CN108169282A - Differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system and method - Google Patents
Differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system and method Download PDFInfo
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- CN108169282A CN108169282A CN201711488513.1A CN201711488513A CN108169282A CN 108169282 A CN108169282 A CN 108169282A CN 201711488513 A CN201711488513 A CN 201711488513A CN 108169282 A CN108169282 A CN 108169282A
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Abstract
The present invention proposes a kind of differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system and method, and the system is by a high power laser, 1：1 laser beam splitter mirror, two same specification concavees lens, a thermal infrared imager, an Image Acquisition and processing computer；Its detection method is：First with 1：The laser beam that high power laser is sent out is divided into the identical twin children's laser beam of two beams by 1 laser beam splitter mirror；Two sub- laser beams are expanded respectively with two same specification concavees lens again and are irradiated to two adjacent area of measured workpiece surface and are heated, form two identical thermal excitation regions；It is detected simultaneously using thermal infrared imager and records two regional temperature distributed datas；Finally two regional temperatures are distributed and carry out additive operation, inside two detection zones during equal zero defect, difference is close to zero, and when a certain region existing defects, difference is that Temperature Distribution caused by defect disturbs.It can be eliminated by this method since laser heat source is unevenly distributed the interference caused by testing result, realize the high sensitivity detection to measured workpiece internal flaw.
Description
Technical field
The present invention relates to mechanical structure and the active infrared lossless detection methods of material internal defect, and in particular to a kind of difference
Dynamic formula induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING method and system.
Background technology
Infrared thermal imaging detection technique is spread using active control heating excitation hot-fluid in tested interior of articles, by quick
Thermal image acquires and realizes testee Inner Defect Testing based on heat waves image processing techniques.The technology has detection speed
Many advantages, such as spending block, non-contact, applied widely, visual result, easy to automate and real-time observation, has wide
Application prospect.Infrared thermal imaging detection mode of heating mainly has thermolamp heating, electromagnetic heating, Ultrasonic Heating and laser heating,
In laser infrared detection technique using laser as heat source have that heating region is controllable, heat is concentrated, it is remote to can be achieved and high
The advantages that precision Scanning Detction is a kind of new infrared detection technique very with development potentiality.In addition, compared to traditional
Thermolamp heats, and the energy wavelength of laser pumping is single and apart from each other with thermal imaging system acquisition wave band, the reflected light in detection process
Line will not interfere testing result.But the laser facula that laser generates is there are Energy distribution unevenness, irregular at any time
Phenomena such as variation, poor repeatability, the quality and the recognition capability to defect that seriously affect detection image.It is mainly adopted in detection at present
It solves the above problems with the following method：1. realize uniform hot spot distribution as far as possible by the even optical element of laser.2. using lacking
The testing result twice for falling into workpiece and zero defect workpiece carries out difference to eliminate inhomogeneities.3. extraction calculates signal different characteristic
Value schemes (such as rate of temperature change, principal component figure) to enhance defect contrast.However, optimize even optical element cannot thoroughly eliminate it is sharp
The problem of beam energy is unevenly distributed, and its effect when unstable in face of laser beam energy distribution is worse；And similary difference side
Method is laser beam energy distribution is unstable, can not be also applicable in when poor repeatability；Although characteristic value figure can be to a certain degree
Picture quality is promoted, but limited for whole raising Flaw detectability aspect effect.
Invention content
Lead to its detectability to solve the heterogeneity of excitation hot spot and unstability in current laser infrared detection
The main problems such as decline, the present invention propose a kind of THERMAL IMAGING NONDESTRUCTIVE TESTING method based on the excitation of differential type induced with laser,
Detectability of the laser infrared for interior of articles defect can be increased substantially.
To achieve the above objectives, the present invention adopts the following technical scheme that：
A kind of differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system, including high power laser 1, laser beam splitter mirror
2nd, speculum 3, the first beam expanding lens 4, the second beam expanding lens 5, thermal infrared imager 6 and Image Acquisition and processing computer 8；It is described to swash
Light beam splitter 2 is placed with 9 angle at 45 ° of incoming laser beam that high power laser 1 is sent out, and the first beam expanding lens 4 is arranged on incidence
Laser beam 9 passes through the incident direction of the first sub- laser beam 10 that laser beam splitter mirror 2 is formed, and speculum 3 is swashed with incoming laser beam 9
Light beam splitter 2 is divided into the second sub- laser beam 11 incident direction angle at 45 ° after reflecting is placed, and the second beam expanding lens 5 is arranged on the
Two sub- laser beams 11 reflected by speculum 3 after light path on and position and the first beam expanding lens 4 it is symmetrical, the first beam expanding lens 4 and second
Beam expanding lens 5 is two identical beam expanding lens, and is arranged in parallel in 6 both sides of thermal infrared imager, the first beam expanding lens 4 and the second beam expanding lens 5
It is identical with a distance from measured workpiece 7, be so as to form two shapes, area on 7 surface of measured workpiece and be distributed identical heating region
Hot spot；Interval S between first beam expanding lens 4 and the second beam expanding lens 5 is by detection workpiece area with depending on detection demand, meeting simultaneously
S >=2D, D are the diameter of two hot spots formed on 7 surface of measured workpiece；Computer 8 connects high power laser 1 and infrared heat
As instrument 6.
The laser beam splitter mirror 2 is 1：1 laser beam splitter mirror, the laser beam for high power laser 1 to be sent out are divided into two
Identical twin children's laser beam.
Plano-concave lens of first beam expanding lens, 4 and second beam expanding lens 5 for two same sizes, focal length F.
The detection method of the differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system, which is characterized in that including such as
Lower step：
Step 1：The incoming laser beam 9 of an a diameter of d is sent out using high power laser 1, is incident on laser beam splitter mirror 2
On；
Step 2：Laser beam splitter mirror 2 is placed with 9 angle at 45 ° of incoming laser beam, is divided through laser beam 9 former after beam splitter
As two the first sub- 10 and second sub- laser beams 11 of laser beam of beam twin children laser beam, wavelength, beam cross section size, cross section
On power density distribution it is identical, only exit direction is different；First sub- laser beam 10 is still incident on along original direction
In one beam expanding lens 4, the second sub- laser beam 11 is incident on along with original vertical direction on speculum 3 first；Since incidence angle is
45 °, direction is vertical with incident direction after reflection, and is incident on the second beam expanding lens along the direction parallel with the first sub- laser beam 10
In 5；
Step 3：First beam expanding lens 4 and the plano-concave lens that the second beam expanding lens 5 is two same sizes, focal length F, respectively by two
Sub- laser beam expand and be irradiated to distance be L 7 surface of measured workpiece, workpiece surface formed two a diameter of D=d (F+L)/
The hot spot of F, and the two regions are heated using thermal infrared imager 6, form two identical thermal excitation regions；First expands
Depending on interval S between 4 and second beam expanding lens 5 of mirror is by detection workpiece area and detection demand, while meet S >=2D, therefore two
The heat source of a heating region will not be overlapped interference；
Step 4：The Temperature Distribution of two heating regions is detected and recorded simultaneously while laser excitation using thermal infrared imager 6
Data, and be transferred on computer 8, finally two regional temperatures are distributed with progress additive operation and obtains the temperature difference in two regions
Value；Inside two detection zones during equal zero defect, difference is close to zero；When a certain region existing defects, difference is scarce
Temperature Distribution disturbance caused by falling into；The defects of detection zone inside, can be detected based on this temperature difference.
The present invention passes through 1：Laser heat source is divided into two identical twin children's laser beams and is irradiated to tested by 1 laser beam splitter mirror
Two region of workpiece, while Temperature Distribution difference of two regions under the conditions of the excitation of identical heat source is measured to carry out inside workpiece defect
Detection with directly the method for region into a row energization is compared, this method can eliminate due to laser heat source distribution not
It is interfered caused by testing result, and without carrying out complicated image processing process, therefore testing result to temperature pattern
With higher defect contrast and image degree of purity, and result has the parameters such as defective locations and size high-precision show
Show.
Description of the drawings
Fig. 1 is the schematic diagram of the nondestructive detection system based on differential type induced with laser infrared thermal imaging.
Fig. 2 is the schematic diagram of differential readout.
Fig. 3 is Temperature Distribution exemplary plot when being encouraged using uneven laser facula to measured workpiece.
Fig. 4 be after difference it is defective with zero defect at residual temperature distribution example figure.
Specific embodiment
With reference to the accompanying drawings and detailed description, the present invention is described in further details.
As shown in Figure 1, the nondestructive detection system based on differential type induced with laser infrared thermal imaging is by workpiece 7 to be detected, big
Power laser diode 1,1:1 laser beam splitter mirror 2,4 and of i.e. the first beam expanding lens of laser beam expanding lens of 3, two same sizes of speculum
Second beam expanding lens 5, thermal infrared imager 6 and Image Acquisition and processing computer 7 form.
The testing principle of the method for the present invention is：First with 1：The laser beam that 1 laser beam splitter mirror sends out high power laser
It is divided into the identical twin children's laser beam of two beams；Two sub- laser beams are expanded and are irradiated to tested respectively with two same specification beam expanding lens again
Two adjacent area of workpiece surface is heated, and forms two identical thermal excitation regions；It detects and remembers simultaneously using thermal infrared imager
Record two regional temperature distributed datas；Finally two regional temperatures are distributed and carry out additive operation, it is intact inside two detection zones
When falling into, difference is close to zero, and when a certain region existing defects, difference is that Temperature Distribution caused by defect disturbs.Pass through
This method can be eliminated since laser heat source is unevenly distributed the interference caused by testing result, realize and measured workpiece inside is lacked
Sunken detection.This method can realize a kind of more highly sensitive, high stability inside relative to traditional laser infrared method
The non-contact detection method of defect.
With reference to Fig. 1 to Fig. 4 and specific embodiment, the present invention is described in further detail.
The present invention is a kind of lossless detection method based on differential type induced with laser infrared thermal imaging, specifically includes following step
Suddenly：
Step 1：The incoming laser beam 9 of an a diameter of d is sent out using high power laser 1, is incident on laser beam splitter mirror 2
On.
Step 2：The splitting ratio of laser beam splitter mirror 2 is 1:1, it is placed with 9 angle at 45 ° of incoming laser beam, through beam splitter
Former laser beam 9 is split up into two the first sub- 10 and second sub- laser beams 11 of laser beam of beam twin children laser beam, wavelength, light beam afterwards
Power density distribution in sectional dimension, cross section is identical, and only exit direction is different.First sub- laser beam 10 is still along original
Direction be incident in the first beam expanding lens 4, the second sub- laser beam 11 is incident on speculum 3 along with original vertical direction first
On.Since incidence angle is 45 °, direction is vertical with incident direction after reflection, and the edge direction parallel with the first sub- laser beam 10
It is incident in the second beam expanding lens 5；
Step 3：First beam expanding lens 4 and the plano-concave lens that the second beam expanding lens 5 is two same sizes, focal length F, respectively by two
Sub- laser beam expands and is irradiated to 7 surface of measured workpiece that distance is L, and two a diameter of D=d are formed on 7 surface of measured workpiece
(F+L) hot spot of/F, and the two regions are heated using thermal infrared imager 6, form two identical heat shown in Fig. 2
Excitation area i.e. the first thermal excitation region 12 and the second thermal excitation region 13.When 12 inside defective 14 of the first thermal excitation region
When, since the thermal conductivity of defect area is far below the material area of surrounding, the accumulation of heat can be generated near defect, from
And the Temperature Distribution in this region is made to generate disturbance.Interval S between first beam expanding lens 4 and the second beam expanding lens 5 is by detection workpiece
Depending on area and detection demand, while meet S >=2D, therefore the heat source of two heating regions will not be overlapped interference.
Step 4：It is detected simultaneously using thermal infrared imager 6 while laser excitation and records the first thermal excitation region 12 and the
The temperature distribution image data sequence in two thermal excitation regions 13, and be transferred on computer 8.As shown in figure 3,15 and 16 are respectively
The surface temperature distribution image in the first thermal excitation region 12 and the second thermal excitation region 13 when being heated using uneven laser facula.
Typically directly Temperature Distribution difference is not obvious as caused by defect from image, therefore finally two regional temperatures are distributed
It carries out additive operation and obtains the temperature difference value in two regions.A certain moment temperature difference Distribution value figure is illustrated in figure 4, when two inspections
When surveying equal zero defect inside region, difference is close to zero；When a certain region existing defects, Temperature Distribution caused by defect is disturbed
It is dynamic to generate difference 17.The defects of detection zone inside, can be detected based on this temperature difference.
Claims (4)
1. a kind of differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system, it is characterised in that：Including high power laser
(1), laser beam splitter mirror (2), speculum (3), the first beam expanding lens (4), the second beam expanding lens (5), thermal infrared imager (6) and image are adopted
Collection and processing computer (8)；The incoming laser beam (9) that the laser beam splitter mirror (2) and high power laser (1) are sent out into
45 ° of angles are placed, and the first beam expanding lens (4) is arranged on the first sub- laser that incoming laser beam (9) is formed across laser beam splitter mirror (2)
The incident direction of beam (10), speculum (3) are divided into the second sub- laser after being reflected with incoming laser beam (9) by laser beam splitter mirror (2)
The incident direction angle at 45 ° of beam (11) is placed, and the second beam expanding lens (5) is arranged on the second sub- laser beam (11) by speculum (3)
With the first beam expanding lens (4) symmetrically, the first beam expanding lens (4) is identical for two with the second beam expanding lens (5) in light path after reflection and position
Beam expanding lens, and be arranged in parallel in thermal infrared imager (6) both sides, the first beam expanding lens (4) is with the second beam expanding lens (5) from measured workpiece
(7) apart from identical, so as to form two shapes, area and the identical heating region, that is, hot spot of distribution on measured workpiece (7) surface；The
Depending on interval S between one beam expanding lens (4) and the second beam expanding lens (5) is by detection workpiece area and detection demand, at the same meet S >=
2D, D are the diameter of two hot spots formed on measured workpiece (7) surface；Computer (8) connection high power laser (1) and red
Outer thermal imaging system (6).
2. differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system according to claim 1, it is characterised in that：It is described
Laser beam splitter mirror (2) is 1：1 laser beam splitter mirror, it is identical twin that the laser beam for high power laser (1) to be sent out is divided into two
Raw sub- laser beam.
3. differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system according to claim 1, it is characterised in that：It is described
First beam expanding lens (4) and the plano-concave lens that the second beam expanding lens (5) is two same sizes, focal length F.
4. the detection method of the differential type induced with laser THERMAL IMAGING NONDESTRUCTIVE TESTING system of claim 1 or 3, feature exist
In including the following steps：
Step 1：The incoming laser beam (9) of an a diameter of d is sent out using high power laser (1), is incident on laser beam splitter mirror (2)
On；
Step 2：Laser beam splitter mirror (2) is placed with incoming laser beam (9) angle at 45 °, through laser beam (9) quilt former after beam splitter
Be divided into two the first sub- laser beams (10) of beam twin children laser beam and the second sub- laser beam (11), wavelength, beam cross section size,
Power density distribution on cross section is identical, and only exit direction is different；First sub- laser beam (10) is still along original direction
It is incident in the first beam expanding lens (4), the second sub- laser beam (11) is incident on speculum (3) along with original vertical direction first
On；Since incidence angle is 45 °, direction is vertical with incident direction after reflection, and the edge side parallel with the first sub- laser beam (10)
To being incident in the second beam expanding lens (5)；
Step 3：First beam expanding lens (4) and the plano-concave lens that the second beam expanding lens (5) is two same sizes, focal length F, respectively by two
Sub- laser beam expands and is irradiated to measured workpiece (7) surface that distance is L, and two a diameter of D are formed on measured workpiece (7) surface
The hot spot of=d (F+L)/F, and the two regions are heated using thermal infrared imager (6), form two identical thermal excitation areas
Domain；Interval S between first beam expanding lens (4) and the second beam expanding lens (5) is by detection workpiece area with depending on detection demand, expiring simultaneously
Sufficient S >=2D, therefore the heat source of two heating regions will not be overlapped interference；
Step 4：Thermal infrared imager (6) is used while laser excitation while detects and record the Temperature Distribution number of two heating regions
According to, and be transferred on computer (8), finally two regional temperatures are distributed with progress additive operation and obtains the temperature difference in two regions
Value；Inside two detection zones during equal zero defect, difference is close to zero；When a certain region existing defects, difference is scarce
Temperature Distribution disturbance caused by falling into；The defects of detection zone inside, can be detected based on this temperature difference.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109211976A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Semi-conductor silicon chip surface/sub-surface micro-cracks damage chirp beam splitting laser excitation infrared thermal wave detection device and method |
| CN109211975A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Fiber Reinforced Metal Laminates defect chirp coherent laser motivates infrared thermal wave destructive interference detection device and method |
| CN109254012A (en) * | 2018-10-09 | 2019-01-22 | 中北大学 | A kind of cracks of metal surface detection device and method based on semiconductor laser |
| CN109813758A (en) * | 2019-02-28 | 2019-05-28 | 西安交通大学 | Interlayer debonding defect complex boundary profile based on infrared detection picture signal quantifies reconstructing method |
| CN110057868A (en) * | 2019-04-02 | 2019-07-26 | 中国人民解放军空军工程大学 | Background subtraction differential type laser infrared thermal imaging nondestructive detection system and method |
| CN110133043A (en) * | 2019-06-04 | 2019-08-16 | 武汉科技大学 | Measure the method and system of solid-state material thermal conductivity |
| CN113406145A (en) * | 2020-03-17 | 2021-09-17 | 觉芯电子(无锡)有限公司 | Defect detection method, device and system based on infrared thermal imaging |
| CN113447527A (en) * | 2021-06-11 | 2021-09-28 | 西安交通大学 | Dual-mode laser infrared thermal imaging detection system and method |
| CN113866219A (en) * | 2021-08-30 | 2021-12-31 | 东南大学 | Ultrasonic infrared thermal imaging detection method and system for microcracks of gas cylinder liner |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102142143A (en) * | 2009-11-20 | 2011-08-03 | 弗卢克公司 | Comparison of infrared images |
| CN103278272A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Soldered joint stress concentration testing device and stress concentration testing method based on laser speckle technology |
| CN204203115U (en) * | 2014-11-29 | 2015-03-11 | 黑龙江科技大学 | Novel pulse laser infrared thermal image detection device |
| US20150260667A1 (en) * | 2014-03-12 | 2015-09-17 | Agency For Science, Technology And Research | Method of detecting defects in an object based on active thermography and a system thereof |
| CN205353468U (en) * | 2015-12-15 | 2016-06-29 | 南昌航空大学 | Laser beam splitter |
| CN106158688A (en) * | 2016-05-20 | 2016-11-23 | 江苏师范大学 | A kind of TSV encapsulation defect detecting device and detection method thereof |
| CN107389732A (en) * | 2017-07-14 | 2017-11-24 | 中国计量大学 | A kind of laser scanning thermal imaging crack detecting method |
-
2017
- 2017-12-30 CN CN201711488513.1A patent/CN108169282A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102142143A (en) * | 2009-11-20 | 2011-08-03 | 弗卢克公司 | Comparison of infrared images |
| CN103278272A (en) * | 2013-05-31 | 2013-09-04 | 哈尔滨工业大学 | Soldered joint stress concentration testing device and stress concentration testing method based on laser speckle technology |
| US20150260667A1 (en) * | 2014-03-12 | 2015-09-17 | Agency For Science, Technology And Research | Method of detecting defects in an object based on active thermography and a system thereof |
| CN204203115U (en) * | 2014-11-29 | 2015-03-11 | 黑龙江科技大学 | Novel pulse laser infrared thermal image detection device |
| CN205353468U (en) * | 2015-12-15 | 2016-06-29 | 南昌航空大学 | Laser beam splitter |
| CN106158688A (en) * | 2016-05-20 | 2016-11-23 | 江苏师范大学 | A kind of TSV encapsulation defect detecting device and detection method thereof |
| CN107389732A (en) * | 2017-07-14 | 2017-11-24 | 中国计量大学 | A kind of laser scanning thermal imaging crack detecting method |
Non-Patent Citations (3)
| Title |
|---|
| 卢进军，刘卫国 编著: "《光学薄膜技术》", 31 October 2005, 西北工业大学出版社 * |
| 梅林 等: "脉冲加热红外无损检测中的图像处理", 《红外与毫米波学报》 * |
| 王化祥 编著: "《现代传感技术及应用》", 30 June 2016, 天津大学出版社 * |
Cited By (11)
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|---|---|---|---|---|
| CN109211976A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Semi-conductor silicon chip surface/sub-surface micro-cracks damage chirp beam splitting laser excitation infrared thermal wave detection device and method |
| CN109211975A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Fiber Reinforced Metal Laminates defect chirp coherent laser motivates infrared thermal wave destructive interference detection device and method |
| CN109254012A (en) * | 2018-10-09 | 2019-01-22 | 中北大学 | A kind of cracks of metal surface detection device and method based on semiconductor laser |
| CN109813758A (en) * | 2019-02-28 | 2019-05-28 | 西安交通大学 | Interlayer debonding defect complex boundary profile based on infrared detection picture signal quantifies reconstructing method |
| CN110057868A (en) * | 2019-04-02 | 2019-07-26 | 中国人民解放军空军工程大学 | Background subtraction differential type laser infrared thermal imaging nondestructive detection system and method |
| CN110057868B (en) * | 2019-04-02 | 2024-05-24 | 中国人民解放军空军工程大学 | Background-reduction differential laser infrared thermal imaging nondestructive detection system and method |
| CN110133043A (en) * | 2019-06-04 | 2019-08-16 | 武汉科技大学 | Measure the method and system of solid-state material thermal conductivity |
| CN113406145A (en) * | 2020-03-17 | 2021-09-17 | 觉芯电子(无锡)有限公司 | Defect detection method, device and system based on infrared thermal imaging |
| CN113447527A (en) * | 2021-06-11 | 2021-09-28 | 西安交通大学 | Dual-mode laser infrared thermal imaging detection system and method |
| CN113447527B (en) * | 2021-06-11 | 2022-10-25 | 西安交通大学 | Dual-mode laser infrared thermal imaging detection system and method |
| CN113866219A (en) * | 2021-08-30 | 2021-12-31 | 东南大学 | Ultrasonic infrared thermal imaging detection method and system for microcracks of gas cylinder liner |
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Application publication date: 20180615 |