CN108414087A - A kind of echelle grating type space heterodyne Raman spectrometer light channel structure - Google Patents
A kind of echelle grating type space heterodyne Raman spectrometer light channel structure Download PDFInfo
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 51
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- 238000005079 FT-Raman Methods 0.000 abstract description 3
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0289—Field-of-view determination; Aiming or pointing of a spectrometer; Adjusting alignment; Encoding angular position; Size of measurement area; Position tracking
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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Abstract
The present invention relates to Raman spectrometer fields, specifically disclose a kind of echelle grating type space heterodyne Raman spectrometer light channel structure.Invention realizes space heterodyne type raman spectroscopy measurement using two echelle grating (or an echelle grating and the plane mirror) generation space heterodyne interference effects, the problem low so as to avoid generally there are measurement efficiencies caused by moving component in conventional Fourier transform Raman spectrometer, resolution ratio is low and field widening angle is small；The use level N of the echelle grating is more than 1, in the case where keeping the Raman spectrum overall measurement wavelength band of light path of the present invention constant, the use level N of the echelle grating is more, then the Raman spectrum resolution ratio of light channel structure of the invention is higher, and the backscattering Raman spectrum of sample can be both measured, the transmission Raman spectrum of sample can also be measured.
Description
Technical field
The present invention relates to Raman spectrometer field, more particularly to a kind of echelle grating type space heterodyne Raman spectrometer light
Line structure.
Background technology
For each chemical bond in molecule there are one eigen vibration energy, Raman spectrum is exactly the non-ballistic using molecular link
Property scattering measure.Each Raman peaks just corresponds to a molecular link, therefore Raman spectrum is referred to as " molecular fingerprint " spectrum,
It, can be with the chemical bond of testing biological specimen, protein, lipid and other biologies being present in tissue by raman spectroscopy measurement
Molecule, low-level virus and bacterium, the bulk informations such as the pathogen or even a single cell of different type and type.
Raman spectrum not only can get the information such as discriminating, composition, structure and the conformation of biological sample, but also can analyze macromolecular damage
And the interaction etc. between macromolecular.
Fourier transform raman spectroscopy instrument generates interference spectrogram using Michelson interferometer and then obtains Raman spectrum.It steps
The light path of Ke Erxun interferometers is mainly made of beam splitter and two plane mirrors, and one of plane mirror is static not
It is dynamic, it is constantly moved before and after another plane mirror, to form interference optical path difference.Since generally there are movement portions in the optical path
Part leads to the measurement that full spectral coverage Raman spectrum cannot be completed in synchronization, and since its core light path uses mikey ear
Inferior interferometer structure, leads to fourier transform raman spectroscopy instrument there are measurement efficiencies that low, apparatus structure is not compact, instrument visual field exhibition
The problems such as wide ability is limited.
To overcome the above disadvantages, a kind of new echelle grating type space heterodyne Raman spectrometer light channel structure is designed.
Invention content
In view of this, an embodiment of the present invention provides provide compact-sized one kind, movement-less part, instrument field widening energy
The echelle grating type space heterodyne Raman spectrometer light channel structure that power is strong, spectral resolution is high.
A kind of echelle grating type space heterodyne Raman spectrometer light channel structure is provided in the embodiment of the present invention comprising：
Laser narrow-band pass filter, dichroscope, collimation microscope group, interferometer component, dispersing prism, imaging microscope group and face battle array detection
Device, the collimation microscope group are located at the front of the dichroscope, and the laser narrow-band pass filter is located at the dichroscope
Top；The interferometer component includes a beam splitter and two interfere arms, and two interfere arms are located at the beam splitting
Rear, the top of mirror, two interfere arms include two visual field prisms and at least one echelle grating, the middle ladder
The groove direction of grating is parallel with Z axis, and the use level N of the echelle grating is more than 1, and the wavelength band of overall measurement is described
The product using level N and the measurement wavelength band of each level of the echelle grating of echelle grating；The dispersion
Prism is located at the lower section of the beam splitter, and the dispersing prism is used for the Raman of the different diffraction times of the echelle grating
Different location of the light dispersion simultaneously in the planar array detector；It is logical that the laser that one laser is sent out first passes around the laser narrow-band
Optical filter, then via the dichroscope reflect after, focused on a testee by the collimation microscope group；Testee is sent out
The light gone out becomes directional light after returning through the collimation microscope group collimation, and directional light enters the interferometer component, and directional light is first
It is divided into mutually perpendicular two beams directional light by the beam splitter, using two interfere arms and returns, then mutually
Two vertical beam directional lights form space heterodyne interference light after closing beam using the beam splitter, and space heterodyne interference light is incident to
The dispersing prism and the imaging microscope group, then space heterodyne interference light is detected by the planar array detector.
Optionally, two interfere arms include two echelle grating, and two echelle grating distinguish position
In the rear of the beam splitter, top, the visual field prism is between the beam splitter and the echelle grating, to make
The structural parameters for obtaining two interfere arms are identical.
Optionally, the parameter of two echelle grating is identical.
Optionally, two interfere arms include an echelle grating and a plane mirror, wherein one
A interfere arm is made of a visual field prism and an echelle grating, and another described interfere arm is by one
A visual field prism and a plane mirror composition.
Optionally, projection of the dispersing prism in XOZ coordinate planes is triangular in shape.
Optionally, both the collimation microscope group and the imaging microscope group wherein at least one eyeglass are aspherical mirror.
Optionally, further include Raman optical filter and short wave pass filter, the short wave pass filter is located at the interference
The front of instrument component, the Raman optical filter are located at the front of the short wave pass filter, and the dichroscope is located at the drawing
The front of graceful optical filter.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
1, the present invention is using two echelle grating (or an echelle grating and a plane reflection
Mirror) space heterodyne interference effect is generated to realize space heterodyne type raman spectroscopy measurement, so as to avoid conventional Fourier transform
The problem that generally there are measurement efficiencies caused by moving component in Raman spectrometer is low, resolution ratio is low and field widening angle is small.
2, the use level N of the echelle grating is more than 1, in the Raman spectrum overall measurement for keeping light path of the present invention
In the case that wavelength band is constant, the use level N of the echelle grating is more, then the Raman light of light channel structure of the invention
Spectral resolution is higher.
3, the effect of the short wave pass filter be in order to filter out the interference of the stray light on Raman Measurement wave band, it is described
The effect of visual field prism is to realize the field widening of incident Raman light；The effect of the dispersing prism is so that the middle ladder light
The Raman light of the different diffraction times of grid by dispersion planar array detector different location, to avoid echelle grating not at the same level
It is secondary that level aliasing is generated on the planar array detector.
Description of the drawings
Fig. 1 is the schematic diagram of the echelle grating type space heterodyne Raman spectrometer light channel structure of the present invention；
Fig. 2 is the spatial relation schematic diagram of the dispersing prism of the present invention；
Fig. 3 is the space heterodyne interference light of the different levels generation by echelle grating in the present invention in planar array detector
Location diagram.
Specific implementation mode
In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention
Attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
The every other embodiment that member is obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Fig. 1 is please referred to, for the echelle grating type space heterodyne Raman spectrometer light channel structure of the present invention, can both be surveyed
The backscattering Raman spectrum for measuring sample, can also measure the transmission Raman light of sample.
Echelle grating type space heterodyne Raman spectrometer light channel structure includes：Laser narrow-band pass filter 2, dichroscope
3, microscope group 4, Raman optical filter 5, short wave pass filter 6, interferometer component 7, dispersing prism 8, imaging microscope group 9 and face battle array are collimated
Detector 10, the short wave pass filter 6 are located at the front of the interferometer component 7, and the Raman optical filter 5 is located at described short
The front of wave pass filter 6, the dichroscope 3 are located at the front of the Raman optical filter 5, and the collimation microscope group 4 is located at institute
The front of dichroscope 3 is stated, the laser narrow-band pass filter 2 is located at the top of the dichroscope 3, the dispersing prism 8
Positioned at the lower section of the interferometer component 7, the imaging microscope group 9 is located at the lower section of the dispersing prism 8, the planar array detector
10 are located at the lower section of the imaging microscope group 9.The imaging microscope group 9 can be the imaging lens group or can be the imaging
Speculum group.The collimation microscope group 4 can be collimation lens set or can be collimation speculum group.
In one of the embodiments, the interferometer component 7 include a beam splitter 701 and two interfere arms, two
The interfere arm is located at the rear of the beam splitter 701, top, two interfere arms include two visual field prisms 702,
704 and at least one echelle grating 703, the groove direction of the echelle grating 703 it is parallel with Z axis.
Two interfere arms include two echelle grating 703,705, two institutes in one of the embodiments,
It states echelle grating 703,705 and is located at the rear of the beam splitter 701, top, the visual field prism 702,704 is located at institute
It states between beam splitter 701 and the echelle grating 703,705, so that the complete phase of the structural parameters of two interfere arms
Together.The parameter of two echelle grating 703,705 is identical, and the groove of two echelle grating 703,705 is close
Degree is 79line/mm, and the litrrow incidence angles under 532nm wavelength are 20.9 degree.Two echelle grating 703,
705 effective usable floor area is 6mm × 6mm.
The use level N of the echelle grating 703,705 is more than 1 in one of the embodiments, the wave band of overall measurement
The ranging from measurement using level N and each level of the echelle grating 703,705 of the echelle grating 703,705
The product of wavelength band.
The use level N of the echelle grating 703,705 is more than 1 in one of the embodiments, the wave band of overall measurement
The ranging from measurement using level N and each level of the echelle grating 703,705 of the echelle grating 703,705
The product of wavelength band.
Projection of the dispersing prism 8 in XOZ coordinate planes is triangular in shape in one of the embodiments,.The color
The effect for dissipating prism 8 is so that the Raman light of the different diffraction times of the echelle grating 703,705 is visited by dispersion in face battle array
Survey the different location of device 10.
The anaberration lens that the effective focal length of the collimation microscope group 4 is 30mm in one of the embodiments,.Specifically,
What the collimation microscope group 4 was selected is that the anaberration that the effective focal length that Edmund Optics company models are 49662 is 30mm is saturating
Mirror.
The short wave pass filter 6 is the short wave pass filter 6 of 700nm in one of the embodiments,.Specifically, institute
State the selection of short wave pass filter 6 is the 700nm short wave pass filters 6 of the model 84-714 of Edmund Optics companies.Institute
The effect for stating short wave pass filter 6 is and the laser narrow-band in order to filter out the interference of the stray light on Raman Measurement wave band
Pass filter 2 is used to filter out the interference of stray light other than optical maser wavelength.
What the beam splitter 701 in the interferometer component 7 was selected in one of the embodiments, is Newport companies
The optical manufacturing parameter of 20BC17MB.1 type products, two visual field prisms 702,704 is identical, the visual field prism
702,704 effect is to realize the field widening of incident Raman light.
Fig. 1 and Fig. 2 is please referred to, the laser that a laser is sent out first passes around the laser narrow-band pass filter 2, then passes through
After being reflected by the dichroscope 3, focused on a testee by the collimation microscope group 4；The Raman that testee is sent out
Scattering light, which returns through, becomes directional light after the collimation microscope group 4 collimation, and directional light passes through the Raman optical filter 5 and described short
Wave pass filter 6, enters back into the interferometer component 7, and directional light first passes through the beam splitter 701 and is divided into mutually perpendicular two
Beam directional light using two interfere arms and returns, and then mutually perpendicular two beams directional light is using the beam splitter
701 close formation space heterodyne interference light after beam, and space heterodyne interference light is incident to the dispersing prism 8 and the imaging microscope group 9,
Space heterodyne interference light is detected by the planar array detector 10 again.
Specifically, the first stage：The laser that the laser is sent out first passes around the laser narrow-band pass filter 2 and filters
After interference of stray light in addition to optical maser wavelength, then via the dichroscope 3 reflect after, by the collimation microscope group 4 focusing
Onto testee；Second stage, the Raman diffused light that testee is sent out become flat after the collimation microscope group 4 collimation
Row light first passes through the Raman optical filter 5 and the short wave pass filter 6, then enters back into the interferometer component 7；Third rank
Section, for directional light after the beam splitter 701, directional light is divided into mutually perpendicular two beams directional light, and passes through two respectively
The visual field prism 702,704 of the interfere arm, and two echelle grating 703,705 surfaces are incident to, it passes through respectively
It crosses after two echelle grating 703,705 diffraction again by two visual field prisms 702,704, is again introduced into described
Beam splitter 701 forms space heterodyne interference light after closing beam, and space heterodyne interference light is incident to the dispersing prism 8 and the imaging
Microscope group 9, then the difference interference light for injecting the imaging microscope group 9 is detected by the planar array detector 10.
Fig. 3 is please referred to, due to the effect of the dispersing prism 8, by the difference of two echelle grating 703,705
For the difference interference Raman light of diffraction time by dispersion simultaneously in the different location of the planar array detector 10, the N in Fig. 3 is described
For echelle grating 703,705 using the number of level, i.e. the use level of the echelle grating 703,705 is respectively m, m+
1 ..., m+N, the planar array detector pixel number shared by the corresponding Raman difference interference figure width of each level is respectively n0,
n1n2..., nN。
The use level N of the echelle grating 703,705 is more than 1, is keeping the Raman spectrum of the light path of the present invention total
In the case that measurement wavelength band is constant, the use level N of the echelle grating 703,705 is more, then light of the present invention
The Raman spectrum resolution ratio of line structure is higher.In addition, the laser selection of one embodiment wherein of the present invention is Changchun
532 Ramar laser of MSL-FN-532 models of NPD projects Photoelectric Co., Ltd..
Both the collimation microscope group 4 and the imaging microscope group 9 wherein at least one eyeglass in one of the embodiments,
For aspherical mirror (such as cylindrical mirror or paraboloidal mirror)；The dispersing prism 8 is used cooperatively with the aspherical mirror, can will be described
The dispersion simultaneously of the corresponding difference interference Raman light of different diffraction times of echelle grating 703,705 is in the planar array detector 10
Different location, to avoid the corresponding difference interference Raman light of the different level of echelle grating 703,705 from being visited in face battle array
It surveys and generates level aliasing on device 10.
When installing in one of the embodiments, the echelle grating 703 around Y-axis there are certain rotation angle, it is described
Echelle grating 705 has certain rotation angle around X-axis, its purpose is to coordinate prism 8 and imaging microscope group 9, reaches and avoids light
Compose the purpose of aliasing.
Two interfere arms include that an echelle grating 703 and one are flat in one of the embodiments,
Face speculum, one of them described interfere arm are made of a visual field prism 702 and an echelle grating 703,
And another described interfere arm is made of a visual field prism 704 and a plane mirror.Specifically, the first rank
Section, the laser that the laser is sent out after the laser narrow-band pass filter 2, then via the dichroscope 3 reflect after,
It is focused on testee by the collimation microscope group 4；Second stage, the Raman diffused light that testee is sent out pass through the standard
After straight microscope group 4 collimates, becomes directional light by the Raman optical filter 5 and the short wave pass filter 6, enter back into the interference
Instrument component 7；Phase III, directional light light beam after the beam splitter 701 is divided into mutually perpendicular two beams directional light, and divides
The visual field prism 702,704 not Jing Guo two interfere arms, and it is incident to an echelle grating 703 and one
The surface of the plane mirror passes through 703 diffraction of the echelle grating respectively and a plane mirror is anti-
Again by two visual field prisms 702,704 after penetrating, space heterodyne is formed after then closing beam using the beam splitter 701
Interference light, space heterodyne interference light are incident to the dispersing prism 8 and the imaging microscope group 9, then by the planar array detector 10
Difference interference light to injecting the imaging microscope group 9 detects.
The present invention in the design process, using two echelle grating 703,705 (or echelle grating
703 and a plane mirror) generate space heterodyne interference effect and realize space heterodyne type raman spectroscopy measurement, to
To avoid in Traditional Space heterodyne Raman spectrometer that generally there are measurement efficiencies caused by moving component low, resolution ratio is low and visual field
Broaden the small problem of angle.In addition, the use level N of echelle grating 703,705 of the present invention is more than 1, this hair is being kept
In the case that the Raman spectrum overall measurement wavelength band of bright light path is constant, the use level N of the echelle grating 703,705
More, then the Raman spectrum resolution ratio of light channel structure of the present invention is higher.
The specific implementation mode of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes made by the technical concept of the present invention and deformation, should be included in the guarantor of the claims in the present invention
It protects in range.
Claims (8)
1. a kind of echelle grating type space heterodyne Raman spectrometer light channel structure, which is characterized in that including：The logical filter of laser narrow-band
Mating plate, dichroscope, collimation microscope group, interferometer component, dispersing prism, imaging microscope group and planar array detector, the collimating mirror
Group is located at the top of the dichroscope positioned at the front of the dichroscope, the laser narrow-band pass filter；
The interferometer component includes a beam splitter and two interfere arms, and two interfere arms are located at the beam splitter
Rear, top, two interfere arms include two visual field prisms and at least one echelle grating, the middle ladder light
The groove direction of grid is parallel with Z axis；
The dispersing prism is located at the lower section of the beam splitter, and the dispersing prism is for spreading out the difference of the echelle grating
Different location of the Raman light dispersion simultaneously in the planar array detector of level is penetrated, the use level N of the echelle grating is big
In 1, the wavelength band of overall measurement is the survey using level N and each level of the echelle grating of the echelle grating
Measure the product of wavelength band；
The laser that one laser is sent out first passes around the laser narrow-band pass filter, then after being reflected via the dichroscope,
It is focused on a testee by the collimation microscope group；After the light that testee is sent out returns through the collimation microscope group collimation
Become directional light, into the interferometer component, directional light first passes through the beam splitter, and to be divided into mutually perpendicular two beam parallel
Light using two interfere arms and returns, after then mutually perpendicular two beams directional light closes beam using the beam splitter
Space heterodyne interference light is formed, space heterodyne interference light is incident to the dispersing prism and the imaging microscope group, then by the face
Array detector detects space heterodyne interference light.
2. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：Two
The interfere arm include two echelle grating, two echelle grating be located at the beam splitter rear,
Top, the visual field prism is between the beam splitter and the echelle grating, so that two interfere arms
Structural parameters are identical.
3. echelle grating type space heterodyne Raman spectrometer light channel structure as claimed in claim 2, it is characterised in that：Two
The parameter of the echelle grating is identical.
4. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：Two
The interfere arm includes an echelle grating and a plane mirror, one of them described interfere arm is by an institute
Visual field prism and an echelle grating composition are stated, and another described interfere arm is by a visual field prism and one
The plane mirror composition.
5. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：It is described
Projection of the dispersing prism in XOZ coordinate planes is triangular in shape.
6. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：It is described
Collimation microscope group is anaberration lens.
7. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：It is described
Collimation both microscope group and the imaging microscope group wherein at least one eyeglass is aspherical mirror.
8. echelle grating type space heterodyne Raman spectrometer light channel structure as described in claim 1, it is characterised in that：Also wrap
Raman optical filter and short wave pass filter are included, the short wave pass filter is located at the front of the interferometer component, the drawing
Graceful optical filter is located at the front of the short wave pass filter, and the dichroscope is located at the front of the Raman optical filter.
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| CN110553736A (en) * | 2019-10-17 | 2019-12-10 | 中国科学院长春光学精密机械与物理研究所 | raman spectrometer |
| CN110793954A (en) * | 2019-11-05 | 2020-02-14 | 中国科学院苏州生物医学工程技术研究所 | Portable Raman blood identification system based on echelle grating |
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| CN113189079A (en) * | 2021-04-26 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Spatial heterodyne Raman spectrometer system |
| CN113566961A (en) * | 2021-07-12 | 2021-10-29 | 钢研纳克检测技术股份有限公司 | Small fixing device for echelle grating and posture adjusting method |
| CN114719983A (en) * | 2022-04-12 | 2022-07-08 | 中国科学院长春光学精密机械与物理研究所 | Spatial heterodyne Raman spectrometer |
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