CN203365364U - Thermal wave imaging system adopting laser asynchronous scanning - Google Patents
Thermal wave imaging system adopting laser asynchronous scanning Download PDFInfo
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- CN203365364U CN203365364U CN 201320492716 CN201320492716U CN203365364U CN 203365364 U CN203365364 U CN 203365364U CN 201320492716 CN201320492716 CN 201320492716 CN 201320492716 U CN201320492716 U CN 201320492716U CN 203365364 U CN203365364 U CN 203365364U
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Abstract
The utility model relates to a thermal wave imaging system adopting laser asynchronous scanning. The system comprises a high-power laser, a light beam shaping device, a light beam deflection device, an infrared thermal imager, a data processing unit, a scanning control unit and the like. The system adopts high-power laser beam; the light beam deflection device is used for scanning the surface of a sample to realize thermal excitation; with the adoption of the scanning control unit, the frame scanning speed of the laser beam and the frame scanning speed of the thermal imager are asynchronous; and the infrared thermal imager is used for collecting a series of thermal wave images changing with time, different delay exists between a thermal wave signal of each pixel in each frame image and the thermal excitation, and internal defects of the sample can be analyzed through retardation correction and numerical processing.
Description
Technical field
The utility model relates to a kind of thermal wave imaging system of scanning laser beam as the thermal excitation source that adopt, and for testee is carried out to Non-Destructive Testing, belongs to the technical field of Infrared Non-destructive Testing.
Background technology
The ultimate principle of heat wave tomography Dynamic Non-Destruction Measurement is, at first adopts the thermal excitation source to carry out PULSE HEATING to the testee surface, forms the temperature difference of surface and testee inside, makes heat energy flow from surface to interior of articles.If the thermal characteristic of interior of articles has heterogeneity, such as defects such as fracture or spaces, the propagation of hot-fluid will be affected, and the part hot-fluid can be reflected back to the surface of object.Utilize the heat radiation images of thermal imaging system continuous acquisition from the testee surface, then, by analyzing the temperature variant characteristic of these images, can obtain heat wave by the time and intensity of interior of articles defect reflection, thereby judge size and the characteristic of these defects.
Along with the fast development of the industry such as new material, new forms of energy, high-speed railway, nuclear industry and Aero-Space, the requirement of Dynamic Non-Destruction Measurement is increased day by day.The advantages such as the thermal wave detection technology has that detection speed is fast, imaging area is large, noncontact and long-range detection, be widely used, from little aspect, can be to semiconductor material, as the test of the encapsulation of solar cell, integrated circuit, the encapsulation heat conductivility of semiconductor light sources etc., and the measurement of metal and other non-transparent film etc.From large aspect, can be to the bonding situation in inside and the extent of corrosion of aircraft and spacecraft shell, delivery line, track for a train and wheel disc, boiler pot body, automobile case and the enamelled coating quality etc. of shell, gas and the liquid of naval vessel are assessed under water, thereby scent a hidden danger in time to avoid accident.
Compare traditional nondestructiving detecting means, such as ultrasound wave, eddy current, the technology such as X ray, the infrared thermal wave imaging technique has unique advantage.And this technology is especially very effective to the detection of compound substance.The utilization of compound substance has become the modern aerospace field and has equipped one of advanced important symbol.Along with the application at positions such as fuselage, wing, turbo blade, storepipe, aeromotor jet pipe, turbo blade and airframe structures of various particulate metal materials and compound substance, the requirement of Non-Destructive Testing is progressively increased.At the compound substance of new energy field, apply also at Fast Growth, as the blade of aerogenerator is mainly all made by the glass fiber resin packing material at present equally.Usually compound substance is mode or the honeycomb sandwich construction that adopts the multi-layer fiber gummed, has high strength and lightweight advantage.Owing in the process manufacturing and using, often can producing inherent vice, as layering, unsticking, crack etc., greatly affected intensity and the serviceable life of material.Although the Non-Destructive Testing to compound substance can adopt traditional Ultrasonic Flaw Defect, this technical requirement probe contact testee, point by point scanning, waste time and energy.For baroque compound substance, as cellular sheet material, ultrasonic technology can't be detected effectively.
When the heat wave tomography, characteristic per sample has two kinds of thermal excitation modes.For the material of thinner sample, particularly high thermal conductivity, such as semiconductor wafer and solar silicon wafers etc., adopt very short pulse mode of thermal excitation time, otherwise the echo of heat wave while arriving surface thermal excitation also do not finish, impact detects.And, for sample thicker or the heat conduction rate variance, the variation of heat wave is slow, high to the energy requirement of thermal excitation, so usually adopt continuous thermal excitation source, as the Infrared High-Power lamp etc., long-time heating continuously, and then carry out image acquisition, sampling rate can be very slow.
Detection to quick variation heat wave signal need to solve two problems, the thermal excitation of high-energy short pulse and high-speed image sampling.For the thermal excitation of high-energy short pulse, the product on foreign market all adopts the high-energy flashlamp as the pulse heat driving source at present.For example, but this high-energy flashlamp has a lot of limitations, and its gross energy is limited, the area of each test can not be too large; Beam divergence is inhomogeneous, can not telekinesy; The flash pulse cycle is extremely short and non-adjustable, and too high peak power can cause the damage of sample; The serviceable life of fluorescent tube is limited, and equipment volume is huge, it is mobile etc. to be difficult for.And, for the problem of high-speed image sampling, only have at present and adopt the thermal imaging system with high frame frequency function.This thermal imaging system is very expensive, and the image resolution ratio of output significantly descends along with the raising of frame frequency.
High power semiconductor lasers has obtained rapid development in recent years, makes this type of laser instrument when power increases substantially, the price fast-descending.Laser instrument is compared with traditional thermal excitation light source has that wavelength can be selected, intensity can be modulated, and light beam can be assembled and the advantage such as can scan.
Existing a small amount of thermal wave imagine technique adopts the laser scanning thermal excitation at present, as United States Patent (USP) 3,808,439,6,343,874,6,419,387 etc., all introduced and adopted the method for laser scanning thermal excitation to carry out thermal wave imaging, but all could not solve the key issue of heat wave tomography in these methods, the detection that particularly is directed to shallow cosmetic bug must adopt the problem of high frame frequency thermal imaging system.Chinese invention patent application (application number 2013101306946) has been described a kind of heat wave chromatography imaging method that adopts the excitation of laser phase shift scanning calorimeter, has solved two problems that superficial defects realized to the necessary short pulse thermal excitation of heat wave tomography and high-speed sampling simultaneously.But, because the laser scanning line frequency of this invention is synchronized with the line frequency of thermal imaging system, so sweep velocity is confined to the parameter of thermal imaging system, make the application of this technology obtain larger restriction.
Summary of the invention
The purpose of this utility model is exactly the deficiency for above-mentioned existing heat wave Dynamic Non-Destruction Measurement, and a kind of thermal wave imaging nondestructive detection system that simultaneously meets pulse heat excitation and high speed infrared image acquisition is provided.This system adopts high power laser as the thermal excitation source, by controlling the beam deflection device, rapid scanning is carried out in the surface of sample, realizes the pulse heat excitation.The vertical sweep frequency of laser facula is asynchronous to the vertical sweep frequency of thermal imaging system, the heat wave signal that makes each pixel constantly changes with respect to the delay of thermal excitation, carry out again correction and the data processing of time delay by the heat wave image to gathered, thereby reach the purpose of high frame frequency image acquisition.
The temporal resolution of traditional thermal wave imagine technique is decided by the frame frequency of thermal imaging system, and the frame frequency of conventional thermal imaging system is limited, as in the 25-60Hz left and right, is not suitable for thermal wave imaging the Non-Destructive Testing thinner or sample that thermal conductivity is larger.The asynchronous scanning technique of laser of the present utility model has effectively solved this problem, in the situation that use conventional thermal imaging system, makes the temporal resolution of thermal wave detection increase substantially.
The utility model adopts asynchronous scan method, the frame scan speed that is the frame scan speed of laser beam and thermal imaging system is asynchronous, laser beam is multiple scanning repeatedly, in every like this two field picture, the heat wave signal of each pixel all has different time delays with respect to thermal excitation, the heat wave signal of all image same pixel points, by sorting time delay and carrying out matching, can be obtained to the time dependent curve of this heat wave signal.
The speed of laser scanning can characteristic per sample be selected, if sample heat conduction is fast and have the defect than shallow-layer, can adopt the light pencil rapid scanning.If the sample temperature conductivity is low, defective locations is deep, can adopt the angle pencil of ray slow scanning, in order to more thermal excitation energy is arranged.Except can taking the linear beam one-dimensional scanning, also can adopt the point-like focal beam spot to carry out two-dimensional scan.
The accompanying drawing explanation
Fig. 1 is that the heat wave signal varies with temperature schematic diagram.
The difference heat wave signal schematic representation that Fig. 2 is defectiveness district and nondefective zone.
Fig. 3 is conventional heat wave chromatography imaging technique schematic diagram.
The schematic diagram that Fig. 4 is the utility model thermal wave imagine technique.
Fig. 5 is the utility model embodiment schematic diagram.
Fig. 6 is the utility model thermal wave imaging light path schematic diagram.
Fig. 7 is know-why schematic diagram of the present utility model: the situation that (a) for laser beam frame scan speed, is greater than thermal infrared imager frame scan speed; (b) be less than the situation of thermal infrared imager frame scan speed for laser beam frame scan speed.
Fig. 8 is laser scanning methods schematic diagram of the present utility model: (a) during the flyback of beam deflection device, laser instrument output is closed; (b), during the flyback of beam deflection device, laser instrument output is held open.
Fig. 9 is several laser scanning methods schematic diagram of the utility model: (a) adopt angle pencil of ray to be scanned; (b) adopt light pencil, but shake fast at relative broad range, produce equivalent angle pencil of ray.
Figure 10 is several employing laser of the utility model subarea-scanning mode schematic diagram: (a) carry out in the vertical direction subarea-scanning; (b) carry out in the horizontal direction subarea-scanning.
Figure 11 is the schematic diagram that several laser beam of the utility model and thermal infrared imager frame scan direction are non-parallel mode: (a) laser beam and thermal infrared imager frame scan direction are quadrature; (b) laser beam and thermal infrared imager frame scan direction are an angle.
The schematic diagram that Figure 12 is several employing point-like laser of the utility model Shu Jinhang two-dimensional scan: (a) laser beam simple scanning, laser beam fast moving or close during flyback, avoid producing thermal excitation; (b) keep during flyback the laser beam output power constant; (c) adopt and scanned than large spot.
Figure 13 is a kind of definite heat wave of the utility model schematic diagram of signal delay time: (a) sampling location of heat wave image; (b) sampled signal is with the variation signal of position.
Figure 14 is the another kind of embodiment schematic diagram of the utility model.
Embodiment
Below in conjunction with drawings and Examples, the utility model is described in further detail.
Shown in Fig. 1 is the time dependent relation of heat wave signal.After of short duration pulse heat excitation, the sample surfaces temperature raises rapidly, then starts to descend.If sample interior does not have defect, the heat wave signal intensity is as shown in curve 31.But if sample interior has the thermal resistance defect, as space crackle etc., the variation of signal is as shown in curve 32.The difference of these two curves 31,32 is as shown in the curve 33 in Fig. 2.Peak value S according to curve 33
osize and the time t that occurs of peak value
ocan learn defect for information about, as the degree of depth and size etc.Therefore in order to realize the heat wave tomography, temperature decline curve 31 and 32 must can be measured.
The process of conventional heat wave tomography as shown in Figure 3.After the high-energy flashlamp heats sample, the heat energy absorbed along with sample surfaces starts to propagate to sample interior, and surface temperature starts to descend, as shown in curve 36.Continuous acquisition a series of images 34 in the process that thermal imaging system descends in temperature, then the heat wave signal 35 use formula fittings corresponding to same pixel in this series of images 34 are got up, the temperature variant curve 36 of this pixel heat wave signal can be obtained.Can find out, what conventional heat wave chromatography imaging technique adopted is once to excite, the method for image acquisition repeatedly, and the minimum interval of image acquisition is a frame frequency cycle.As can be seen here, the frame frequency cycle of thermal imaging system must be much smaller than the period of change of heat wave signal, otherwise can can't accurately obtain curve 34 very little because of sampled point.Therefore to some heat wave signal intensities than sample faster, usually require to adopt the thermal imaging system of high frame frequency.
What the utility model was taked is the method for the asynchronous scanning thermal wave imaging of laser.The peak power of common high power laser is limited, particularly on average to sample surfaces.In order to form the pulse heat excitation, at first focus of the light beam on a line, the power density of unit area can improve hundreds of times like this.Can certainly focus on a point, the power density raising is more like this, but needs to adopt two-dimentional scanister.When the laser wire harness during at the sample surfaces rapid scanning, to the thermal excitation of any point on sample, be of short duration, therefore can regard pulse as.Laser instrument can the scanning of repetition period property, and intensification and the temperature-fall period of each scanning repeat substantially.As shown in Figure 4, the temperature that curve 37 representatives are caused by laser scanning rises, curve 39 representation temperature decline processes.If gather a two field picture 38 between each temperature decrement phase, and the acquisition time of every two field picture 38 has a skew with respect to former frame, passes through so several all after dates, can obtain a series of heat wave images 38 that different time postpones that have.Heat wave signal to same pixel in this series of images 38 carries out matching, just can obtain the heat wave change curve 39 of this pixel.The single thermal excitation adopted with traditional heat wave tomography, repeatedly Sampling techniques are compared, and the laser scanner technique that the utility model adopts is the method for repeated thermal excitation, asynchronous-sampling.
Between multiple scanning, if not waiting for enough time, the sample surfaces temperature after each scanning all can raise to some extent, therefore need to carry out the correction of ambient temperature, in the temperature of each laser beam flying pre-test sample surfaces.
Shown in Fig. 5 is a kind of embodiment schematic diagram of the utility model system, comprises superpower laser 21, light-beam forming unit 26, beam deflection device 25, thermal imaging system 22, data processing unit 20, scan control unit 24 etc.Laser beam 27 forms fan-shaped in-line laser focal spot 30 by light-beam forming unit 26, is lined by line scan in the laser scanning district 29 on testee 28.The heat wave signal excited receives and delivers to data processing unit 20 by thermal imaging system 22, and infrared fileter 23 is for wavelength, the particularly wavelength of thermal excitation light beam beyond elimination heat wave signal.The relativeness of beam deflection device 25 and thermal imaging system 22 is controlled in scan control unit 24, makes both frame scan speed keep a difference.
Figure 6 shows that the light path schematic diagram of the utility model device imaging moiety.The lens 43 of thermal imaging system 22 project to laser focal spot 30 on the infrared array detector 40 of thermal imaging system 22, laser focal spot 30 is projected on the pixel column 42 on infrared focal plane detector 40, and the current demand signal of infrared array detector 40 is read row 41 corresponding to 29 position, laser scanning district 46.The projected position 42 of laser focal spot 30 and current to read line-spacing between row 41 be exactly the current delay of the heat wave signal of row 41 with respect to thermal excitation of reading divided by the sweep speed of laser focal spot 30 projection on infrared array detector 40.For example the frame scan speed of laser focal spot 30 is 10Hz, and the frame frequency cycle is 100ms, and if the gap of reading row 41 and light beam projecting position 42 current is 1/4 frame, and the current heat wave signal of reading is 25ms with respect to the time delay of thermal excitation.
In order to realize quick heat wave tomography, the utility model is taked the asynchronous scan method of laser, i.e. the sweep velocity that the speed of laser beam flying and thermal imaging system are read is asynchronous.As shown in Figure 7 (a), as laser beam flying speed V
l(unit: line number/second) be greater than thermal imaging system reading scan speed V
dthe time, the current distance of reading between row 41 and laser beam projection 42 of thermal imaging system can be along with the time from t
0to t
1increase gradually.Otherwise, as laser beam flying speed V
lbe less than thermal imaging system reading scan speed V
dthe time, the current distance of reading between row 41 and laser beam projection 42 of thermal imaging system can be along with the time from t
0to t
1dwindle gradually, as shown in Figure 7 (b) shows.The delay of the heat wave signal that the current line-spacing of reading between row 41 and laser beam projection 42 of thermal imaging system is exactly the laser beam heats position divided by the thermal imaging system sweep velocity when being detected.
If while just starting, the current delay of reading between row 41 and laser beam projection 42 of thermal imaging system is dt
0, to the retardation dt in the t moment, be:
dt(t)?=?dt
0?+?(V
L/V
D–1)t
Can obtain thus the heat wave signal of any a line in any frame heat wave image and the retardation between thermal excitation.If the frame frequency cycle is T
f, line period is T
l, in the N frame, the capable heat wave signal delay amount dt (N, n) of n is:
dt(N,n)?=?dt
0?+?(V
L/V
D–1)(NT
F?+?nT
L)
At this moment in same frame heat wave image, the retardation of every a line is all different.
The frame scan of laser focal spot 30 can be as shown in Fig. 8 (a), be one with the wide straight line in laser scanning zone 29, scanning, along a direction, is skimmed over fast during flyback, or laser instrument is closed, in order to avoid testee 28 is produced to extra thermal effect; Also can be as shown in Figure 8 (b) shows, laser focal spot 30 carries out shuttle-scanning, can save time and take full advantage of the energy of laser instrument.
Laser focal spot 30 can be a thick line, as shown in Fig. 9 (a).Laser focal spot 30 also can be as shown in Fig. 9 (b), the wider zone of shuttle-scanning when constantly advancing.The advantage of thick line scanning is to form the one dimension thermal diffusion in part, is conducive to heat wave and propagates to depths, to survey darker defect.
Laser focal spot 30 can also great-jump-forward scanning, as shown in Figure 10 (a) shows, and the first row and the second row about field of being separated by, and then get back to the third line, until complete the scanning of a frame, can make like this thermal excitation overlap zone has longer cooling release time.Equally, laser beam can be polymerized to a short-term, a part of each scanning samples, and every column scan, as shown in Figure 10 (b), this is specially adapted to detect larger sample.
The direction of scanning of laser focal spot 30 can be different with the direction of scanning of thermal imaging system 22, as shown in Figure 11 (a) shows, and both direction quadratures, or in an angle, as shown in Figure 11 (b).Requirement is that the sweep speed of laser focal spot 30 and the sweep speed of thermal imaging system 22 keep particular kind of relationship, makes the heat wave signal delay of each pixel of thermal imaging system 22 can produce gradual change.
Laser focal spot 30 can be also point-like or short-term shaped laser spot, adopts the method for two-dimensional scan, as shown in figure 12.Figure 12 (a) means be scanning pattern as pectination, be all from left to right, flyback fast; What Figure 12 (b) meaned is shuttle-scanning, can take full advantage of flyback time, improves the utilization factor of laser power; Shown in Figure 12 (c) is large spot scanning, can improve scan efficiency, can form the condition of local one dimension thermal diffusion simultaneously, is conducive to the detection of deep flaw.
In the heat wave image gathered in the asynchronous scanning situation of above-mentioned laser, the heat wave signal of each pixel or pixel column and the time delay between thermal excitation are different, for these time delays are revised, need to know position and the sweep velocity of laser facula 30 in the heat wave image.This can pass through accomplished in many ways.At first, in the situation that known testee 28 is to the distance of beam deflection device 25, can adopt deflection angle and the rotational angular velocity of the prior beam deflection device 25 of calibrating, obtain by calculating in conjunction with the scanning sequence relation between beam deflection device 25 and thermal imaging system 22.Reasonable way is the heat wave image from collecting, and according to the position of laser facula 30, determines, the position of laser facula 30 is also the place that signal is the strongest usually.As shown in Figure 13 (a), when laser facula 30 scans from top to bottom, if read the heat wave signal along the straight line 51 of direction of scanning, obtain the curve as shown in Figure 13 (b), wherein the signal maximum value 50 at laser facula 30 places, place is for the strongest.Therefore can carry out matching in the heat wave image, along the direction of scanning of laser facula 30, taking out data, find out heat wave signal maximum value 50 residing positions.A method is arranged as shown in figure 14 again, adopt the track while scan to the video camera 52 synchronous recording laser faculas 30 of thermal excitation wavelength sensitive, and calculate thus position and the sweep velocity of laser facula 30.The scanning area of video camera 52 and thermal imaging system 22 need be proofreaded through accurate, and the frame frequency of image is preferably synchronous.The image of video camera 52 can also be used to the surface optics characteristic of the homogeneity of laser facula 30 and testee 28 is recorded and proofreaies and correct.
Claims (5)
1. the asynchronous scanning heat wave of a laser imaging system, is characterized in that, described system comprises:
Laser instrument (21), described laser instrument (21) is for encouraging heat wave on testee (28) surface;
Light-beam forming unit (26), described light-beam forming unit (26) is adjusted the shape of laser beam (27) at the laser focal spot (30) of testee (28) surface formation;
Beam deflection device (25), described beam deflection device (25) is scanned testee (28) surface for deflection laser bundle (27);
Thermal imaging system (22), described thermal imaging system (22) comprises infrared array detector (40), for gathering the heat wave image on testee (28) surface;
Data processing unit (20), described data processing unit (20) carries out Treatment Analysis for the heat wave image that described thermal imaging system (22) is gathered;
Scan control unit (24), described beam deflection device (25) is controlled in described scan control unit (24), makes the sweep speed of the projection of described laser focal spot (30) on described infrared array detector (40) be asynchronous to the signal scanning of described infrared array detector (40).
2. the asynchronous scanning heat wave of laser according to claim 1 imaging system, it is characterized by, described light-beam forming unit (26) makes laser beam (27) form the linear laser focal spot (30) substantially wide with laser scanning zone (29) on testee (28) surface, and described beam deflection device (25) is carried out one-dimensional scanning.
3. the asynchronous scanning heat wave of laser according to claim 1 imaging system, it is characterized by, described light-beam forming unit (26) makes laser beam (27) form the laser focal spot (30) of dimension much smaller than laser scanning zone (29) on testee (28) surface, and described beam deflection device (25) is carried out two-dimensional scan.
4. the asynchronous scanning heat wave of laser according to claim 1 imaging system, it is characterized by, the signal scanning direction of the direction of scanning of the projection of described laser focal spot (30) on described infrared array detector (40) and described infrared array detector (40) self is inconsistent.
5. the asynchronous scanning heat wave of laser according to claim 1 imaging system, it is characterized by, further comprise the video camera (52) to described laser beam (27) wavelength sensitive, for the surface optics feature that records testee (28) and the optical signature of thermal excitation focal spot (30).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411999A (en) * | 2013-08-13 | 2013-11-27 | 南京诺威尔光电系统有限公司 | Laser asynchronous scanning thermal wave imaging method |
| CN103926274A (en) * | 2014-04-22 | 2014-07-16 | 哈尔滨工业大学 | Infrared thermal wave radar imaging nondestructive testing method and system for defects of carbon fiber reinforced plastic (CFRP) plywood |
| CN109211974A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Thermal insulation layer construction debonding defect pulsed femtosecond laser pumping infrared thermal wave detection device and method |
-
2013
- 2013-08-13 CN CN 201320492716 patent/CN203365364U/en not_active Expired - Lifetime
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103411999A (en) * | 2013-08-13 | 2013-11-27 | 南京诺威尔光电系统有限公司 | Laser asynchronous scanning thermal wave imaging method |
| CN103411999B (en) * | 2013-08-13 | 2016-06-15 | 南京诺威尔光电系统有限公司 | The asynchronous scanning heat wave imaging non-destructive detection System and method for of laser |
| CN103926274A (en) * | 2014-04-22 | 2014-07-16 | 哈尔滨工业大学 | Infrared thermal wave radar imaging nondestructive testing method and system for defects of carbon fiber reinforced plastic (CFRP) plywood |
| CN103926274B (en) * | 2014-04-22 | 2017-01-25 | 哈尔滨工业大学 | Infrared thermal wave radar imaging nondestructive testing method for defects of carbon fiber reinforced plastic (CFRP) plywood |
| CN109211974A (en) * | 2018-08-07 | 2019-01-15 | 哈尔滨商业大学 | Thermal insulation layer construction debonding defect pulsed femtosecond laser pumping infrared thermal wave detection device and method |
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Address after: 210046, A building, 10 building, Xing Zhi Science Park, No. 6-3 Xing Chi Road, Nanjing economic and Technological Development Zone, Jiangsu, Nanjing, China Patentee after: Nanjing Newell Optical System Co.,Ltd. Address before: 501 room 8, No. 210038, Heng Fei Road, Nanjing economic and Technological Development Zone, Nanjing, Jiangsu Patentee before: Nanjing Newell Optical System Co.,Ltd. |
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