CN108426852A - A kind of detection device and its method of multilayered medium material internal flaw - Google Patents
A kind of detection device and its method of multilayered medium material internal flaw Download PDFInfo
- Publication number
- CN108426852A CN108426852A CN201810168270.1A CN201810168270A CN108426852A CN 108426852 A CN108426852 A CN 108426852A CN 201810168270 A CN201810168270 A CN 201810168270A CN 108426852 A CN108426852 A CN 108426852A
- Authority
- CN
- China
- Prior art keywords
- terahertz
- frequency
- signal
- frequency signal
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title claims abstract description 71
- 238000001514 detection method Methods 0.000 title claims abstract description 45
- 238000000034 method Methods 0.000 title claims abstract description 12
- 238000003384 imaging method Methods 0.000 claims description 51
- 238000012545 processing Methods 0.000 claims description 24
- 239000010410 layer Substances 0.000 claims description 13
- 238000004804 winding Methods 0.000 claims description 5
- 238000003491 array Methods 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims description 4
- 239000003365 glass fiber Substances 0.000 claims description 4
- 238000002156 mixing Methods 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 4
- 239000011229 interlayer Substances 0.000 claims description 3
- 230000001788 irregular Effects 0.000 claims description 3
- 230000008569 process Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000004512 die casting Methods 0.000 claims description 2
- 239000003989 dielectric material Substances 0.000 claims description 2
- 150000002484 inorganic compounds Chemical class 0.000 claims description 2
- 229910010272 inorganic material Inorganic materials 0.000 claims description 2
- 239000011347 resin Substances 0.000 claims description 2
- 229920005989 resin Polymers 0.000 claims description 2
- 238000012360 testing method Methods 0.000 abstract description 7
- 230000007547 defect Effects 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 7
- 238000003325 tomography Methods 0.000 description 5
- 230000008859 change Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 208000019155 Radiation injury Diseases 0.000 description 3
- 239000003814 drug Substances 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229920003023 plastic Polymers 0.000 description 3
- 239000013626 chemical specie Substances 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 238000001093 holography Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000002650 laminated plastic Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000011514 reflex Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000004449 solid propellant Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Toxicology (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The present invention provides a kind of detection device of multilayered medium material internal flaw, is included in time tsThe signal generator of the low frequency signal for the continuous frequency modulation that interior tranmitting frequency changes between 9.375GHz~13.75GHz and for by the low frequency signal by n times frequency multiplication link to obtain in time tsThe Terahertz frequency multiplication link device of the Terahertz high-frequency signal for the continuous frequency modulation that interior tranmitting frequency changes between 9.375nGHz~13.75nGHz, wherein n are the integer more than or equal to 8.The detection device and its method of a kind of multilayered medium material internal flaw provided by the invention, detectable material is more extensive, unrestricted choice is strong, applied widely, highly practical, can reduce testing cost.
Description
Technical field
The present invention relates to lacked inside multilayered medium material component quality control field more particularly to a kind of multilayered medium material
Sunken detection device and its method.
Background technology
With the development of science and technology, more and more, multilayered medium material is applied to aerospace, high-tension electricity transports
Concerning in the large-engineering of national security and the people's livelihood.Reliability service of the quality of such material concerning a whole set of big system, still, due to
Often there is whole unsticking inside this kind of multilayered medium material or local unsticking, some even can shape in the reason of manufacturing process
It at air cleft, is kept completely separate, such as airspace engine bucket section etc.；Some will appear redundant stress, such as wind since material is uneven
Power blade；With the presence of meeting foreign matter so that material electrical insulating property be deteriorated, cause to puncture, such as extra-high voltage power transformation insulating bag covering layer.
To affect the overall performance of material and cause huge security risk, especially for reliability requirement height, long storage uses
The Large-Scale Equipment and system in period, this defect are very crucial to the assessment of system global reliability, and so far, without needle
To the efficient equipment and method of the assessment of large-sized multiple layer dielectric material globality unsticking.
For key areas such as the defects detection inside multilayered medium material, especially aerospaces, existing X-ray skill
Art can effectively detect thicker multilayer dielectric structure thin layered media material poor contrast, but due to detection
Speed is slow, can not accomplish region all standing, and to user of service, there are a degree of radiation injuries, and equipment is heavy, are not suitable for family
Outer portable detection；Thermal wave technology is not suitable for insulating medium material；Ultrasonic scanning image technology is for many winding fiberizings
Structure and material is helpless.
The three-dimensional THz imaging technology developed in recent years has flight time imaging, computer-aided tomography imaging, diffraction
The methods of tomography, Fresnel lens imaging, holographic imaging.Flight time imaging can provide object surface appearance or difference
The three-dimensional structure of level, but it can not show the non-laminar structure distribution of interior of articles.In computer-aided tomography imaging, terahertz
Hereby the diameter of wave focus needs to be less than the spatial resolution required by tomography, and its depth of focus is needed more than the object to be imaged
Size.In Diffraction tomography, the spatial frequency of the picture of low frequency region is relatively low, and the THz wave letter used in high frequency region imaging
It makes an uproar relatively low, so all there is a problem of in low frequency range and high frequency region second-rate.The transverse direction of Fresnel lens three-dimensional imaging point
By the diffraction limit of imaging system, longitudinal resolution limited resolution by the spectral resolution of carrier wave；In addition, the two of object under test
The spacing of a object plane is more than the depth of field of imaging system, and respective picture could be made not interfere with each other, therefore, image quality
Also it is influenced by the depth of field of imaging system.Three-dimensional holography cannot can not extract the light of object to very complicated target imaging
Spectrum information, under any circumstance it cannot all provide rebuild target accurate refractive index data.
Invention content
It is an object of the invention to be detected to internal defects in the case where not damaging multilayered medium material, carry
For a kind of detection device and its method of multilayered medium material internal flaw highly practical, range of applicability is wide.
A kind of detection device of multilayered medium material internal flaw provided by the invention, is included in time tsInterior tranmitting frequency
The signal generator of the low frequency signal of the continuous frequency modulation changed between 9.375GHz~13.75GHz and for will be described low
Frequency signal is by n times frequency multiplication link to obtain in time tsWhat interior tranmitting frequency changed between 9.375nGHz~13.75nGHz
The Terahertz frequency multiplication link device of the Terahertz high-frequency signal of continuous frequency modulation, wherein n are the integer more than or equal to 8.
As a preferred embodiment, further include sawtooth wave power supply；The sawtooth wave power supply is connect with the signal generator,
For exporting continuous sawtooth voltage signal to drive the signal generator to export the low frequency signal；The Terahertz times
Frequency link device is connect with the signal generator, and the low frequency signal for emitting the signal generator carries out n times times
Frequency forms the Terahertz high-frequency signal.
As a preferred embodiment, further include the first paraboloidal mirror and the second paraboloidal mirror, first paraboloidal mirror and
Second paraboloidal mirror is located between the Terahertz frequency multiplication link device and a sample to be tested and is oppositely arranged, described
First paraboloidal mirror is used to reflect the Terahertz high-frequency signal of Terahertz frequency multiplication link device transmitting and by described the
Two paraboloidal mirrors focus on the sample to be tested, and the Terahertz high-frequency signal after focusing is in the sample to be tested table
Face and inside are reflected.
As a preferred embodiment, further include Terahertz beam splitter, the Terahertz beam splitter setting is thrown described first
Between object plane mirror and second paraboloidal mirror and the transmission direction of the Terahertz beam splitter and the Terahertz high-frequency signal
It is arranged in 135 ° of angles, passes through second parabolic on the sample to be tested surface and the internal Terahertz high-frequency signal reflected
By the Terahertz beam splitter reflection to the direction of the path orthogonal with second paraboloidal mirror transmitting after the mirror of face.
As a preferred embodiment, further include Terahertz frequency mixer, the Terahertz frequency mixer is inputted including the first signal
End, second signal input terminal and signal output end；First signal input part is connect with the signal generator, for receiving
The part Terahertz high-frequency signal that the signal generator is launched；The second signal input terminal is for receiving by the beam splitting
The Terahertz high-frequency signal of device reflection；The Terahertz frequency mixer believes the Terahertz high-frequency signal of reception and the low frequency
Number mixing obtains intermediate-freuqncy signal.Intermediate-freuqncy signal is handled by Fast Fourier Transform (FFT), obtains the one-dimensional picture of z direction targets, can be anti-
Reflect the depth location of defect.
As a preferred embodiment, further include third paraboloidal mirror, the third paraboloidal mirror is used for the beam splitter
The Terahertz high-frequency signal of reflection focuses to the second signal input terminal of the Terahertz frequency mixer.
As a preferred embodiment, further include two-dimensional scanner, the two-dimensional scanner passes through second for controlling
The Terahertz high-frequency signal that paraboloidal mirror focuses carries out the sample to be tested surface scanning in the direction x, y, the two dimension
It is that the faces x-y constituted with the directions x and y and definition are put down with x-y that scanning means, which defines the face parallel with the sample to be tested surface,
The vertical direction in face is the directions z.
As a preferred embodiment, further include data acquisition device and imaging processing device；The data acquisition device with
The Terahertz frequency mixer connection, the intermediate-freuqncy signal being mixed for acquiring the Terahertz frequency mixer；The imaging
Device is connect with the data acquisition device, for receiving the intermediate-freuqncy signal and obtaining filling with the two-dimensional scan by processing
The one-dimensional image array in the corresponding directions z of each scan position is set, the two-dimensional scanner controls the Terahertz high frequency letter
The scanning that x, y direction number is carried out to the sample to be tested surface, obtain multiple one-dimensional image arrays constitute a three-dimensionals at
As data array, the imaging processing device exports x- corresponding with the sample to be tested according to the three-dimensional imaging data array
The directions y image, the directions x-z image and the directions y-z image.
As a preferred embodiment, two-dimensional scanner residence time at each scan position is NT, wherein N
For the integer more than or equal to 1；The directions the x and y scanning accuracy of the two-dimensional scanner is 0.1~20mm；T is 10~500
Microsecond；N is 1~1024；The sawtooth wave power supply transmit cycle is T0, wherein T0=T, ts=0.8T.
As a preferred embodiment, the directions the x and y scanning accuracy of the two-dimensional scanner is 0.5mm；T is 150 micro-
Second；N is 256.
As a preferred embodiment, the integer that n is 8~96, preferably 8,16 or 24.
As a preferred embodiment, the multilayered medium material be by glass fibre, ceramics, resin, inorganic compound or
The component with multilayer interfacial structure that rubber material is formed by pressing, winding or die casting process.
As a preferred embodiment, the shape of the multilayered medium material is plane stratiform, cylinder stratiform or random shape
Shape；The multilayered medium material internal flaw be each layer media interior or between formed cavity, doping foreign matter, density unevenness
Even and/or interlayer unsticking.
As a preferred embodiment, the sawtooth wave power supply transmit cycle is T, ts=0.8T；The two-dimensional scanner
Residence time is NT at each scan position, and wherein N is the integer more than or equal to 1；Two-dimensional scanner definition with
The face that the surface of the solid propellant rocket to be measured is parallel is that the x-y plane constituted with the directions x and y and definition are put down with x-y
The vertical direction in face is the directions z；Wherein, the directions the x and y scanning accuracy of the two-dimensional scanner is 0.5mm；T is 10~500
Microsecond；N is 1~1024.
The present invention also provides a kind of detection methods of multilayered medium material internal flaw, are based on above-mentioned detection device, packet
Include following steps：
Step S1：Continuous sawtooth voltage signal drive signal generator tranmitting frequency is exported by the sawtooth wave power supply
The low frequency signal of the continuous frequency modulation changed between 9.375GHz~13.75GHz, the low frequency signal are changed to by 9.375GHz
The time of 13.75GHz is ts；The Terahertz frequency multiplication link device receives the low frequency signal and carries out n times frequency multiplication, emits in week
Phase tsThe Terahertz high-frequency signal for the continuous frequency modulation that interior frequency changes between 9.375nGHz~13.75nGHz, wherein n are big
In or equal to 8 integer；
Step S2：The Terahertz high-frequency signal critical dimensions of Terahertz frequency multiplication link device transmitting are to free sky
Between, it is collimated into directional light by first paraboloidal mirror, first passes through the Terahertz beam splitter, using second parabolic
Face mirror focuses to the sample to be tested, is reflected by each medium bed boundary of the sample to be tested, Terahertz high-frequency signal
By the second paraboloidal mirror backtracking to the Terahertz beam splitter, by the Terahertz beam splitter reflection to original
Vertical direction is reflected on road；
Step S3：The low frequency signal part of the signal generator transmitting is transmitted to the Terahertz frequency mixer
In；The Terahertz frequency mixer receives the Terahertz high-frequency signal and signal generator hair of the Terahertz beam splitter reflection
The low frequency signal penetrated is mixed to obtain intermediate-freuqncy signal；
Step S4：The Terahertz high-frequency signal pair that the two-dimensional scanner control is focused by the second paraboloidal mirror
The sample to be tested surface carries out the scanning in the direction x, y, and the two-dimensional scanner defines parallel with the sample to be tested surface
Face be the faces x-y constituted with the directions x and y and to define the direction vertical with x-y plane be the directions z；
Step S5：The data acquisition device receives the intermediate-freuqncy signal and is transmitted in the imaging processing device, passes through
The imaging processing device is crossed to handle to obtain the one-dimensional image in the directions z corresponding with each scan position of the two-dimensional scanner
Array, the two-dimensional scanner control the Terahertz high-frequency signal and are swept to the sample to be tested surface directions progress x, y
It retouches, obtained multiple one-dimensional image arrays constitute a three-dimensional imaging data array, and the imaging processing device is according to institute
It states three-dimensional imaging data array and exports the directions x-y corresponding with sample to be tested image, the directions x-z image and the side y-z
To image.
The beneficial effects of the present invention are：The present invention is using THz imaging technology to the internal flaw of multilayered medium material
Be detected, due to THz wave have penetrability is strong, safe to use, directionality is good, bandwidth is high, release energy very
It is small, will not human body generate harmful photoionization the features such as, detection device of the invention for detection material be medium class
The materials such as material, such as glass fibre class, ceramic-like, resinae, inorganic chemical species, rubber.The multilayered medium material
The component with multilayer interface that predominantly above-mentioned material is formed by techniques such as pressing, winding, moldings.The shape of the component
It can be plane stratiform, can also be cylinder stratiform or similar irregular shape.The internal flaw is each layer medium
It is internal and between formed cavity, doping the uniform interlayer unsticking of foreign matter, density unevenness, multilayer dielectric structure inside can be lacked
Effectively detection, accuracy height, favorable reproducibility are fallen into, and radiation injury will not be caused to human body.Meanwhile detecting system knot of the invention
Structure is compact, can realize that wall-weather and all-region all the period of time uses, without extra mating consumptive material and protective gear, easy to detect,
Fast, the detectable material of Terahertz high-frequency signal is more extensive, unrestricted choice is strong, applied widely, highly practical, can reduce
Testing cost improves production efficiency.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of the detection device of multilayered medium material internal flaw of the present invention；
Fig. 2 is the pictorial diagram of the sample to be tested 1 of the present invention；
Fig. 2 a are the 1 corresponding directions the x-y image of sample to be tested of the present invention；
Fig. 2 b are the 1 corresponding directions the x-z image of sample to be tested of the present invention；
Fig. 3 is the pictorial diagram of the sample to be tested 2 of the present invention；
Fig. 3 a are the 2 corresponding directions the y-z image of sample to be tested of the present invention；
Fig. 4 is the pictorial diagram of the sample to be tested 3 of the present invention；
Fig. 4 a are the 3 corresponding directions the x-y image of sample to be tested of the present invention.
Reference sign：
100- sawtooth wave power supplys；101- signal generators；102- Terahertz frequency multiplication link devices；
The first paraboloidal mirrors of 103-；The second paraboloidal mirrors of 104-；105- third paraboloidal mirrors；
106- Terahertz beam splitters；107- Terahertz frequency mixers；108- data acquisition devices；
109- imaging processing devices；110- two-dimensional scanners；111- samples to be tested.
Specific implementation mode
It in order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below will be in the embodiment of the present invention
Technical solution be explicitly described, it is clear that described embodiments are some of the embodiments of the present invention, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are obtained without making creative work
The every other embodiment obtained, shall fall within the protection scope of the present invention.Unless otherwise specified, technological means used is in embodiment
Conventional means well-known to those skilled in the art.
A kind of detection device of multilayered medium material internal flaw provided by the invention is included in time t with reference to figure 1sIt is interior
The signal generator 101 of the low frequency signal for the continuous frequency modulation that tranmitting frequency changes between 9.375GHz~13.75GHz and
For by the low frequency signal by n times frequency multiplication link to obtain in time tsInterior tranmitting frequency 9.375nGHz~
The Terahertz frequency multiplication link device 102 of the Terahertz high-frequency signal of the continuous frequency modulation changed between 13.75nGHz, wherein n be more than
Or the integer equal to 8.
The present invention is the internal flaw for detecting multilayered medium material, and the material for detection is medium class material, example
Such as glass fibre class, ceramic-like, resinae, inorganic chemical species, rubber material.Or by above-mentioned material by pressing,
The component with multilayer interface that the techniques such as winding, molding are formed.Components Shape can be plane stratiform, can also be cylindrical layer
Shape or similar irregular shape.The overall thickness of multilayered medium material, to more than ten centimetres, usually exists different in submillimeter
Medium, be divided into multilayer, be the component for being compressed to an entirety by process means such as high-pressure extrusion or bondings, inside each layer or
Between there may be disengaging or unsticking or there are foreign matter cavity or phenomena such as there are Density inhomogeneities, material structure can be caused whole
Body performance indicator reduces the problem of to influence quality of materials, and the present invention is using THz imaging technology to multilayered medium material
Internal debonding defect is detected, and since THz wave has, penetrability is strong, safe to use, directionality is good, bandwidth is high, releases
The energy very little put, will not be the features such as human body generates harmful photoionization, detection device of the invention can be to thicker
Multilayer dielectric structure is effectively detected, accuracy height, favorable reproducibility, while will not cause radiation injury to human body.
101 tranmitting frequency of signal generator of the present invention is covered in the low frequency signal conduct of 9.375GHz~13.75GHz variations
Fundamental frequency signal, Terahertz frequency multiplication link device 102 are used to emit the Terahertz high frequency letter of the continuous frequency modulation of required frequency range
Number.The present invention can select different times Terahertzs according to the thickness difference of multilayered medium material, the needs of different resolution
Frequency multiplication link device 102, the Terahertz frequency multiplication link device 102 that high power time may be selected when detecting relatively thin multilayered medium material emit
The THz wave of upper frequency, when the Terahertz frequency multiplication link device of low power time may be selected in the larger multilayered medium material of detection thickness
The THz wave of 102 transmitting lower frequencies also may be selected a times time adjustable Terahertz frequency multiplication link device 102 and emit different frequency
THz wave is based on this, and the detectable material of detection device of the invention is more extensive, unrestricted choice is strong, applied widely, real
It is strong with property, testing cost can be reduced.
For example, layer resolution ratio γ=c/2B (c is the light velocity, and B is bandwidth), works as n=8, B=35GHz, γ ≈ 4.3mm, transmitting
High frequency THz wave frequency 110GHz is changed to by 75GHz, be applicable to the big mesh of thickness to 10mm or more such as wind blades
Mark is detected；Work as n=16, the high frequency THz wave frequency of B=70GHz, γ ≈ 2.1mm, transmitting are changed to by 150GHz
220GHz is applicable to be detected the target of the 5mm~30mm such as composite material casing；Work as n=24, B=105GHz, γ ≈
The high frequency THz wave frequency of 1.4mm, transmitting are changed to 330GHz by 225GHz, are applicable to the insulating layer material to 3~10mm
Material is detected.
The Terahertz frequency multiplication link device 102 of the present invention by n times frequency multiplication link, obtains the low frequency signal required
Terahertz high-frequency signal, wherein n are the integer more than 1, preferably 8~24 integer, more preferably 8,16 or 24.
Further include sawtooth wave power supply 100 with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention；
The sawtooth wave power supply 100 is connect with the signal generator 101, for exporting continuous sawtooth voltage signal to drive
It states signal generator 101 and exports the low frequency signal；The Terahertz frequency multiplication link device 102 connects with the signal generator 101
It connects, the low frequency signal for emitting the signal generator 101 carries out n times frequency multiplication and forms the Terahertz high frequency letter
Number.
Specifically, the signal generator 101 is driven by sawtooth wave power supply 100, and voltage becomes in a cycle T from 0 volt
It is lied prostrate to A, in the range of 0-A is lied prostrate, any voltage value, corresponding signal generator 101 exports the electromagnetic viscosimeter of a specific frequency
Signal, usual voltage is higher, and output frequency is higher, and the output drive signal generator 101 of continuous sawtooth voltage signal is defeated
Go out the electromagnetic signal of continuous frequency modulation.As one embodiment, the 101 rate-adaptive pacemaker range of signal generator used in the present invention is complete
Period output frequency is 9GHz-18.75GHz, can cover the required frequency range of required 9.375GHz-13.75GHz, is exported
Power is more than 10dBm, and the period is adjustable within the scope of 10us~500us, due to the otherness of hardware performance index, reality output meeting
Slightly deviation.
Further include the first paraboloidal mirror 103 with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention
With the second paraboloidal mirror 104, first paraboloidal mirror 103 and second paraboloidal mirror 104 are located at the Terahertz
Between frequency multiplication link device 102 and a sample to be tested 111 and be oppositely arranged, first paraboloidal mirror 103 for reflect it is described too
The Terahertz high-frequency signal of 102 transmitting of hertz frequency multiplication link device is simultaneously focused to by second paraboloidal mirror 104
On the sample to be tested 111, the Terahertz high-frequency signal after focusing is anti-on 111 surface of the sample to be tested and internal generation
It penetrates.
If there is the defects of disengagements, unsticking, foreign matter, cavity situation in the inside of sample to be tested 111, the intensity of return signal with
Phase change can be different from area free from defect, can detect each Jie by the Terahertz high-frequency signal that each medium bed boundary is reflected back
The defect situation of matter bed boundary.
Further include Terahertz beam splitter with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention
106, the Terahertz beam splitter 106 be arranged between first paraboloidal mirror 103 and second paraboloidal mirror 104 and
The Terahertz beam splitter 106 and the transmission direction of the Terahertz high-frequency signal are arranged in 135 ° of angles, in the sample to be tested
111 surfaces and the internal Terahertz high-frequency signal reflected are divided after second paraboloidal mirror 104 by the Terahertz
Beam device 106 reflexes to the direction of the path orthogonal emitted with second paraboloidal mirror 104.
Terahertz beam splitter 106 can arbitrarily change the route for the Terahertz high-frequency signal that the second paraboloidal mirror 104 is reflected back,
More convenient it can be detected and received by other devices, device setting is more flexible, highly practical, applied widely.Terahertz beam splitting
Device 106 and the transmission direction of the Terahertz high-frequency signal are in 135 ° of angles, can be reflexed to Terahertz high-frequency signal anti-with former road
Vertical direction is penetrated, is conducive to precise alignment and adjusts calibration, facilitate optimization system signal quality.
Further include Terahertz frequency mixer with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention
107, the Terahertz frequency mixer 107 includes the first signal input part, second signal input terminal and signal output end；Described first
Signal input part is connect with the signal generator 101, the part Terahertz launched for receiving the signal generator 101
High-frequency signal；The second signal input terminal is for receiving the Terahertz high-frequency signal reflected by the beam splitter 106；It is described too
Hertz frequency mixer 107 is mixed the Terahertz high-frequency signal of reception and the low frequency signal to obtain intermediate-freuqncy signal.Intermediate frequency is believed
Number by Fast Fourier Transform (FFT) handle, obtain the one-dimensional picture of z direction targets, can reflect the depth location of defect.
Specifically, a part of critical dimensions of Terahertz high-frequency signal that the Terahertz frequency multiplication link device 102 emits
To free space, it is collimated into directional light by first paraboloidal mirror 103, another part is transmitted to the Terahertz frequency mixer
In 107.The Terahertz frequency mixer 107 receives the Terahertz high-frequency signal and the letter that the Terahertz beam splitter 106 reflects
The Terahertz high-frequency signal that number generator 101 emits, intermediate-freuqncy signal is obtained after mixing.Wherein, the signal hair of the embodiment of the present invention
The low frequency signal frequency of raw device transmitting preferably changes between 9.375GHz~13.75GHz, the frequency selection purposes range be in order to
When using the Terahertz frequency multiplication link device 102 of low power time, it may not be necessary to change other configurations, only simply replace or increase
Corresponding function can be realized in the frequency doubling device and mixing device for being added to n=16 or n=24, easy to operate.In order to facilitate terahertz
Hereby frequency mixer 107 receives the Terahertz high-frequency signal of transmitting, can Terahertz beam splitter 106 and Terahertz frequency mixer 107 it
Between setting third paraboloidal mirror 105, THz wave meeting of the third paraboloidal mirror 103 for reflecting Terahertz beam splitter 106
Gather the signal receiving end of Terahertz frequency mixer 107.It can also be set between Terahertz beam splitter 106 and Terahertz frequency mixer 107
Third paraboloidal mirror 105 is set, the Terahertz that the third paraboloidal mirror 105 is used to reflect the Terahertz beam splitter 106 is high
Frequency signal focus to the Terahertz frequency mixer 107 second signal input terminal.
Further include two-dimensional scanner with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention
110, the two-dimensional scanner 110 is used to control the Terahertz high-frequency signal pair focused by the second paraboloidal mirror 104
The sample to be tested surface carries out the scanning in the direction x, y, the definition of the two-dimensional scanner 110 and 111 table of the sample to be tested
The parallel face in face is the faces x-y constituted with the directions x and y and to define the direction vertical with x-y plane be the directions z.The two dimension
The residence time at each scan position of scanning means 110 is Nts, wherein N is the integer more than or equal to 1, and the two dimension is swept
Imaging apparatus 110 is defined the face parallel with 111 surface of the sample to be tested and is the x-y plane constituted with the directions x and y and defines
The direction vertical with x-y plane is the directions z.Wherein, the directions the x and y scanning accuracy of two-dimensional scanner 110 be preferably 0.1~
20mm is typically set at 0.5mm, and the size of the x-y for the minimum defect that can be detected is 0.5mm × 0.5mm, can effectively be known
Other defect area is more than 2mm × 2mm；The period of setting is faster, and measuring speed is faster, since the limit of response time limits
System, T of the invention is preferably 10~500 delicate, and N is preferably 1~1024, more preferable N=256, ts<T, preferably ts=0.8T.
Specifically, the two-dimensional scanner 110 can be by controlling the detection device of the present invention or controlling sample to be tested 111
It is scanned, keeps the distance between the second paraboloidal mirror 104 and sample to be tested 111 in the focal length of the second paraboloidal mirror 104
Near, realize that the relative position between the terahertz signal focused by the second paraboloidal mirror 104 and sample to be tested 111 moves,
Realize the data acquisition of tri- dimensions of x, y and z.X, y two can be directed to the shape of sample to be tested, be set as linear movement or turn
Dynamic movement.The residence time at each scan position of the two-dimensional scanner 110 is NT, and wherein N is whole more than or equal to 1
Number.By taking linear scan as an example, the two-dimensional scanner 110 define the face parallel with 111 surface of the sample to be tested for x and
The faces x-y and define the direction vertical with x-y plane as the directions z that the directions y are constituted.
Further include data acquisition device 108 with reference to figure 1 in the present embodiment as a kind of preferably embodiment of the present invention
With imaging processing device 109；The data acquisition device 108 is connect with the Terahertz frequency mixer 107, for acquire it is described too
Hertz frequency mixer 107 is mixed obtained intermediate-freuqncy signal.
The imaging processing device 109 is connect with the data acquisition device 108, for receiving the intermediate-freuqncy signal and passing through
It crosses processing and obtains the one-dimensional image array in the directions z corresponding with 110 each scan position of the two-dimensional scanner, the two dimension
Scanning means 110 controls the scanning that the Terahertz high-frequency signal carries out the sample to be tested surface in the direction x, y, obtains multiple
The one-dimensional image array constitutes a three-dimensional imaging data array, and the imaging processing device 109 is according to the three-dimensional imaging
Data array exports the directions x-y corresponding with sample to be tested image, the directions x-z image and the directions y-z image.For
Reduction ambient noise in practical applications needs between the imaging processing device 109 and the Terahertz frequency mixer 107
Data acquisition device 108 is set, and the intermediate-freuqncy signal that Terahertz frequency mixer 107 exports is configured by data acquisition device 108
All adjustable parameters realize that the multicycle acquires and export average signal, and generate visual image result.Imaging processing device
Co-ordination can be synchronized with synchronous control data acquisition device 108 and two-dimensional scanner 110.Further, data acquire
Device 108 can also be connect with signal generator 101, for driving synchro source, signal generator 101, Terahertz frequency multiplication link
Co-ordination between 102 and Terahertz frequency mixer 107.Imaging processing device 109 being capable of the acquisition of visualization display system device
The three-dimensional data of acquisition, and shown with tri- coordinate dimensions of xy, yz and xz.
A kind of detection method of multilayered medium material internal flaw of the present invention, includes the following steps：
Step S1：Continuous sawtooth voltage signal drive signal generator tranmitting frequency is exported by the sawtooth wave power supply
The low frequency signal of the continuous frequency modulation changed between 9.375GHz~13.75GHz, the low frequency signal are changed to by 9.375GHz
The time of 13.75GHz is ts；The Terahertz frequency multiplication link device receives the low frequency signal and carries out n times frequency multiplication, emits in week
Phase tsThe Terahertz high-frequency signal for the continuous frequency modulation that interior frequency changes between 9.375nGHz~13.75nGHz, wherein n are big
In or equal to 8 integer；
Step S2：The Terahertz high-frequency signal critical dimensions of Terahertz frequency multiplication link device transmitting are to free sky
Between, it is collimated into directional light by first paraboloidal mirror, first passes through the Terahertz beam splitter, using second parabolic
Face mirror focuses to the sample to be tested, is reflected by each medium bed boundary of the sample to be tested, Terahertz high-frequency signal
By the second paraboloidal mirror backtracking to the Terahertz beam splitter, by the Terahertz beam splitter reflection to original
Vertical direction is reflected on road；
Step S3：The low frequency signal part of the signal generator transmitting is transmitted to the Terahertz frequency mixer
In；The Terahertz frequency mixer receives the Terahertz high-frequency signal and signal generator hair of the Terahertz beam splitter reflection
The low frequency signal penetrated is mixed to obtain intermediate-freuqncy signal；
Step S4：The Terahertz high-frequency signal pair that the two-dimensional scanner control is focused by the second paraboloidal mirror
The sample to be tested surface carries out the scanning in the direction x, y, and the two-dimensional scanner defines parallel with the sample to be tested surface
Face be the faces x-y constituted with the directions x and y and to define the direction vertical with x-y plane be the directions z；
Step S5：The data acquisition device receives the intermediate-freuqncy signal and is transmitted in the imaging processing device, passes through
The imaging processing device is crossed to handle to obtain the one-dimensional image in the directions z corresponding with each scan position of the two-dimensional scanner
Array, the two-dimensional scanner control the Terahertz high-frequency signal and are swept to the sample to be tested surface directions progress x, y
It retouches, obtained multiple one-dimensional image arrays constitute a three-dimensional imaging data array, and the imaging processing device is according to institute
It states three-dimensional imaging data array and exports the directions x-y corresponding with sample to be tested image, the directions x-z image and the side y-z
To image.Internal flaw in multilayer dielectric structure can cause the intensity of terahertz signal and phase to change, and be different from
Do not have defective region.
Test example 1
Sample to be tested 1：The attaching stairstepping insulating layer material (as shown in Figure 2) on stairstepping metallic plate, size 16cm ×
The step-thickness of 4cm × 2cm, insulating materials are 16mm, 10mm, 4mm.Sample to be tested is carried out using the detection device of the present invention
Detection can get the corresponding directions the x-y image (as shown in Figure 2 a) of sample to be tested, the directions x-z image (as shown in Figure 2 b).
The position at each interface is apparent that by the directions x-z image, it can clearly be seen that the thickness at each interface and
Each interface fits closely, and does not occur unsticking phenomenon.
Test example 2
Sample to be tested 2：The hole of a high 1cm is emptied out in the unit of plastic of one piece of thickness 2cm, to formed by plastic layer,
The laminated plastics structure (as shown in Figure 3) that air layer, plastic layer are constituted.Sample to be tested is carried out using the detection device of the present invention
Detection can get sample to be tested and correspond to the directions y-z image (as shown in Figure 3a).It can be understood by the directions y-z image and be seen
To the position at each interface, it can clearly be seen that the thickness at each interface.
Test example 3
Sample to be tested 3：The glass filament case (as shown in Figure 4) attached outside electro-insulating rubber medicine block, glass filament case is big
About 5mm is thick, and electro-insulating rubber medicine block about 4cm is thick.Sample to be tested is detected using the detection device of the present invention, can get and wait for
The corresponding directions the x-y image (as shown in fig. 4 a) of sample.By the directions x-y image be clear that shell with absolutely
Between edge rubber medicine block, there are several round unsticking regions (circle represents region in figure).
Finally it should be noted that：The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although
Present invention has been described in detail with reference to the aforementioned embodiments, it will be understood by those of ordinary skill in the art that：It still may be used
With technical scheme described in the above embodiments is modified or equivalent replacement of some of the technical features；
And these modifications or replacements, various embodiments of the present invention technical solution that it does not separate the essence of the corresponding technical solution spirit and
Range.
Claims (15)
1. a kind of detection device of multilayered medium material internal flaw, which is characterized in that be included in time tsInterior tranmitting frequency exists
The signal generator of the low frequency signal of the continuous frequency modulation changed between 9.375GHz~13.75GHz and for by the low frequency
Signal is by n times frequency multiplication link to obtain in time tsThe company that interior tranmitting frequency changes between 9.375nGHz~13.75nGHz
The Terahertz frequency multiplication link device of the Terahertz high-frequency signal of continuous frequency modulation, wherein n are the integer more than or equal to 8.
2. the detection device of multilayered medium material internal flaw as described in claim 1, which is characterized in that further include sawtooth wave
Power supply；The sawtooth wave power supply is connect with the signal generator, for exporting continuous sawtooth voltage signal to drive
It states signal generator and exports the low frequency signal；The Terahertz frequency multiplication link device is connect with the signal generator, and being used for will
The low frequency signal of the signal generator transmitting carries out n times frequency multiplication and forms the Terahertz high-frequency signal.
3. the detection device of multilayered medium material internal flaw as claimed in claim 1 or 2, which is characterized in that further include
One paraboloidal mirror and the second paraboloidal mirror, first paraboloidal mirror and second paraboloidal mirror are located at the Terahertz
It between frequency multiplication link device and a sample to be tested and is oppositely arranged, first paraboloidal mirror is for reflecting the Terahertz frequency multiplication
The Terahertz high-frequency signal of link device transmitting is simultaneously focused to by second paraboloidal mirror on the sample to be tested,
The Terahertz high-frequency signal after focusing reflects on the sample to be tested surface and inside.
4. the detection device of multilayered medium material internal flaw as claimed in claim 3, which is characterized in that further include Terahertz
Beam splitter, the Terahertz beam splitter be arranged between first paraboloidal mirror and second paraboloidal mirror and it is described too
Hertz beam splitter and the transmission direction of the Terahertz high-frequency signal are arranged in 135 ° of angles, in the sample to be tested surface and inside
The Terahertz high-frequency signal reflected after second paraboloidal mirror by the Terahertz beam splitter reflection to it is described
The direction of the path orthogonal of second paraboloidal mirror transmitting.
5. the detection device of multilayered medium material internal flaw as claimed in claim 4, which is characterized in that further include Terahertz
Frequency mixer, the Terahertz frequency mixer include the first signal input part, second signal input terminal and signal output end；Described first
Signal input part is connect with the signal generator, the part Terahertz high frequency letter launched for receiving the signal generator
Number；The second signal input terminal is used to receive the Terahertz high-frequency signal by the beam splitter reflection；The Terahertz mixing
Device is mixed the Terahertz high-frequency signal of reception and the low frequency signal to obtain intermediate-freuqncy signal.
6. the detection device of multilayered medium material internal flaw as claimed in claim 5, which is characterized in that further include that third is thrown
Object plane mirror, the third paraboloidal mirror are mixed for the Terahertz high-frequency signal of the beam splitter reflection to be focused to the Terahertz
The second signal input terminal of frequency device.
7. the detection device of multilayered medium material internal flaw as claimed in claim 6, which is characterized in that further include that two dimension is swept
Imaging apparatus, the two-dimensional scanner are used to control the Terahertz high-frequency signal focused by the second paraboloidal mirror to described
Sample to be tested surface carries out the scanning in the direction x, y, and the two-dimensional scanner defines the face parallel with the sample to be tested surface
For the faces x-y that are constituted with the directions x and y and to define the direction vertical with x-y plane be the directions z.
8. the detection device of multilayered medium material internal flaw as claimed in claim 7, which is characterized in that further include that data are adopted
Acquisition means and imaging processing device；
The data acquisition device is connect with the Terahertz frequency mixer, is mixed for acquiring the Terahertz frequency mixer
Intermediate-freuqncy signal；
The imaging processing device is connect with the data acquisition device, for receiving the intermediate-freuqncy signal and being obtained by processing
The one-dimensional image array in the directions z corresponding with each scan position of the two-dimensional scanner, the two-dimensional scanner control
The Terahertz high-frequency signal carries out the sample to be tested surface scanning in the direction x, y, obtains multiple one-dimensional image numbers
Group constitute a three-dimensional imaging data array, the imaging processing device according to the three-dimensional imaging data array export with it is described
The corresponding directions the x-y image of sample to be tested, the directions x-z image and the directions y-z image.
9. the detection device of multilayered medium material internal flaw as claimed in claim 8, which is characterized in that the two-dimensional scan
Device residence time at each scan position is NT, and wherein N is the integer more than or equal to 1；The two-dimensional scanner
The directions x and y scanning accuracy be 0.1~20mm；T is 10~500 microseconds；N is 1~1024；The sawtooth wave power supply transmitting week
Phase is T0, wherein T0=T, ts=0.8T.
10. the detection device of multilayered medium material internal flaw as claimed in claim 9, which is characterized in that the two dimension is swept
The directions the x and y scanning accuracy of imaging apparatus is 0.5mm；T is 150 microseconds；N is 256.
11. such as the detection device of claim 1~10 any one of them multilayered medium material internal flaw, which is characterized in that n
For 8~96 integer.
12. such as the detection device of claim 1~10 any one of them multilayered medium material internal flaw, which is characterized in that n
It is 8,16 or 24.
13. the detection device of the multilayered medium material internal flaw as described in claim 1~10, which is characterized in that described more
Layer dielectric material is to pass through pressing, winding or die casting process by glass fibre, ceramics, resin, inorganic compound or rubber material
The component with multilayer interfacial structure formed.
14. the detection device of multilayered medium material internal flaw as claimed in claim 13, which is characterized in that the multilayer is situated between
The shape of material is plane stratiform, cylinder stratiform or irregular shape；The multilayered medium material internal flaw is situated between for each layer
Foreign matter, Density inhomogeneity and/or the interlayer unsticking in the cavity, doping that are formed within or between matter.
15. a kind of detection method of multilayered medium material internal flaw, which is characterized in that using described in claim 1~14
The detection device of multilayered medium material internal flaw is detected, and described detection method includes the following steps：
Step S1：Continuous sawtooth voltage signal drive signal generator tranmitting frequency is exported by the sawtooth wave power supply to exist
The low frequency signal of the continuous frequency modulation changed between 9.375GHz~13.75GHz, the low frequency signal are changed to by 9.375GHz
The time of 13.75GHz is ts；The Terahertz frequency multiplication link device receives the low frequency signal and carries out n times frequency multiplication, emits in week
Phase tsThe Terahertz high-frequency signal for the continuous frequency modulation that interior frequency changes between 9.375nGHz~13.75nGHz, wherein n are big
In or equal to 8 integer；
Step S2：The Terahertz high-frequency signal critical dimensions of the Terahertz frequency multiplication link device transmitting are passed through to free space
It crosses first paraboloidal mirror and is collimated into directional light, first pass through the Terahertz beam splitter, using second paraboloidal mirror
Convergence focuses to the sample to be tested, is reflected by each medium bed boundary of the sample to be tested, Terahertz high-frequency signal passes through
The second paraboloidal mirror backtracking is extremely anti-with former road by the Terahertz beam splitter reflection to the Terahertz beam splitter
Penetrate vertical direction；
Step S3：The low frequency signal part of the signal generator transmitting is transmitted in the Terahertz frequency mixer；Institute
State Terahertz frequency mixer receive the Terahertz beam splitter reflection Terahertz high-frequency signal and the signal generator transmitting
Low frequency signal is mixed to obtain intermediate-freuqncy signal；
Step S4：The Terahertz high-frequency signal that the two-dimensional scanner control is focused by the second paraboloidal mirror is to described
Sample to be tested surface carries out the scanning in the direction x, y, and the two-dimensional scanner defines the face parallel with the sample to be tested surface
For the faces x-y that are constituted with the directions x and y and to define the direction vertical with x-y plane be the directions z；
Step S5：The data acquisition device receives the intermediate-freuqncy signal and is transmitted in the imaging processing device, by institute
Imaging processing device is stated to handle to obtain the one-dimensional image number in the directions z corresponding with each scan position of the two-dimensional scanner
Group, the two-dimensional scanner control the scanning that the Terahertz high-frequency signal carries out the sample to be tested surface in the direction x, y,
Obtained multiple one-dimensional image arrays constitute a three-dimensional imaging data array, and the imaging processing device is according to described three
Tie up imaging data array export x-y corresponding with sample to be tested directions image, the directions x-z image and the directions y-z at
As figure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810168270.1A CN108426852A (en) | 2018-02-28 | 2018-02-28 | A kind of detection device and its method of multilayered medium material internal flaw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810168270.1A CN108426852A (en) | 2018-02-28 | 2018-02-28 | A kind of detection device and its method of multilayered medium material internal flaw |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108426852A true CN108426852A (en) | 2018-08-21 |
Family
ID=63157269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810168270.1A Pending CN108426852A (en) | 2018-02-28 | 2018-02-28 | A kind of detection device and its method of multilayered medium material internal flaw |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108426852A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109001141A (en) * | 2018-09-28 | 2018-12-14 | 中国兵器工业标准化研究所 | Infrared optical material impurity test method |
| CN110987861A (en) * | 2019-12-11 | 2020-04-10 | 北京工业大学 | Continuous terahertz wave multi-object-plane laminated phase contrast imaging method |
| CN113899744A (en) * | 2021-09-29 | 2022-01-07 | 上海理工大学 | Terahertz-based building material defect detection method and system |
| CN116818704A (en) * | 2023-03-09 | 2023-09-29 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203929627U (en) * | 2014-04-17 | 2014-11-05 | 中国计量学院 | Solid protein matter thermal stability Terahertz spectrometer |
| CN104914432A (en) * | 2015-04-17 | 2015-09-16 | 中国电子科技集团公司第四十一研究所 | THz scanning imaging system and method based on FMCW system |
| CN105891900A (en) * | 2016-06-03 | 2016-08-24 | 中国工程物理研究院电子工程研究所 | Security inspection system of active terahertz two-dimensional high-speed scanning imaging |
| CN106525862A (en) * | 2016-10-27 | 2017-03-22 | 首都师范大学 | Method for detecting internal defect of layered insulating material by using terahertz imaging and apparatus thereof |
| CN206556602U (en) * | 2016-12-30 | 2017-10-13 | 华中科技大学 | A kind of terahertz imaging device based on coherent tomographic |
-
2018
- 2018-02-28 CN CN201810168270.1A patent/CN108426852A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203929627U (en) * | 2014-04-17 | 2014-11-05 | 中国计量学院 | Solid protein matter thermal stability Terahertz spectrometer |
| CN104914432A (en) * | 2015-04-17 | 2015-09-16 | 中国电子科技集团公司第四十一研究所 | THz scanning imaging system and method based on FMCW system |
| CN105891900A (en) * | 2016-06-03 | 2016-08-24 | 中国工程物理研究院电子工程研究所 | Security inspection system of active terahertz two-dimensional high-speed scanning imaging |
| CN106525862A (en) * | 2016-10-27 | 2017-03-22 | 首都师范大学 | Method for detecting internal defect of layered insulating material by using terahertz imaging and apparatus thereof |
| CN206556602U (en) * | 2016-12-30 | 2017-10-13 | 华中科技大学 | A kind of terahertz imaging device based on coherent tomographic |
Non-Patent Citations (1)
| Title |
|---|
| 李文军等: "多层胶接结构胶层空气缺陷的太赫兹无损检测", 《光学学报》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109001141A (en) * | 2018-09-28 | 2018-12-14 | 中国兵器工业标准化研究所 | Infrared optical material impurity test method |
| CN110987861A (en) * | 2019-12-11 | 2020-04-10 | 北京工业大学 | Continuous terahertz wave multi-object-plane laminated phase contrast imaging method |
| CN110987861B (en) * | 2019-12-11 | 2022-05-03 | 北京工业大学 | Continuous terahertz wave multi-object-plane laminated phase contrast imaging method |
| CN113899744A (en) * | 2021-09-29 | 2022-01-07 | 上海理工大学 | Terahertz-based building material defect detection method and system |
| CN113899744B (en) * | 2021-09-29 | 2023-12-08 | 上海理工大学 | Terahertz-based building material defect detection method and system |
| CN116818704A (en) * | 2023-03-09 | 2023-09-29 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
| CN116818704B (en) * | 2023-03-09 | 2024-02-02 | 苏州荣视软件技术有限公司 | High-precision full-automatic detection method, equipment and medium for semiconductor flaw AI |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108426852A (en) | A kind of detection device and its method of multilayered medium material internal flaw | |
| CN107462544B (en) | A kind of multi-functional THz wave imaging system and imaging method | |
| CN107782694B (en) | Terahertz time-domain spectrum full-polarization electromagnetic scattering measurement system and acquisition method | |
| CN108444938B (en) | Terahertz imaging solid rocket engine interface debonding defect detection method and system | |
| Zhang et al. | Broadband millimeter-wave imaging radar-based 3-D holographic reconstruction for nondestructive testing | |
| CN108535550A (en) | Terahertz substance dielectric constant measuring system based on Brewster angular measurement | |
| CN106323907A (en) | Optical fiber coupling terahertz time-domain spectroscopy testing system | |
| CN103411999B (en) | The asynchronous scanning heat wave imaging non-destructive detection System and method for of laser | |
| Herschel et al. | 3D millimeter wave screening of wind turbine blade segments | |
| CN106525862A (en) | Method for detecting internal defect of layered insulating material by using terahertz imaging and apparatus thereof | |
| CN108490497B (en) | Security inspection system and method | |
| CN114002160A (en) | Terahertz frequency modulation continuous wave nondestructive testing imaging system and method | |
| Pan et al. | Guided reflectometry imaging unit using millimeter wave FMCW radars | |
| Zhenwei et al. | Terahertz non-destructive testing and imaging of high-voltage cables | |
| Bauer et al. | Terahertz non-destructive testing of the Mica insulation of power generator bars in FMCW measurements with a dielectric waveguide antenna | |
| CN207946362U (en) | Safe examination system | |
| CN109031255A (en) | The experimental provision of Terahertz radar scattering imaging | |
| CN206945533U (en) | Minimize terahertz time-domain spectroscopy instrument | |
| CN207764388U (en) | Active continuous wave Terahertz human body cache detection device | |
| US5020920A (en) | Method and apparatus for millimeter-wave detection of thermal waves for materials evaluation | |
| CN111157486A (en) | Three-dimensional terahertz imaging method and imaging system thereof | |
| CN105973812B (en) | Active terahertz imaging detection system and method based on Nb5N6 detectors | |
| CN112414965A (en) | Automatic adjusting device and method for sample position of terahertz three-dimensional tomography system | |
| CN115079167A (en) | Terahertz continuous wave three-dimensional tomography device and method | |
| CN114088734B (en) | System and method for detecting internal defects of composite insulator |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |