CN108458787A - Echelle grating type space heterodyne Raman spectrometer light channel structure - Google Patents
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Abstract
本发明提出中阶梯光栅型空间外差拉曼光谱仪光路结构，包括：拉曼滤光片、准直反射镜、中阶梯光栅、屋脊反射镜、平面反射镜、聚焦反射镜、光阑和探测器。样品发出的拉曼散射光经过拉曼滤光片照射准直反射镜，准直反射镜将入射的拉曼光变成平行拉曼光垂直照射中阶梯光栅，经中阶梯光栅衍射的正负级次拉曼光分别经屋脊反射镜和平面反射镜的反射，再照射至中阶梯光栅，经中阶梯光栅衍射后获得空间外差拉曼干涉光，最后空间外差拉曼干涉光经过聚焦反射镜和光阑后由探测器接收。本发明的中阶梯光栅型空间外差拉曼光谱仪具有分辨率高、光通量大、测量波段范围宽、无运动部件等优点，可有效提高紫外以及深紫外拉曼光谱的信号强度。
The present invention proposes an optical path structure of an echelle grating type spatial heterodyne Raman spectrometer, including: a Raman filter, a collimating mirror, an echelle grating, a roof mirror, a plane mirror, a focusing mirror, an aperture and a detector . The Raman scattered light emitted by the sample passes through the Raman filter and irradiates the collimating mirror. The collimating mirror converts the incident Raman light into parallel Raman light and irradiates the echelle grating vertically. The positive and negative stages diffracted by the echelle grating The sub-Raman light is respectively reflected by the roof reflector and the plane reflector, and then irradiated to the echelle grating, and after being diffracted by the echelle grating, the spatial heterodyne Raman interference light is obtained, and finally the spatial heterodyne Raman interference light passes through the focusing mirror and received by the detector behind the aperture. The echelle grating spatial heterodyne Raman spectrometer of the present invention has the advantages of high resolution, large luminous flux, wide measurement band range, no moving parts, etc., and can effectively improve the signal intensity of ultraviolet and deep ultraviolet Raman spectra.
Description
技术领域technical field
本发明涉及光谱分析仪器技术领域，特别涉及一种中阶梯光栅型空间外差拉曼光谱仪光路结构。The invention relates to the technical field of spectral analysis instruments, in particular to an optical path structure of an echelle grating type spatial heterodyne Raman spectrometer.
背景技术Background technique
拉曼光谱技术是一种非弹性光散射技术，并由C.V.Raman于1928年首先提出。拉曼光谱具有信息丰富、拉曼频移与入射光频率无关、分析效率高及无损伤探测等特点，因此拉曼光谱已被广泛应用于化学、生物医学、食品安全、航空航天、环境保护等领域。Raman spectroscopy is an inelastic light scattering technique first proposed by C.V.Raman in 1928. Raman spectroscopy has the characteristics of rich information, Raman frequency shift is independent of incident light frequency, high analysis efficiency and non-destructive detection, so Raman spectroscopy has been widely used in chemistry, biomedicine, food safety, aerospace, environmental protection, etc. field.
拉曼光谱仪是利用分析物质散射出来的拉曼光谱而了解被测量物质信息的一种光学检测仪器。传统拉曼光谱仪中存在透射光学元件，用于制作透射光学元件的玻璃材料对紫外光以及深紫外光的吸收很大导致其对拉曼光的透光率较低，所以不适用对紫外以及深紫外拉曼光谱的探测，也不适用于包含紫外波段在内的拉曼全谱扫描。另外，传统的拉曼光谱仪一般不能同时满足高分辨率和高通量的使用要求。The Raman spectrometer is an optical detection instrument that uses the Raman spectrum scattered by the analyzed substance to understand the information of the measured substance. There are transmission optical elements in traditional Raman spectrometers. The glass material used to make transmission optical elements has a large absorption of ultraviolet light and deep ultraviolet light, resulting in low transmittance to Raman light, so it is not suitable for ultraviolet and deep ultraviolet light. The detection of ultraviolet Raman spectrum is not suitable for full-spectrum scanning of Raman including ultraviolet band. In addition, traditional Raman spectrometers generally cannot meet the requirements of high resolution and high throughput at the same time.
为了克服上述缺点，设计一种新的全反射式中阶梯光栅型空间外差拉曼光谱仪光路结构。In order to overcome the above shortcomings, a new optical path structure of the total reflection echelle grating spatial heterodyne Raman spectrometer is designed.
发明内容Contents of the invention
有鉴于此，本发明实施例提供一种具有分辨率高、光通量大、测量波段范围宽、无运动部件的中阶梯光栅型空间外差拉曼光谱仪光路结构。In view of this, embodiments of the present invention provide an optical path structure of an echelle type spatial heterodyne Raman spectrometer with high resolution, large luminous flux, wide measurement wavelength range, and no moving parts.
本发明实施例中提供一种中阶梯光栅型空间外差拉曼光谱仪光路结构，包括：前置成像系统，所述前置成像系统包括拉曼滤光片、准直反射镜；干涉仪，所述干涉仪位于所述前置成像系统的后侧，所述干涉仪包括中阶梯光栅、屋脊反射镜、平面反射镜，所述屋脊反射镜倾斜地位于中阶梯光栅的上侧，所述平面反射镜倾斜地位于中阶梯光栅的下侧，所述屋脊反射镜、所述平面反射镜以及中阶梯光栅的延伸线分别相交形成一个三角形；其中所述中阶梯光栅设有第一反射部及第二反射部，所述第二反射部自所述第一反射部向下延伸形成；后置成像系统，所述后置成像系统位于所述干涉仪的前侧且位于前置成像系统后侧，所述后置成像系统包括聚焦反射镜、光阑；An embodiment of the present invention provides an optical path structure of an echelle grating type spatial heterodyne Raman spectrometer, including: a pre-imaging system, the pre-imaging system includes a Raman filter and a collimating mirror; an interferometer, the The interferometer is located at the rear side of the front imaging system, and the interferometer includes an echelle grating, a roof reflector, and a plane reflector, and the roof reflector is obliquely located on the upper side of the echelle grating, and the plane reflector The mirror is obliquely located on the lower side of the echelle grating, and the extension lines of the roof reflector, the plane reflector and the echelle grating respectively intersect to form a triangle; wherein the echelle grating is provided with a first reflection part and a second reflector. A reflective part, the second reflective part extends downward from the first reflective part; a rear imaging system, the rear imaging system is located at the front side of the interferometer and at the rear side of the front imaging system, the The rear imaging system includes a focusing mirror and a diaphragm;
接收系统，所述接收系统位于所述后置成像系统的上方，所述接收系统包括探测器。A receiving system, the receiving system is located above the rear imaging system, and the receiving system includes a detector.
可选地，沿所述拉曼滤光片的出射光线方向放置所述准直反射镜，沿所述准直反射镜的出射光线方向上放置所述中阶梯光栅，沿所述中阶梯光栅的第一次衍射光线方向上放置所述屋脊反射镜和所述平面反射镜，所述中阶梯光栅的第一次衍射光线分别经过所述屋脊反射镜和所述平面反射镜后再次照射在所述中阶梯光栅的同一位置，沿所述中阶梯光栅的第二次衍射光线方向上放置所述聚焦反射镜，沿所述聚焦反射镜反射光线方向放置所述光阑，沿所述光阑出射光线方向放置所述探测器。Optionally, the collimating mirror is placed along the outgoing light direction of the Raman filter, the echelle grating is placed along the outgoing light direction of the collimating mirror, and the echelle grating is placed along the outgoing light direction of the collimating mirror. The roof reflector and the plane reflector are placed in the direction of the first diffracted light, and the first diffracted light of the echelle grating passes through the roof reflector and the plane reflector respectively and then irradiates on the At the same position of the echelle grating, place the focusing mirror along the direction of the second diffraction light of the echelle grating, place the diaphragm along the direction of the light reflected by the focusing mirror, and emit light along the diaphragm direction to place the detector.
可选地，还包括聚焦透镜和激光器，所述聚焦透镜沿着所述激光器的光线方向放置，所述聚焦透镜的焦平面用于放置待检测物品。Optionally, a focusing lens and a laser are also included, the focusing lens is placed along the light direction of the laser, and the focal plane of the focusing lens is used to place the object to be detected.
可选地，所述激光器发射的激光经所述聚焦透镜后照射待检测物品，待检测物品上的任意一点经激光照射后反射或透射的光束经过所述拉曼滤光片照射在所述准直反射镜上，经所述准直反射镜反射后形成平行拉曼光，平行拉曼光垂直照射在所述中阶梯光栅，经所述中阶梯光栅的第一次衍射的正负级次拉曼光分别照射在所述屋脊反射镜和所述平面反射镜上，经所述屋脊反射镜反射的正级次拉曼光照射在所述平面反射镜，经所述平面反射镜反射的负级次拉曼光照射在所述屋脊反射镜，经所述屋脊反射镜和所述平面反射镜反射的拉曼光再次照射在所述中阶梯光栅的同一位置，再次经所述中阶梯光栅衍射后获得的空间外差拉曼干涉光，空间外差拉曼干涉光沿垂直于所述中阶梯光栅的光栅面方向射出并照射在所述聚焦反射镜，经所述聚焦反射镜反射的空间外差拉曼干涉光最后由所述探测器接收。Optionally, the laser light emitted by the laser irradiates the object to be detected after passing through the focusing lens, and the reflected or transmitted light beam is irradiated on the quasi-detection point through the Raman filter after any point on the object to be detected is irradiated by the laser. On the straight reflector, parallel Raman light is formed after being reflected by the collimating reflector, and the parallel Raman light is vertically irradiated on the echelle grating, and is pulled The Raman light is irradiated on the roof reflector and the plane reflector respectively, the positive order Raman light reflected by the roof reflector is irradiated on the plane reflector, and the negative order Raman light reflected by the plane reflector is The secondary Raman light is irradiated on the roof reflector, and the Raman light reflected by the roof reflector and the plane reflector is irradiated on the same position of the echelle grating again, and is diffracted by the echelle grating again The obtained spatial heterodyne Raman interference light, the spatial heterodyne Raman interference light is emitted along the direction perpendicular to the grating surface of the echelle grating and illuminates the focusing mirror, and the spatial heterodyne reflected by the focusing mirror The Raman interference light is finally received by the detector.
可选地，所述中阶梯光栅的使用级次N大于1，拉曼光谱总测量的波段范围为所述中阶梯光栅的使用级次N和所述中阶梯光栅的每个级次的测量波段范围的乘积。Optionally, the use order N of the échelle grating is greater than 1, and the total measurement band range of the Raman spectrum is the use order N of the échelle grating and the measurement band of each order of the échelle grating The product of ranges.
可选地，所述中阶梯光栅绕着空间直角坐标系的y轴旋转一个小角度(如0.5度)，对系统获得的干涉图作傅立叶变换后使得中阶梯光栅将不同级次的外差拉曼光谱分离。Optionally, the echelle grating rotates a small angle (such as 0.5 degrees) around the y-axis of the space Cartesian coordinate system, and after Fourier transform is performed on the interferogram obtained by the system, the echelle grating pulls heterodynes of different orders Mann spectral separation.
可选地，所述光阑的内部通光部分为圆形或长方形通孔。Optionally, the internal light-transmitting part of the diaphragm is a circular or rectangular through-hole.
从以上技术方案可以看出，本发明实施例具有以下优点：It can be seen from the above technical solutions that the embodiments of the present invention have the following advantages:
1、本发明采用全反射式光路结构有效提高了紫外以及深紫外拉曼光的光通量和信号强度；采用中阶梯光栅可以获得多个级次的空间外差干涉光，提高系统的光谱探测范围和光谱分辨率。1. The present invention adopts the total reflection optical path structure to effectively improve the luminous flux and signal intensity of ultraviolet and deep ultraviolet Raman light; adopting the echelle grating can obtain multiple orders of spatial heterodyne interference light, and improve the spectral detection range and spectral resolution.
2、所述中阶梯光栅的第一反射部作为分束器将垂直入射光分成不同级次的光束射出，所述中阶梯光栅的第二反射部作为合束器将第二次入射到所述中阶梯光栅上的不同级次光整合到同一方向射出，以此获得空间外差拉曼干涉光，而且所述中阶梯光栅可以提高系统的分辨率和增大系统的光通量。2. The first reflective part of the echelle grating acts as a beam splitter to divide the vertically incident light into beams of different orders to emit, and the second reflective part of the echelle grating acts as a beam combiner to split the second incident light into the Different orders of light on the echelle grating are integrated and emitted in the same direction to obtain spatial heterodyne Raman interference light, and the echelle grating can improve the resolution of the system and increase the light flux of the system.
3、采用所述屋脊反射镜可实现入射光和出射光相分离，该种光路结构形式很好的保证了宽光谱范围、高分辨率和高通量的使用要求。3. The phase separation of the incident light and the outgoing light can be achieved by using the roof reflector, and this kind of light path structure can well guarantee the use requirements of wide spectral range, high resolution and high throughput.
4、在所述聚焦反射镜和所述探测器之间放置所述光阑可有效降低所述中阶梯光栅的非使用衍射级次产生的杂散光对拉曼测量结果的影响。4. Placing the diaphragm between the focusing mirror and the detector can effectively reduce the influence of stray light generated by non-used diffraction orders of the echelle grating on the Raman measurement results.
附图说明Description of drawings
图1是本发明的全反射式中阶梯光栅型空间外差拉曼光谱仪光路结构的俯视图。Fig. 1 is a top view of the optical path structure of the total reflection echelle grating spatial heterodyne Raman spectrometer of the present invention.
图2是本发明的全反射式中阶梯光栅型空间外差拉曼光谱仪光路结构的侧视图。Fig. 2 is a side view of the optical path structure of the total reflection echelle grating spatial heterodyne Raman spectrometer of the present invention.
具体实施方式Detailed ways
为了使本技术领域的人员更好地理解本发明方案，下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分的实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都应当属于本发明保护的范围。In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.
请参看图1以及图2，为本发明的全反射式中阶梯光栅型空间外差拉曼光谱仪光路结构，其既可以测量物品的反射拉曼光谱，也可以测量物品的透射拉曼光谱。Please refer to FIG. 1 and FIG. 2 , which show the optical path structure of the total reflection echelle grating spatial heterodyne Raman spectrometer of the present invention, which can measure both the reflected Raman spectrum and the transmitted Raman spectrum of the item.
请参看图1，全反射式中阶梯光栅型空间外差拉曼光谱仪光路结构包括：前置成像系统、干涉仪、后置成像系统以及接收系统。所述前置成像系统包括拉曼滤光片1、准直反射镜2。所述干涉仪位于所述前置成像系统的后侧，所述干涉仪包括中阶梯光栅3、屋脊反射镜4、平面反射镜5，所述屋脊反射镜4倾斜地位于中阶梯光栅3的上侧，所述平面反射镜5倾斜地位于中阶梯光栅3的下侧，所述屋脊反射镜4、所述平面反射镜5以及中阶梯光栅3的延伸线分别相交形成一个三角形。其中所述中阶梯光栅3设有第一反射部及第二反射部，所述第二反射部自所述第一反射部向下延伸形成。Please refer to Figure 1. The optical path structure of the total reflection echelle grating spatial heterodyne Raman spectrometer includes: a front imaging system, an interferometer, a rear imaging system and a receiving system. The front imaging system includes a Raman filter 1 and a collimating mirror 2 . The interferometer is located at the rear side of the front imaging system, and the interferometer includes an echelle grating 3, a roof reflector 4, and a plane reflector 5, and the roof reflector 4 is obliquely located on the echelle grating 3 On the side, the flat reflector 5 is obliquely located on the lower side of the echelle grating 3, and the extension lines of the roof reflector 4, the planar reflector 5 and the echelle grating 3 respectively intersect to form a triangle. The echelle grating 3 is provided with a first reflective portion and a second reflective portion, and the second reflective portion extends downward from the first reflective portion.
所述后置成像系统位于所述干涉仪的前侧且位于前置成像系统后侧，所述后置成像系统包括聚焦反射镜6、光阑7。所述接收系统位于所述后置成像系统的上方，所述接收系统包括探测器8。The rear imaging system is located at the front side of the interferometer and at the rear side of the front imaging system, and the rear imaging system includes a focusing mirror 6 and an aperture 7 . The receiving system is located above the rear imaging system, and the receiving system includes a detector 8 .
其中，所述拉曼滤光片1的作用是过滤掉进入本发明光路中的瑞利散射光，所述准直反射镜2的作用是把进入系统的拉曼光变成平行拉曼光束。Wherein, the function of the Raman filter 1 is to filter out the Rayleigh scattered light entering the optical path of the present invention, and the function of the collimating mirror 2 is to convert the Raman light entering the system into a parallel Raman beam.
其中，所述中阶梯光栅3的第一反射部(上部分)作为分束器将垂直入射光分成不同级次的光束射出，所述中阶梯光栅3的第二反射部(下部分)作为合束器将第二次入射到所述中阶梯光栅3上的不同级次光整合到同一方向射出，以此获得空间外差拉曼干涉光，而且所述中阶梯光栅3可以提高系统的分辨率和增大系统的光通量。Wherein, the first reflective part (upper part) of the echelle grating 3 acts as a beam splitter to divide the vertically incident light into beams of different orders, and the second reflective part (lower part) of the echelle grating 3 acts as a combination The beamer integrates the different orders of light incident on the echelle grating 3 for the second time and emits them in the same direction, so as to obtain spatial heterodyne Raman interference light, and the echelle grating 3 can improve the resolution of the system And increase the luminous flux of the system.
其中，所述屋脊反射镜4的作用是把入射光和出射光分开；所述聚焦反射镜6的作用是把出射光聚焦到探测器8上；所述光阑7的作用是使特定波长特定级次的光输出。Wherein, the function of the roof reflector 4 is to separate the incident light from the outgoing light; the function of the focusing reflector 6 is to focus the outgoing light onto the detector 8; the function of the diaphragm 7 is to make the specific wavelength specific levels of light output.
其中，接收系统：采用探测器阵列接收成像系统获得的拉曼光谱信息。Among them, the receiving system: the detector array is used to receive the Raman spectral information obtained by the imaging system.
请参照图1，沿所述拉曼滤光片1的出射光线方向放置所述准直反射镜2，沿所述准直反射镜2的出射光线方向上放置所述中阶梯光栅3，沿所述中阶梯光栅3的第一次衍射光线方向上放置屋脊反射镜4和平面反射镜5，所述中阶梯光栅的第一次衍射光线分别经过所述屋脊反射镜4和所述平面反射镜5后再次照射在所述中阶梯光栅的同一位置，沿所述中阶梯光栅的第二次衍射光线方向上放置所述聚焦反射镜6，沿所述聚焦反射镜6反射光线方向放置所述光阑7，沿所述光阑7出射光线方向放置所述探测器8。Please refer to Fig. 1, place described collimating reflector 2 along the outgoing light direction of described Raman optical filter 1, place described echelle grating 3 along the outgoing light direction of described collimating reflective mirror 2, along the A roof reflector 4 and a plane reflector 5 are placed on the direction of the first diffracted light of the echelle grating 3, and the first diffracted light of the echelle grating passes through the roof reflector 4 and the plane reflector 5 respectively After irradiating again at the same position of the echelle grating, place the focusing mirror 6 along the direction of the second diffraction light of the echelle grating, and place the diaphragm along the direction of the light reflected by the focusing mirror 6 7. Place the detector 8 along the light emitting direction of the aperture 7 .
请参照图1，还包括聚焦透镜10和激光器11，所述聚焦透镜10沿着所述激光器11的光线方向放置，所述聚焦透镜10的焦平面用于放置待检测物品9。所述激光器11发射的激光经所述聚焦透镜10后照射待检测物品9，待检测物品9上的任意一点经激光照射后反射或透射的光束经过所述拉曼滤光片1照射在所述准直反射镜2上，经所述准直反射镜2反射后形成平行拉曼光，平行拉曼光垂直照射在所述中阶梯光栅3，经所述中阶梯光栅3的第一次衍射的正负级次拉曼光分别照射在所述屋脊反射镜4和所述平面反射镜5上，经所述屋脊反射镜4反射的正级次拉曼光照射在所述平面反射镜5上，经所述平面反射镜5反射的负级次拉曼光照射在所述屋脊反射镜4上，经所述屋脊反射镜4和所述平面反射镜5反射的拉曼光再次照射在所述中阶梯光栅3的同一位置，再次经所述中阶梯光栅3衍射后获得的空间外差拉曼干涉光，空间外差拉曼干涉光沿垂直于所述中阶梯光栅3的光栅面方向射出并照射在所述聚焦反射镜6，经所述聚焦反射镜6反射的空间外差拉曼干涉光最后由所述探测器8接收。Referring to FIG. 1 , it also includes a focusing lens 10 and a laser 11 , the focusing lens 10 is placed along the light direction of the laser 11 , and the focal plane of the focusing lens 10 is used to place the object 9 to be inspected. The laser light emitted by the laser 11 passes through the focusing lens 10 and irradiates the object 9 to be inspected, and any point on the object 9 to be inspected is irradiated by the laser light, and the reflected or transmitted light beam passes through the Raman filter 1 and irradiates on the object to be inspected. On the collimating mirror 2, parallel Raman light is formed after being reflected by the collimating mirror 2, and the parallel Raman light is vertically irradiated on the echelle grating 3, and the first diffraction of the echelle grating 3 The positive and negative secondary Raman light is irradiated on the roof reflector 4 and the plane reflector 5 respectively, and the positive secondary Raman light reflected by the roof reflector 4 is irradiated on the plane reflector 5, The negative secondary Raman light reflected by the plane reflector 5 is irradiated on the roof reflector 4, and the Raman light reflected by the roof reflector 4 and the plane reflector 5 is irradiated on the center again. The same position of the echelle grating 3, the spatial heterodyne Raman interference light obtained after being diffracted by the echelle grating 3 again, the spatial heterodyne Raman interference light is emitted and irradiated along the direction perpendicular to the grating surface of the echelle grating 3 In the focusing mirror 6 , the spatial heterodyne Raman interference light reflected by the focusing mirror 6 is finally received by the detector 8 .
在其中一个实施例中，所述中阶梯光栅3的使用级次N大于1，拉曼光谱总测量的波段范围为所述中阶梯光栅3的使用级次N和所述中阶梯光栅3的每个级次的测量波段范围的乘积。且根据空间外差干涉原理，所述中阶梯光栅3的使用级次N越多，所述光路结构的拉曼光谱分辨率越高，所以采用中阶梯光栅3，不仅能增大光谱测量宽度，而且能提高系统的光谱分辨率。In one of the embodiments, the use order N of the echelle grating 3 is greater than 1, and the total measurement band range of the Raman spectrum is the use order N of the echelle grating 3 and each of the echelle grating 3 The product of the measurement band ranges of the order. And according to the principle of spatial heterodyne interference, the more steps N of the echelle grating 3 are used, the higher the resolution of the Raman spectrum of the optical path structure, so the use of the echelle grating 3 can not only increase the spectral measurement width, Moreover, the spectral resolution of the system can be improved.
请参看图1，为本发明的空间直角坐标系的x轴、y轴如图1所示，z轴垂直图1的纸面。所述中阶梯光栅3绕着空间直角坐标系的y轴旋转一个小角度,具体的所述小角度为0.5度，对系统获得的干涉图作傅立叶变换后使得中阶梯光栅将不同级次的外差拉曼光谱分离。在其它实施例中，所述小角度可为0.6度、0.7度、0.4度等等其它的角度。Please refer to Fig. 1, which is the x-axis and y-axis of the spatial rectangular coordinate system of the present invention as shown in Fig. 1, and the z-axis is perpendicular to the paper surface of Fig. 1 . The echelle grating 3 is rotated by a small angle around the y-axis of the space Cartesian coordinate system, specifically, the small angle is 0.5 degrees, and after Fourier transform is performed on the interferogram obtained by the system, the echelle grating will transform the outer layers of different orders Poor Raman spectral separation. In other embodiments, the small angle may be 0.6 degrees, 0.7 degrees, 0.4 degrees, etc. other angles.
其中，光阑7的内部通光部分为圆形或长方形通孔，在聚焦反射镜6和探测器8之间放置光阑7可有效降低所述中阶梯光栅的非使用衍射级次产生的杂散光对拉曼测量结果的影响。Wherein, the inner light-passing part of the diaphragm 7 is a circular or rectangular through hole, and placing the diaphragm 7 between the focusing mirror 6 and the detector 8 can effectively reduce the noise generated by the non-used diffraction orders of the echelle grating. Effect of astigmatism on Raman measurement results.
本发明的中阶梯光栅型空间外差拉曼光谱仪具有分辨率高、光通量大、测量波段范围宽、无运动部件等优点；本发明采用全反射式光路结构有效提高了紫外以及深紫外拉曼光的光通量和信号强度；采用中阶梯光栅3可以获得多个级次的空间外差干涉光，提高系统的光谱探测范围和光谱分辨率；采用屋脊反射镜可以实现入射光和出射光的分离；系统中干涉条纹的获取无需运动部件，这可以有效地增强仪器拉曼光谱探测的可靠性。The echelle grating type spatial heterodyne Raman spectrometer of the present invention has the advantages of high resolution, large luminous flux, wide measurement band range, and no moving parts; The luminous flux and signal intensity; the use of echelle grating 3 can obtain multiple orders of spatial heterodyne interference light, which improves the spectral detection range and spectral resolution of the system; the use of roof reflectors can realize the separation of incident light and outgoing light; the system The acquisition of medium interference fringes does not require moving parts, which can effectively enhance the reliability of the Raman spectrum detection of the instrument.
以上所述本发明的具体实施方式，并不构成对本发明保护范围的限定。任何根据本发明的技术构思所作出的各种其他相应的改变与变形，均应包含在本发明权利要求的保护范围内。The specific embodiments of the present invention described above do not constitute a limitation to the protection scope of the present invention. Any other corresponding changes and modifications made according to the technical concept of the present invention shall be included in the protection scope of the claims of the present invention.
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