CN108181237A - A kind of light channel structure of space heterodyne Raman spectroscopy instrument - Google Patents
A kind of light channel structure of space heterodyne Raman spectroscopy instrument Download PDFInfo
- Publication number
- CN108181237A CN108181237A CN201810110122.4A CN201810110122A CN108181237A CN 108181237 A CN108181237 A CN 108181237A CN 201810110122 A CN201810110122 A CN 201810110122A CN 108181237 A CN108181237 A CN 108181237A
- Authority
- CN
- China
- Prior art keywords
- raman
- lens
- light
- optical filter
- prism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The present invention proposes that a kind of light channel structure of space heterodyne Raman spectroscopy instrument mainly includes：Collimation lens, condenser lens, the first Raman optical filter, beam splitter prism, two prism wedges, two balzed grating,s, the second Raman optical filter, non-spherical lens, imaging lens group, planar array detector, objective table, beam expander and laser.The Raman light that sample is sent out is focused onto after collimation lens, condenser lens and the first Raman optical filter on the balzed grating, of interferometer two-arm, beam splitter prism is again passed by later and closes beam acquisition space heterodyne Raman interference light, is finally received after the second Raman optical filter, non-spherical lens and imaging lens group by planar array detector.The present invention effectively increases the picking rate of each frame heterodyne Raman interference light of planar array detector using non-spherical lens.The present invention realizes the quick measurement of the Raman spectrum of sample surface each position, while has many advantages, such as that high resolution, luminous flux are big, it is wide to measure wavelength band.
Description
Technical field
The present invention relates to spectrometric instrument technical field, more particularly to a kind of light of space heterodyne Raman spectroscopy instrument
Line structure.
Background technology
Raman spectroscopy is that a kind of Raman light scattering light generated based on light-matter interaction is lossless to carry out
The method quickly detected.After incident laser radiation to measured object, it can inspire and not inhibit with incident laser frequency and frequency is entering
Penetrate the Raman diffused light near light.By analyzing the Raman diffused light, you can obtain the molecular system phase of measurand
Close information.According to the difference of the molecular structure of object or state, molecule has corresponding Raman spectrum.Raman spectrum
Have many advantages, such as non-destructive, Noninvasive, without carry out sample processing, therefore Raman spectrum be widely used in chemistry,
The fields such as biomedicine, food security, aerospace, environmental protection.For example, in biomedical sector, by detecting due to people
Tissue, body fluid or Raman spectrum difference caused by cell equimolecular structure change are, it can be achieved that human body caused by body disease
Disease in body or Testing in vitro.
Raman spectrometer is using analyzing the Raman spectrum and the one kind for understanding substances to be measured information that substance scatters out
Optical detecting instrument.Raman spectrometer mainly has：Color dispersion-type Raman spectrometer, FTRaman SpectrometerFTIRRaman and space heterodyne
Raman spectrometer.The Raman spectrometer of color dispersion-type needs very small slit that could obtain higher resolution ratio, so color dispersion-type
Raman spectrometer can not obtain higher luminous flux；FTRaman SpectrometerFTIRRaman does not need to entrance slit, can realize height
Flux feature, but this kind of spectrometer needs to obtain optical path difference using moving component.Space heterodyne Raman spectrometer combines color
Dissipate both type Raman spectrometer and fourier transform raman spectroscopy instrument the advantages of, can be achieved at the same time movement-less part, high light flux,
High-resolution and broadband range.But in existing Raman spectrometer technology, it is radiated at using the laser facula focused on
On sample, raman spectroscopy measurement is carried out to a specific location on sample；If desired entire sample surfaces are measured, then needed
The carry out point by point scanning of an a location point then location point is wanted, the disadvantages of this method is that measurement efficiency is relatively low, is not suitable for sample
The full surface fast Raman of product measures.
To overcome the above disadvantages, a kind of light channel structure of new space heterodyne Raman spectroscopy instrument is designed.
Invention content
In view of this, an embodiment of the present invention provides a kind of high resolution, the spaces that luminous flux is big, measurement wavelength band is wide
The light channel structure of heterodyne Raman spectroscopy instrument.
A kind of light channel structure of space heterodyne Raman spectroscopy instrument is provided in the embodiment of the present invention, including：It is preposition into
As system：Objective table, beam expander, laser, collimation lens, condenser lens and the first Raman optical filter；Interferometer, it is described dry
Interferometer is located at the rear of the preposition imaging system, and the interferometer glares including beam splitter prism, two prism wedges, two
Grid；Postposition imaging system, the postposition imaging system are located at the lower section of the interferometer, and the postposition imaging system includes second
Raman optical filter, non-spherical lens, imaging lens group；Reception system, the reception system are located at the postposition imaging system
Lower section, the reception system include planar array detector；The focal plane that the objective table is located at the collimation lens is treated with placement
It detects article and the objective table is used to carry out step motion along the Y-axis in rectangular coordinate system in space；Along the collimation lens
The condenser lens is placed in emergent ray direction, and any point that the condenser lens is used to implement on article to be detected focuses on institute
State on balzed grating, it is unique a bit；The first Raman optical filter, edge are placed along the condenser lens emergent ray direction
The beam splitter prism is placed on the first Raman optical filter emergent ray direction, radiation direction is emitted along the beam splitter prism two
It is upper to place two prism wedges respectively, two sudden strains of a muscle are placed respectively along two prism wedge emergent ray directions
Credit grating places the second Raman optical filter along through the beam splitter prism return projector direction, filters along second Raman
Piece emergent ray places the non-spherical lens on direction, and the imaging is placed along the non-spherical lens emergent ray direction
Lens group and the non-spherical lens are used for Z axis side of the heterodyne Raman interference light of article to be detected in rectangular coordinate system in space
It is compressed upwards, the planar array detector is placed finally along the imaging lens group emergent ray direction.
Optionally, the number of the objective table step motion is equal to the planar array detector in rectangular coordinate system in space
The pixel number of X-axis.
Optionally, the objective table each time step motion distance be equal to sample a Raman Measurement area in Y-axis
The pixel number of the length in direction divided by the surface detector in the X-axis direction.
Optionally, the laser irradiates article to be detected, the spot diameter of the laser illumination through the beam expander
More than twice of detection article diameter.
Optionally, when the movement objective table makes spectrometer scan article to be detected in the form of pushing away and sweep, article to be detected
The light beam that upper any point is reflected or transmitted upon laser irradiation becomes collimated light beam by the collimation lens and irradiates described gather
Focus lens, the light beam being emitted from the condenser lens irradiate the first Raman optical filter, go out from the first Raman optical filter
The Raman light beam penetrated irradiates the beam splitter prism, irradiates two wedges respectively through the two beam Raman lights that the beam splitter prism is divided into
Shape prism, the Raman light auto-collimation after two prism wedge refractions are irradiated on two balzed grating,s, auto-collimation
The Raman light backtracking of two balzed grating,s is irradiated, after again passing by two prism wedges and the beam splitter prism
Space heterodyne Raman interference light is obtained, space heterodyne Raman interference light is irradiated to the second Raman optical filter, from described second
The space heterodyne Raman interference light of Raman optical filter outgoing exposes to the non-spherical lens, is emitted from the non-spherical lens
Space heterodyne Raman interference light exposes to the imaging lens group, the space heterodyne Raman interference being emitted from the imaging lens group
Light is finally received by the surface detector.
Optionally, the collimation lens is anaberration non-spherical lens.
Optionally, the condenser lens is anaberration lens.
Optionally, the non-spherical lens is cylindrical lens or parabolic lens.
As can be seen from the above technical solutions, the embodiment of the present invention has the following advantages：
1st, the effect of non-spherical lens is that sample heterodyne Raman interference light is risen in Z-direction (i.e. perpendicular to paper direction)
To compression, sample heterodyne Raman interference light is made to occupy less planar array detector pixel number in Z-direction and (for example is only occupied
100 pixel numbers), so as to fulfill the Quick Acquisition of each frame heterodyne Raman interference light of planar array detector.
2nd, it pushes away the spectrometer dependence using objective table and sweeps acquisition two-dimensional space information and one-dimensional spectral information, for regarding
In every bit, with objective table along Y-axis carry out step motion, will change relative to the field angle of interferometer,
When the move distance of the inswept full filed of spectrometer, the interference pattern of every bit will be obtained, Fourier's change is implemented to interference pattern
Change the Raman spectrum distribution for just obtaining each object point on sample.
3rd, the hot spot of laser is expanded with beam expander, it is ensured that laser any time is irradiated to the full table of sample
Face, and using condenser lens realize any point on sample focus on balzed grating, it is unique a bit, using non-spherical lens
With the optical elements such as imaging lens group focus on planar array detector it is unique a bit, so as to fulfill any point on sample and face battle array
More unique one-to-one relationship on detector, using by objective table along Y direction carry out continuous step motion and
Planar array detector carries out a heterodyne Raman interference pattern shooting and storage when each step motion of objective table stops, so as to obtain
With the heterodyne Raman interference pattern cube with sample surface location coordinate information, by by each point in sample surface
Corresponding heterodyne Raman interference pattern cube metadata extracts, you can obtains the Raman spectrum letter each put on sample surface
Breath, so as to fulfill the quick measurement of the Raman spectrum of sample surface each position.
Description of the drawings
Fig. 1 is the schematic diagram of the light channel structure of the space heterodyne Raman spectroscopy instrument of the present invention.
Specific embodiment
In order to which those skilled in the art is made to more fully understand the present invention program, below in conjunction in the embodiment of the present invention
The technical solution in the embodiment of the present invention is clearly and completely described in attached drawing, it is clear that described embodiment is only
The embodiment of a part of the invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's all other embodiments obtained without making creative work should all belong to the model that the present invention protects
It encloses.
Fig. 1 is please referred to, the light channel structure of the space heterodyne Raman spectroscopy instrument for the present invention can both measure article
Reflection Raman spectrum, the transmission Raman spectrum of article can also be measured.
Fig. 1 is please referred to, the X-axis, Y-axis for rectangular coordinate system in space of the invention are as shown in Figure 1, the paper of Z axis vertical view 1
Face.
Fig. 1 is please referred to, the light channel structure of space heterodyne Raman spectroscopy instrument includes：Preposition imaging system, interferometer, after
It puts imaging system and receives system.It is saturating that the preposition imaging system includes objective table 14, beam expander 15, laser 16, collimation
Mirror 1,2 and first Raman optical filter 3 of condenser lens.The interferometer is located at the rear of the preposition imaging system, described dry
Interferometer includes 4, two prism wedges of beam splitter prism, 5 and 6, two balzed grating,s 7 and 8.The postposition imaging system is located at described
The lower section of interferometer, the postposition imaging system include the second Raman optical filter 9, non-spherical lens 10, imaging lens group 11.Institute
The lower section that reception system is located at the postposition imaging system is stated, the reception system includes surface detector 12.
Wherein, the objective table 14 is located at the focal plane placement article to be detected and objective table of the collimation lens 1
14 are used to carry out step motion along the Y-axis in rectangular coordinate system in space.It places and is focused on thoroughly along 1 emergent ray direction of collimation lens
Mirror 2, any point that the condenser lens 2 is used to implement on article to be detected focus on unique one on the balzed grating, 7 and 8
Point.The effect of collimation lens 1 is that the light beam that article reflects is become collimated light beam, and the effect of the condenser lens 2 is entrance
The collimated light beam of system is focused on the balzed grating, 7 and 8, and the effect of the first Raman optical filter 3 is to filter out entrance
Veiling glare in system in addition to Raman light.
Wherein, interferometer：The effect of the beam splitter prism 4 is that the Raman light for entering system is divided into two-arm light path, then adjust
The light beam of two-arm light path processed obtains space heterodyne Raman interference light；The effect of two prism wedges 5 and 6 is increase system
Visual field；The effect of two balzed grating,s 7 and 8 is the resolution ratio of raising system and the luminous flux of increase system.
Wherein, postposition imaging system：The effect of the second Raman optical filter 9 is that space heterodyne Raman interfering beam is made
Further Raman light filtering；The effect of the non-spherical lens 10 is will to interfere by the space heterodyne Raman further filtered
Light beam becomes collimated light beam.The effect of imaging lens group 11 is that parallel space heterodyne Raman interfering beam is focused on surface detector
On 12 arrays.The effect of non-spherical lens 10 in the present invention be to sample heterodyne Raman interference light Z-direction (i.e. perpendicular to
Paper direction) compression is played, sample heterodyne Raman interference light is made to occupy less 12 pixel of planar array detector in Z-direction
Number (for example only occupying 100 pixel numbers), so as to fulfill the Quick Acquisition of 12 each frame heterodyne Raman interference light of planar array detector.
Wherein, system is received：The purpose of surface detector 12 is the spectral information that reception system obtains.
The present invention provides a kind of light channel structure of space heterodyne Raman spectroscopy instrument for Raman spectrum analysis, by adopting
Two-dimension spectrum information is received with balzed grating, 7 and 8, the combination of prism wedge 5 and 6 and area array CCD 12, the structure type is fine
Ensure that high-resolution and high-throughput requirement.
Fig. 1 is please referred to, the condenser lens 2 is placed along the 1 emergent ray direction of collimation lens, along the condenser lens
The first Raman optical filter 3 is placed in 2 emergent ray directions, and institute is placed along the 3 emergent ray direction of the first Raman optical filter
Beam splitter prism 4 is stated, two prism wedges 5 and 6 are placed respectively along described 4 liang of outgoing radiation directions of beam splitter prism, along two
Two balzed grating,s 7 and 8 are placed in the 5 and 6 emergent ray direction of prism wedge respectively, and edge is returned through the beam splitter prism 4
The second Raman optical filter 9 is placed in catacustic direction, is placed along the 9 emergent ray direction of the second Raman optical filter described non-
Spherical lens 10 places the imaging lens group 11 and the non-spherical lens along the 10 emergent ray direction of non-spherical lens
10 are compressed for the heterodyne Raman interference light of article to be detected in Z-direction in rectangular coordinate system in space, along it is described into
As the planar array detector 12 is placed in 11 emergent ray direction of lens group.
Fig. 1 is please referred to, the focal plane that the objective table 14 is located at the collimation lens 1 places article to be detected, object
Product reflect or the light beam of transmission is incident on the preposition imaging system through the collimation lens 1, and the beam expander 15 is located at described
16 rear of laser, the spot diameter for the laser 16 to be irradiated expand so that the hot spot that the laser 16 irradiates
Diameter is more than 2 times of article diameter to be detected, ensures during objective table 14 sample always in the hot spot of laser irradiation, sample
The light beam that every bit is reflected or transmitted upon laser irradiation on product is eventually focused on 12 gusts of surface detector by the spectrometer
In row corresponding points.The laser 16 irradiates article to be detected through the beam expander 15 so that objective table makes the spectrometer exist
During scanning article to be detected in the form of pushing away and sweep, article to be detected is always in the hot spot of laser irradiation；When the spectrum
When instrument scans article to be detected in the form of pushing away and sweep, any point is reflected or transmitted upon laser irradiation on article to be detected light beam
Become collimated light beam irradiation condenser lens 2 by collimation lens 1, the light beam being emitted from condenser lens 2 irradiates the first Raman and filters
Piece 3, the Raman light beam illumination beam splitter prism 4 being emitted from the first Raman optical filter 3, two beam Raman lights being divided into through beam splitter prism 4
Two prism wedges 5 and 6 are irradiated respectively, and the Raman light auto-collimation after two prism wedges 5 and 6 reflect irradiates two and glares
Grid 7 and 8, auto-collimation irradiate the Raman light backtracking of two balzed grating,s 7 and 8, again pass by two 5 and 6 Hes of prism wedge
Space heterodyne Raman interference light is obtained after beam splitter prism 4, space heterodyne Raman interference light irradiates the second Raman optical filter 9, from the
The space heterodyne Raman interference light irradiation non-spherical lens 10 of two Raman optical filters 9 outgoing, the sky being emitted from non-spherical lens 10
Between heterodyne Raman interference light irradiation imaging lens group 11, from imaging lens group 11 be emitted space heterodyne Raman interference light finally by
Surface detector 12 receives.
The number of 14 step motion of objective table is equal to planar array detector 12 and is sat in space right-angle in one of the embodiments,
The pixel number of X-axis in mark system.Objective table 14 each time step motion distance be equal to sample a Raman Measurement area in Y
The pixel number of the length divided by surface detector 12 of axis direction in the X-axis direction.
First collimation lens 1 is anaberration non-spherical lens in one of the embodiments,.The condenser lens 2
For anaberration lens.Non-spherical lens 10 is cylindrical lens or parabolic lens.First collimation lens 1, the focusing are saturating
Containing earth silicon material to eliminate the aberration of system in mirror 2.The effect of non-spherical lens 10 in the present invention be to sample outside
Poor Raman interference light plays compression in Z-direction (i.e. perpendicular to paper direction), makes sample heterodyne Raman interference light in Z axis
Less planar array detector pixel number (for example only occupying 100 pixel numbers) is occupied in direction, each so as to fulfill planar array detector
The Quick Acquisition of frame heterodyne Raman interference light.
In specific one embodiment, sample is chosen as the doubtful tumor of breast cut down in Human Breast Cancer operation
Block selects one of face in sample as raman spectroscopy measurement face (size is about 2.0cm × 2.0cm), by laser 16
The light sent out is beaten after beam expanding lens 15 expands light beam in the measuring surface of the tumor of breast block, any of the tested surface of tumor of breast
The Raman spectrum that sends out of point focuses on the different location of balzed grating, 7 and 8 that (i.e. mammary gland swells respectively after optical element 1 to 6
Any point on knurl tested surface images in the different location of grating 7 and 8), using 7 and 8 diffraction of grating and beam splitter prism 4
After closing beam, the corresponding Rayleigh scattering light of laser wavelength is filtered out using Raman optical filter 9, finally by lens 10 and 11
The focussing force formed is closed, so as to focus on planar array detector 12.The focal length selected as 150mm of condenser lens 2, grating 7 and 8
Center respectively positioned at condenser lens 2 focus on.The Raman spectrum that any point of the tested surface of tumor of breast is sent out first focuses on
In on grating 7 and 8 it is unique a bit, finally focus on planar array detector 12 it is unique a bit, it is achieved thereby that tumor of breast
Any point of tested surface and the one-to-one relationship uniquely put of planar array detector 12, i.e., the tested surface of tumor of breast is each
A final space heterodyne of point images in the different location of planar array detector 12.
In practical measurement process, 14 times of exercise of objective table is consistent with the pixel number of the X-direction of planar array detector 12.
IKon-M_934BU2 product of the planar array detector 12 for Andor companies in this example, the X-direction of the surface detector 12
Pixel number be 1024.Therefore, the times of exercise of the objective table 14 is 1024, and each step distance of the objective table 14 is
Raman Measurement area of sample is removed in the length of Y direction divided by the pixel number of surface detector 12X axis directions, i.e. 1.5cm
With 1024, about 1.46 microns.The objective table 14 is primary per stepping, and planar array detector 12 carries out a Raman image acquisition,
The objective table is total to stepping 1024 times, therefore planar array detector 12 acquires 1024 width Raman images altogether.By to collected
The Raman image of 1024 width tumor of breast tested surfaces, you can obtain any space heterodyne of doubtful tumor of breast tested surface and draw
Graceful curve can obtain the Raman spectral information of the point by Fourier transform, so as to judge that the doubtful tumor of breast is to be measured
Face is remaining with the presence or absence of tumor of breast, and can calculate the specific location coordinate at the remaining place of tumor of breast.If this is doubtful
It certain position of tumor of breast tested surface can be to the further hand of the position of patient's mammary gland progress there are Neoplasm residual, then doctor
Art.
Advantage of this embodiment is that it can realize in a short period of time with any dot position information in the full surface of sample
Raman spectroscopy measurement (a Raman image acquisition time is about 0.2 second, and 1024 width images of acquisition simultaneously carry out Raman data analysis
Only need 3 to 5 minutes or so), it need to use point-by-point two-dimensional scan that could realize sample so as to avoid traditional Raman spectrometer
Low (collecting efficiency of conventional method is about several percentages of the method for the present invention to measurement efficiency caused by full Surface Raman Spectra measures
One of even several one thousandths) the problems such as, be effectively saved the time of measuring of the Raman spectrum of sample surface each position, greatly
It improves work efficiency greatly.
The present invention can ensure that any time is irradiated to the full surface of sample, and uses using the laser facula expanded
Condenser lens 2 realize any point on sample focus on balzed grating, 7 and 8 it is unique a bit, using 10 He of non-spherical lens
11 grade optical elements of imaging lens group focus on planar array detector 12 it is unique a bit, so as to fulfill any point on sample and face
More unique one-to-one relationship on array detector 12 carries out continuous stepping using by objective table 14 along Y direction
Movement and planar array detector 12 carry out a heterodyne Raman interference pattern shooting and storage when each step motion of objective table stops,
So as to obtain with the heterodyne Raman interference pattern cube with sample surface location coordinate information, by by sample table
The heterodyne Raman interference pattern cube metadata that face each pair of point is answered extracts, you can obtains the drawing that sample surface is each put
Graceful spectral information, so as to fulfill the quick measurement of the Raman spectrum of sample surface each position.
Space heterodyne Raman spectroscopy instrument light channel structure proposed by the present invention is to use space heterodyne principle of interference, therefore
Have many advantages, such as that high resolution, luminous flux are big, it is wide to measure wavelength band simultaneously.
The space heterodyne Raman spectroscopy instrument of the present invention sweeps acquisition two-dimensional space using planar array detector 12 and by pushing away
Information and one-dimensional spectral information.For the every bit in visual field, as the objective table 14 along Y-axis carries out step motion,
It will change relative to the field angle of interferometer, when the move distance of the inswept full filed of the objective table spectrometer,
The interference pattern of every bit will be obtained, implement the Raman spectrum point that Fourier transformation just obtains each object point on sample to interference pattern
Cloth.
The specific embodiment of present invention described above, is not intended to limit the scope of the present invention..Any basis
Various other corresponding changes and deformation made by the technical concept of the present invention, should be included in the guarantor of the claims in the present invention
In the range of shield.
Claims (8)
1. a kind of light channel structure of space heterodyne Raman spectroscopy instrument, which is characterized in that including：
Preposition imaging system：Objective table, beam expander, laser, collimation lens, condenser lens and the first Raman optical filter；
Interferometer, the interferometer are located at the rear of the preposition imaging system, and the interferometer includes beam splitter prism, two wedges
Shape prism, two balzed grating,s；
Postposition imaging system, the postposition imaging system are located at the lower section of the interferometer, and the postposition imaging system includes the
Two Raman optical filters, non-spherical lens, imaging lens group；
Reception system, the reception system are located at the lower section of the postposition imaging system, and the reception system includes face battle array detection
Device；
The objective table be located at the collimation lens focal plane place article to be detected and the objective table be used for along
Y-axis in rectangular coordinate system in space carries out step motion；
The condenser lens is placed along the collimation lens emergent ray direction, the condenser lens is used to implement article to be detected
On any point focus on the balzed grating, it is unique a bit；
The first Raman optical filter is placed along the condenser lens emergent ray direction, is gone out along the first Raman optical filter
It penetrates on radiation direction and places the beam splitter prism, two wedges are placed respectively along the beam splitter prism two outgoing radiation direction
Shape prism places two balzed grating,s along two prism wedge emergent ray directions respectively, along through the beam splitting
The second Raman optical filter is placed in prism return projector direction, is placed along the second Raman optical filter emergent ray direction
The non-spherical lens places the imaging lens group and described aspherical along the non-spherical lens emergent ray direction
Mirror is used for the heterodyne Raman interference light of article to be detected and is compressed in the Z-direction in rectangular coordinate system in space, finally along
Place the planar array detector in the imaging lens group emergent ray direction.
2. the light channel structure of space heterodyne Raman spectroscopy instrument as described in claim 1, it is characterised in that：The objective table
The number of step motion is equal to the pixel number of X-axis of the planar array detector in rectangular coordinate system in space.
3. the light channel structure of space heterodyne Raman spectroscopy instrument as claimed in claim 2, it is characterised in that：The objective table
The distance of step motion is equal to length divided by the surface detector of the Raman Measurement area of sample in Y direction each time
Pixel number in the X-axis direction.
4. the light channel structure of space heterodyne Raman spectroscopy instrument as claimed in claim 3, it is characterised in that：The laser
Article to be detected is irradiated through the beam expander, the spot diameter of the laser illumination is more than twice of detection article diameter.
5. the light channel structure of space heterodyne Raman spectroscopy instrument as claimed in claim 4, it is characterised in that：When described in movement
When objective table makes the spectrometer scan article to be detected in the form of pushing away and sweep, any point is reflected upon laser irradiation on article to be detected
Or the light beam of transmission becomes collimated light beam by the collimation lens and irradiates the condenser lens, is emitted from the condenser lens
Light beam irradiates the first Raman optical filter, and the Raman light beam being emitted from the first Raman optical filter irradiates the beam splitting rib
Mirror irradiates two prism wedges, through two prism wedges respectively through the two beam Raman lights that the beam splitter prism is divided into
Raman light auto-collimation after refraction is irradiated on two balzed grating,s, and auto-collimation irradiates the Raman of two balzed grating,s
Light backtracking obtains space heterodyne Raman interference light after again passing by two prism wedges and the beam splitter prism, empty
Between heterodyne Raman interference light be irradiated to the second Raman optical filter, from the second Raman optical filter be emitted space heterodyne draw
Graceful interference light exposes to the non-spherical lens, and the space heterodyne Raman interference light being emitted from the non-spherical lens exposes to institute
Imaging lens group is stated, the space heterodyne Raman interference light being emitted from the imaging lens group is finally received by the surface detector.
6. the light channel structure of space heterodyne Raman spectroscopy instrument as described in claim 1, it is characterised in that：The collimation is saturating
Mirror is anaberration non-spherical lens.
7. the light channel structure of space heterodyne Raman spectroscopy instrument as described in claim 1, it is characterised in that：It is described to focus on thoroughly
Mirror is anaberration lens.
8. the light channel structure of space heterodyne Raman spectroscopy instrument as described in claim 1, it is characterised in that：It is described aspherical
Lens are cylindrical lens or parabolic lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810110122.4A CN108181237B (en) | 2018-02-05 | 2018-02-05 | A kind of light channel structure of space heterodyne Raman spectroscopy instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810110122.4A CN108181237B (en) | 2018-02-05 | 2018-02-05 | A kind of light channel structure of space heterodyne Raman spectroscopy instrument |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108181237A true CN108181237A (en) | 2018-06-19 |
| CN108181237B CN108181237B (en) | 2019-09-27 |
Family
ID=62552101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810110122.4A Active CN108181237B (en) | 2018-02-05 | 2018-02-05 | A kind of light channel structure of space heterodyne Raman spectroscopy instrument |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108181237B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764963A (en) * | 2019-01-23 | 2019-05-17 | 桂林电子科技大学 | A kind of setting of prism-type space heterodyne spectrograph reference wavelength and adjustment method |
| CN110057809A (en) * | 2019-05-29 | 2019-07-26 | 桂林电子科技大学 | One kind non-contact, rapid detection system and detection method for the fine Raman spectrum of substance |
| CN111948699A (en) * | 2020-08-26 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | Compact proton energy spectrum measuring device |
| CN112067598A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | Low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection |
| CN112268618A (en) * | 2020-11-18 | 2021-01-26 | 江苏师范大学 | High-flux interference type Raman hyperspectral imaging system |
| CN112504457A (en) * | 2020-11-27 | 2021-03-16 | 武汉船舶通信研究所（中国船舶重工集团公司第七二二研究所） | Spatial heterodyne spectrometer applied to DWDM system |
| CN113189079A (en) * | 2021-04-26 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Spatial heterodyne Raman spectrometer system |
| CN114018900A (en) * | 2021-11-15 | 2022-02-08 | 中国工程物理研究院材料研究所 | Raman spectrometer |
| CN114295209A (en) * | 2021-12-30 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tunable spatial heterodyne spectrometer with single light splitting, single rotating shaft and symmetrical light path |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1869658A (en) * | 2006-06-13 | 2006-11-29 | 中国科学院安徽光学精密机械研究所 | Interferometer of space heterodyne spectrograph tester |
| US20070121119A1 (en) * | 2005-10-21 | 2007-05-31 | Southwest Research Institute | Spatial Heterodyne Wide-Field Coherent Anti-Stokes Raman Spectromicroscopy |
| CN102589701A (en) * | 2012-02-22 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Method for expanding application bandwidth of spatial heterodyne interferometer |
| CN103033265A (en) * | 2012-12-21 | 2013-04-10 | 南京理工大学 | Device and method of space heterodyning interference hyper spectrum imaging |
| US20130188181A1 (en) * | 2011-10-18 | 2013-07-25 | Stanley Michael Angel | Systems and Methods for Spatial Heterodyne Raman Spectroscopy |
| CN103759830A (en) * | 2013-12-12 | 2014-04-30 | 中国科学院合肥物质科学研究院 | Structure and adjusting method of sub view field spatial heterodyne interference spectrograph |
| CN103868596A (en) * | 2014-02-21 | 2014-06-18 | 中国科学院光电研究院 | Large-aperture space heterodyne interference spectral imaging method and spectrometer |
| US20140247447A1 (en) * | 2012-10-30 | 2014-09-04 | University Of South Carolina | Systems and Methods for Spatial Heterodyne Raman Spectroscopy |
-
2018
- 2018-02-05 CN CN201810110122.4A patent/CN108181237B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070121119A1 (en) * | 2005-10-21 | 2007-05-31 | Southwest Research Institute | Spatial Heterodyne Wide-Field Coherent Anti-Stokes Raman Spectromicroscopy |
| CN1869658A (en) * | 2006-06-13 | 2006-11-29 | 中国科学院安徽光学精密机械研究所 | Interferometer of space heterodyne spectrograph tester |
| US20130188181A1 (en) * | 2011-10-18 | 2013-07-25 | Stanley Michael Angel | Systems and Methods for Spatial Heterodyne Raman Spectroscopy |
| CN102589701A (en) * | 2012-02-22 | 2012-07-18 | 中国科学院安徽光学精密机械研究所 | Method for expanding application bandwidth of spatial heterodyne interferometer |
| US20140247447A1 (en) * | 2012-10-30 | 2014-09-04 | University Of South Carolina | Systems and Methods for Spatial Heterodyne Raman Spectroscopy |
| CN103033265A (en) * | 2012-12-21 | 2013-04-10 | 南京理工大学 | Device and method of space heterodyning interference hyper spectrum imaging |
| CN103759830A (en) * | 2013-12-12 | 2014-04-30 | 中国科学院合肥物质科学研究院 | Structure and adjusting method of sub view field spatial heterodyne interference spectrograph |
| CN103868596A (en) * | 2014-02-21 | 2014-06-18 | 中国科学院光电研究院 | Large-aperture space heterodyne interference spectral imaging method and spectrometer |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109764963B (en) * | 2019-01-23 | 2020-12-04 | 桂林电子科技大学 | Reference wavelength setting and debugging method for prism type spatial heterodyne spectrometer |
| CN109764963A (en) * | 2019-01-23 | 2019-05-17 | 桂林电子科技大学 | A kind of setting of prism-type space heterodyne spectrograph reference wavelength and adjustment method |
| CN110057809A (en) * | 2019-05-29 | 2019-07-26 | 桂林电子科技大学 | One kind non-contact, rapid detection system and detection method for the fine Raman spectrum of substance |
| CN111948699A (en) * | 2020-08-26 | 2020-11-17 | 中国科学院西安光学精密机械研究所 | Compact proton energy spectrum measuring device |
| CN112067598A (en) * | 2020-09-15 | 2020-12-11 | 江苏师范大学 | Low-noise spatial heterodyne spectrometer for short-wave ultraviolet Raman spectrum detection |
| CN112268618B (en) * | 2020-11-18 | 2024-06-11 | 江苏师范大学 | High-flux interference type Raman hyperspectral imaging system |
| CN112268618A (en) * | 2020-11-18 | 2021-01-26 | 江苏师范大学 | High-flux interference type Raman hyperspectral imaging system |
| CN112504457A (en) * | 2020-11-27 | 2021-03-16 | 武汉船舶通信研究所（中国船舶重工集团公司第七二二研究所） | Spatial heterodyne spectrometer applied to DWDM system |
| CN112504457B (en) * | 2020-11-27 | 2023-02-24 | 武汉船舶通信研究所（中国船舶重工集团公司第七二二研究所） | Spatial heterodyne spectrometer applied to DWDM system |
| CN113189079B (en) * | 2021-04-26 | 2023-09-01 | 中国科学院西安光学精密机械研究所 | Space heterodyne Raman spectrometer system |
| CN113189079A (en) * | 2021-04-26 | 2021-07-30 | 中国科学院西安光学精密机械研究所 | Spatial heterodyne Raman spectrometer system |
| CN114018900A (en) * | 2021-11-15 | 2022-02-08 | 中国工程物理研究院材料研究所 | Raman spectrometer |
| CN114295209A (en) * | 2021-12-30 | 2022-04-08 | 中国科学院长春光学精密机械与物理研究所 | Tunable spatial heterodyne spectrometer with single light splitting, single rotating shaft and symmetrical light path |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108181237B (en) | 2019-09-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108181237B (en) | A kind of light channel structure of space heterodyne Raman spectroscopy instrument | |
| US9332902B2 (en) | Line-field holoscopy | |
| US9243888B2 (en) | Image mapped optical coherence tomography | |
| US4649275A (en) | High resolution breast imaging device utilizing non-ionizing radiation of narrow spectral bandwidth | |
| CN109414163A (en) | Device and method for the confocal microscope for using dispersed structure to illuminate | |
| CN105548080B (en) | A kind of continuous THz wave spacescan coherent diffraction imaging system and method | |
| US9239263B2 (en) | Image mapped spectropolarimetry | |
| KR101392311B1 (en) | Object inspection apparatus using terahertz wave bessel beam | |
| US20070201033A1 (en) | Methods and systems for performing angle-resolved fourier-domain optical coherence tomography | |
| CN106442467A (en) | Spatial autofocusing laser confocal imaging Raman-spectrum detecting method and device | |
| CN109115804A (en) | A kind of device and method of quantitative detection glass subsurface defect | |
| US7505561B1 (en) | Schlieren-type radiography using a line source and focusing optics | |
| JP2009511909A (en) | System and method for angle resolved low coherence interferometry with endoscope | |
| JP2009508571A (en) | Method and system for measuring composition directly under surface of specimen | |
| RU2561867C2 (en) | Device and method for optical coherence tomography | |
| Holmes et al. | Multi-channel Fourier domain OCT system with superior lateral resolution for biomedical applications | |
| CN108226131A (en) | A kind of space panorama laser differential confocal Raman spectrum imaging detection method and device | |
| CN106525240B (en) | Spectral detection device | |
| CN104990908B (en) | The confocal induced breakdown Raman spectrum imaging detection method of laser twin shaft and device | |
| CN106770154A (en) | Space autofocusing laser differential confocal Raman spectroscopic detection method and apparatus | |
| CN108489613B (en) | A kind of volume holographic grating type space heterodyne Raman spectroscopy instrument light channel structure | |
| CN102499647B (en) | Multi-mode low-coherence scattering spectrometer | |
| KR20160082076A (en) | Simultaneous Imaging device for tomography and surface profiler based on interferometer | |
| CN205514536U (en) | Frequency domain optics chromatographic device that is concerned with | |
| US20110310384A1 (en) | Methods and system for confocal light scattering spectroscopic imaging |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |