CN108414448A - One kind being based on the cascade optical sensor of dual resonant cavity - Google Patents
One kind being based on the cascade optical sensor of dual resonant cavity Download PDFInfo
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- CN108414448A CN108414448A CN201810543361.9A CN201810543361A CN108414448A CN 108414448 A CN108414448 A CN 108414448A CN 201810543361 A CN201810543361 A CN 201810543361A CN 108414448 A CN108414448 A CN 108414448A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 26
- 230000009977 dual effect Effects 0.000 title claims abstract description 17
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000004048 modification Effects 0.000 claims abstract description 4
- 238000012986 modification Methods 0.000 claims abstract description 4
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- 230000010354 integration Effects 0.000 claims description 3
- 239000013307 optical fiber Substances 0.000 claims description 2
- 239000000126 substance Substances 0.000 abstract description 8
- 238000001228 spectrum Methods 0.000 abstract description 4
- 230000003595 spectral effect Effects 0.000 description 13
- 230000035945 sensitivity Effects 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 239000006185 dispersion Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 241000208340 Araliaceae Species 0.000 description 2
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 2
- 235000003140 Panax quinquefolius Nutrition 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 235000008434 ginseng Nutrition 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 235000013305 food Nutrition 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/4133—Refractometers, e.g. differential
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- General Physics & Mathematics (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses one kind being based on the cascade optical sensor of dual resonant cavity, including wideband light source and two resonant cavities；The surface of one resonant cavity is contacted with fluid to be measured, is reference cavity；The surface modification molecule film of another resonant cavity, and be in contact with fluid to be measured, it is sensing resonant cavity；Two resonant cavities are intercoupled by a shared straight wave guide.The present invention, which is utilized, to be adsorbed due to the test substance in fluid to be measured by the biological surface film of sensing resonant cavity, cause the effective refractive index variation for sensing resonant cavity, and the effective refractive index of reference cavity does not change, spectrum after being cascaded so as to cause two resonant cavities generates variation, final so that the light intensity of output changes.By measuring the variation of output power, the content information of test substance in fluid to be measured can be obtained.
Description
Technical field
The present invention relates to a kind of optical sensors, more particularly to one kind being based on the cascade optical sensor of dual resonant cavity.
Background technology
Optical sensing technology is with electromagnetism interference, the advantages such as highly sensitive and high integration, in environment measuring, food
The fields such as safety and biomedicine are widely used.In the research of recent years, in order to improve the sensitivity of sensor, base
Become a current research hotspot in the optical sensor of cursor effect.But this sensor because reference cavity has on
Covering, and do not contacted with fluid to be measured, and sense resonant cavity and contacted with fluid to be measured, the top covering of the two is different, so as to cause
The temperature sensitive properties and dispersion characteristics of two resonant cavities also differ, so such sensor is because ambient temperature variation generates
Interference also amplified by cursor effect.
Based on the cascade optical sensor of dual resonant cavity power detection mould is operated in using wideband light source and detector
Under formula, to substantially reduce the cost of sensor-based system.Existing research shows that the Free Spectral Range when two resonant cavities is identical
When, such sensor can reach highest power detection sensitivity.But it because the dispersion characteristics of two resonant cavities are different, leads
The Free Spectral Range of two resonant cavities is caused to be differed in very wide wavelength region, so the sensitivity of such sensor is not
It is high.
Invention content
The purpose of the present invention is to provide one kind being based on the cascade optical sensor of dual resonant cavity, all by two resonant cavities
It is in contact with fluid to be measured, keeps two resonant cavity temperature sensitivities identical with dispersion characteristics.The temperature of two resonant cavities is sensitive special
Property it is identical, caused by temperature change sensor output signal variation will not be amplified by cursor effect, reduce environmental factor
Influence to sensor performance.Two cavity dispersion characteristics are identical, can ensure two resonance in very wide spectral region
The Free Spectral Range of chamber is identical, to greatly improve the sensitivity of sensor.When the test substance in fluid to be measured is adsorbed on
When sensing resonant cavity, the effective refractive index for sensing resonant cavity is caused to change, the light after being cascaded so as to cause two resonant cavities
Spectrum generates variation, final so that the light intensity of output changes.By measuring the variation of output power, fluid to be measured can be obtained
The content information of middle test substance.
The purpose of the present invention is achieved through the following technical solutions：One kind being based on the cascade optical sensing of dual resonant cavity
Device, it includes wideband light source, the input waveguide that is coupled with wideband light source, the reference cavity being coupled with input waveguide, with
Connection waveguide that reference cavity is coupled, with connect sensing resonant cavity that waveguide is coupled, be coupled with sensing resonant cavity
Output waveguide is coupled with output waveguide and surveys the first light power meter of its outgoing luminous power；It repaiies on the surface of the sensing resonant cavity
Molecule film is adornd, it is described to be contacted with fluid to be measured with sensing ring-shaped resonant with reference to ring resonator.
Further, the coupling between the input waveguide and connection waveguide and reference cavity is to pass through directional coupler
Or it is coupled by respective multi-mode interference coupler.
Further, the output waveguide and connection waveguide and the coupling sensed between resonant cavity are to pass through directional coupler
Or it is coupled by respective multi-mode interference coupler.
Further, all waveguides and resonant cavity are Planar integration optical waveguide, or are made of optical fiber.
Further, the reference cavity is identical as the sensing optical length of resonant cavity.
Further, the other end of the input waveguide is coupled with the second light power meter.
Further, the reference cavity and sensing resonant cavity are made of ring resonator, or are interfered by Mach-Zehnder
Instrument is constituted, or is made of array waveguide grating, or is made of Fabry-Perot interferometer.
The invention has the advantages that：The present invention connects reference cavity and sensing resonant cavity with fluid to be measured simultaneously
It touches so that the sensor signal caused by fluid to be measured temperature change changes, and will not be amplified by cursor effect, reduce sensor
To the sensitivity characteristic of environment temperature.Meanwhile the dispersion characteristics of two resonant cavities are identical so that the free spectrum model of two resonant cavities
Sensitivity that is identical, and then improving sensor can be kept by being trapped among in prodigious wave-length coverage.When the refractive index of fluid to be measured
Change, and do not adsorbed by molecule film in fluid to be measured substance when, reference cavity and sensing resonant cavity have
Effect refraction index changing is identical, and the output spectral line of two resonant cavities is mobile simultaneously, and keeps overlapping, and the output power of sensor is kept
It is constant, therefore the background interference brought due to fluid to be measured variations in refractive index itself can be excluded.
Description of the drawings
Fig. 1 is that the present invention is based on the cascade optical sensor schematic diagrames of dual resonant cavity；
Fig. 2 is the spectrogram of wideband light source；
When Fig. 3 is that sensing resonant cavity effective refractive index changes δ n, sensor transmissivity change schematic diagram；
When Fig. 4 is two different cavity length differences, sensing resonant cavity effective refractive index changes δ n, and detector receives
Normalized power change schematic diagram；
In figure, wideband light source 1, input waveguide 2, connection waveguide 3, reference cavity 10, sensing resonant cavity 20, output waveguide
4, the first light power meter 52, the second light power meter 51, fluid to be measured 6, molecule film 7.
Specific implementation mode
The present invention is further illustrated with reference to the accompanying drawings and examples.
Embodiment
As shown in Figure 1, it is provided by the invention it is a kind of be based on the cascade optical sensor of dual resonant cavity, including wideband light source 1,
The input waveguide 2 being coupled with the wideband light source 1, the reference cavity 10 being coupled with the input waveguide 2；With the ginseng
Examine the connection waveguide 3 that resonant cavity 10 is coupled；The sensing resonant cavity 20 being coupled with the connection waveguide 3；It is humorous with the sensing
The output waveguide 4 that the chamber 20 that shakes is coupled；It is coupled with the output waveguide 4 and surveys the first light power meter 52 of its outgoing luminous power；
The reference cavity 10 is identical as the sensing optical length of resonant cavity 20, and the output spectrum of two resonant cavities overlaps；The ginseng
Resonant cavity 10 is examined to contact with fluid to be measured 6 with sensing resonant cavity 20；The surface modification biomolecule of the sensing resonant cavity 20
Film 7；The other end of the input waveguide 2 is coupled with the second light power meter 51.
The light that wideband light source 1 is sent out is coupled by input waveguide 2 and reference cavity 10；It is not humorous with reference cavity 10
The light to shake is coupled by input waveguide 2 and the second light power meter 51；With the light of 10 resonance of reference cavity, pass through connection wave
3 are led to be coupled with sensing resonant cavity 20；With the light of sensing 20 resonance of resonant cavity, the first light power meter is entered by output waveguide 4
52；When the test substance in fluid to be measured 6 is adsorbed by the biological surface film 7 on sensing resonant cavity 20, cause to sense resonant cavity
20 effective refractive index changes, and then changes the variation of sensor output spectral line, therefore results in the first light power meter 52 and connect
The luminous intensity being subject to changes.The luminous power that second light power meter 51 receives can monitor the changed power of wideband light source 1.
Central wavelength lambda=550nm of the wideband light source 1, polarization state are TM patterns, and normalized light is done to peak power
Spectral curve as shown in Fig. 2, the maximum peak wavelength of light source in 550nm.The effective refractive index n of reference cavity 10 in this example1
With the effective refractive index n of sensing resonant cavity 202Original state is 2.0, i.e. n1=n2=2.0, reference cavity 10 and sensing are humorous
Shake chamber 20 optical length it is equal, assume in this example that being L=55 μm；The coefficient of coup square of all waveguides and resonant cavity is equal
For k2=0.1, t1And t2Respectively transmission coefficient of the light after reference cavity 10 and sensing resonant cavity 20, is expressed as：
I=1 or 2 (1)
Wherein,
According to formula (1), the transmissivity T of sensor is expressed as：
T=| t1*t2|2 (2)
After the molecule film 7 on sensing resonant cavity 20 has adsorbed the test substance in fluid to be measured, cause to sense humorous
Shake the effective refractive index n of chamber 202Change n=5 × 10 δ-4When, the variation of the transmissivity T of sensor is as shown in Figure 3.As seen from the figure,
When original state, because the transmission spectral line of reference cavity and sensing resonant cavity overlaps, most of light energy penetrates.Therefore first
The power highest that light power meter 52 receives.When to be measured in the absorption fluid to be measured 6 of molecule film 7 on sensing resonant cavity 20
After substance, effective refractive index, which changes, causes the transmission spectral line for sensing resonant cavity that movement, reference cavity and biography has occurred
The transmission spectral line of sense resonant cavity no longer overlaps, and the transmission spectral line of sensor can be obtained by sensor after being multiplied with the spectral line of light source
Output power, therefore the luminous power that the first light power meter 52 receives can reduce.When the refractive index generation due to fluid to be measured 6
When variation, reference cavity 10 is identical with the sensing spectral line variation of resonant cavity 20, still overlaps, so the first light power meter 52 connects
The luminous power received is constant.When Fig. 4 gives different reference cavities 10 with sensing 20 length difference of resonant cavity, sensor output light
Power is with the change curve for sensing 20 effective refractive index of resonant cavity.It can be seen that when effective refraction of sensing resonant cavity 20
When rate increases, the output power of sensor is reduced.When reference cavity 10 is identical as the sensing length of resonant cavity 20, sensor
Sensitivity it is maximum.In this example, in n=0~4 × 10 δ-4In range, maximum sensitivity reaches 60000dB/RIU.If minimum
Detectable changed power is 1dB, and the variation of detectable minimum effective refractive index is 1.67 × 10‐5。
Above-described embodiment is used for illustrating the present invention, rather than limits the invention.The present invention spirit and
In scope of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.
Claims (8)
1. one kind being based on the cascade optical sensor of dual resonant cavity, it is characterised in that：It includes wideband light source (1) and broadband light
The input waveguide (2) that source (1) is coupled and reference cavity (10) and reference cavity (10) that input waveguide (2) is coupled
The connection waveguide (3) that is coupled, with connect sensing resonant cavity (20) that waveguide (3) is coupled, with sensing resonant cavity (20) phase coupling
The output waveguide (4) of conjunction is coupled with output waveguide (4) and surveys the first light power meter (52) of its outgoing luminous power；The sensing
The surface modification molecule film (7) of resonant cavity (20), it is described with reference to ring resonator (10) and sensing ring-shaped resonant (20)
Contacted with fluid to be measured (6).
2. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：The input
Coupling between waveguide (2) and connection waveguide (3) and reference cavity (10) is by directional coupler or by respective more
Mode interference coupler is coupled.
3. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：The output
Coupling between waveguide (4) and connection waveguide (3) and sensing resonant cavity (20) is by directional coupler or by respective more
Mode interference coupler is coupled.
4. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：All waveguides
And resonant cavity is Planar integration optical waveguide.
5. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：All waveguides
And resonant cavity is made of optical fiber.
6. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：The reference
Resonant cavity (10) is identical as the optical length of sensing resonant cavity (20).
7. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：The input
The other end of waveguide (2) is coupled with the second light power meter (51).
8. according to claim 1 a kind of based on the cascade optical sensor of dual resonant cavity, it is characterised in that：The reference
Resonant cavity (10) and sensing resonant cavity (20) are made of ring resonator or Mach-Zehnder interferometer is constituted, or by
Array waveguide grating is constituted, or is made of Fabry-Perot interferometer.
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| CN201810543361.9A CN108414448A (en) | 2018-05-30 | 2018-05-30 | One kind being based on the cascade optical sensor of dual resonant cavity |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253986A (en) * | 2018-10-24 | 2019-01-22 | 苏州联讯仪器有限公司 | A kind of bicyclic optical sensor cascading Fourier transform spectrometer, |
| CN109507129A (en) * | 2019-01-17 | 2019-03-22 | 哈尔滨理工大学 | Spectrographic detection type gas sensor based on FP two-chamber cascade sensitizing property |
| CN110261000A (en) * | 2019-08-01 | 2019-09-20 | 广西师范大学 | A kind of temperature sensor based on Fano resonance |
| CN110554006A (en) * | 2019-09-04 | 2019-12-10 | 中国科学技术大学 | Multi-mode measurement method based on self-interference micro-ring resonant cavity sensor |
| CN112504973A (en) * | 2020-10-14 | 2021-03-16 | 杭州香侬科技有限公司 | Self-referencing optical micro-resonator sensor |
| CN112763457A (en) * | 2020-12-25 | 2021-05-07 | 济南国科医工科技发展有限公司 | Preparation method of silicon-based cascaded double-ring resonant cavity chip for detecting PCA3 |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109253986A (en) * | 2018-10-24 | 2019-01-22 | 苏州联讯仪器有限公司 | A kind of bicyclic optical sensor cascading Fourier transform spectrometer, |
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| CN109507129A (en) * | 2019-01-17 | 2019-03-22 | 哈尔滨理工大学 | Spectrographic detection type gas sensor based on FP two-chamber cascade sensitizing property |
| CN110261000A (en) * | 2019-08-01 | 2019-09-20 | 广西师范大学 | A kind of temperature sensor based on Fano resonance |
| CN110554006A (en) * | 2019-09-04 | 2019-12-10 | 中国科学技术大学 | Multi-mode measurement method based on self-interference micro-ring resonant cavity sensor |
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| CN112504973A (en) * | 2020-10-14 | 2021-03-16 | 杭州香侬科技有限公司 | Self-referencing optical micro-resonator sensor |
| CN112763457A (en) * | 2020-12-25 | 2021-05-07 | 济南国科医工科技发展有限公司 | Preparation method of silicon-based cascaded double-ring resonant cavity chip for detecting PCA3 |
| CN112763457B (en) * | 2020-12-25 | 2024-05-14 | 济南国科医工科技发展有限公司 | Preparation method of silicon-based cascade dual-ring resonant cavity chip for detecting PCA3 |
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