CN108801966A - A kind of polynary pyroelectricity sensing element of polymorphic type gas sensing - Google Patents
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- 230000005616 pyroelectricity Effects 0.000 title claims abstract description 41
- 239000000463 material Substances 0.000 claims abstract description 50
- 238000010521 absorption reaction Methods 0.000 claims abstract description 22
- 239000002184 metal Substances 0.000 claims abstract description 20
- 229910052751 metal Inorganic materials 0.000 claims abstract description 20
- 230000002745 absorbent Effects 0.000 claims abstract description 8
- 239000002250 absorbent Substances 0.000 claims abstract description 8
- 238000013461 design Methods 0.000 claims description 10
- 239000000203 mixture Substances 0.000 claims description 6
- 238000005520 cutting process Methods 0.000 claims description 2
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- 239000010410 layer Substances 0.000 description 62
- 239000007789 gas Substances 0.000 description 22
- 239000010408 film Substances 0.000 description 14
- 239000010931 gold Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000003287 optical effect Effects 0.000 description 6
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005566 electron beam evaporation Methods 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 238000003698 laser cutting Methods 0.000 description 4
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
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- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000002086 nanomaterial Substances 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000609 electron-beam lithography Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000005445 natural material Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
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- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3504—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing gases, e.g. multi-gas analysis
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Abstract
The invention belongs to infrared-gas field of sensing technologies, the polynary pyroelectricity sensing element of specially a kind of polymorphic type gas sensing.The present invention is by designing single infrared sensitive unit, the top electrode as first structure layer simultaneously by the bottom metal layer of the second structure sheaf M-I-M metamaterial structures.Subregion graphical treatment is carried out by the top metal graph layer to the second structure sheaf, realizes that more sensitive members are integrated on single pyroelectricity material, the absorption of more infrared bands and the response of more gaseous species.The present invention is combined pyroelectricity sensitive material with Meta Materials perfection absorbent structure, is applied to gas sensing, is directly realized by the high infrared selectivity of sensitive member, omit filter member in existing infrared gas sensor, device volume is reduced, improves device integration, and make conducive to mass.
Description
Technical field
The invention belongs to infrared-gas field of sensing technologies, are related to infrared-sensitive member, and specially a kind of polymorphic type gas passes
Feel polynary pyroelectricity sensing element.
Background technology
In infrared-gas detecting element, probe unit is usually by sensitive first (pyroelectricity material) and its upper/lower electrode, red
Outer absorbed layer and filter set at.Infrared light penetrates optical filter, is absorbed by infrared absorption layer, and pyroelectricity material is made to generate temperature
It rises, electric signal changes, drawn by upper/lower electrode, and infrared detection is realized with this.Common infrared absorption layer can not be right
The wavelength of infrared light is selected, and response can be brought it about in an extensive wave-length coverage, but past in application
Toward the infrared light for only needing some wave band.Therefore, when making devices, can by infrared light do light-splitting processing come
Filtering useless wave band, leaves behind required wave band, exclusive PCR, so infrared detector has high selectivity and anti-interference
Property.
Nowadays common method is exactly that optical filter is added between sensitive member and light source, and optical filter is usually to have multi-layer thin
The high transparency chip of membrane structure, effect are selected required infrared band before infrared light reaches sensitive member, this
It is also the maximum feature of NDIR (non-dispersive infrared) type infrared detector.When realizing detection of gas, need using more
A sensitive member, forms signal path and reference channel, to improve the accuracy of signal.More detection of gas are realized if necessary, are led to
The quantity in road then needs more, it means that needs more different optical filters, final structure and its preparation process will become more
For complexity.So in the current highly integrated research process of NDIR device miniaturizations, optical filter due to its indispensable property and
The characteristics of structure, greatly limits the development of device.Then, find new mode or structure come that alternative filters become to have very much must
It wants.
Meta Materials refer to the artificial composite material or composite construction for having the extraordinary physical property not available for natural material.
Nowadays have it is demonstrated experimentally that the selectivity to different-waveband infrared line superelevation and suction may be implemented in the Meta Materials of certain special constructions
The property received, the Meta Materials of this class formation are otherwise known as Meta Materials perfection absorbent structure (MPA).This kind of Meta Materials size is small, in receiving
Meter level is other, is mainly prepared on substrate with patterned form of film, and can be by the design to its certain size, to select
The center of absorption bands.
Invention content
For above-mentioned there are problem or deficiency, detected in sensitive components caused by optical filter to solve existing infrared-gas
Device miniaturization, highly integrated complex process and be unfavorable for mass prepare the problem of；The present invention provides a kind of polymorphic type gas
Body senses polynary pyroelectricity sensing element.
A kind of polymorphic type gas sensing polynary pyroelectricity sensing element, including n infrared sensitive unit, n >=1.
Each infrared sensitive unit structure is identical, including two structure sheafs：First structure layer, including pyroelectricity material and on
Lower electrode, the traditional infrared-sensitive member of composition one；Second structure sheaf, M-I-M metamaterial structures, i.e. bottom metal layer, medium
Layer and top metal graph layer three-layer thin-film, the infrared perfect absorbent structure (MPA) of composition Meta Materials.And second structure sheaf bottom
Layer metal layer top electrode as first structure layer simultaneously.Optimize Fabric utilization.Top electrode is prepared on pyroelectricity material layer
When layer, reserves a zonule and do not cover subsequent Meta Materials infrared absorption structure, the top electrode of pyroelectricity material is made to expose
Come, for drawing electric signal.
Further, the top metal graph layer progress subregion of the infrared perfect absorbent structure of the Meta Materials is graphically located
Reason prepares the metal nano graphic structure of different designs size, for the infrared absorption peak wavelength of gas with various in different zones.
By subregion it is graphical treated that different zones are cut open, each region is as an infrared sensitive unit, cutting between unit
It cuts raceway groove and is used as and be thermally isolated and signal isolation, realize that more sensitive members are integrated on single pyroelectricity material, the absorption of more infrared bands,
And the response of more gaseous species.
In conclusion the present invention is combined pyroelectricity sensitive material with Meta Materials perfection absorbent structure, it is applied to gas and passes
Sense, for the Meta Materials of the absorption peak Position Design different shape size of gas with various；It is directly realized by the high infrared choosing of sensitive member
Selecting property omits filter member in infrared gas sensor, greatly reduces device volume, improves device integration.And it can be
Multiple infrared-sensitive members for gas with various absorption bands are prepared on one pyroelectricity material unit simultaneously, realize that more gases are visited
It surveys, greatly promotes the integrated level of device, reduce device size.There is application prospect in infrared-gas field of detecting.
Description of the drawings
Fig. 1 is the side cross-section schematic diagram of embodiment；
Fig. 2 is the 3D structural schematic diagrams of the single infrared sensitive unit of embodiment；
Fig. 3 is the sensitive first schematic cross-section of the single pyroelectricity material unit double base two waveband of embodiment.
Fig. 4 is the polynary Graphic Design schematic top plan view of single pyroelectricity material unit of embodiment.
Fig. 5 is many element laser cutting processing schematic diagram of embodiment；
Reference numeral：101 times electrodes, 102 pyroelectricity materials, 103 top electrodes, 104 dielectric layers, 105 top-level metallic figures
Layer, 106 top-level metallic graph layers, A, B, C, D are the top metal graph layer of different graphic size, and E is top electrode.
Specific implementation mode
In order to make the purpose of the present invention, scheme and advantage be more clear, below in conjunction with the accompanying drawings with specific implementation method to this
Invention is described in detail.
Fig. 1 shows single sensitive first side cross-sectional views of the polynary pyroelectricity sensing element of polymorphic type gas sensing, including
101 times electrodes, 102 pyroelectricity materials, 103 top electrodes, 104 dielectric layers, 105 top-level metallic graph layers.
101 times electrodes are used to draw the variation of pyroelectricity unit electric signal；The gold electrode prepared using electron beam evaporation, it is complete
The entire pyroelectricity material range of all standing.Gold electrode metallic film adhesion is bad, and one layer of chromium metallic film is first plated before preparing
As adhesive layer, the adhesive force of gold is improved, so 101 layers of the present embodiment are made of double layer of metal film.
102 be pyroelectricity material, using LTO (lithium tantalate) film, is 4 inch wafer of standard, is formed by being cut by laser
Small pieces, to prepare the probe unit in device.
103 layers identical as 101 layers for top electrode, preparation method and material, while being also used as the infrared suction of Meta Materials
Receive required bottom metal layer in structure.
104 layers are SiO2Dielectric layer, prepared by PECVD methods.
105 layers be gold top layer metal pattern layer, be scale in nanometer to the graphical film between micron, pass through electron beam
It is prepared by exposure and electron beam evaporation；According to the principle of Meta Materials infrared absorption structure, the metallic film of different shape, size is prepared
Nanostructure, and the thickness of change dielectric layer can select the central absorbent wave band of infrared absorption structure；Pass through
It is first to the infrared-sensitive that different-waveband is sensitive that different designs realization is carried out to 105 layers of shape, size and 104 layers of thickness.
In overall structure, 101,102,103 one standard IR sensing element of composition, including pyroelectricity sensitive material and use
In the upper/lower electrode for drawing change in electric.103,104,105 composition Meta Materials infrared absorption structures, correspond to underlying metal respectively
Layer, dielectric layer and top metal graph layer.Wherein, it is used as infrared-sensitive member top electrode and Meta Materials infrared absorption simultaneously for 103 layers
The bottom metal layer of structure is two partial commons.
Fig. 4 is its top plan, includes the Meta Materials infrared absorption structure top-level metallic graph layer in the region A, B, C, D,
With the regions E top electrode.A, 105 layers in the region B, C, D, that is, Fig. 1, almost entire pyroelectricity material top electrode area is covered,
The infrared light of a certain wave band of absorption for selectivity.E overlying regions are exposed top electrodes 103 without 104,105 layers
Layer, for drawing pyroelectricity material signal.
Fig. 2 is 3D structure charts, each layer in 101,102,103,104,105 difference corresponding diagrams 1 in figure.104,105 layers in figure
When 103 layers of covering, lacks one jiao, make to expose 103 layers on this angle, it can be by modes such as Wire Bonding by circuit
It is connected on exposed 103 layers, draws pyroelectricity material signal.
When preparing element, Graphic Design is carried out on large stretch of pyroelectricity material, to large area pyroelectricity material subregion
Each layer structure is graphically prepared, is then cut open each region using laser cutting, each region is exactly an infrared-sensitive list
Element.As shown in Fig. 3 double bases cross section, different top-level metallic graph layers is prepared on a pyroelectricity unit, respectively
105,106.The two is directed to different-waveband respectively, using laser cutting, by connect together originally 102,103,104 together with contact
105,106 cut, form two sensitive members, realize the double base structure on single pyroelectricity material.Based on this is designed,
When patterned design top-level metallic graph layer, multizone division is carried out for single pyroelectricity material, is prepared in different zones
The different Meta Materials infrared absorption structure of center wave band, as shown in A, B, C, D in the polynary vertical views of Fig. 4, tetra- regions A, B, C, D
For different top layer metal pattern layers design Meta Materials infrared absorption structure, for different infrared absorption wave bands.The regions E are figure
103 layers in 1, it is sensitive first top electrode, is drawn to signal.Under such design, realize that single pyroelectricity unit is multiwave
Response forms more sensitive meta structures, can be used for more gas infrared acquisitions of high integration.
The present invention can be prepared by following technical process and be obtained：
1, by standard electronic beam evaporation coating process, 10nm thickness is respectively plated above or below 4 inch wafer pyroelectric single crystal LTO
The Ti films of degree, as the adhesion layer of Au films, then same deposited by electron beam evaporation plates the Au films of 100nm thickness, structure on Ti films
At the upper/lower electrode of pyroelectricity material, i.e. 101,103 layers in Fig. 1.
2, upper at 103 layers to coat photoresist, graphical to expose, then some regions in 103 layers of solidification wash off photoresist,
Some small square region photoresists are remained, the top electrode exposed region as sensitive member retains, i.e. the regions E shown in Fig. 4.
3, by standard PECVD process at 103 layers the upper SiO2 films for preparing all standing, in thickness 70nm, i.e. Fig. 1
104 layers.
4, upper at 104 layers to coat photoresist, it is received by electron beam lithography development solidification Meta Materials perfect absorbing structure
Required graphical nanostructure.Various sizes of nano graph structure is designed according in wafer different zones, A as shown in Figure 4,
B, the region C, D is directed to the absorption peak wavelength of gas with various, such as CO2, CH4, the gases such as SO2, NH3 respectively.Then it exposes, wash glue,
The Ti films that thickness is 5nm are prepared using electron beam evaporation, then prepare the Au films of 31nm thickness.
5, it washes off in step 2, the photoresist that the regions E retain in Fig. 4.Finally by laser cutting by different absorption bands
Region segmentation is opened, as shown in Figure 5.
In summary, it is seen that the present invention realizes a kind of polynary pyroelectricity sensing element of polymorphic type gas sensing, can be with
It realizes multiband response, is used for the infrared acquisition of more gases, the volume of sensor integral device can be reduced and improve integrated
Degree, and prepared conducive to mass.
Claims (3)
1. a kind of polymorphic type gas sensing polynary pyroelectricity sensing element, including n infrared sensitive unit, n >=1, feature
It is：
Each infrared sensitive unit structure is identical, including two structure sheafs：First structure layer, including pyroelectricity material and power-on and power-off
Pole, the traditional infrared-sensitive member of composition one；Second structure sheaf, M-I-M metamaterial structures, i.e. bottom metal layer, dielectric layer and
The three-layer thin-film of top metal graph layer composition constitutes the infrared perfect absorbent structure MPA of Meta Materials.And second structure sheaf bottom
Metal layer top electrode as first structure layer simultaneously.
2. the polynary pyroelectricity sensing element of polymorphic type gas sensing as described in claim 1, it is characterised in that：
The top metal graph layer of the infrared perfect absorbent structure of the Meta Materials carries out subregion graphical treatment, in different zones system
The metal nano graphic structure of standby different designs size, for the infrared absorption peak wavelength of gas with various；Subregion is graphically located
Different zones after reason are cut open, each region as an infrared sensitive unit, the cutting raceway groove between unit be used as heat every
Information number is isolated.
3. the polynary pyroelectricity sensing element of polymorphic type gas sensing as described in claim 1, it is characterised in that：The top electrode
It reserves a zonule and does not cover subsequent Meta Materials infrared absorption structure, the top electrode of pyroelectricity material is made to expose, use
It is drawn in by electric signal.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110687067A (en) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微系统与信息技术研究所 | Infrared gas sensor |
| CN110687064A (en) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微系统与信息技术研究所 | Infrared detector and infrared gas sensor |
| CN110687068A (en) * | 2019-09-17 | 2020-01-14 | 中国科学院上海微系统与信息技术研究所 | Infrared detector and infrared gas sensor |
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