CN108458787A - Echelle grating type space heterodyne Raman spectrometer light channel structure - Google Patents
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- CN108458787A CN108458787A CN201810109855.6A CN201810109855A CN108458787A CN 108458787 A CN108458787 A CN 108458787A CN 201810109855 A CN201810109855 A CN 201810109855A CN 108458787 A CN108458787 A CN 108458787A
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 78
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 238000001237 Raman spectrum Methods 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims abstract description 9
- 230000005855 radiation Effects 0.000 claims abstract description 5
- 238000003384 imaging method Methods 0.000 claims description 24
- 230000005540 biological transmission Effects 0.000 claims description 3
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- 230000004907 flux Effects 0.000 abstract description 7
- 230000003595 spectral effect Effects 0.000 description 7
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- 238000003841 Raman measurement Methods 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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Abstract
The present invention proposes echelle grating type space heterodyne Raman spectrometer light channel structure, including：Raman optical filter, collimating mirror, echelle grating, ridge mirror, plane mirror, focusing mirror, diaphragm and detector.The Raman diffused light that sample is sent out passes through Raman optical filter radiation collimation speculum, incident Raman light is become parallel Raman light vertical irradiation echelle grating by collimating mirror, the reflection through ridge mirror and plane mirror respectively of positive and negative level Raman light through echelle grating diffraction, echelle grating is exposed to again, space heterodyne Raman interference light is obtained after echelle grating diffraction, last space heterodyne Raman interference light is received after focusing mirror and diaphragm by detector.The echelle grating type space heterodyne Raman spectrometer of the present invention has many advantages, such as that high resolution, luminous flux are big, measurement wavelength band is wide, movement-less part, can effectively improve ultraviolet and deep ultraviolet Raman spectrum signal strength.
Description
Technical field
The present invention relates to spectrometric instrument technical field, more particularly to a kind of echelle grating type space heterodyne Raman light
Spectrometer light path structure.
Background technology
Raman spectroscopy is a kind of inelastic optical scattering technology, and is proposed first in nineteen twenty-eight by C.V.Raman.Raman
Spectrum has the characteristics that abundant information, Raman frequency shift are unrelated with incident light frequency, analysis efficiency is high and nondestructive detecting, therefore draws
Graceful spectrum has been widely used in the fields such as chemistry, biomedicine, food security, aerospace, environmental protection.
Raman spectrometer is to understand one kind of substances to be measured information using the Raman spectrum that scatters out of analysis substance
Optical detecting instrument.There are transmission optical component in traditional Raman spectrometer, the glass material for making transmission optical component
Cause very much it relatively low to the light transmittance of Raman light greatly the absorption of ultraviolet light and deep ultraviolet light, thus it is not applicable to ultraviolet and
The detection of deep ultraviolet Raman spectrum is not suitable for composing scanning entirely comprising the Raman including ultraviolet band yet.In addition, traditional Raman
Spectrometer cannot generally meet high-resolution and high-throughput requirement simultaneously.
To overcome the above disadvantages, a kind of new total-reflection type echelle grating type space heterodyne Raman spectrometer light is designed
Line structure.
Invention content
In view of this, offer one kind of the embodiment of the present invention has, high resolution, luminous flux are big, measurement wavelength band is wide, nothing
The echelle grating type space heterodyne Raman spectrometer light channel structure of moving component.
A kind of echelle grating type space heterodyne Raman spectrometer light channel structure is provided in the embodiment of the present invention, including：Before
Imaging system is set, the preposition imaging system includes Raman optical filter, collimating mirror；Interferometer, the interferometer are located at institute
The rear side of preposition imaging system is stated, the interferometer includes echelle grating, ridge mirror, plane mirror, the ridge
Mirror tilt it is located at the upside of echelle grating, the plane mirror is obliquely located at the downside of echelle grating, institute
The extension line for stating ridge mirror, the plane mirror and echelle grating is crossed to form a triangle respectively；Wherein
The echelle grating is equipped with the first reflecting part and the second reflecting part, and second reflecting part is from first reflecting part to downward
It stretches to be formed；Postposition imaging system, the postposition imaging system are located at the front side of the interferometer and after preposition imaging systems
Side, the postposition imaging system include focusing mirror, diaphragm；
Reception system, the reception system are located at the top of the postposition imaging system, and the reception system includes detection
Device.
Optionally, the collimating mirror is placed along the emergent ray direction of the Raman optical filter, it is anti-along the collimation
It penetrates on the emergent ray direction of mirror and places the echelle grating, along the first time diffracted ray direction of the echelle grating
The ridge mirror and the plane mirror are placed, the first time diffracted ray of the echelle grating is respectively by described
The same position of the echelle grating is radiated at after ridge mirror and the plane mirror again, along the middle ladder light
The focusing mirror is placed on second of diffracted ray direction of grid, institute is placed along focusing mirror reflection light direction
Diaphragm is stated, the detector is placed along diaphragm emergent ray direction.
Optionally, further include condenser lens and laser, the condenser lens is put along the radiation direction of the laser
It sets, the focal plane of the condenser lens is for placing article to be detected.
Optionally, the laser of the laser transmitting irradiates article to be detected, article to be detected after the condenser lens
On any point light beam for reflecting or transmit upon laser irradiation be radiated at the collimated reflected by the Raman optical filter
On mirror, parallel Raman light is formed after collimating mirror reflection, parallel Raman light vertical irradiation in the echelle grating,
The positive and negative level Raman light of first time diffraction through the echelle grating is radiated at the ridge mirror and described flat respectively
On the speculum of face, the positive level Raman light reflected through the ridge mirror is radiated at the plane mirror, through the plane
The negative level Raman light of speculum reflection is radiated at the ridge mirror, through the ridge mirror and the plane mirror
The Raman light of reflection is radiated at the same position of the echelle grating again, is obtained after the echelle grating diffraction again
Space heterodyne Raman interference light, space heterodyne Raman interference light projects along perpendicular to the grating face direction of the echelle grating
And it is radiated at the focusing mirror, the space heterodyne Raman interference light through focusing mirror reflection is finally by the detection
Device receives.
Optionally, the use level N of the echelle grating is more than 1, and the wavelength band of Raman spectrum overall measurement is described
The product using level N and the measurement wavelength band of each level of the echelle grating of echelle grating.
Optionally, the echelle grating rotates a low-angle (such as 0.5 degree) around the y-axis of rectangular coordinate system in space,
After making Fourier transform to the interference pattern that system obtains echelle grating is detached the heterodyne Raman spectrum of different levels.
Optionally, the inside thang-kng part of the diaphragm is round or rectangular through holes.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
1, the present invention using total-reflection type light channel structure effectively increase ultraviolet and deep ultraviolet Raman light luminous flux and
Signal strength；The space heterodyne interference light that multiple levels can be obtained using echelle grating improves the spectrographic detection model of system
It encloses and spectral resolution.
2, vertical incidence light is divided into the light beam of different levels as beam splitter by the first reflecting part of the echelle grating
It projects, the second reflecting part of the echelle grating will be incident on the difference in the echelle grating for the second time as bundling device
Level light is integrated into same direction injection, obtains space heterodyne Raman interference light with this, and the echelle grating can carry
The resolution ratio of high system and the luminous flux for increasing system.
3, it can realize that incident light and emergent light are separated using the ridge mirror, this kind of light channel structure form is good
It ensure that the requirement of wide spectral range, high-resolution and high throughput.
4, the diaphragm is placed between the focusing mirror and the detector can effectively reduce the middle ladder light
Influence of the non-stray light generated using diffraction time of grid to Raman Measurement result.
Description of the drawings
Fig. 1 is the vertical view of the total-reflection type echelle grating type space heterodyne Raman spectrometer light channel structure of the present invention.
Fig. 2 is the side view of the total-reflection type echelle grating type space heterodyne Raman spectrometer light channel structure of the present invention.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Fig. 1 and Fig. 2 is please referred to, for the total-reflection type echelle grating type space heterodyne Raman spectrometer light path of the present invention
Structure can both measure the reflection Raman spectrum of article, can also measure the transmission Raman spectrum of article.
Fig. 1 is please referred to, total-reflection type echelle grating type space heterodyne Raman spectrometer light channel structure includes：Preposition imaging
System, interferometer, postposition imaging system and reception system.The preposition imaging system includes Raman optical filter 1, collimated reflected
Mirror 2.The interferometer is located at the rear side of the preposition imaging system, and the interferometer includes echelle grating 3, ridge mirror
4, plane mirror 5, the ridge mirror 4 are obliquely located at the upside of echelle grating 3, and the plane mirror 5 tilts
Ground is located at the downside of echelle grating 3, the extension of the ridge mirror 4, the plane mirror 5 and echelle grating 3
Line is crossed to form a triangle respectively.The wherein described echelle grating 3 is equipped with the first reflecting part and the second reflecting part, and described the
Two reflecting parts are downwardly extending from first reflecting part.
The postposition imaging system is located at the front side of the interferometer and on rear side of the preposition imaging system, the postposition at
As system includes focusing mirror 6, diaphragm 7.The reception system is located at the top of the postposition imaging system, the reception system
System includes detector 8.
Wherein, the effect of the Raman optical filter 1 is the Rayleigh scattering light filtered out into light path of the present invention, the standard
The effect of straight speculum 2 is that the Raman light for entering system is become parallel Raman light beam.
Wherein, vertical incidence light is divided into not by the first reflecting part (upper part) of the echelle grating 3 as beam splitter
Light beam with level projects, and the second reflecting part (lower part) of the echelle grating 3 will be incident on for the second time as bundling device
Different level light in the echelle grating 3 are integrated into same direction injection, and space heterodyne Raman interference light is obtained with this, and
And the echelle grating 3 can improve the resolution ratio of system and increase the luminous flux of system.
Wherein, the effect of the ridge mirror 4 is that incident light and emergent light are separated；The work of the focusing mirror 6
With being that emergent light is focused on detector 8；The effect of the diaphragm 7 is to make the light output of the specific level of specific wavelength.
Wherein, system is received：The Raman spectral information that imaging system obtains is received using detector array.
Fig. 1 is please referred to, the collimating mirror 2 is placed along the emergent ray direction of the Raman optical filter 1, along the standard
The echelle grating 3 is placed on the emergent ray direction of straight speculum 2, along the first time diffraction light of the echelle grating 3
Ridge mirror 4 and plane mirror 5 are placed on line direction, the first time diffracted ray of the echelle grating passes through institute respectively
The same position for being radiated at the echelle grating after ridge mirror 4 and the plane mirror 5 again is stated, along the scala media
The focusing mirror 6 is placed on second of diffracted ray direction of terraced grating, along 6 reflection light direction of the focusing mirror
The diaphragm 7 is placed, the detector 8 is placed along 7 emergent ray direction of the diaphragm.
Fig. 1 is please referred to, further includes condenser lens 10 and laser 11, the condenser lens 10 is along the laser 11
Radiation direction is placed, and the focal plane of the condenser lens 10 is for placing article 9 to be detected.The laser that the laser 11 emits
Article 9 to be detected is irradiated after the condenser lens 10, any point on article 9 to be detected reflect upon laser irradiation or thoroughly
The light beam penetrated is radiated at by the Raman optical filter 1 on the collimating mirror 2, the shape after the reflection of the collimating mirror 2
At parallel Raman light, parallel Raman light vertical irradiation spreads out in the echelle grating 3, the first time through the echelle grating 3
The positive and negative level Raman light penetrated is radiated at respectively on the ridge mirror 4 and the plane mirror 5, is reflected through the ridge
The positive level Raman light that mirror 4 reflects is radiated on the plane mirror 5, and the negative level reflected through the plane mirror 5 is drawn
Graceful light is radiated on the ridge mirror 4, and the Raman light reflected through the ridge mirror 4 and the plane mirror 5 is again
The secondary same position for being radiated at the echelle grating 3, the space heterodyne obtained after 3 diffraction of the echelle grating again are drawn
Graceful interference light, space heterodyne Raman interference light edge are projected perpendicular to the grating face direction of the echelle grating 3 and are radiated at institute
Focusing mirror 6 is stated, the space heterodyne Raman interference light reflected through the focusing mirror 6 is finally received by the detector 8.
The use level N of the echelle grating 3 is more than 1 in one of the embodiments, the wave of Raman spectrum overall measurement
Segment limit is the echelle grating 3 using the measurement wavelength band of level N and each level of the echelle grating 3
Product.And according to space heterodyne principle of interference, the use level N of the echelle grating 3 is more, the Raman of the light channel structure
Spectral resolution is higher, so using echelle grating 3, can not only increase spectral measurement width, and can improve the light of system
Spectral resolution.
Please refer to Fig. 1, for the present invention the x-axis of rectangular coordinate system in space, y-axis as shown in Figure 1, z-axis vertical view 1 paper
Face.The echelle grating 3 rotates a low-angle around the y-axis of rectangular coordinate system in space, and the specific low-angle is 0.5
Degree makes echelle grating by the heterodyne Raman spectrum of different levels point after making Fourier transform to the interference pattern that system obtains
From.In other embodiments, the low-angle can be 0.6 degree, 0.7 degree, 0.4 degree etc. other angle.
Wherein, the inside thang-kng part of diaphragm 7 is round or rectangular through holes, between focusing mirror 6 and detector 8
The non-stray light generated using diffraction time of the echelle grating can effectively be reduced to Raman Measurement result by placing diaphragm 7
It influences.
The echelle grating type space heterodyne Raman spectrometer of the present invention has that high resolution, luminous flux are big, measure wave band
The advantages that range is wide, movement-less part；The present invention effectively increases ultraviolet and deep ultraviolet using total-reflection type light channel structure and draws
The luminous flux and signal strength of graceful light；The space heterodyne interference light of multiple levels can be obtained using echelle grating 3, improve system
The spectrographic detection range and spectral resolution of system；The separation of incident light and emergent light may be implemented using ridge mirror；System
The acquisition of middle interference fringe is not necessarily to moving component, this can effectively enhance the reliability of instrument Raman spectroscopic detection.
The specific implementation mode of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes made by the technical concept of the present invention and deformation, should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (7)
1. a kind of echelle grating type space heterodyne Raman spectrometer light channel structure, which is characterized in that including：
Preposition imaging system, the preposition imaging system include Raman optical filter, collimating mirror；
Interferometer, the interferometer are located at the rear side of the preposition imaging system, and the interferometer includes echelle grating, ridge
Speculum, plane mirror, the ridge mirror are obliquely located at the upside of echelle grating, and the plane mirror tilts
Ground is located at the downside of echelle grating, the extension line point of the ridge mirror, the plane mirror and echelle grating
It is not crossed to form a triangle；
Wherein, the echelle grating is equipped with the first reflecting part and the second reflecting part, and second reflecting part is anti-from described first
The portion of penetrating is downwardly extending；
Postposition imaging system, the postposition imaging system are located at the front side of the interferometer and on rear side of preposition imaging systems,
The postposition imaging system includes focusing mirror, diaphragm；
Reception system, the reception system are located at the top of the postposition imaging system, and the reception system includes detector.
2. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：Along institute
The collimating mirror is placed in the emergent ray direction for stating Raman optical filter, along the emergent ray direction of the collimating mirror
Place the echelle grating, placed along the first time diffracted ray direction of the echelle grating ridge mirror and
The first time diffracted ray of the plane mirror, the echelle grating passes through the ridge mirror and the plane respectively
The same position of the echelle grating is radiated at after speculum again, along second of diffracted ray side of the echelle grating
The focusing mirror is placed upwards, is placed the diaphragm along focusing mirror reflection light direction, is gone out along the diaphragm
It penetrates radiation direction and places the detector.
3. echelle grating type space heterodyne Raman spectrometer light channel structure as claimed in claim 2, it is characterised in that：Also wrap
Condenser lens and laser are included, the condenser lens is placed along the radiation direction of the laser, the coke of the condenser lens
Plane is for placing article to be detected.
4. echelle grating type space heterodyne Raman spectrometer light channel structure as claimed in claim 3, it is characterised in that：It is described
The laser of laser transmitting irradiates article to be detected after the condenser lens, and any point on article to be detected is shone through laser
The light beam for penetrating back reflection or transmission is radiated at by the Raman optical filter on the collimating mirror, through the collimating mirror
Parallel Raman light is formed after reflection, parallel Raman light vertical irradiation is in the echelle grating, and through the echelle grating
The positive and negative level Raman light of diffraction is radiated at respectively on the ridge mirror and the plane mirror, through the ridge
The positive level Raman light of speculum reflection is radiated at the plane mirror, the negative level Raman reflected through the plane mirror
Light is radiated at the ridge mirror, and the Raman light reflected through the ridge mirror and the plane mirror is radiated at again
The same position of the echelle grating, the space heterodyne Raman interference light obtained after the echelle grating diffraction again,
It is projected perpendicular to the grating face direction of the echelle grating and is radiated at the focusing reflection in space heterodyne Raman interference light edge
Mirror, the space heterodyne Raman interference light reflected through the focusing mirror are finally received by the detector.
5. echelle grating type space heterodyne Raman spectrometer light channel structure as claimed in claim 4, it is characterised in that：It is described
The use level N of echelle grating is more than 1, and the wavelength band of Raman spectrum overall measurement is the use level of the echelle grating
The product of the measurement wavelength band of each level of N and the echelle grating.
6. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：It is described
Echelle grating rotates a low-angle around the y-axis of rectangular coordinate system in space, and the interference pattern obtained to system makees Fourier change
So that echelle grating detaches the heterodyne Raman spectrum of different levels after changing.
7. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：It is described
The inside thang-kng part of diaphragm is round or rectangular through holes.
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| CN112067597A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | Remote short-wave ultraviolet Mach Zehnder space heterodyne Raman spectrometer |
| CN112067598A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | Low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection |
| CN112747826A (en) * | 2020-12-07 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high spectral resolution far ultraviolet spectrometer based on diffraction-interference mixing |
| CN112986190A (en) * | 2021-02-24 | 2021-06-18 | 中国科学院长春光学精密机械与物理研究所 | Reflectivity measuring device |
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| CN112747826A (en) * | 2020-12-07 | 2021-05-04 | 中国科学院长春光学精密机械与物理研究所 | Ultra-high spectral resolution far ultraviolet spectrometer based on diffraction-interference mixing |
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| CN108458787B (en) | 2019-08-23 |
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