CN108701575B - 用于x射线发射装置的靶组件和x射线发射装置 - Google Patents

用于x射线发射装置的靶组件和x射线发射装置 Download PDF

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Publication number
CN108701575B
CN108701575B CN201680073027.0A CN201680073027A CN108701575B CN 108701575 B CN108701575 B CN 108701575B CN 201680073027 A CN201680073027 A CN 201680073027A CN 108701575 B CN108701575 B CN 108701575B
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China
Prior art keywords
target
target assembly
conductive wall
ray
high voltage
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CN201680073027.0A
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English (en)
Chinese (zh)
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CN108701575A (zh
Inventor
I·G·黑格
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Nikon Metrology NV
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Nikon Metrology NV
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Publication of CN108701575A publication Critical patent/CN108701575A/zh
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/08—Anodes; Anti cathodes
    • H01J35/112—Non-rotating anodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/16—Vessels; Containers; Shields associated therewith
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J5/00—Details relating to vessels or to leading-in conductors common to two or more basic types of discharge tubes or lamps
    • H01J5/02—Vessels; Containers; Shields associated therewith; Vacuum locks
    • H01J5/06—Vessels or containers specially adapted for operation at high tension, e.g. by improved potential distribution over surface of vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/02—Electrical arrangements
    • H01J2235/023—Connecting of signals or tensions to or through the vessel
    • H01J2235/0233—High tension
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/08—Targets (anodes) and X-ray converters
    • H01J2235/088—Laminated targets, e.g. plurality of emitting layers of unique or differing materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/16—Vessels
    • H01J2235/165—Shielding arrangements
    • H01J2235/168—Shielding arrangements against charged particles

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  • X-Ray Techniques (AREA)
CN201680073027.0A 2015-12-23 2016-12-21 用于x射线发射装置的靶组件和x射线发射装置 Active CN108701575B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB1522885.1 2015-12-23
GB1522885.1A GB2545742A (en) 2015-12-23 2015-12-23 Target assembly for an x-ray emission apparatus and x-ray emission apparatus
PCT/EP2016/082133 WO2017108923A1 (en) 2015-12-23 2016-12-21 Target assembly for an x-ray emission apparatus and x-ray emission apparatus

Publications (2)

Publication Number Publication Date
CN108701575A CN108701575A (zh) 2018-10-23
CN108701575B true CN108701575B (zh) 2020-07-03

Family

ID=55359023

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680073027.0A Active CN108701575B (zh) 2015-12-23 2016-12-21 用于x射线发射装置的靶组件和x射线发射装置

Country Status (6)

Country Link
US (1) US10614990B2 (https=)
EP (1) EP3394876B1 (https=)
JP (1) JP6612453B2 (https=)
CN (1) CN108701575B (https=)
GB (1) GB2545742A (https=)
WO (1) WO2017108923A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10879029B2 (en) 2015-12-25 2020-12-29 Nikon Corporation Charged particle device, structure manufacturing method, and structure manufacturing system
JP7048396B2 (ja) * 2018-04-12 2022-04-05 浜松ホトニクス株式会社 Ｘ線管
GB202011389D0 (en) * 2020-07-23 2020-09-09 Nikon Metrology Nv Target assembly, x-ray apparatus, structure measurement apparatus, structure measurement method, and method of modifying a target assembly
CN118541772A (zh) * 2022-01-13 2024-08-23 斯格瑞公司 用于生成高通量低能量x射线的微焦x射线源
US12360067B2 (en) 2022-03-02 2025-07-15 Sigray, Inc. X-ray fluorescence system and x-ray source with electrically insulative target material

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101848A (zh) * 2007-08-10 2008-01-09 东南大学 场致发射阴极x射线管

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3142281A1 (de) 1981-10-24 1983-05-05 Philips Patentverwaltung Gmbh, 2000 Hamburg Roentgenroehre mit einem metallteil und einer gegenueber dem metallteil positive hochspannung fuehrenden elektrode
JP2634369B2 (ja) * 1993-07-15 1997-07-23 浜松ホトニクス株式会社 Ｘ線装置
US6148061A (en) * 1997-04-28 2000-11-14 Newton Scientific, Inc. Miniature x-ray unit
US6125169A (en) * 1997-12-19 2000-09-26 Picker International, Inc. Target integral heat shield for x-ray tubes
US6775354B1 (en) * 2000-09-20 2004-08-10 Ge Medical Systems Global Technology Company, Llc Method and apparatus for reducing high voltage breakdown events in X-ray tubes
US20030002627A1 (en) * 2000-09-28 2003-01-02 Oxford Instruments, Inc. Cold emitter x-ray tube incorporating a nanostructured carbon film electron emitter
JP2002218610A (ja) * 2001-01-18 2002-08-02 Toshiba Corp ガス絶縁機器
JP4339724B2 (ja) 2004-03-12 2009-10-07 三菱電機株式会社 スイッチギヤおよびスイッチギヤの製造方法
US8213575B2 (en) 2006-11-21 2012-07-03 Shimadzu Corporation X-ray generating apparatus
WO2009006592A2 (en) * 2007-07-05 2009-01-08 Newton Scientific, Inc. Compact high voltage x-ray source system and method for x-ray inspection applications
JP2009245806A (ja) * 2008-03-31 2009-10-22 Hamamatsu Photonics Kk Ｘ線管及びこのｘ線管を具備したｘ線発生装置
DE102009017924B4 (de) 2009-04-16 2012-05-31 rtw RÖNTGEN-TECHNIK DR. WARRIKHOFF GmbH & Co. KG Isolator für Röntgenröhren und Verwendung von zweiphasigem Aluminium-Nitrid als Isolator für Röntgenröhren
JP2017054679A (ja) * 2015-09-09 2017-03-16 東芝電子管デバイス株式会社 固定陽極型ｘ線管装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101848A (zh) * 2007-08-10 2008-01-09 东南大学 场致发射阴极x射线管

Also Published As

Publication number Publication date
GB2545742A (en) 2017-06-28
EP3394876A1 (en) 2018-10-31
US10614990B2 (en) 2020-04-07
EP3394876B1 (en) 2019-09-11
GB201522885D0 (en) 2016-02-10
JP6612453B2 (ja) 2019-11-27
US20180301312A1 (en) 2018-10-18
WO2017108923A1 (en) 2017-06-29
JP2018536978A (ja) 2018-12-13
CN108701575A (zh) 2018-10-23

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