CN108666189B - Multi-station automatic centering device in high-temperature and high-vacuum environment - Google Patents
Multi-station automatic centering device in high-temperature and high-vacuum environment Download PDFInfo
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- CN108666189B CN108666189B CN201810462781.4A CN201810462781A CN108666189B CN 108666189 B CN108666189 B CN 108666189B CN 201810462781 A CN201810462781 A CN 201810462781A CN 108666189 B CN108666189 B CN 108666189B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
- H01J9/26—Sealing together parts of vessels
- H01J9/263—Sealing together parts of vessels specially adapted for cathode-ray tubes
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Abstract
The invention discloses a multi-station automatic centering device in a high-temperature and high-vacuum environment, which comprises a main vacuum chamber, wherein the main vacuum chamber is positioned on a chamber chassis, a supporting rotary positioning mechanism is arranged in the main vacuum chamber, a main shaft of the supporting rotary positioning mechanism penetrates out of the main vacuum chamber and is fixed on the chamber chassis, three stations for placing workpieces are arranged on the supporting rotary positioning mechanism, the workpieces are fixed on the supporting rotary positioning mechanism through workpiece clamps, guide blocks are arranged on the workpiece clamps, an MCP assembly tray is arranged below the main vacuum chamber, an MCP assembly is loaded on the MCP assembly tray and comprises a lower kovar tray, an MCP lifting mechanism is arranged below the MCP assembly tray, and the MCP lifting mechanism is positioned. The invention has the beneficial effects that: the supporting rotary positioning mechanism is utilized to realize the initial centering of the three-station workpiece, and then the characteristic that the adjusting chassis in the MCP component tray can freely slide in the horizontal direction for 360 degrees and the geometric dimension of the guiding bottom of the workpiece fixture are utilized to realize the automatic centering.
Description
Technical Field
The invention relates to process equipment, in particular to a multi-station automatic centering device in a high-temperature and high-vacuum environment.
Background
In the three-station cathode transfer system, a workpiece is an ellipsoidal glass shell, which is called a glass shell for short, a vacuum cavity of the equipment is of a bell jar type structure and can be lifted, a plurality of observation ports are arranged on the bell jar cavity, three glass shells can rotate around the central shaft of the bell jar cavity at the same time, and the three ellipsoidal glass shells can be simultaneously transferred and switched on a first working station and a second working station. The bottom of the frame is provided with three working procedure one-station chambers and three working procedure two-station chambers, the chambers are distributed circumferentially, and the bell jar cavity and the bottom plate are sealed by fluorine rubber rings. The equipment consists of a cavity, a cooling system, a vacuum system, a heating system, a workpiece rotating and positioning mechanism, a control system and the like. A very important one-step process in this apparatus is to achieve indium sealing of the MCP assembly (including the lower kovar tray) to the workpiece (including the upper kovar tray). In the indium sealing process, due to the influence of various uncertain factors at present, such as the inconsistency of the sizes of workpieces, the verticality deviation of the sealing surface of the Kovar disc to the axis of the workpiece, the coaxiality deviation of the axis of the Kovar disc and the workpiece and the like are shown; the rotational positioning error of the revolution plate; positional error of the device due to heating; the accuracy of the eccentricity of the indium seal of the upper and lower kovar discs is difficult to guarantee due to factors such as the installation error of the glass shell.
Disclosure of Invention
Aiming at the problems in the related art, the invention provides a multi-station automatic centering device in a high-temperature and high-vacuum environment, which can meet the high-precision requirement of the concentricity of an indium seal.
In order to achieve the technical purpose, the technical scheme of the invention is as follows:
a multi-station automatic centering device in a high-temperature and high-vacuum environment comprises a main vacuum chamber, wherein the main vacuum chamber is positioned on a chamber chassis, a supporting rotary positioning mechanism is arranged in the main vacuum chamber, a main shaft of the supporting rotary positioning mechanism penetrates out of the main vacuum chamber and is fixed on the chamber chassis, three stations for placing workpieces are arranged on the supporting rotary positioning mechanism, the workpieces are fixed on the supporting rotary positioning mechanism through workpiece clamps, guide blocks are arranged on the workpiece clamps, an MCP assembly tray is arranged below the main vacuum chamber, an MCP assembly is loaded on the MCP assembly tray and comprises a lower kovar tray, an MCP lifting mechanism is arranged below the MCP assembly tray and is positioned in an MCP cavity;
the MCP component tray comprises an adjusting chassis and a supporting adjusting disk, an adjusting elastic sheet is placed in a gap between an inner circle of the adjusting chassis and the supporting adjusting disk, a heating supporting disk and a ceramic electrode disk are fixed on the adjusting chassis, an adjusting disk pressing ring is fixed on the supporting adjusting disk, and the supporting adjusting disk is connected with an MCP lifting mechanism below the supporting adjusting disk.
Furthermore, the number of the adjusting elastic pieces is 8.
Furthermore, the adjusting spring piece is made of high-elasticity steel.
Furthermore, the clearance between the inner circle of the adjusting chassis and the supporting adjusting disk is 5 mm.
Furthermore, the heating supporting disk and the ceramic electrode disk are fixed on the adjusting base plate through bolts.
Furthermore, the adjusting disk pressing ring is fixed on the supporting adjusting disk through a bolt.
The invention has the beneficial effects that: the supporting and rotating positioning mechanism is utilized to realize the initial centering of the three-station workpiece, the lower kovar plate of the MCP assembly can enter the workpiece fixture for guiding, and then the characteristic that an adjusting chassis in the MCP assembly tray can freely slide in a supporting and adjusting disk in 360 degrees in the horizontal direction and the geometric dimension (required to ensure form and position tolerance) of the guiding bottom of the workpiece fixture are utilized to realize the automatic centering; the positioning deviation of the rotary positioning mechanism, the manufacturing deviation of the size of the workpiece, the position deviation caused by heating, the installation error of the workpiece and other uncertain factors can be compensated through adjusting the gap between the base plate and the supporting adjusting plate, and the high-precision requirement of the concentricity of the indium seal is realized.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a multi-station automatic centering device in a high-temperature and high-vacuum environment according to an embodiment of the invention;
FIG. 2 is a schematic structural diagram of a single station centering according to an embodiment of the present invention;
figure 3 is a schematic view of a workpiece holder according to an embodiment of the invention;
FIG. 4 is a schematic diagram of a partial structure of the MCP assembly and the MCP assembly tray according to the embodiment of the invention;
FIG. 5 is a schematic structural diagram of a support adjustment disk according to an embodiment of the present invention;
fig. 6 is a schematic structural diagram of an adjusting spring according to an embodiment of the present invention;
FIG. 7 is a flow chart of an indium sealing process of the present invention.
In the figure:
1. a main vacuum chamber; 2. a workpiece; 3. an MCP component; 31. a lower kovar disc; 4. supporting the rotary positioning mechanism; 5. a workpiece fixture; 51. a guide block; 6. a chamber chassis; 7. an MCP component tray; 71. heating the support plate; 72. a ceramic electrode disk; 73. a disc is adjusted to press the ring; 74. supporting the adjusting plate; 75. adjusting the elastic sheet; 76. adjusting the chassis; 8. an MCP lifting mechanism; 9. MCP cavity.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments that can be derived by one of ordinary skill in the art from the embodiments given herein are intended to be within the scope of the present invention.
As shown in fig. 1-7, a multi-station automatic centering device in a high-temperature and high-vacuum environment comprises a main vacuum chamber 1, wherein the main vacuum chamber 1 is located on a chamber chassis 6, a supporting rotary positioning mechanism 4 is arranged in the main vacuum chamber 1, a main shaft of the supporting rotary positioning mechanism 4 penetrates out of the main vacuum chamber 1 and is fixed on the chamber chassis 6, three stations for placing workpieces 2 are arranged on the supporting rotary positioning mechanism 4, the workpieces 2 are fixed on the supporting rotary positioning mechanism 4 through a workpiece fixture 5, a guide block 51 is arranged on the workpiece fixture 5, and the guide block 51 is used for limiting the movement direction of a lower kovar disc 31 when indium is sealed so as to realize automatic centering; an MCP assembly tray 7 is arranged below the main vacuum chamber 1, an MCP assembly 3 is loaded on the MCP assembly tray 7, the MCP assembly 3 comprises a lower kovar tray 31, an MCP lifting mechanism 8 is arranged below the MCP assembly tray 7, and the MCP lifting mechanism 8 is located in an MCP chamber 9; the MCP assembly tray 7 comprises an adjusting bottom plate 76 and a supporting adjusting plate 74, a gap of 5mm is formed between the inner circle of the adjusting bottom plate 76 and the supporting adjusting plate 74, and the adjusting bottom plate 76 can freely slide in the supporting adjusting plate 74 in 360 degrees in the horizontal direction; 8 adjusting elastic sheets 75 are placed in the gap, so that the support chassis 76 and the MCP assembly 3 thereon can be ensured to freely slide in the center of the support adjusting disc 74 and in the guiding process when the lower kovar disc 31 enters the workpiece fixture 5 in a natural state, automatic centering is completed by means of geometric dimensions, and the indium sealing precision is ensured; a heating supporting disk 71 and a ceramic electrode disk 72 are fixed on the adjusting bottom disk 76, an adjusting disk pressing ring 73 is fixed on the supporting adjusting disk 74, the adjusting disk pressing ring 73 is used for limiting the adjusting bottom disk 76 to move in the vertical direction, and meanwhile, the adjusting elastic sheet 75 is limited in a clamping groove of the supporting adjusting disk 74; the support adjusting plate 74 is connected to the MCP elevating mechanism 8 below.
When the device is used specifically, a workpiece 2 is placed in a station on the supporting rotary positioning mechanism 4, and is positioned and clamped through the workpiece fixture 5, and when the indium sealing process step is carried out, the supporting rotary positioning mechanism 4 rotationally positions the workpiece 2 to the upper part of the MCP cavity 9 to complete initial centering; when the indium seal is started, the lifting mechanism 8 in the MCP cavity 9 starts to lift up, the MCP assembly 3 enters the workpiece 2, when the Kovar tray below the MCP assembly 3 enters the workpiece fixture 5 for guiding, the MCP assembly tray 7 adjusts the chassis 76 to freely slide in the support adjusting disc 74, and the indium seal is automatically completed in a centering mode.
The present invention is not limited to the above preferred embodiments, and any modifications, equivalent substitutions, improvements, etc. within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (6)
1. The utility model provides an automatic centering device of multistation under high temperature high vacuum environment, includes main vacuum chamber (1), main vacuum chamber (1) is located chamber chassis (6), the below of main vacuum chamber (1) is equipped with MCP subassembly tray (7), MCP subassembly tray (7) are gone up and are born MCP subassembly (3), MCP subassembly (3) are including lower kovar dish (31), MCP subassembly tray (7) below is equipped with MCP elevating system (8), MCP elevating system (8) are located MCP chamber (9), its characterized in that: a supporting rotary positioning mechanism (4) is arranged in the main vacuum chamber (1), a main shaft of the supporting rotary positioning mechanism (4) penetrates out of the main vacuum chamber (1) and is fixed on a chamber chassis (6), three stations for placing a workpiece (2) are arranged on the supporting rotary positioning mechanism (4), the workpiece (2) is fixed on the supporting rotary positioning mechanism (4) through a workpiece fixture (5), and a guide block (51) is arranged on the workpiece fixture (5); MCP subassembly tray (7) is including adjusting chassis (76) and supporting adjustment disk (74), regulation shell fragment (75) have been placed in the interior circle of adjusting chassis (76) and the clearance between supporting adjustment disk (74), be fixed with heating supporting disk (71) and ceramic electrode dish (72) on adjusting chassis (76), be fixed with adjustment disk clamping ring (73) on supporting adjustment disk (74), support adjustment disk (74) and MCP elevating system (8) of below are connected.
2. The multi-station automatic centering device in the high-temperature and high-vacuum environment as claimed in claim 1, wherein there are 8 adjusting spring pieces (75).
3. The multi-station automatic centering device in the high-temperature and high-vacuum environment as claimed in claim 2, wherein the adjusting spring (75) is made of high-elasticity steel.
4. The multi-station automatic centering device in the high-temperature and high-vacuum environment as claimed in claim 1, wherein the clearance between the inner circle of the adjusting chassis (76) and the supporting adjusting chassis (74) is 5 mm.
5. The multi-station automatic centering device in the high-temperature and high-vacuum environment as claimed in claim 1, wherein the heating support disk (71) and the ceramic electrode disk (72) are fixed on the adjusting base disk (76) through bolts.
6. The multi-station automatic centering device in the high-temperature and high-vacuum environment as claimed in claim 1, wherein the adjusting disk pressing ring (73) is fixed on the supporting adjusting disk (74) through bolts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810462781.4A CN108666189B (en) | 2018-05-15 | 2018-05-15 | Multi-station automatic centering device in high-temperature and high-vacuum environment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810462781.4A CN108666189B (en) | 2018-05-15 | 2018-05-15 | Multi-station automatic centering device in high-temperature and high-vacuum environment |
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| Publication Number | Publication Date |
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| CN108666189A CN108666189A (en) | 2018-10-16 |
| CN108666189B true CN108666189B (en) | 2020-01-24 |
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| CN201810462781.4A Active CN108666189B (en) | 2018-05-15 | 2018-05-15 | Multi-station automatic centering device in high-temperature and high-vacuum environment |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111463090B (en) * | 2020-05-09 | 2022-07-08 | 北方夜视技术股份有限公司 | Device for accurately sealing large-size and small-diameter photomultiplier |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6837410B1 (en) * | 2000-04-19 | 2005-01-04 | Neng-Kuei Yeh | Automatic picture tube cutting machine |
| CN203863575U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Shell positioning clamp of photomultiplier tube |
| CN203871298U (en) * | 2014-05-26 | 2014-10-08 | 北方夜视技术股份有限公司 | Exhaust device structure for photomultiplier cathode making and sealing |
| CN207217898U (en) * | 2017-04-27 | 2018-04-10 | 北京中科科美科技股份有限公司 | More jack electrical connection components under high temperature, high vacuum environment |
| CN206839929U (en) * | 2017-05-05 | 2018-01-05 | 北京中科科美科技股份有限公司 | High temperature, vacuum environment workpiece rotationally support disk be accurately positioned and control system |
| CN107706072B (en) * | 2017-08-25 | 2019-08-02 | 北方夜视技术股份有限公司 | The indium encapsulation method and prepared photomultiplier tube of photomultiplier tube based on cathode transfer equipment |
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