CN108422101A - A kind of cutting method of sapphire optical window - Google Patents
A kind of cutting method of sapphire optical window Download PDFInfo
- Publication number
- CN108422101A CN108422101A CN201810326563.8A CN201810326563A CN108422101A CN 108422101 A CN108422101 A CN 108422101A CN 201810326563 A CN201810326563 A CN 201810326563A CN 108422101 A CN108422101 A CN 108422101A
- Authority
- CN
- China
- Prior art keywords
- optical window
- sapphire
- cutting method
- sapphire optical
- metallic diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
Abstract
The present invention provides a kind of cutting methods of sapphire optical window, belong to sapphire optical window production technical field.Laser is carried out to sapphire substrate to precut, and reserves multiple tie points；It is coated with metallic diaphragm in the arbitrary face of the sapphire substrate；UV films are sticked on the metallic diaphragm；Tie point is cut away, and by ultraviolet photolysis UV films, carries out sliver.The metallic diaphragm for avoiding product after the completion of cutting is damaged, and the resultant metal film layer being cut into using the cutting method is without any damage, and it is that efficiency is low effectively to solve the production of small-size product monolithic, the low problem of yield.
Description
Technical field
The present invention relates to sapphire optical window production technical field, more particularly to a kind of cutting of sapphire optical window
Method.
Background technology
Currently, sapphire bare die cutting technique uses laser cutting substantially, but temperature is very high when due to laser cutting, and blue
After gemstone surface has plated metal film, laser cutting can damage metallic film, be easy to cause product rejection.If using first will be blue
Jewel is cut into the method that small pieces are coated with metallic diaphragm again, and efficiency is very low, unsuitable mass production.Therefore, one is developed
It is kind novel be coated with metal film after sapphire cutting method be the technical issues of being badly in need of solving.
Invention content
The purpose of the present invention is to provide a kind of cutting methods of sapphire optical window, to solve existing cutting efficiency
Low problem.
In order to solve the above technical problems, the present invention provides a kind of cutting method of sapphire optical window, including walk as follows
Suddenly：
Step 1, reserved multiple tie points precut to sapphire substrate progress laser；
Step 2 is coated with metallic diaphragm in the arbitrary face of the sapphire substrate；
Step 3 sticks UV films on the metallic diaphragm；
Step 4 cuts away tie point, and by ultraviolet photolysis UV films, carries out sliver.
Optionally, sapphire substrate is subjected to twin polishing before the step 1.
Optionally, the quantity of the tie point is 2 ~ 8.
Optionally, the width of the tie point is finally to cut the 1/5 ~ 1/50 of obtained sapphire optical window diameter.
Optionally, ultrasonic cleaning is first carried out before the step 2, washes away the residue on surface.
Optionally, the material of the metallic diaphragm is one or more of Ti, Cr, Ni, Sn, Cu, Pt, Au.
Optionally, it is cut using mechanical bit in the step 4.
A kind of cutting method of sapphire optical window is provided in the present invention, and laser pre-cut is carried out to sapphire substrate
It cuts, reserves multiple tie points；It is coated with metallic diaphragm in the arbitrary face of the sapphire substrate；UV is sticked on the metallic diaphragm
Film；Tie point is cut away, and by ultraviolet photolysis UV films, carries out sliver.Avoid cutting after the completion of product metallic diaphragm by
Damage, the resultant metal film layer being cut into using the cutting method effectively solve the life of small-size product monolithic without any damage
Production is that efficiency is low, the low problem of yield.
Description of the drawings
Fig. 1 is the cutting method flow diagram of sapphire optical window provided by the invention；
Fig. 2 is the structural schematic diagram of sapphire substrate provided by the invention.
Specific implementation mode
Below in conjunction with the drawings and specific embodiments to a kind of cutting method work of sapphire optical window proposed by the present invention
It is further described.According to following explanation and claims, advantages and features of the invention will become apparent from.It should be noted
That attached drawing is all made of very simplified form and uses non-accurate ratio, only to it is convenient, lucidly aid in illustrating this hair
The purpose of bright embodiment.
Embodiment one
This hair provides a kind of cutting method of sapphire optical window, and flow diagram is as shown in Figure 1.Include the following steps：
Step S11, it carries out laser to sapphire substrate to precut, reserves multiple tie points；
Step S12, it is coated with metallic diaphragm in the arbitrary face of the sapphire substrate；
Step S13, UV films are sticked on the metallic diaphragm；
Step S14, tie point is cut away, and by ultraviolet photolysis UV films, carries out sliver.
Specifically, first first to sapphire substrate 1 carry out twin polishing, then to its by laser along precut road 3 into
Row is precut, reserves 2 ~ 8 tie points, and in the present embodiment one, the quantity of the tie point 2 is 4, as shown in Figure 2.It is described
The width of tie point 2 is finally to cut the 1/5 ~ 1/50 of obtained 5 diameter of sapphire optical window；Then use ultrasonic wave to pre-
Sapphire substrate cleaning after cutting, washes away the residue on surface；Then it is coated with metal film in the arbitrary face of the sapphire substrate 1
The material of layer, the metallic diaphragm is one or more of Ti, Cr, Ni, Sn, Cu, Pt, Au；It is pasted on the metallic diaphragm
Upper UV films protect outermost metallic diaphragm not to be scratched or polluted by cutting residue；It is carried out along Cutting Road 4 by mechanical bit
Final cutting, this cutting cuts away four points of connection 2 according to smooth vertical and horizontal method, after ultraviolet photolysis UV
Conventional sliver is carried out, sapphire optical window 5 is obtained.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair
Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims
Range.
Claims (7)
1. a kind of cutting method of sapphire optical window, which is characterized in that include the following steps：
Step 1, reserved multiple tie points precut to sapphire substrate progress laser；
Step 2 is coated with metallic diaphragm in the arbitrary face of the sapphire substrate；
Step 3 sticks UV films on the metallic diaphragm；
Step 4 cuts away tie point, and by ultraviolet photolysis UV films, carries out sliver.
2. the cutting method of sapphire optical window as described in claim 1, which is characterized in that will before the step 1
Sapphire substrate carries out twin polishing.
3. the cutting method of sapphire optical window as described in claim 1, which is characterized in that the quantity of the tie point is
2 ~ 8.
4. the cutting method of sapphire optical window as described in claim 1, which is characterized in that the width of the tie point is
Finally cut the 1/5 ~ 1/50 of obtained sapphire optical window diameter.
5. the cutting method of sapphire optical window described in claim 1, which is characterized in that first carried out before the step 2
Ultrasonic cleaning washes away the residue on surface.
6. the cutting method of sapphire optical window as described in claim 1, which is characterized in that the material of the metallic diaphragm
For one or more of Ti, Cr, Ni, Sn, Cu, Pt, Au.
7. the cutting method of sapphire optical window as described in claim 1, which is characterized in that use machine in the step 4
Tool blade is cut.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810326563.8A CN108422101B (en) | 2018-04-12 | 2018-04-12 | Cutting method of sapphire optical window |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810326563.8A CN108422101B (en) | 2018-04-12 | 2018-04-12 | Cutting method of sapphire optical window |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108422101A true CN108422101A (en) | 2018-08-21 |
| CN108422101B CN108422101B (en) | 2020-04-14 |
Family
ID=63160810
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810326563.8A Active CN108422101B (en) | 2018-04-12 | 2018-04-12 | Cutting method of sapphire optical window |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108422101B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN108422101B (en) | 2020-04-14 |
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