CN108469592B - Miniature magnetic capacitance sensor based on magnetic concentrator and magnetic nanoparticle composite material - Google Patents
Miniature magnetic capacitance sensor based on magnetic concentrator and magnetic nanoparticle composite material Download PDFInfo
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- 239000002122 magnetic nanoparticle Substances 0.000 title claims abstract description 51
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- 229910052751 metal Inorganic materials 0.000 claims abstract description 32
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- 239000002105 nanoparticle Substances 0.000 claims abstract description 12
- 229920000642 polymer Polymers 0.000 claims abstract description 7
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
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- 239000000377 silicon dioxide Substances 0.000 claims description 4
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
Abstract
The invention discloses a miniature magnetic capacitance sensing device based on a magnetic concentrator and a nano magnetic particle composite material, which comprises an SOI substrate, two magnetic field concentrators, a magnetic nano particle composite material magnetic capacitance sensing unit, a left metal electrode plate and a right metal electrode plate; two magnetic field collectors and susceptorsThe rice particle composite material magnetic capacitance sensitive unit is positioned on SiO etched by patterning the top layer low-resistance Si of the SOI substrate2On the surface; the two magnetic field collectors are arranged in a left-right symmetrical manner; the magnetic nano particle composite material magnetic capacitance sensing unit is positioned in a gap between the two magnetic field aggregators, and the magnetic nano particle composite material consists of superparamagnetic nano particles and high molecular polymers; a left metal electrode plate and a right metal electrode plate are arranged between each magnetic field concentrator and the magnetic nano particle composite material magnetic capacitance sensitive unit. The invention is suitable for magnetic field measurement in various occasions, in particular to magnetic field measurement in high dynamic magnetic field application environments such as deep space, deep sea, deep land and the like.
Description
Technical Field
The invention relates to a micro magnetic sensor, in particular to a micro magnetic capacitance sensor based on a magnetic concentrator and a magnetic nanoparticle composite material and a manufacturing method thereof.
Background
The widely existing magnetic fields in deep space, deep sea, deep land and the like directly or indirectly reflect the resource distribution change rule of the space environment, and the accurate measurement of the magnetic field vector information is an important means for detecting and recognizing the environments in deep space, deep sea, deep land and the like. Currently, the measurement of magnetic field vector information is achieved by magnetic sensors. However, in deep space, deep sea, deep ground and other measurement environments, the magnetic field is weak, the change of the magnetic field component is fast, the temperature range is wide, and the volume of the measurement carrier is miniaturized, so that the magnetic sensor is required to have the characteristics of micro volume, low power consumption, vectority, high sensitivity, no magnetic hysteresis, wide measurement range and the like. The existing miniature magnetic sensor mainly comprises a hall magnetic sensor and a magnetoresistive sensor. The Hall magnetic sensor utilizes the Hall effect of a semiconductor material to detect a magnetic field, is limited by a detection mechanism, has the problems of low sensitivity, large power consumption and large influence of temperature, and is not suitable for measuring magnetic field vector information in environments such as deep space, deep sea, deep land and the like. The magnetic resistance sensor detects a magnetic field by using the resistance change of a material under the action of the magnetic field, but the resistance value of the magnetic sensitive material is easily influenced by the temperature change, and the applied magnetic sensitive material has wide hysteresis characteristics, so that the zero point and sensitivity parameters of the sensor in a high dynamic magnetic field drift.
In summary, there is no magnetic sensor having micro-volume, low power consumption, vectority, high sensitivity, no hysteresis and wide measurement range, which is suitable for magnetic field measurement in deep space, deep sea, deep ground and other environments.
Disclosure of Invention
The invention provides a design and a manufacturing method of a micro magnetic capacitance sensing device based on a magnetic concentrator and a magnetic nanoparticle composite material, aiming at solving the problem that the existing magnetic sensor is not suitable for magnetic vector measurement in environments such as deep space, deep sea, deep ground and the like.
The invention is realized by adopting the following technical scheme:
a miniature magnetic capacitance sensor based on magnetic concentrator and magnetic nanoparticle composite material comprises SOI substrate (SOI comprises top low-resistance Si and middle buried layer SiO)2And a bottom layer Si), two magnetic field collectors, a magnetic nano particle composite material magnetic capacitance sensitive unit, a left metal electrode plate and a right metal electrode plate.
Two magnetic field collectors and magnetic nano-particle composite material magnetic capacitance sensitive unit are positioned on SiO etched by patterning top-layer low-resistance Si of SOI substrate2A surface; the two magnetic field collectors are arranged in a left-right symmetrical manner; the magnetic nano particle composite material magnetic capacitance sensing unit is positioned in a gap between the two magnetic field aggregators, and the magnetic nano particle composite material consists of superparamagnetic nano particles and high molecular polymers; a left metal electrode plate and a right metal electrode plate are arranged between each magnetic field concentrator and the magnetic nano particle composite material magnetic capacitance sensitive unit. Magnetic nano particle composite material magnetic capacitorThe sensitive unit, the left metal electrode plate and the right metal electrode plate at the two sides are etched with a middle buried layer SiO2。
Aiming at the manufacturing method of the magnetic capacitance sensing device based on the magnetic concentrator and the magnetic nanoparticle composite material, the manufacturing method is realized by adopting the following steps:
s1, selecting an SOI substrate, sputtering and depositing a metal welding spot layer on the top low-resistance Si of the SOI substrate, performing photoresist hardening by using a metal welding spot mask, and performing wet etching to obtain a left metal electrode plate and a right metal electrode plate;
s2, etching the top low-resistance Si at the positions of the patterned magnetic field concentrator and the magnetic capacitance sensitive unit by using the photoresist of the two magnetic field concentrators and the nanometer composite material magnetic capacitance sensitive unit mask plate through a Si etching process to expose the SiO of the middle buried layer of the SOI substrate2Then removing the photoresist to obtain a magnetic field concentrator and a patterned groove of the magnetic capacitance sensitive unit, wherein the top layer low-resistance Si at the position of the magnetic field concentrator is etched to be used for subsequent sputtering deposition of a magnetic field concentrator film, and the top layer low-resistance Si at the position of the magnetic capacitance sensitive unit is etched to be used for subsequent injection of the magnetic nanoparticle composite material;
s3, performing photo-etching glue fixation by using two magnetic field concentrator mask plates, sputtering and depositing a soft magnetic material film with high magnetic permeability, and then stripping off the photoresist to obtain a magnetic field concentrator;
and S4, using the mask plate of the nanocomposite magnetic capacitance sensitive unit to carry out photoresist solidification, carrying out spin coating on the injected nanocomposite, and then removing the photoresist to obtain the magnetic capacitance sensing device consisting of the nanocomposite magnetic capacitance sensitive unit and the magnetic field collector.
The invention is based on the following principle: the left electrode plate, the magnetic nano particle composite material magnetic capacitance sensitive unit and the right electrode plate jointly form a magnetic sensitive capacitor, a magnetic capacitance device formed by two magnetic field collectors and the magnetic capacitance sensitive unit is placed in a measured magnetic field, the capacitance value of the magnetic capacitance sensitive unit is changed, the left electrode plate and the right electrode plate are respectively connected with a capacitance detection circuit, and the measured magnetic field value can be obtained through the capacitance value measured by the detection circuit.
The specific working process is as follows: after the measured magnetic field passes through the two magnetic field collectors, the measured magnetic field is amplified, when the amplified magnetic field passes through the magnetic nanoparticle composite material, superparamagnetic nanoparticles in the composite material are magnetized, magnetized adjacent magnetic nanoparticles generate attraction along the magnetic field direction, and the polymer material is deformed by the attraction, so that the dielectric constant of the magnetic capacitance sensitive unit is changed, the capacitance value of the magnetic capacitance sensitive unit is further changed, and the vector information of the measured magnetic field can be accurately measured by measuring the variation of the capacitance value through the capacitance detection circuit. In this process, the polymer material serves as an insulation.
Based on the process, the micro magnetic capacitance sensing device based on the magnetic agglomerator and the magnetic nano particle composite material realizes the measurement of magnetic field vector information by utilizing the magnetic capacitance effect.
Compared with the prior art, the invention has the following advantages:
the magnetic field vector information measurement is carried out by utilizing the magnetic capacitance characteristic of the magnetic nanoparticle composite material, wherein the magnetic nanoparticles have the superparamagnetic characteristic, so that the magnetic field change can be quickly responded, and the magnetic nanoparticle composite material has the characteristics of no magnetic hysteresis and small influence of temperature.
Secondly, the two magnetic field collectors which are bilaterally symmetrical can amplify the magnetic field to be detected, so that the magnetic field sensed by the magnetic nanoparticle composite material is larger, the magnetic capacitance effect is more obvious, the sensitivity of the magnetic sensor is improved, and the sensor is suitable for detecting the weak magnetic field.
Thirdly, the magnetic capacitor device obtains magnetic field vector information by testing capacitance variation, and the capacitor detection circuit has the characteristic of low power consumption.
Fourthly, the magnetic capacitor device can be manufactured integrally through a micro-nano processing technology, so that the sensor device has the characteristic of micro volume.
The magnetic capacitance sensing device based on the magnetic concentrator and the magnetic nanoparticle composite material has the characteristics of micro volume, low power consumption, vectority, high sensitivity, no magnetic hysteresis and wide measurement range, is suitable for magnetic field measurement in severe environments such as deep space, deep sea and deep land, and has good market popularization and application values.
Drawings
Fig. 1 shows a schematic top view of a magnetic capacitive sensing device in accordance with the present invention.
Fig. 2 shows a schematic cross-sectional view of a magnetic capacitance sensing device in accordance with the present invention.
Fig. 3 shows a schematic view of S1 in an embodiment of the present invention.
Fig. 4 shows a schematic view of S2 in an embodiment of the present invention.
Fig. 5 shows a schematic view of S3 in an embodiment of the present invention.
Fig. 6 shows a schematic view of S4 in an embodiment of the present invention.
In the figure: 1-SOI substrate, top-layer low resistivity Si in 11-SOI substrate, intermediate buried layer SiO in 12-SOI substrate213-bottom layer Si in SOI substrate, 2-magnetic flux concentrator, 3-magnetic nano particle composite material magnetic capacitance sensitive unit, 31-super paramagnetic nano particle, 32-high molecular polymer, 4-left metal electrode plate and 5-right metal electrode plate.
Detailed Description
The following detailed description of specific embodiments of the invention refers to the accompanying drawings.
A micro magnetic capacitance sensing device based on a magnetic concentrator and a magnetic nanoparticle composite material is shown in figures 1 and 2 and comprises an SOI substrate 1, two magnetic field concentrators 2, a magnetic nanoparticle composite material magnetic capacitance sensing unit 3, a left metal electrode plate 4 and a right metal electrode plate 5.
Wherein the SOI substrate 1 comprises a top layer of low-resistivity Si 11 and an intermediate buried layer of SiO 212 and an underlayer Si 13.
Two magnetic field collectors and magnetic nano-particle composite material magnetic capacitance sensitive unit are positioned on SiO etched by patterning top layer low-resistance Si 11 of SOI substrate 212 of the surface; the two magnetic field collectors 2 are arranged in a left-right symmetrical manner; the magnetic nano particle composite material magnetic capacitance sensitive unit 3 is positioned in two magnetic fieldsThe gap between the collectors; a left metal electrode plate 4 and a right metal electrode plate 5 are arranged between each magnetic field concentrator and the magnetic nano particle composite material magnetic capacitance sensitive unit. A magnetic nano particle composite material magnetic capacitance sensitive unit 3, a left metal electrode plate 4 and a right metal electrode plate 5 at two sides, and a middle buried layer SiO etched at the periphery of the left metal electrode plate 4 and the right metal electrode plate 52。
The magnetic nanoparticle composite material of the magnetic capacitance sensing unit 3 is composed of superparamagnetic nanoparticles 31 and high molecular polymers 32; the superparamagnetic nanoparticles 31 are elementary nanoparticles of elements such as iron Fe, cobalt Co, nickel Ni, or oxide nanoparticles containing a single element or multiple elements; the high molecular polymer 32 is organic silica gel or inorganic silica gel.
The manufacturing method of the magnetic capacitance sensing device based on the magnetic concentrator and the magnetic nanoparticle composite material is realized by adopting the following steps:
s1, selecting the SOI substrate 1, sputtering and depositing a metal welding spot layer on the top-layer low-resistance Si 11 of the SOI substrate 1, using a metal welding spot mask to perform photoresist solidification, and performing wet etching to obtain the left metal electrode plate 4 and the right metal electrode plate 5, as shown in figure 3.
S2, etching the top layer low-resistance Si 11 at the positions of the patterned magnetic field concentrator and the magnetic capacitance sensitive unit by using the two magnetic field concentrators and the nano composite material magnetic capacitance sensitive unit mask photoresist through a Si etching process to expose the middle buried layer SiO of the SOI substrate 12And 12, removing the photoresist to obtain a magnetic field concentrator and a patterned groove of the magnetic capacitance sensing unit, wherein the top layer low-resistance Si at the position of the magnetic field concentrator is etched to be used for subsequent sputtering deposition of a magnetic field concentrator film (the magnetic concentrator can be prepared into any shape and is not limited to the shape indicated in the schematic diagram), and the top layer low-resistance Si at the position of the magnetic capacitance sensing unit is etched to be used for subsequent injection of the magnetic nanoparticle composite material, as shown in fig. 4.
S3, using two magnetic field concentrator mask plates to carry out photo-curing, sputtering and depositing a soft magnetic material film with high magnetic permeability, and then stripping and removing the photo-resist to obtain the magnetic field concentrator 2, as shown in figure 5.
S4, using the nanocomposite magnetic capacitance sensing unit mask to perform photoresist curing, spin-coating the injected nanocomposite, and then removing the photoresist, to obtain the magnetic capacitance sensing device composed of the nanocomposite magnetic capacitance sensing unit 3 and the magnetic field concentrator 2, as shown in fig. 6.
The invention solves the problem that the existing micro magnetic sensor is not suitable for the application environment of the high dynamic magnetic field, is suitable for the magnetic field measurement of various occasions, and is particularly suitable for the magnetic field measurement of the application environment of the high dynamic magnetic field such as deep space, deep sea, deep land and the like.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above-described embodiments. All technical schemes belonging to the idea of the invention belong to the protection scope of the invention. It should be noted that modifications and embellishments within the scope of the invention may be made by those skilled in the art without departing from the principle of the invention, and such modifications and embellishments should also be considered as within the scope of the invention.
Claims (2)
1. A miniature magnetic capacitance sensor based on magnetic aggregators and magnetic nanoparticle composites is characterized in that: the magnetic nano particle composite material magnetic capacitance sensor comprises an SOI substrate (1), two magnetic field collectors (2), a magnetic nano particle composite material magnetic capacitance sensitive unit (3), a left metal electrode plate (4) and a right metal electrode plate (5);
the SOI substrate (1) comprises top-layer low-resistance Si (11) and an intermediate buried layer SiO2(12) And an underlayer Si (13);
two magnetic field collectors (2) and a magnetic nano particle composite material magnetic capacitance sensitive unit (3) are positioned on a middle buried layer SiO after the top layer low-resistance Si (11) of the SOI substrate (1) is subjected to graphical etching2(12) A surface;
the two magnetic field collectors (2) are arranged in a left-right symmetrical manner; the magnetic nano particle composite material magnetic capacitance sensitive unit (3) is positioned in the gap between the two magnetic field collectors, the two sides of the magnetic nano particle composite material magnetic capacitance sensitive unit (3) are respectively a left metal electrode plate (4) and a right metal electrode plate (5), and the periphery of the left metal electrode plate and the right metal electrode plate is etchedIntermediate buried layer SiO2；
The manufacturing method comprises the following steps:
s1, selecting an SOI substrate (1), sputtering and depositing a metal welding spot layer on the top-layer low-resistance Si (11) of the SOI substrate, using a metal welding spot mask plate to carry out photo-resist curing, and carrying out wet corrosion to obtain a left metal electrode plate (4) and a right metal electrode plate (5);
s2, etching the top layer low-resistance Si (11) at the position of the patterned magnetic field concentrator and the magnetic nanoparticle composite material magnetic capacitance sensitive unit by using two magnetic field concentrators and the magnetic nanoparticle composite material magnetic capacitance sensitive unit mask photoresist through a Si etching process to expose the middle buried layer SiO (11) of the SOI substrate (1)2(12) Then removing the photoresist to obtain a magnetic field concentrator and a graphical groove of the magnetic nano particle composite material magnetic capacitance sensitive unit;
s3, using two magnetic field concentrator mask plates to carry out photo-etching and glue fixing, sputtering and depositing a soft magnetic material film with high magnetic conductivity, and then stripping and removing the photo-etching glue to obtain a magnetic field concentrator (2);
s4, using the magnetic nano particle composite material magnetic capacitance sensitive unit mask plate to carry out photoresist solidification, carrying out spin coating on the injected magnetic nano particle composite material, and then removing the photoresist to obtain the magnetic capacitance sensing device which is composed of the magnetic nano particle composite material magnetic capacitance sensitive unit (3) and the magnetic field collector (2).
2. The micro magnetic capacitive sensor based on magnetic agglomerator and magnetic nanoparticle composite material of claim 1, wherein: the magnetic nanoparticle composite material of the magnetic capacitance sensing unit (3) of the magnetic nanoparticle composite material is composed of superparamagnetic nanoparticles (31) and high molecular polymers (32); the superparamagnetic nano-particles (31) are elementary substance nano-particles of Fe, Co, Ni or oxide nano-particles containing single element or multiple elements; the high molecular polymer (32) is organic silica gel or inorganic silica gel.
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| CN104390720B (en) * | 2014-12-03 | 2016-11-09 | 东南大学 | A kind of capacitive temperature sensor based on graphene oxide and preparation method thereof |
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