CN108627271A - Two-dimentional plasma temperature field measurement device and method for multiple element object - Google Patents
Two-dimentional plasma temperature field measurement device and method for multiple element object Download PDFInfo
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- CN108627271A CN108627271A CN201710163617.9A CN201710163617A CN108627271A CN 108627271 A CN108627271 A CN 108627271A CN 201710163617 A CN201710163617 A CN 201710163617A CN 108627271 A CN108627271 A CN 108627271A
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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Abstract
The invention discloses a kind of two-dimentional plasma temperature field measurement devices and method for multiple element object.Device includes the optics walk acquisition module, spectral analysis module, Signal acquiring and processing module set gradually from measuring nose to rear end.Method is：Optics walk acquisition module automatic identification target plasma radiation peak and edge, and the even multigroup acquisition of step is carried out to measuring light in this section, Transmission Fibers will measure light and pass to spectral analysis module and parse the spectral information of each element wherein included, Signal acquiring and processing module obtains the integral temperature value in measuring route according to spectral information, the temperature of path center is solved using Abel inverse transformations, and then the two-dimensional temperature field of multiple element is fitted according to radiation rotational symmetry.The present invention realizes while the measurement to multiple element plasma spectrometry and the foundation of two-dimensional temperature field, and can be accurately measured in bad environments, electromagnetic interference.
Description
Technical field
The invention belongs to optical precision technical field of measurement and test, especially a kind of two-dimentional plasma for multiple element object
Temperature field measurement device and method.
Background technology
The demand of the two-dimentional plasma temperature field measurement of multiple element object is embodied in military weapon research and development, aviation boat
It, plasma characteristics related science research etc. fields, two-dimension temperature field data contribute to staff obtain material character, set
The relationship that standby operating status and various elements interact under plasma state, is of great significance for scientific research.
The method based on linear array type colored CCD is mostly used greatly for the measurement of two-dimensional temperature field at present, this method is existed by photographic subjects
Radiation image under three wave bands, each pixel is stored with specific primary color values in three width images, i.e. rgb value, passes through figure
As the pixel temperature of the method parsing rgb value representative of processing builds the temperature field of target face in turn.Since this method is parsing
It is constant empirical value that spectral emissivity is taken in radiation temperature, and actually spectral emissivity is the wavelength and temperature change with target
And change, therefore there are relatively large deviations for measuring the multielement plasma temperature comprising multi-wavelength, in addition, this method
The plasma of specific wavelength, that is, element-specific can only be measured into trip temperature, multielement plasma temperature can not be carried out same
When measure.
Other than the above is based on linear array type colored CCD method, the common spectrum based on multichannel wavelength channel is surveyed
Warm therapy such as Zhai Yang et al. proposes " multispectral transient state thermo detector is used for power emission system flame test " (in July, 2011《Using
Optics》The 4th phase of volume 32).It discloses a kind of multispectral transient state thermo detectors, and this method solve the light calculated in radiation temperature
The problem of composing emissivity, but the temperature point value in measuring route can only be measured, the bulk temperature of measured object is indicated with integrated value,
True temperature inside measured object can not be restored, to which the two-dimensional temperature field of tested plasma cannot be built.
Invention content
The purpose of the present invention is to provide a kind of two-dimentional plasma temperature field measurement dresses suitable for multiple element object
It sets and method establishes out two dimension while solving the problems, such as spectral emissivity under the different wave length of tested multielement plasma
Radiant temperature field.
Realize that the technical solution of the object of the invention is：A kind of two-dimentional plasma temperature for multiple element object
Field measurement device includes that optics walk acquisition module, spectral analysis module, the signal set gradually from measuring nose to rear end is adopted
Collection and processing module mutually transmit signal between each module by Transmission Fibers, wherein：
The Transmission Fibers, including the first Transmission Fibers, the second Transmission Fibers；
The optics walk acquisition module, including optical filter, Step Motor platform, optically detecting mechanism, wherein filtering
Piece includes neutral colour filter, interferometric filter, and neutral colour filter, interference filter is respectively set in the acquisition front end of optically detecting mechanism
Mating plate, and optically detecting mechanism is placed on Step Motor platform；By adjusting the movement of Step Motor platform, optics
Collecting mechanism collects the measurement optical signal of different height, is passed to the first Transmission Fibers；
The spectral analysis module, including the first off-axis parabolic mirror, the second off-axis parabolic mirror, binary optical
Grid receive target surface, which uses C-T formula beam-splitting structures, the first Transmission Fibers output end to be located at the reflection of the first off axis paraboloid mirror
The focus of mirror receives the focus that target surface is located at the second off-axis parabolic mirror；Optical signal is brought out from the output of the first Transmission Fibers
It penetrates, directional light is reflected via the first off-axis parabolic mirror, which is divided back reflection to second by binary raster
Off-axis parabolic mirror, the measurement light of the corresponding different wave length of different elements is converged to by the second off-axis parabolic mirror to be connect
The different location on target surface is received, and the second Transmission Fibers are output to from the perforation hole received on target surface；
The Signal acquiring and processing module, including spectroanalysis instrument, two-dimensional temperature field construction unit, spectroanalysis instrument connect
10~15 group integral temperature values of the plurality of target element on acquisition path are received, two-dimensional temperature field construction unit utilizes Abel inversions
Change and parse detective path central point temperature, by automatic seeking rank and method of gradual regression be fitted respectively temperature spot and plan-position it
Between relation function, determine the two-dimensional temperature field of detection target face to get to measuring the corresponding plasma two-dimension temperature of element
.
Further, neutral colour filter, the interferometric filter that the optics walk acquisition module is included, allow to pass through light
Wavelength is within the scope of ± the 5nm of operating spectrum band.
Further, the Step Motor platform determines turnover zone according to plasma resonance peak value and marginal position
Between, and divide equally 10~15 times in this section and measure.
Further, the two-dimensional temperature field construction unit parses detective path central point temperature using Abel inverse transformations
Degree, wherein Abel inverse transformation integral formula f (r) are as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length,
The true temperature value of central point is obtained by the Formula Parsing.
A kind of two-dimentional plasma temperature field measurement method for multiple element object includes the following steps：
Step 1, neutral colour filter, interferometric filter are respectively set in the acquisition front end of optically detecting mechanism, and by optics
Collecting mechanism is placed on Step Motor platform；By adjusting the movement of Step Motor platform, the acquisition of optically detecting mechanism
To the measurement optical signal of different height, it is passed to the first Transmission Fibers；
Step 2, using C-T formula beam-splitting structures, the first Transmission Fibers output end is located at the first off-axis parabolic mirror
Focus receives the focus that target surface is located at the second off-axis parabolic mirror；Optical signal is emitted from the first Transmission Fibers output end, warp
Directional light is reflected by the first off-axis parabolic mirror, which is divided back reflection to the second off-axis throwing by binary raster
The measurement light of parabolic mirror, the corresponding different wave length of different elements converges to reception target surface by the second off-axis parabolic mirror
On different location, and from receive target surface on perforation hole be output to the second Transmission Fibers；
Step 3, spectroanalysis instrument receives 10~15 group integral temperature values of the plurality of target element on acquisition path, two dimension
Temperature field construction unit parses detective path central point temperature using Abel inverse transformations, passes through automatic seeking rank and method of gradual regression
The relation function being fitted respectively between temperature spot and plan-position determines the two-dimensional temperature field of detection target face to get to measurement
The corresponding plasma two-dimensional temperature field of element.
Further, two-dimensional temperature field construction unit described in step 3 parses detective path center using Abel inverse transformations
Point temperature, wherein Abel inverse transformation integral formula f (r) are as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length,
The true temperature value of central point is obtained by the Formula Parsing.
Compared with prior art, the present invention its remarkable advantage is：(1) target surface has multiple light holes, can meet to one
Multiple element plasmas of wavelength range are carried out while being measured, and by the true measurement to spectral emissivity, have adapted to survey
The requirement for measuring the multielement plasma temperature of multi-wavelength range, improves measurement accuracy；(2) utilize Abel inverse transformations to measuring
Temperature point value on path is parsed, and the temperature value of path center can be really obtained, and fitting temperature spot is closed with position
System, and utilize rotational symmetry structure two-dimensional temperature field；(3) by radiating the feedback of light intensity, Step Motor platform can be automatic
The center and edge of radiation are found, and respectively 10 steps carry out walk measurement, while the module also has and adjusted according to operating accuracy
The function of step-length；(4) Transmission Fibers connection front end acquisition module and rear end light-splitting processing module are utilized, staff can be made remote
Radiation from test site, while the influence of live severe factor is reduced or remitted, apparatus structure is simple, small, easy to carry.
Description of the drawings
Fig. 1 is the structural representation for the two-dimentional plasma temperature field measurement device that the present invention is suitable for multiple element object
Figure.
Specific implementation mode
Present invention is further described in detail below in conjunction with the accompanying drawings.
In conjunction with Fig. 1, the present invention is used for the two-dimentional plasma temperature field measurement device of multiple element object, including from measurement
Optics walk acquisition module that front end is set gradually to rear end, spectral analysis module, Signal acquiring and processing module, each module it
Between by Transmission Fibers mutually transmit signal, wherein：
The Transmission Fibers, including the first Transmission Fibers 4, the second Transmission Fibers 9；
The optics walk acquisition module, including optical filter 1, Step Motor platform 3, optically detecting mechanism 2, wherein filtering
Mating plate 1 includes neutral colour filter, interferometric filter, and neutral colour filter, dry is respectively set in the acquisition front end of optically detecting mechanism 2
Optical filter is related to, and optically detecting mechanism 2 is placed on Step Motor platform 3；By adjusting the shifting of Step Motor platform 3
Dynamic, optically detecting mechanism 2 collects the measurement optical signal of different height, is passed to the first Transmission Fibers 4；
The spectral analysis module, including the first off-axis parabolic mirror 5, the second off-axis parabolic mirror 7, binary
Grating 6 receives target surface 8, which uses C-T formula beam-splitting structures, 4 output end of the first Transmission Fibers to be located at the first off axis paraboloid mirror
The focus of speculum 5 receives the focus that target surface 8 is located at the second off-axis parabolic mirror 7；Optical signal is from the first Transmission Fibers 4
Output end is emitted, and directional light is reflected via the first off-axis parabolic mirror 5, after which is divided by binary raster 6
It is reflected into the second off-axis parabolic mirror 7, the measurement light of the corresponding different wave length of different elements is anti-by the second off axis paraboloid mirror
It penetrates mirror 7 and converges to the different location received on target surface 8, and the second Transmission Fibers 9 are output to from the perforation hole received on target surface 8；
The Signal acquiring and processing module, including spectroanalysis instrument 10, two-dimensional temperature field construction unit, spectroanalysis instrument
10 receive 10~15 group integral temperature values of the plurality of target element on acquisition path, and two-dimensional temperature field construction unit utilizes Abel
Inverse transformation parses detective path central point temperature, and temperature spot and plane position are fitted respectively by automatic seeking rank and method of gradual regression
Relation function between setting determines the two-dimensional temperature field of detection target face to get two-dimentional to the corresponding plasma of element is measured
Temperature field.
As a kind of specific example, neutral colour filter, the interferometric filter that the optics walk acquisition module is included are permitted
Perhaps within the scope of the ± 5nm by a length of operating spectrum band of light wave.
As a kind of specific example, the Step Motor platform 3 is true according to plasma resonance peak value and marginal position
Determine moving section, and divides equally 10~15 times in this section and measure.
As a kind of specific example, the two-dimensional temperature field construction unit is parsed using Abel inverse transformations in detective path
Heart point temperature, wherein Abel inverse transformation integral formula f (r) are as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length,
The true temperature value of central point is obtained by the Formula Parsing.
The present invention is used for the two-dimentional plasma temperature field measurement method of multiple element object, includes the following steps：
Step 1, neutral colour filter, interferometric filter are respectively set in the acquisition front end of optically detecting mechanism 2, and by optics
Collecting mechanism 2 is placed on Step Motor platform 3；By adjusting the movement of Step Motor platform 3, optically detecting mechanism 2
The measurement optical signal of different height is collected, the first Transmission Fibers 4 are passed to；
Step 2, using C-T formula beam-splitting structures, 4 output end of the first Transmission Fibers is located at the first off-axis parabolic mirror 5
Focus, receive target surface 8 and be located at the focus of the second off-axis parabolic mirror 7；Optical signal is brought out from the output of the first Transmission Fibers 4
It penetrates, directional light is reflected via the first off-axis parabolic mirror 5, which is divided back reflection to the by binary raster 6
The measurement light of two off-axis parabolic mirrors 7, the corresponding different wave length of different elements is assembled by the second off-axis parabolic mirror 7
It is output to the second Transmission Fibers 9 to the different location received on target surface 8, and from the perforation hole received on target surface 8；
Step 3,10~15 group integral temperature values of the reception plurality of target element of spectroanalysis instrument 10 on acquisition path, two
Dimension temperature field construction unit parses detective path central point temperature using Abel inverse transformations, passes through automatic seeking rank and successive Regression
Method is fitted the relation function between temperature spot and plan-position respectively, determines the two-dimensional temperature field of detection target face to get to survey
The corresponding plasma two-dimensional temperature field of secondary element.
As a kind of specific example, two-dimensional temperature field construction unit described in step 3 parses detection using Abel inverse transformations
Path center point temperature, wherein Abel inverse transformation integral formula f (r) are as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length,
The true temperature value of central point is obtained by the Formula Parsing.
The advantages of two-dimentional plasma temperature field measurement device and method of the present invention suitable for multiple element object
It is, by the true measurement to spectral emissivity, substitutes the perseverance of spectral emissivity in the existing measurement method using colored CCD
Definite value has adapted to the requirement for the multielement plasma temperature for measuring multi-wavelength range, has improved measurement accuracy.Target surface has more
A light hole can carry out multiple element plasmas of a wavelength range while measure and build two-dimensional temperature field.Profit
The temperature point value in measuring route is parsed with Abel inverse transformations, can really obtain the temperature value of path center,
It is fitted temperature spot and position relationship, and utilizes rotational symmetry structure two-dimensional temperature field.By radiating the feedback of light intensity, stepper motor
Lifting platform can Automatic-searching radiation center and edge, and respectively 10 steps carry out walk measurement, while the module also has basis
Operating accuracy adjusts the function of step-length.Using Transmission Fibers connection front-end acquisition device and rear end light-splitting processing device, can make
Radiation of the staff far from test site, while reducing or remitting the influence of live severe factor.Apparatus structure is simple, small, just
In carrying.
Claims (6)
1. a kind of two-dimentional plasma temperature field measurement device for multiple element object, it is characterised in that：Including from measurement
Optics walk acquisition module that front end is set gradually to rear end, spectral analysis module, Signal acquiring and processing module, each module it
Between by Transmission Fibers mutually transmit signal, wherein：
The Transmission Fibers, including the first Transmission Fibers (4), the second Transmission Fibers (9)；
The optics walk acquisition module, including optical filter (1), Step Motor platform (3), optically detecting mechanism (2), wherein
Optical filter (1) includes neutral colour filter, interferometric filter, and neutral filter is respectively set in the acquisition front end of optically detecting mechanism (2)
Mating plate, interferometric filter, and optically detecting mechanism (2) is placed on Step Motor platform (3)；By adjusting stepper motor
The movement of lifting platform (3), optically detecting mechanism (2) collect the measurement optical signal of different height, are passed to the first Transmission Fibers
(4)；
The spectral analysis module, including the first off-axis parabolic mirror (5), the second off-axis parabolic mirror (7), binary
Grating (6) receives target surface (8), which uses C-T formula beam-splitting structures, and it is off-axis that the first Transmission Fibers (4) output end is located at first
The focus of parabolic mirror (5) receives the focus that target surface (8) is located at the second off-axis parabolic mirror (7)；Optical signal is from
One Transmission Fibers (4) output end is emitted, and reflects directional light via the first off-axis parabolic mirror (5), which passes through
Binary raster (6) is divided back reflection to the second off-axis parabolic mirror (7), the measurement light of the corresponding different wave length of different elements
Converged to the different location received on target surface (8) by the second off-axis parabolic mirror (7), and from receiving going out on target surface (8)
Perforation is output to the second Transmission Fibers (9)；
The Signal acquiring and processing module, including spectroanalysis instrument (10), two-dimensional temperature field construction unit, spectroanalysis instrument
(10) 10~15 group integral temperature values of the plurality of target element on acquisition path are received, two-dimensional temperature field construction unit utilizes
Abel inverse transformations parse detective path central point temperature, are fitted temperature spot respectively by automatic seeking rank and method of gradual regression and put down
Relation function between the position of face determines the two-dimensional temperature field of detection target face to get to measuring the corresponding plasma of element
Two-dimensional temperature field.
2. the two-dimentional plasma temperature field measurement device according to claim 1 for multiple element object, feature
It is：Neutral colour filter, the interferometric filter that the optics walk acquisition module is included allow through a length of work spectrum of light wave
Within the scope of ± the 5nm of section.
3. the two-dimentional plasma temperature field measurement device according to claim 1 for multiple element object, feature
It is：The Step Motor platform (3) determines moving section, the areas Bing Ci according to plasma resonance peak value and marginal position
Between divide equally and measure for 10~15 times.
4. the two-dimentional plasma temperature field measurement device according to claim 1 for multiple element object, feature
It is：The two-dimensional temperature field construction unit parses detective path central point temperature using Abel inverse transformations, and wherein Abel is inverse
Transform integrals formula f (r) is as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length, by this
Formula Parsing obtains the true temperature value of central point.
5. a kind of two-dimentional plasma temperature field measurement method for multiple element object, it is characterised in that：Including following step
Suddenly：
Step 1, neutral colour filter, interferometric filter is respectively set in the acquisition front end of optically detecting mechanism (2), and optics is adopted
Collecting mechanism (2) is placed on Step Motor platform (3)；By adjusting the movement of Step Motor platform (3), optically detecting machine
Structure (2) collects the measurement optical signal of different height, is passed to the first Transmission Fibers (4)；
Step 2, using C-T formula beam-splitting structures, the first Transmission Fibers (4) output end is located at the first off-axis parabolic mirror (5)
Focus, receive target surface (8) and be located at the focus of the second off-axis parabolic mirror (7)；Optical signal is defeated from the first Transmission Fibers (4)
Outlet is emitted, and directional light is reflected via the first off-axis parabolic mirror (5), which is divided by binary raster (6)
Back reflection is to the second off-axis parabolic mirror (7), and the measurement light of the corresponding different wave length of different elements is by the second off-axis parabolic
Face speculum (7) converges to the different location received on target surface (8), and is output to second from the perforation hole received on target surface (8)
Transmission Fibers (9)；
Step 3, spectroanalysis instrument (10) receives 10~15 group integral temperature values of the plurality of target element on acquisition path, two dimension
Temperature field construction unit parses detective path central point temperature using Abel inverse transformations, passes through automatic seeking rank and method of gradual regression
The relation function being fitted respectively between temperature spot and plan-position determines the two-dimensional temperature field of detection target face to get to measurement
The corresponding plasma two-dimensional temperature field of element.
6. being used for the two-dimentional plasma temperature field measurement method of multiple element object according to claim 5, feature exists
In：Two-dimensional temperature field construction unit described in step 3 parses detective path central point temperature, wherein Abel using Abel inverse transformations
Inverse transformation integral formula f (r) is as follows：
In formula, r is the relative position away from the plasma space center of circle, and R is plasma radius, and x is integral domain length, by this
Formula Parsing obtains the true temperature value of central point.
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| US20120068091A1 (en) * | 2008-09-26 | 2012-03-22 | Gigaphoton Inc. | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device |
| CN102661933A (en) * | 2012-05-17 | 2012-09-12 | 苏州大学 | Wet steam dryness measuring device and measuring method based on surface plasma resonance |
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2017
- 2017-03-20 CN CN201710163617.9A patent/CN108627271A/en not_active Withdrawn
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|---|---|---|---|---|
| US20120068091A1 (en) * | 2008-09-26 | 2012-03-22 | Gigaphoton Inc. | Extreme ultraviolet light source device, laser light source device for extreme ultraviolet light source device, and method for controlling saturable absorber used in extreme ultraviolet light source device |
| CN101387559A (en) * | 2008-10-31 | 2009-03-18 | 湖南大学 | Photo plasma temperature spatial distribution detecting device and detecting method |
| CN102661933A (en) * | 2012-05-17 | 2012-09-12 | 苏州大学 | Wet steam dryness measuring device and measuring method based on surface plasma resonance |
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| 翟洋: "瞬态等离子体温度光谱法诊断技术研究及应用", 《中国博士学位论文全文数据库 基础科学辑》 * |
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