CN103411999B - The asynchronous scanning heat wave imaging non-destructive detection System and method for of laser - Google Patents
The asynchronous scanning heat wave imaging non-destructive detection System and method for of laser Download PDFInfo
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- CN103411999B CN103411999B CN201310352096.3A CN201310352096A CN103411999B CN 103411999 B CN103411999 B CN 103411999B CN 201310352096 A CN201310352096 A CN 201310352096A CN 103411999 B CN103411999 B CN 103411999B
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Abstract
The present invention relates to the asynchronous scanning heat wave imaging non-destructive detection System and method for of a kind of laser, system adopts high-power laser beam, through beam deflecting device, the surface of sample is quickly scanned, it is achieved pulse heat encourages. The frame scan speed of laser beam is asynchronous to the frame scan speed of thermal imaging system, thermal imaging system gathers a series of heat wave images, every two field picture has different delays between heat wave signal and the thermal excitation of each pixel, through the heat wave image that retardation correction and numerical value process, it is possible to for the internal flaw of sample is analyzed.
Description
Technical field
The present invention relates to and a kind of adopt scanning laser beam as the thermal wave imaging method of thermal excitation source, for testee is carried out Non-Destructive Testing, belong to the technical field of Infrared Non-destructive Testing.
Background technology
The ultimate principle of heat wave tomography Dynamic Non-Destruction Measurement is, initially with thermal excitation source, testee surface is carried out PULSE HEATING, forms surface and the temperature difference within testee so that heat energy flows from surface to interior of articles. If the thermal characteristic of interior of articles has heterogeneity, the such as defect such as fracture or space, the propagation of hot-fluid will be affected, and part hot-fluid can be reflected back to the surface of object. Utilize thermal imaging system continuous acquisition from the heat radiation images on testee surface, again through analyzing the characteristic that these images vary with temperature, it is possible to obtain the heat wave time and intensity by interior of articles defect reflection, thus judging size and the characteristic of these defects.
Along with the fast development of the industry such as new material, new forms of energy, high-speed railway, nuclear industry and Aero-Space, the requirement of Dynamic Non-Destruction Measurement is increased day by day. The advantages such as thermal wave detection technology has a detection, and speed is fast, imaging area big, noncontact and long-range detection, it is widely used, from little aspect, can to semi-conducting material, as solaode, the encapsulation of integrated circuit, semiconductor light source the test of encapsulation heat conductivility etc., and the measurement etc. of metal and other non-transparent film. From big aspect, the inside of aircraft and spacecraft shell can be bonded situation and the feed-line of the shell of extent of corrosion, under water naval vessel, gas and liquid, track for a train and wheel disc, boiler pot, automobile case and enamelled coating quality etc. are estimated, thus scenting a hidden danger in time to avoid accident.
Comparing traditional nondestructiving detecting means, such as ultrasound wave, eddy current, the technology such as X ray, infrared thermal wave imaging technique has the advantage of uniqueness.And this technology is especially largely effective to the detection of composite. The utilization of composite has become one of advanced important symbol of modern aerospace field equipment. Along with various particulate metal materials and composite are in the application at the positions such as fuselage, wing, turbo blade, storepipe, aero-engine jet pipe, turbo blade and airframe structure, the requirement of Non-Destructive Testing is stepped up. The same composite at new energy field is applied also at Fast Growth, and the blade such as wind-driven generator is currently mainly all made up of glass fiber resin packing material. Usual composite is the mode or honeycomb sandwich construction that adopt multi-layer fiber glued, has high intensity and lightweight advantage. Owing to often producing internal flaw in the process manufactured and use, such as layering, unsticking, crack etc., leverage intensity and the service life of material. Although the Non-Destructive Testing of composite can being adopted traditional Ultrasonic Flaw Defect, but this technology requiring probe contacts testee, point by point scanning, wastes time and energy. For baroque composite, such as cellular sheet material, ultrasonic technology then cannot be effectively taking place detection.
When heat wave tomography, characteristic per sample has two kinds of thermal excitation modes. For the material than relatively thin sample, particularly high thermal conductivity, for instance semiconductor wafer and solar silicon wafers etc., adopting the pulse mode that the thermal excitation time is very short, when otherwise the echo of heat wave arrives surface, thermal excitation does not also terminate, impact detection. And for relatively thicker or heat conduction rate variance sample, the change of heat wave is slow, the energy requirement of thermal excitation is high, so generally adopting continuous print thermal excitation source, such as Infrared High-Power lamp etc., continuous long-time heating, then carrying out image acquisition again, sampling rate can be very slow.
Needing to solve two problems to the detection of Rapid Variable Design heat wave signal, high-energy short pulse rushes thermal excitation and high-speed image sampling. Rushing thermal excitation for high-energy short pulse, the product on current foreign market all adopts high-energy flash lamp as pulse heat driving source. But this high-energy flash lamp has a lot of limitation, for instance its gross energy is limited, the area of test can not be too big every time; Beam divergence is uneven, it is impossible to telekinesy; The flash pulse cycle is extremely short and non-adjustable, and too high peak power can cause the damage of sample; The service life of fluorescent tube is limited, and equipment volume is huge, not easily shifted. And for the problem of high-speed image sampling, only adopt the thermal imaging system with high frame frequency function at present. This thermal imaging system is sufficiently expensive, and the image resolution ratio exported significantly declines along with the raising of frame frequency.
High power semiconductor lasers obtains rapid development in recent years so that this type of laser instrument while power increases substantially, price rapid decrease. Laser instrument is compared with traditional thermal excitation light source has that wavelength selectable is selected, intensity can be modulated, and advantage can be assembled and can be scanned etc. to light beam.
Existing a small amount of thermal wave imagine technique adopts laser scanning thermal excitation at present, such as United States Patent (USP) 3,808,439,6,343,874,6,419,387 etc., all describe and adopt the method for laser scanning thermal excitation to carry out thermal wave imaging, but these methods fail to solve the key issue of heat wave tomography, especially for the problem that the detection in shallow cosmetic bug must adopt high frame frequency thermal imaging system. Chinese invention patent application (application number 2013101306946) describes a kind of heat wave chromatography imaging method adopting laser phase shift scanning calorimeter to encourage, and solves simultaneously and superficial defects realizes short pulse necessary to heat wave tomography rushes two problems of thermal excitation and high-speed sampling.But owing to the laser scanning line frequency of this invention is synchronized with the line frequency of thermal imaging system, so scanning speed is confined to the parameter of thermal imaging system so that the application of this technology obtains bigger restriction.
Summary of the invention
The purpose of the present invention is aiming at the deficiency of above-mentioned existing heat wave Dynamic Non-Destruction Measurement, it is provided that a kind of thermal wave imaging lossless detection method simultaneously meeting pulse heat excitation and high speed infrared image acquisition. The method adopts high power laser as thermal excitation source, by controlling beam deflecting device, the surface of sample is quickly scanned, it is achieved pulse heat encourages. The vertical sweep frequency of laser facula is asynchronous to the vertical sweep frequency of thermal imaging system, the heat wave signal making each pixel constantly changes relative to the delay of thermal excitation, process again through the heat wave image gathered is carried out time delay correction and data, thus reaching the purpose of high frame frequency image acquisition.
The temporal resolution of traditional thermal wave imagine technique is decided by the frame frequency of thermal imaging system, and the frame frequency of conventional thermal imaging system is limited, as at about 25-60Hz, being not suitable for the thermal wave imaging Non-Destructive Testing of relatively thin or that thermal conductivity is bigger sample. The asynchronous scanning technique of laser of the present invention effectively solves this problem, when using conventional thermal imaging system so that the temporal resolution of thermal wave detection increases substantially.
The present invention adopts asynchronous scan method, namely the frame scan speed of laser beam and the frame scan speed of thermal imaging system are asynchronous, laser beam is multiple scanning repeatedly, in so every two field picture, the heat wave signal of each pixel all has different time delays relative to thermal excitation, the heat wave signal of all image same pixel points is got up by sequence time delay and is fitted, namely can obtain this time dependent curve of heat wave signal.
The speed of laser scanning can characteristic per sample select, if sample heat conduction is fast and has the defect of relatively shallow-layer, it is possible to adopt light pencil quickly to scan. If sample thermal conductivity is low, defective locations is deep, then can adopt angle pencil of ray slow scanning, in order to have more thermal excitation energy. Except can taking linear beam one-dimensional scanning, it would however also be possible to employ point-like focal beam spot carries out two-dimensional scan.
Accompanying drawing explanation
Fig. 1 is that heat wave signal varies with temperature schematic diagram.
Fig. 2 is the difference heat wave signal schematic representation in defective district and nondefective zone.
Fig. 3 is conventional heat wave chromatography imaging technique schematic diagram.
Fig. 4 is the schematic diagram of thermal wave imagine technique of the present invention.
Fig. 5 is embodiment of the present invention schematic diagram.
Fig. 6 is thermal wave imaging light path schematic diagram of the present invention.
Fig. 7 is the know-why schematic diagram of the present invention.
Fig. 8 is the laser scanning methods schematic diagram of the present invention.
Fig. 9 is several laser scanning methods schematic diagram of the present invention.
Figure 10 is the another several laser scanning methods schematic diagrams of the present invention.
Figure 11 is the another several laser scanning methods schematic diagrams of the present invention.
Figure 12 is the another several laser scanning methods schematic diagrams of the present invention.
Figure 13 is a kind of schematic diagram determining heat wave signal delay time of the present invention.
Figure 14 is another embodiment of the present invention schematic diagram.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described.
Shown in Fig. 1 is the time dependent relation of heat wave signal. After of short duration pulse heat excitation, sample surface temperature raises rapidly, then begins to decline. If sample interior does not have defect, heat wave signal intensity is such as shown in curve 31.If but sample interior has thermal resistance defect, such as void crack etc., then the change of signal is such as shown in curve 32. Shown in curve 33 in difference such as Fig. 2 of the two curve 31,32. Peak value S according to curve 33oSize and peak value occur time toIt is appreciated that defect is for information about, such as the degree of depth and size etc. Therefore to heat wave tomography can be realized, it has to be possible to measure temperature decline curve 31 and 32.
The process of conventional heat wave tomography is as shown in Figure 3. After sample is heated by high-energy flash lamp, the heat energy absorbed along with sample surfaces starts to propagate to sample interior, and surface temperature begins to decline, as indicated by curve 36. Continuous acquisition a series of images 34 in the process that thermal imaging system drops at temperature, then the heat wave signal 35 corresponding to same pixel in this series of images 34 is got up with formula fitting, the curve 36 that this pixel heat wave signal varies with temperature can be obtained. It can be seen that the heat wave chromatography imaging technique employing of routine is once excite, the repeatedly method of image acquisition, the minimum interval of image acquisition is a frame frequency cycle. As can be seen here, the frame frequency cycle of thermal imaging system much smaller than the period of change of heat wave signal, otherwise cannot can must accurately obtain curve 34 because of sampled point very little. Therefore to some heat wave signal intensities than sample faster, the thermal imaging system adopting high frame frequency is usually required that.
What the present invention taked is the method for the asynchronous scanning thermal wave imaging of laser. The peak power of common high power laser is limited, particularly average to sample surfaces. In order to form pulse heat excitation, first focusing of the light beam on a line, the power density of such unit are can improve hundreds times. Can certainly focusing on a point, such power density improves more, however it is necessary that the scanning means adopting two dimension. When laser wire harness quickly scans at sample surfaces, it is of short duration to the thermal excitation of any point on sample, therefore can regard pulse as. Laser instrument can repetition period property scan, and intensification and the temperature-fall period of scanning every time repeat substantially. As shown in Figure 4, curve 37 represents the temperature caused by laser scanning and rises, and curve 39 represents temperature decline process. If gathering a two field picture 38 during each temperature declines, and the acquisition time of every two field picture 38 has a skew relative to former frame, so through several all after dates, it is possible to obtain a series of heat wave image 38 with different time delay. The heat wave signal of same pixel in this series of images 38 is fitted, just can obtain the heat wave change curve 39 of this pixel. The single thermal excitation, the multiple repairing weld technology that adopt with traditional heat wave tomography are compared, and laser scanner technique of the present invention is the method for repeatability thermal excitation, asynchronous-sampling.
If not waiting enough time between multiple scanning, the sample surface temperature after scanning all can raise to some extent every time, it is therefore desirable to carries out the correction of ambient temperature, namely in the temperature of each laser beam flying pre-test sample surfaces.
Shown in Fig. 5 is present system one embodiment schematic diagram, including superpower laser 21, light-beam forming unit 26, beam deflecting device 25, thermal imaging system 22, data processing unit 20, scan control unit 24 and infrared fileter 23 etc. Laser beam 27 forms fan-shaped in-line laser focal spot 30 by light-beam forming unit 26, and the laser scanning district 29 on testee 28 progressively scans.The heat wave signal excited is received and delivers to data processing unit 20 by thermal imaging system 22, and infrared fileter 23 is for the wavelength, the particularly wavelength of thermal excitation light beam beyond elimination heat wave signal. Scan control unit 24 controls beam deflecting device 25 and the relativeness of thermal imaging system 22 so that both frame scan speed keeps a difference.
Fig. 6 show the light path schematic diagram of apparatus of the present invention imaging moiety. Laser focal spot 30 is projected on the infrared array detector 40 of thermal imaging system 22 by the lens 43 of thermal imaging system 22, laser focal spot 30 is projected on the pixel column 42 on infrared focal plane detector 40, and the current demand signal of infrared array detector 40 reads row 41 then corresponding to the position 46 in laser scanning district 29. The projected position 42 of laser focal spot 30 and the current line-spacing read between row 41 are exactly currently read the heat wave signal delay relative to thermal excitation of row 41 divided by the sweep speed that laser focal spot 30 projects on infrared array detector 40. The frame scan speed of such as laser focal spot 30 is 10Hz, and the frame frequency cycle is 100ms, if the gap currently reading row 41 and light beam projecting position 42 is 1/4 frame, then the current heat wave signal read is 25ms relative to the time delay of thermal excitation.
In order to realize quick heat wave tomography, the present invention takes the asynchronous scan method of laser, and namely the speed of laser beam flying is asynchronous with the scanning speed that thermal imaging system reads. As shown in Figure 7 (a), as laser beam flying speed VL(unit: line number/second) is more than thermal imaging system reading scan speed VDTime, thermal imaging system currently reads the distance between row 41 and laser beam projection 42 can over time from t0To t1It is gradually increased. Otherwise, as laser beam flying speed VLLess than thermal imaging system reading scan speed VDTime, thermal imaging system currently reads the distance between row 41 and laser beam projection 42 can over time from t0To t1It is gradually reduced, as shown in Figure 7 (b) shows. It is exactly that the heat wave signal at laser beam heats position is to delay when being detected that thermal imaging system currently reads line-spacing between row 41 and laser beam projection 42 divided by thermal imaging system scanning speed.
If when just starting, thermal imaging system currently reads the delay between row 41 and laser beam projection 42 is dt0, the retardation dt to t is then:
dt(t)=dt0+(VL/VD–1)t
It is hereby achieved that retardation between heat wave signal and the thermal excitation of any a line in any one frame heat wave image. If the frame frequency cycle is TF, line period is TL, then in nth frame line n heat wave signal delay amount dt (N, n) be:
dt(N,n)=dt0+(VL/VD–1)(NTF+nTL)
At this moment in same frame heat wave image, the retardation of every a line is all different.
The frame scan of laser focal spot 30 as shown in Figure 8 (a), can carry out along a direction, quickly skim over during flyback, or is closed by laser instrument; Can also as shown in Figure 8 (b) shows, laser focal spot 30 carries out shuttle-scanning, saving time and the energy making full use of laser instrument.
Laser focal spot 30 can be a wide line, as shown in Fig. 9 (a). Laser focal spot 30 can also as shown in Figure 9 (b), the region that shuttle-scanning is wider while constantly advancing. The advantage of wide line scanning is to be partially formed one-dimensional thermal diffusion, is conducive to heat wave to propagate to depths, to detect deeper defect.
Laser focal spot 30 can also saltatory scanning, as shown in Figure 10 (a) shows, the first row and the second row are separated by about field, then returning the third line, until completing the scanning of a frame, thermal excitation overlapping region so can be made to have longer cooling recovery time.Equally, laser beam can be polymerized to a short-term, scans a local of sample every time, and every column scan, as shown in Figure 10 (b), this is particularly well-suited to detect bigger sample.
The scanning direction of laser focal spot 30 can be different with the scanning direction of thermal imaging system 22, and as shown in Figure 11 (a) shows, both directions are orthogonal, or in an angle, as shown in Figure 11 (b). Requirement is that the sweep speed of laser focal spot 30 keeps particular kind of relationship with the sweep speed of thermal imaging system 22 so that the heat wave signal delay of each pixel of thermal imaging system 22 can produce gradual change.
Laser focal spot 30 can also be point-like or short-term shaped laser spot, the method adopting two-dimensional scan, as shown in figure 12. What Figure 12 (a) represented is scanning pattern such as pectination, is namely all from left to right, quick flyback; What Figure 12 (b) represented is shuttle-scanning, it is possible to make full use of flyback time, improves the utilization rate of laser power; Shown in Figure 12 (c) is large spot scanning, it is possible to improves scan efficiency, can form the condition of the one-dimensional thermal diffusion of local simultaneously, be conducive to the detection of deep flaw.
In the heat wave image gathered in the asynchronous scanning situation of above-mentioned laser, time delay between heat wave signal and the thermal excitation of each pixel or pixel column is different, in order to these time delays are modified, it is necessary to know the laser focal spot 30 position in heat wave image and scanning speed. This can pass through accomplished in many ways. First, when the distance of known testee 28 to beam deflecting device 25, deflection angle and the rotational angular velocity of the beam deflecting device 25 calibrated in advance can be adopted, obtain by calculating in conjunction with the scanning sequence relation between beam deflecting device 25 and thermal imaging system 22. Reasonable way is from the heat wave image collected, and determines according to the position of laser focal spot 30, and the position of laser focal spot 30 is generally also the place that signal is the strongest. As shown in Figure 13 (a), when laser focal spot 30 scans from top to bottom, if the straight line 51 along scanning direction reads heat wave signal, obtaining the curve as shown in Figure 13 (b), wherein the signal maximum 50 at laser focal spot 30 place place is the strongest. Therefore can in heat wave image along laser focal spot 30 scanning direction take out data be fitted, find out heat wave signal maximum 50 location. Laser focal spot 30 position in adjacent two two field pictures is subtracted each other and obtains the pixel value that laser focal spot 30 moves in two two field picture intervals, more just can obtain the scanning speed of laser focal spot 30 divided by this interval. Yet another method as shown in figure 14, namely adopts the scanning track of the video camera 52 synchronous recording laser focal spot 30 to thermal excitation wavelength sensitive, and thus calculates position and the scanning speed of laser focal spot 30. The scanning area of video camera 52 and thermal imaging system 22 need to be passed through and accurately be proofreaded, and what the frame frequency of image preferably synchronized. The image of video camera 52 can also be used to the surface optical characteristics of the uniformity to laser focal spot 30 and testee 28 and is recorded and corrects.
Claims (13)
1. the asynchronous scanning heat wave imaging non-destructive detection system of laser, it is characterised in that described system includes:
Laser instrument (21), described laser instrument (21) is at testee (28) surface actuator heat wave;
Light-beam forming unit (26), described light-beam forming unit (26) adjusts the shape of the laser focal spot (30) that laser beam (27) is formed on testee (28) surface;
Beam deflecting device (25), described beam deflecting device (25) is used for deflecting laser beam (27) and testee (28) surface is scanned;
Thermal imaging system (22), described thermal imaging system (22) includes infrared array detector (40), is used for gathering the heat wave image on testee (28) surface;
Data processing unit (20), described data processing unit (20) carries out Treatment Analysis for the heat wave image that described thermal imaging system (22) is gathered;
Scan control unit (24), described scan control unit (24) controls described beam deflecting device (25) so that the sweep speed of the described laser focal spot (30) projection on described infrared array detector (40) is asynchronous to the signal sweep rate of described infrared array detector (40) self.
2. the asynchronous scanning heat wave imaging non-destructive detection system of laser according to claim 1, it is characterized by, described light-beam forming unit (26) makes laser beam (27) form at least one linear laser focal spot (30) substantially wide with laser scanning region (29) on testee (28) surface, and described beam deflecting device (25) carries out one-dimensional scanning.
3. the asynchronous scanning heat wave imaging non-destructive detection system of laser according to claim 1, it is characterized by, described light-beam forming unit (26) makes described laser beam (27) form at least one laser focal spot (30) on testee (28) surface, and described beam deflecting device (25) carries out two-dimensional scan.
4. the asynchronous scanning heat wave imaging non-destructive detection system of laser according to claim 1, it is characterized by, the scanning direction of the described laser focal spot (30) projection on described infrared array detector (40) is inconsistent with the signal scanning direction of described infrared array detector (40) self.
5. the asynchronous scanning heat wave imaging non-destructive detection system of laser according to claim 1, it is characterized by, farther include the video camera (52) to described laser beam (27) wavelength sensitive, be used for recording the optical signature of the surface optical characteristics of testee (28) and laser focal spot (30).
6. the asynchronous scanning heat wave imaging nondestructive inspection method of laser, comprises the following steps:
Testee (28) is placed in laser scanning region (29);
Adopt thermal imaging system (22) that described laser scanning region (29) is detected;
Adopting laser focal spot (30) that described testee (28) is carried out thermal excitation scanning, the line frequency of described thermal excitation scanning is asynchronous with the line-scanning frequency of described thermal imaging system (22);
Gather one group of heat wave image, calculate on described heat wave image the retardation between heat wave signal and the thermal excitation of each pixel according to the described laser focal spot (30) position in described heat wave image and scanning speed;
Described heat wave image is carried out the correction of time delay;
Revised image described time delay is carried out heat wave analysis.
7. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 6, described laser focal spot (30) carries out thermal excitation scanning by beam deflecting device (25), and the position of described laser focal spot (30) is determined by the distance of the deflection angle of described beam deflecting device (25) with described beam deflecting device (25) to described testee (28); The scanning speed of described laser focal spot (30) is determined by the distance of the yaw rate of described beam deflecting device (25) with described beam deflecting device (25) to described testee (28).
8. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 6, the position of described laser focal spot (30) is determined by heat wave signal maximum (50) position in described heat wave image.
9. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 6, the computational methods of the scanning speed of described laser focal spot (30) comprise the following steps:
Choose the image of two frame known interval;
According to the location of pixels that heat wave signal maximum (50) is residing in described two two field pictures, obtain the pixel value that laser focal spot (30) moves between described two two field pictures;
With the described pixel value interval divided by described two two field pictures, obtain the scanning speed of described laser focal spot (30).
10. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 6, the position of described laser focal spot (30) and scanning speed are analyzed to determine by the image of the video camera (52) that optical maser wavelength is sensitive with described thermal imaging system (22) synchronous acquisition.
11. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 6, farther include to utilize the scanogram that the video camera (52) that optical maser wavelength is sensitive gathers laser focal spot (30), utilize described scanogram that the heat wave image gathered carries out the correction of Distribution of laser intensity, reduce laser beam heterogeneity and the impact on heat wave signal of described testee (28) surface optical characteristics.
12. the asynchronous scanning heat wave imaging nondestructive inspection method of laser, comprise the following steps:
Testee (28) is placed in laser scanning region (29);
Set the rate synchronous of scanning of laser focal spot (30) in the sweep speed of thermal imaging system (22);
Use laser focal spot (30) that described testee (28) is carried out thermal excitation scanning, gather one group of heat wave image simultaneously;
Repeat described thermal excitation scanning and heat wave image acquisition, and before each multiple scanning, the scanning initial time setting described laser focal spot (30) has different delays relative to the scanning initial time of described thermal imaging system (22);
Calculate the retardation between heat wave signal and the thermal excitation of each pixel on all images;
By all images by the arrangement of described retardation, and described heat wave image is carried out the correction of time delay;
To through described time delay revised image carry out heat wave analysis.
13. the asynchronous scanning heat wave imaging nondestructive inspection method of laser according to claim 12, the heat wave image that described heat wave analysis includes first each described multiple scanning being obtained carries out the correction of ambient temperature respectively.
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| CN103926274B (en) * | 2014-04-22 | 2017-01-25 | 哈尔滨工业大学 | Infrared thermal wave radar imaging nondestructive testing method for defects of carbon fiber reinforced plastic (CFRP) plywood |
| FR3020678B1 (en) * | 2014-04-30 | 2021-06-25 | Areva Np | PHOTOTHERMAL EXAMINATION PROCESS AND CORRESPONDING EXAMINATION SET |
| CN104764770A (en) * | 2015-03-30 | 2015-07-08 | 南京航空航天大学 | Pulsed eddy current infrared thermal imaging detection system and method for steel rail cracks |
| CN106706709A (en) * | 2016-12-05 | 2017-05-24 | 南京航空航天大学 | Line scanning excitation continuous large-area infrared thermal imaging detection method |
| CN109211976A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Semi-conductor silicon chip surface/sub-surface micro-cracks damage chirp beam splitting laser excitation infrared thermal wave detection device and method |
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