CN112067598A - Low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection - Google Patents
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- 238000005139 ultra-violet Raman spectroscopy Methods 0.000 claims description 6
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01N21/65—Raman scattering
- G01N2021/653—Coherent methods [CARS]
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Abstract
A low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection comprises a front objective, a Raman optical filter, a beam splitter with a diaphragm, a first collimating objective, a first reflection grating, a second collimating objective, a second reflection grating, a third collimating objective and an area array camera. The first collimating objective and the third collimating objective form a 4f system, and the second collimating objective and the third collimating objective form a 4f system; after diffraction spectrum signals reflected by the first grating and the second grating pass through a beam splitter with a diaphragm, only spectrum signals of effective diffraction orders enter the area array camera; the low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection can effectively inhibit grating non-useful-order stray light and improve the signal-to-noise ratio and sensitivity of the short-wave ultraviolet Raman spectrum detection.
Description
Technical Field
The invention relates to the field of optical imaging, in particular to a low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection.
Background
The Raman spectrum reflects the internal structure and state characteristics of molecules, has a fingerprint effect, and is an important means for analyzing the structure of an organic compound. Has important application value in the fields of biomedicine, chemical analysis, pollutant monitoring and the like.
The spatial heterodyne raman spectrometer has limited characteristics of high flux, wide field of view, compact structure and the like, and is an important raman spectrum testing method developed in recent years. The short-wave ultraviolet Raman spectrum has the advantages of high excitation efficiency, weak fluorescence signal, low background noise, enhanced resonance and the like, and is one of important development directions of the Raman spectrum. However, when the short-wave ultraviolet spectrum (200 nm-300 nm) is detected, the wavelength is only 1/3-1/2 of visible near-infrared light, so that the invalid diffraction order of the grating is multiplied, and the included angle between adjacent diffraction orders is reduced, thereby increasing the stray light of the system, reducing the detection sensitivity of the system, and simultaneously, a spectrum false peak may occur to influence the accuracy of Raman spectrum detection.
Disclosure of Invention
The invention aims to provide a low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection so as to overcome the problems in the prior art. By arranging the 4f system in the conventional Michelson spatial heterodyne interference structure, the stray light of the invalid diffraction order of the grating is effectively inhibited, and the sensitivity and accuracy of short-wave ultraviolet Raman spectrum detection are improved.
In order to achieve the above purpose, the technical scheme of the invention is as follows:
a low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection comprises a front objective lens 1, a Raman optical filter 2, a beam splitter 3 with a diaphragm, a first collimating objective lens 4, a first reflection grating 5, a second collimating objective lens 6, a second reflection grating 7, a third collimating objective lens 8 and an area array camera 9, wherein the front objective lens 1, the Raman optical filter 2, the beam splitter, the first collimating objective lens, the second collimating objective lens, the third reflection grating and the area array camera are arranged along a light path; wherein the geometric center of the beam splitter 3 with the diaphragm is positioned at the center of the image surface of the front objective lens and is also positioned at the front focal positions of the first collimating objective lens 4, the second collimating objective lens 6 and the third collimating objective lens 8; the geometric center of the first reflection grating 5 is positioned at the back focal position of the first collimating objective 4, the geometric center of the second reflection grating 7 is positioned at the back focal position of the second collimating objective 6, and the photosensitive surface of the area-array camera 9 is positioned at the back focal position of the third collimating objective 8.
Preferably, the first collimator objective 4 and the second collimator objective 5 are the same lens.
Preferably, the first reflection grating 5 and the second reflection grating 6 are the same grating.
As a preferred technical scheme, when the raman spectrum excitation light source is in a same-frequency laser incidence system, an included angle between the incident light of the first reflection grating 5 and the normal thereof is a Littrow angle, and an included angle between the incident light of the second reflection grating 6 and the normal thereof is a Littrow angle.
As a preferable technical solution, the beam splitter 3 with the aperture stop is composed of a beam splitter mirror and front and rear surface apertures, and the adjustment of the light transmission width of the beam splitter 3 with the aperture stop is realized by controlling the size of the aperture stop.
Preferably, the beam splitter is made of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass.
As a preferable technical scheme, the joint of the two lenses is plated with a short-wave ultraviolet semi-transparent and semi-reflective film.
Compared with the prior art, the invention has the beneficial effects that:
the low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection can effectively inhibit invalid diffraction-order stray light generated by the grating, can improve the signal-to-noise ratio of the short-wave ultraviolet Raman spectrum detection, and further improves the sensitivity; meanwhile, false peaks are avoided, and the accuracy of short-wave ultraviolet Raman spectrum detection is improved.
Drawings
FIG. 1 is a schematic structural diagram of a low-noise spatial heterodyne spectrometer for short-wave UV Raman spectroscopy detection according to the present invention.
FIG. 2 is a schematic structural diagram of a beam splitter with a diaphragm in a low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectroscopy detection of the present invention.
Detailed Description
Examples
As shown in fig. 1, a low-noise spatial heterodyne spectrometer for short-wave ultraviolet raman spectroscopy detection includes a front objective (1) disposed along a light path, a raman filter (2), a beam splitter (3) with a diaphragm, a first collimating objective (4), a first reflective grating (5), a second collimating objective (6), a second reflective grating (7), a third collimating objective (8), and a planar array camera (9); wherein the geometric center of the beam splitter (3) with the diaphragm is positioned at the image surface center of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens (4), the second collimating objective lens (6) and the third collimating objective lens (8); the geometric center of the first reflection grating (5) is positioned at the back focal position of the first collimating objective lens (4), the geometric center of the second reflection grating (7) is positioned at the back focal position of the second collimating objective lens (6), and the photosensitive surface of the area array camera (9) is positioned at the back focal position of the third collimating objective lens (8). All optical elements are co-axially level with respect to the substrate, i.e. with respect to the optical bench or the instrument base.
Preferably, the first collimator objective (4) and the second collimator objective (5) have the same specifications.
The first collimating objective lens (4) and the third collimating objective lens (8) form a 4f system, and a diffraction light wave surface of the first reflection grating (5) can be imaged on a photosensitive surface of the area-array camera (9); the second collimating objective lens (6) and the third collimating objective lens (8) form a 4f system, and the wave surface of the diffracted light of the second reflection grating (7) can be imaged on the photosensitive surface of the area-array camera (9).
The specifications of the first reflection grating (5) and the second reflection grating (6) are the same; when the Raman spectrum excitation light source is incident on the system with the same frequency laser, the included angle between the incident light of the first reflection grating (5) and the normal thereof is a Littrow angle, and the included angle between the incident light of the second reflection grating (6) and the normal thereof is a Littrow angle.
As shown in fig. 2, the beam splitter (3) with a diaphragm is composed of a beam splitter, a front surface diaphragm (311) and a rear surface diaphragm (312), and the light transmission width of the beam splitter (3) with a diaphragm can be adjusted by controlling the diaphragm size. The beam splitter (313) is composed of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass, and a short-wave ultraviolet semi-transparent and semi-reflective film is coated at the joint of the two pieces of lenses.
When the planar grating is used, the first planar grating (5) and the second planar grating (7) can generate a plurality of orders of diffracted light beams, and only one effective diffraction order of light signals needs to be detected. If other invalid diffraction order optical signals enter the area-array camera (9), stray light and pseudo peaks can be formed, and the detection sensitivity and precision of the short-wave ultraviolet Raman spectrum are influenced. By using a 4f imaging system formed by the first collimating objective lens (4) and the third collimating objective lens (8), the invalid diffraction order stray light formed by the first plane grating (5) can be filtered by matching with the beam splitter (3) with the diaphragm. By using a 4f imaging system consisting of a second collimating objective (6) and a third collimating objective (8), the invalid diffraction order stray light formed by the second plane grating (7) can be filtered by matching with the beam splitter (3) with the diaphragm. The light path of the invalid diffraction order stray light is effectively blocked by the beam splitter (3) with the diaphragm as shown by a dotted line in figure 1, and then the invalid diffraction order stray light cannot enter the area-array camera (9). The invention can effectively inhibit the invalid diffraction order stray light generated by the grating, and can improve the signal-to-noise ratio of short-wave ultraviolet Raman spectrum detection, thereby improving the sensitivity; meanwhile, false peaks are avoided, and the accuracy of short-wave ultraviolet Raman spectrum detection is improved.
Claims (7)
1. A low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection is characterized in that: the Raman spectrometer comprises a front objective (1) arranged along a light path, a Raman optical filter (2), a beam splitter (3) with a diaphragm, a first collimating objective (4), a first reflection grating (5), a second collimating objective (6), a second reflection grating (7), a third collimating objective (8) and an array camera (9); wherein the geometric center of the beam splitter (3) with the diaphragm is positioned at the image surface center of the front objective lens and is also positioned at the front focus positions of the first collimating objective lens (4), the second collimating objective lens (6) and the third collimating objective lens (8); the geometric center of the first reflection grating (5) is positioned at the back focal position of the first collimating objective lens (4), the geometric center of the second reflection grating (7) is positioned at the back focal position of the second collimating objective lens (6), and the photosensitive surface of the area array camera (9) is positioned at the back focal position of the third collimating objective lens (8).
2. The low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy detection of claim 1, wherein: the first collimator objective (4) and the second collimator objective (5) are the same lens.
3. The low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy detection of claim 1, wherein: the first reflection grating (5) and the second reflection grating (6) are the same grating.
4. The low noise spatial heterodyne spectrometer for short wave UV Raman spectroscopy detection according to claim 3, wherein: when the Raman spectrum excitation light source is incident on the system with the same frequency laser, the included angle between the incident light of the first reflection grating (5) and the normal line thereof is a Littrow angle, and the included angle between the incident light of the second reflection grating (6) and the normal line thereof is a Littrow angle.
5. The low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy detection of claim 1, wherein: the beam splitter (3) with the diaphragm is composed of a beam splitter mirror and front and rear surface diaphragms, and the light transmission width of the beam splitter (3) with the diaphragm is adjusted by controlling the size of the diaphragm.
6. The low noise spatial heterodyne spectrometer for short wave ultraviolet raman spectroscopy detection of claim 1, wherein: the beam splitter is composed of two pieces of ultraviolet quartz optical glass or two pieces of ultraviolet plastic glass.
7. The low noise spatial heterodyne spectrometer for short wave UV Raman spectroscopy detection according to claim 6, wherein: the joint of the two lenses is plated with a short-wave ultraviolet semi-transparent semi-reflective film.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033265A (en) * | 2012-12-21 | 2013-04-10 | 南京理工大学 | Device and method of space heterodyning interference hyper spectrum imaging |
| CN108181237A (en) * | 2018-02-05 | 2018-06-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of light channel structure of space heterodyne Raman spectroscopy instrument |
| CN108387317A (en) * | 2018-03-06 | 2018-08-10 | 桂林电子科技大学 | A kind of prism-type space heterodyne spectrograph |
| CN108458787A (en) * | 2018-02-05 | 2018-08-28 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating type space heterodyne Raman spectrometer light channel structure |
| CN110987898A (en) * | 2019-12-06 | 2020-04-10 | 中国科学院合肥物质科学研究院 | Spatial heterodyne offset Raman spectrum detection device and detection method thereof |
-
2020
- 2020-09-15 CN CN202010965092.2A patent/CN112067598B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103033265A (en) * | 2012-12-21 | 2013-04-10 | 南京理工大学 | Device and method of space heterodyning interference hyper spectrum imaging |
| CN108181237A (en) * | 2018-02-05 | 2018-06-19 | 中国科学院长春光学精密机械与物理研究所 | A kind of light channel structure of space heterodyne Raman spectroscopy instrument |
| CN108458787A (en) * | 2018-02-05 | 2018-08-28 | 中国科学院长春光学精密机械与物理研究所 | Echelle grating type space heterodyne Raman spectrometer light channel structure |
| CN108387317A (en) * | 2018-03-06 | 2018-08-10 | 桂林电子科技大学 | A kind of prism-type space heterodyne spectrograph |
| CN110987898A (en) * | 2019-12-06 | 2020-04-10 | 中国科学院合肥物质科学研究院 | Spatial heterodyne offset Raman spectrum detection device and detection method thereof |
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