 is located at stationary fixture feeding end, also is provided with described solid to position The locating piece of clamp tool 31, can realize the support rod 313 and the limitting casing by second manipulator unit 8 Separation between 314.
Specifically, second fixing piece includes being fixed on the second installation in second fixed plate and extended downwardly Plate, the 4th driving motor being fixed on second mounting plate, be connected with the 4th driving motor to it is described The second clamping block that limitting casing matches, the 4th driving motor is to drive second clamping block close to or far from described Limitting casing 314.
The fixed course of work with the release limitting casing 314 of the second above-mentioned fixing piece and first fixing piece 733 It is identical, it is repeated no more in this.
Further, the secondary curing device 6 includes having several curing rooms for solidifying lattice 61, to by described first Silicon rod in manipulator unit 72 transfers to the indoor third manipulator unit 62 of solidification, the third manipulator unit 62 With described control unit communication connection.
Specifically, each lattice 61 that solidify include two support frames 611 being oppositely arranged, are set to two support frames as described above The support bar group 612 of 611 opposite two sides, each support bar group 612 include two support bars 6121 being oppositely arranged, And there is gap between two support bars, to realize the support of the silicon rod by the support bar group 612, thus to institute It states silicon rod and carries out secondary curing.
The third manipulator unit 62 includes third driving assembly 621, is connected with the third driving assembly 621 It support plate 622 and is convexly equipped in the support plate 622 to the supporting element 623 for supporting the silicon rod, the supporting element 623 is in Strip, and the width of the supporting element 623 is no more than the gap between two opposite support bars 6121.
The third driving assembly 621 includes drive the silicon rod to move along the depth direction for solidifying lattice 61 first Driving unit, connect with first driving unit with drive that the silicon rod moves along the short transverse of the curing room second Driving unit connect third to drive the silicon rod to move along the length direction of the curing room with second driving unit Driving unit, the support plate 622 are connected with first driving unit.
After the silicon rod is transferred to one end close to the secondary curing device 6 by first manipulator unit 71, Described control unit controls the starting of third driving assembly 621 and the support plate 622 is moved to the position where the silicon rod Place is set, then, described control unit controls two the first claw reverse movements so that silicon rod to be placed on the supporting element 623; Then the third driving assembly 621 is controlled again to be moved to the support plate 622 at the vacant position for solidifying 61 place of lattice Afterwards, controlling first driving unit drives the support plate 622 mobile to the depth direction for solidifying lattice 61, in the branch Behind gap of the support member 623 across two opposite support bars 6121, controls second driving unit and drive the support Plate 622 moves down, so that the silicon rod is placed on the support bar 6121.
Further, the automatically dropping glue curing system 100 of the silicon rod further includes whether to judge silicon rod secondary curing The sensor (not shown) of completion and the 4th manipulator unit the silicon rod after secondary curing to be removed to the curing room, The sensor and the 4th manipulator unit sense silicon in the sensor with described control unit communication connection After stick secondary curing is completed and feeds back to described control unit, described control unit controls the 4th manipulator unit for the silicon Stick removes the curing room, to realize the automatically dropping glue of the silicon rod, solidification, transfer, saves cost of labor, and improve silicon wafer Qualification rate.
Further, the present invention also provides a kind of automatically dropping glue curing method of the automatically dropping glue curing system of silicon rod, institutes Automatically dropping glue curing method is stated to include the following steps:
Stationary fixture 31, substrate 21 are delivered in dispensing room and to glue spraying on the substrate 21, then by the silicon rod Ontology 11, which is delivered to, Nian Jie with the substrate 21 in the dispensing room forms silicon rod;
Stationary fixture with silicon rod is delivered on primary solidification device 5 and carries out primary solidification;
After the completion of primary solidification, the stationary fixture 31 with silicon rod is delivered on the first supply unit;
After first manipulator unit 71 mutually dismantles silicon rod with the stationary fixture, first manipulator unit will be described Silicon rod is delivered on secondary curing device 6, and the stationary fixture 31 is delivered to stationary fixture by the first supply unit starting Feeding end.
Thus, it is possible to realize the recycling of the stationary fixture 31.
Further, described after the stationary fixture is delivered to stationary fixture feeding end by the starting of the first supply unit Automatically dropping glue curing method further includes following steps:
It controls second manipulator unit 8 and grabs the substrate 21 of substrate discharge end, and the substrate is installed to fixing clamp In the stationary fixture 31 for having feeding end.
To realize that the substrate 21 and the stationary fixture 31 are direct pre-assembled, convenient in subsequent entry point glue room 4 Carry out dispensing operation.
Further, in by the silicon rod bulk transport to the dispensing room with the substrate bonding formed silicon rod it Before, the automatically dropping glue curing method further includes following steps:
The number of segment of detection device detection silicon rod ontology and the relevant information of waypoint simultaneously feed back to described control unit;
Described control unit, which controls the point glue equipment according to above-mentioned relevant information, makes the point glue equipment in the substrate On the glue of formation match with the silicon rod ontology.
In conclusion the automatically dropping glue curing system 100 of silicon rod of the invention is by being provided with to the silicon after primary solidification Stick carries out the secondary curing device 6 of secondary curing and the silicon rod after primary solidification is transferred to tearing open in secondary curing device Grass-hopper 7 is unloaded, makes the process of entire silicon wafer without human intervention, to realize automatically dropping glue and the solidification of silicon rod, i.e. silicon The full-automatic production of piece, having saved human cost and having can be avoided leads to rigid life due to artificial operation in process of production The damage for the silicon wafer that output is come, causes damages.
It should be appreciated that although this specification is described in terms of embodiments, but not each embodiment only includes one A independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should will say As a whole, the technical solution in each embodiment may also be suitably combined to form those skilled in the art can for bright book With the other embodiments of understanding.
The series of detailed descriptions listed above only for feasible embodiment of the invention specifically Protection scope bright, that they are not intended to limit the invention, it is all without departing from equivalent implementations made by technical spirit of the present invention Or change should all be included in the protection scope of the present invention.

Claims (10)

1. the automatically dropping glue curing system of a kind of silicon rod, including providing the silicon rod ontology feeding device of silicon rod ontology, providing substrate Substrate feeding device, provide stationary fixture stationary fixture feeding device, substrate and silicon will be located in stationary fixture Stick ontology is bonded together into the dispensing room of silicon rod, the point set on the indoor point glue equipment of the dispensing and the dispensing room Gel outlet be connected and to silicon rod carry out primary solidification primary solidification device, to after primary solidification device primary solidification Silicon rod carry out secondary curing secondary curing device and control unit, it is characterised in that:The base of the substrate feeding device For plate discharge end close to stationary fixture feeding end, the automatically dropping glue curing system of the silicon rod further includes to by the substrate The substrate of discharge end install on the stationary fixture at stationary fixture feeding end the second manipulator unit, be set to it is described preliminary The primary solidification of solidification equipment, which is exported, transfers dress the disassembly between the stationary fixture feeding end of the stationary fixture feeding device Set, second manipulator unit, disassembly grass-hopper with described control unit communication connection.
2. the automatically dropping glue curing system of silicon rod as described in claim 1, it is characterised in that:The disassembly grass-hopper includes Silicon rod is mutually dismantled with stationary fixture and by the silicon rod be delivered to secondary curing device the first manipulator unit, will be described solid Clamp has the first supply unit for being delivered to stationary fixture feeding end, first manipulator unit, the first supply unit With described control unit communication connection.
3. the automatically dropping glue curing system of silicon rod as claimed in claim 2, it is characterised in that:First supply unit is to connect Connect the roller line of the primary solidification outlet and stationary fixture feeding end.
4. the automatically dropping glue curing system of silicon rod as described in claim 1, it is characterised in that:The silicon rod ontology feeding device Detection device including the relevant information to the number of segment and waypoint that detect the silicon rod ontology, the detection device and institute State control unit communication connection.
5. the automatically dropping glue curing system of silicon rod as claimed in claim 4, it is characterised in that:The detection device is camera shooting dress It sets or infrared sensing device.
6. the automatically dropping glue curing system of silicon rod as claimed in claim 2, it is characterised in that:The secondary curing device includes With several curing rooms for solidifying lattice, the silicon rod in first manipulator unit is transferred to the solidification indoor the Three manipulator units, the third manipulator unit and described control unit communication connection.
7. the automatically dropping glue curing system of silicon rod as described in claim 1, it is characterised in that:The automatically dropping glue of the silicon rod is solid Change system further includes to judge sensor that whether silicon rod secondary curing is completed and to move the silicon rod after secondary curing 4th manipulator unit of the curing room out;The sensor and the 4th manipulator unit are and described control unit Communication connection.
8. a kind of automatically dropping glue curing method of the automatically dropping glue curing system of silicon rod as described in claim 1, feature exist In:The disassembly grass-hopper includes mutually dismantling silicon rod with stationary fixture and the silicon rod being delivered to secondary curing device First manipulator unit, the first supply unit that the stationary fixture is delivered to stationary fixture feeding end, it is described automatic Dispensing curing method includes the following steps:
Stationary fixture, substrate are delivered in dispensing room and to glue spraying on the substrate, then extremely by the silicon rod bulk transport Silicon rod is formed with the substrate bonding in the dispensing room;
Stationary fixture with silicon rod is delivered to primary solidification device and carries out primary solidification;
After the completion of primary solidification, the stationary fixture with silicon rod is delivered on the first supply unit;
After first manipulator unit mutually dismantles silicon rod with the stationary fixture, first manipulator unit is defeated by the silicon rod It send to secondary curing device, the stationary fixture is delivered to stationary fixture feeding end by the first supply unit starting.
9. automatically dropping glue curing method as claimed in claim 8, it is characterised in that:Starting in the first supply unit will be described solid After clamp tool is delivered to stationary fixture feeding end, the automatically dropping glue curing method further includes following steps:
The substrate of the second manipulator unit crawl substrate discharge end is controlled, and the substrate is installed to stationary fixture feeding end The stationary fixture in.
10. automatically dropping glue curing method as claimed in claim 8, it is characterised in that:The silicon rod ontology feeding device includes To detect the number of segment of the silicon rod ontology and the detection device of waypoint, the detection device and described control unit are communicated Connection;Before forming silicon rod with the substrate bonding in by the silicon rod bulk transport to the dispensing room, the automatic point Adhesive curing method further includes following steps:
The number of segment of detection device detection silicon rod ontology and the relevant information of waypoint simultaneously feed back to described control unit;
Described control unit controls the point glue equipment dispensing according to above-mentioned relevant information.
CN201810945753.8A 2018-08-20 2018-08-20 Automatic dispensing curing system and method for silicon rod Active CN108816669B (en)

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CN112742668A (en) * 2020-12-24 2021-05-04 苏州桐力光电股份有限公司 Dispensing line for display screen

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CN106995140A (en) * 2017-05-05 2017-08-01 天津中环半导体股份有限公司 A kind of full-automatic sticky stick unit for being used to be bonded crystal bar
CN207682956U (en) * 2017-12-18 2018-08-03 福建铁工机智能机器人有限公司 It is a kind of to utilize the equipment that 3D printing is refrigerator doors installation adhesive tape

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CN202343376U (en) * 2011-11-17 2012-07-25 东莞广泽汽车饰件有限公司 Horizontal type spraying clamp
CN106206379A (en) * 2016-07-28 2016-12-07 苏州高登威科技股份有限公司 The automatically dropping glue solidification equipment of a kind of monocrystal silicon and automatically dropping glue curing
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