CN109253986A - A kind of bicyclic optical sensor cascading Fourier transform spectrometer, - Google Patents
A kind of bicyclic optical sensor cascading Fourier transform spectrometer, Download PDFInfo
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- CN109253986A CN109253986A CN201811247258.6A CN201811247258A CN109253986A CN 109253986 A CN109253986 A CN 109253986A CN 201811247258 A CN201811247258 A CN 201811247258A CN 109253986 A CN109253986 A CN 109253986A
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- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 125000002619 bicyclic group Chemical group 0.000 title claims abstract description 26
- 239000012530 fluid Substances 0.000 claims abstract description 14
- 230000008878 coupling Effects 0.000 claims abstract description 11
- 238000010168 coupling process Methods 0.000 claims abstract description 11
- 238000005859 coupling reaction Methods 0.000 claims abstract description 11
- 230000003595 spectral effect Effects 0.000 claims abstract description 11
- 230000008859 change Effects 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims description 27
- 238000000411 transmission spectrum Methods 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 claims description 5
- 230000009466 transformation Effects 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 239000012267 brine Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 239000000575 pesticide Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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- Health & Medical Sciences (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of bicyclic optical sensors for cascading Fourier transform spectrometer, including wideband light source, two shape annular resonant cavities and Fourier transform spectrometer,；The light that wideband light source issues is coupled by input straight wave guide with first annular resonant cavity；First annular resonant cavity is cascaded by coupling straight wave guide and the second ring resonator；Fourier transform spectrometer, is connected with the second ring resonator downloading end；First annular resonant cavity waveguide surface has top covering, does not contact with fluid to be measured, is with reference to ring resonator；Second ring cavity waveguide surface is contacted with fluid to be measured, is sensing ring-shaped resonant；Since the refractive index of fluid to be measured changes, the effective refractive index of sensing ring-shaped resonant is caused to change, and the effective refractive index for referring to ring resonator does not change, spectral envelope after cascading so as to cause two ring resonators generates variation, the variation of final envelope is restored by Fourier transform spectrometer, and then obtains the change information of fluid to be measured refractive index.
Description
Technical field
The present invention relates to a kind of optical sensor more particularly to a kind of bicyclic optics biographies for cascading Fourier transform spectrometer,
Sensor.
Background technique
Biotechnology, information technology, advanced manufacturing technology etc. are put into emphasis in long-term the program of science and technology in country
The cutting edge technology field of development.Integrated optical waveguide sensor proposed by the invention, exactly base oneself upon three of the above technical foundation it
On, it is suffered from extensively in biomedicine, chemical sensitisation, Pesticides Testing, food safety and current popular chip lab field
General application prospect.Not only there is high sensitivity, anti-electricity using Portable plane light guiding optics sensor made of this feature
The advantages that magnetic disturbance, and miniaturization easy to accomplish, array.More importantly it and existing optical fiber telecommunications system and
The communication technology is compatible, meets the main trend of Information Technology Development, is highly suitable for the real-time detection of safety monitoring system, and food
The numerous areas such as product examine survey, industry and medicine.
The optical sensor of bicyclic cascade resonator utilizes cursor effect, can greatly increase the sensitivity of sensor.But
It is that this sensor needs to test transmitted spectrum, carries out curve fitting to spectral envelope, so that it is determined that the shifting of spectral envelope peak value
Dynamic position.Test spectral needs high-precision spectrometer or tunable laser.These equipment instruments are huge, are unable to monolithic collection
At.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, it is an object of the present invention to provide it is a kind of cascade Fourier transform spectrometer, it is bicyclic
Optical sensor.
The purpose of the present invention is achieved through the following technical solutions: a kind of to cascade the bicyclic of Fourier transform spectrometer,
Optical sensor, including wideband light source, input straight wave guide, coupling straight wave guide, the first shape annular resonant cavity, the second ring resonator,
Second detector, third detector and Fourier transform spectrometer,；
The input terminal of the input straight wave guide is connected with wideband light source；The light that the wideband light source issues is by inputting straight wave
It leads and is coupled with first annular resonant cavity；The first annular resonant cavity passes through coupling straight wave guide and second ring resonator
Cascade；The output end of the coupling straight wave guide is connected with the second detector, and second detector is coupled to second for monitoring
The light intensity of ring resonator；
The first annular resonant cavity waveguide surface has top covering, does not contact with fluid to be measured, is with reference to ring resonator；
Second ring cavity waveguide surface is contacted with fluid to be measured, is sensing ring-shaped resonant；It is described to refer to ring resonator
Side has the first heating electrode；By adjusting size of current of the load on the first heating electrode, two shape ring resonance are adjusted
The difference of the Free Spectral Range of chamber, so that cascading measurement of the bicyclic transmission spectrum envelope period less than Fourier transform spectrometer,
Then range is adjusted to the light intensity minimum that the second detector detects, at this point, the light intensity into the second ring resonator is maximum；
The Fourier transform spectrometer, is constituted using Mach-Zender interferometer, input terminal and the second annular resonance
The downloading end of chamber is connected, and output end is connected with third detector；First arm of the Mach-Zender interferometer is without heating
Electrode, second arm have the second heating electrode；By adjusting size of current of the load on the second heating electrode, two are adjusted
The optical path difference of arm receives the light intensity of different optical path differences by third detector, bicyclic by Fourier transformation reduction cascade
It transmits spectrum envelope and obtains the variations in refractive index of fluid to be measured using the change information of envelope peak position.
Further, the first heating electrode and the second heating electrode are metal electrode.
Further, which further includes the first detector being connected with the output end of input straight wave guide,
For monitoring the input light intensity stability of wideband light source.
Further, when electric current is not added in the first heating electrode, the optics of the first shape annular resonant cavity and the second ring resonator
Length is not identical, and at least one identical resonance frequency in the spectral region of wideband light source.Second heating electrode is not added
When electric current, the optical length of first arm and second arm is identical.
The invention has the advantages that: light source of the invention substantially reduces sensing using the wideband light source of low cost
The cost of manufacture of device；Bicyclic cascade sensor utilizes cursor effect, greatly improves the sensitivity of sensor；Single-chip integration chip
Spectrometer substantially reduces the volume of sensor, increases the portability of sensor；It is not high using chip spectrometer resolution ratio
Feature realizes the detection to bicyclic cascade sensor transmission spectrum envelope, so that transmission spectrum envelope of curve no longer be needed to be fitted
Complicated test data treatment process.
Detailed description of the invention
Fig. 1 is a kind of bicyclic optical sensor structure schematic diagram for cascading Fourier transform spectrometer,；
Fig. 2 is to cascade bicyclic transmitted light spectrogram under different brine strengths；
Fig. 3 is under two kinds of different brine strengths, when the curent change of the second heating electrode, Fourier transform spectrometer, output
Relative power schematic diagram；
Fig. 4 is the bicyclic cascade sensor transmitted spectrum of Fourier transform spectrometer, reduction under two kinds of different brine strengths
Envelope schematic diagram；
In figure, wideband light source 1, input straight wave guide 2, the first shape annular resonant cavity 41, the detection of the second ring resonator 42, first
Device 31, the second detector 32, third detector 33, first heat electrode 51, second and heat electrode 52, coupling straight wave guide 6, are tested
Liquid 7, Fourier transform spectrometer, 8, input terminal 81, first 82, second, arm arm 83, output end 84.
Specific embodiment
The present invention is further illustrated with reference to the accompanying drawings and examples.
As shown in Figure 1, a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, provided by the invention, including width
Band light source 1, input straight wave guide 2, coupling straight wave guide 6, the first shape annular resonant cavity 41, the second ring resonator 42, the second detector
32, third detector 33 and Fourier transform spectrometer, 8；
The input terminal of the input straight wave guide 2 is connected with wideband light source 1, and output end is connected with the first detector 31, passes through
The input light intensity stability of first detector 31 monitoring wideband light source 1；The light that the wideband light source 1 issues is by inputting straight wave
2 are led to be coupled with first annular resonant cavity 41；The first annular resonant cavity 41 passes through coupling straight wave guide 6 and second annular
Resonant cavity 42 cascades；The output end of the coupling straight wave guide 6 is connected with the second detector 32, and second detector 32 is for supervising
The light intensity of the second ring resonator 42 is coupled in control；
41 waveguide surface of first annular resonant cavity has top covering, does not contact with fluid to be measured 7, is with reference to annular resonance
Chamber；Second ring resonator, 42 waveguide surface is contacted with fluid to be measured 7, is sensing ring-shaped resonant；The reference annular
There is the first heating electrode 51 beside resonant cavity；When electric current is not added in first heating electrode 51,41 He of the first shape annular resonant cavity
The optical length of second ring resonator 42 is not identical, and at least one is identical humorous in the spectral region of wideband light source 1
Vibration frequency；By adjusting size of current of the load on the first heating electrode 51, the free spectrum of two shape annular resonant cavities is adjusted
Then the difference of range is adjusted so that cascading the bicyclic transmission spectrum envelope period less than the measurement range of Fourier transform spectrometer, 8
The whole light intensity detected to the second detector 32 is minimum, at this point, the light intensity into the second ring resonator 42 is maximum；
The Fourier transform spectrometer, 8 is constituted using Mach-Zender interferometer, and input terminal 81 and the second annular are humorous
The downloading end of vibration chamber 42 is connected, and output end 84 is connected with third detector 33；First of the Mach-Zender interferometer
For arm 82 without heating electrode, second arm 83 has the second heating electrode 52；When electric current is not added in second heating electrode 52, described first
A arm 82 is identical with the optical length of second arm 83；By adjusting size of current of the load on the second heating electrode 52, adjust
The optical path difference of whole two arms, the light intensity of different optical path differences is received by third detector 33, also simple by Fourier transformation
Join bicyclic transmission spectrum envelope, using the change information of envelope peak position, obtains the variations in refractive index of fluid to be measured 7.
Sensor chip is made using SOI platform in this example, waveguiding structure is 1.81 for TM mode effective refractive index,
The radius of two rings is respectively 127nm and 130nm.By changing size of current of the load on the first heating electrode 51, so that
Cascade the measurement range that bicyclic transmission spectrum envelope period 60nm is less than Fourier spectrometer.Change the refractive index of fluid to be measured 7,
It will affect the waveguide effective index of the second sensing ring-shaped resonant 42.Under different effective refractive indexs, bicyclic transmission spectrum curve
As shown in Figure 2.Assume in this example that Fourier transform spectrometer, can be made to have 16 by the curent change of the second heating electrode 52
Different optical path differences, corresponding wavelength resolution only have 10nm, measurement range 230nm.Fig. 3 be the second ring resonator 42 not
With the performance number that under effective refractive index, third detector 33 is received with the variation of optical path difference.Fig. 4 is the emulation number according to Fig. 3
According under two kinds of different effective refractive indexs of, recovery, the transmission spectral line of dicyclo resonant cavity is cascaded, as seen from Figure 4, Fig. 1 can be restored
Transmittance graph envelope, may determine that the shift position of transmission spectrum envelope peak from the spectral line of recovery, to be tested
The variations in refractive index information of liquid 7.
Above-described embodiment is used to illustrate the present invention, rather than limits the invention.In spirit of the invention and
In scope of protection of the claims, to any modifications and changes that the present invention makes, protection scope of the present invention is both fallen within.
Claims (5)
1. a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, which is characterized in that including wideband light source (1), defeated
Enter straight wave guide (2), coupling straight wave guide (6), the first shape annular resonant cavity (41), the second ring resonator (42), the second detector
(32), third detector (33) and Fourier transform spectrometer, (8)；
The input terminal of input straight wave guide (2) is connected with wideband light source (1)；The light that the wideband light source (1) issues is by defeated
Enter straight wave guide (2) to be coupled with first annular resonant cavity (41)；The first annular resonant cavity (41) passes through coupling straight wave guide (6)
It is cascaded with second ring resonator (42)；The output end of coupling straight wave guide (6) is connected with the second detector (32), institute
The second detector (32) are stated for monitoring the light intensity for being coupled to the second ring resonator (42)；
First annular resonant cavity (41) waveguide surface has top covering, does not contact with fluid to be measured (7), is with reference to annular resonance
Chamber；Second ring resonator (42) waveguide surface is contacted with fluid to be measured (7), is sensing ring-shaped resonant；The reference
There is the first heating electrode (51) beside ring resonator；It is big by adjusting electric current of the load in the first heating electrode (51)
It is small, the difference of the Free Spectral Range of two shape annular resonant cavities is adjusted, so that cascading the bicyclic transmission spectrum envelope period is less than Fu
In leaf transformation spectrometer (8) measurement range, it is minimum to be then adjusted to the light intensity that the second detector (32) detects, at this point, into
The light intensity for entering the second ring resonator (42) is maximum；
The Fourier transform spectrometer, (8) is constituted using Mach-Zender interferometer, and input terminal (81) and the second annular are humorous
The downloading end of vibration chamber (42) is connected, and output end (84) is connected with third detector (33)；The Mach-Zender interferometer
First arm (82) has the second heating electrode (52) without heating electrode, second arm (83)；Added by adjusting load second
Size of current on thermode (52), adjusts the optical path difference of two arms, receives different optical path differences by third detector (33)
Light intensity, bicyclic transmission spectrum envelope is cascaded by Fourier transformation reduction and is obtained using the change information of envelope peak position
The variations in refractive index of fluid to be measured (7).
2. a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, according to claim 1, it is characterised in that:
First heating electrode (51) and the second heating electrode (52) are metal electrode.
3. a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, according to claim 1, it is characterised in that:
It further include the first detector (31) being connected with the output end of input straight wave guide (2), for monitoring the input light of wideband light source (1)
Strength stability.
4. a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, according to claim 1, it is characterised in that:
When electric current is not added in first heating electrode (51), the optics of the first shape annular resonant cavity (41) and the second ring resonator (42) is long
Degree is not identical, and at least one identical resonance frequency in the spectral region of wideband light source (1).
5. a kind of bicyclic optical sensor for cascading Fourier transform spectrometer, according to claim 1, it is characterised in that:
When electric current is not added in second heating electrode (52), first arm (82) is identical with the optical length of second arm (83).
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Cited By (3)
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| CN110044484A (en) * | 2019-05-06 | 2019-07-23 | 长春理工大学 | A kind of Fourier transform spectrometer, cascading bicyclic enhancing |
| CN113899699A (en) * | 2021-11-08 | 2022-01-07 | 长春理工大学 | Outgoing and incoming common-aperture multi-path space light-focusing system for cascaded double-ring biosensor |
| WO2022021880A1 (en) * | 2020-07-30 | 2022-02-03 | 上海交通大学 | Silicon-based fourier transform spectrometer-on-chip, and spectrum reconstruction method |
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| CN109253986B (en) | 2024-02-20 |
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