CN109253986B - Double-ring optical sensor of cascade Fourier transform spectrometer - Google Patents
Double-ring optical sensor of cascade Fourier transform spectrometer Download PDFInfo
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- CN109253986B CN109253986B CN201811247258.6A CN201811247258A CN109253986B CN 109253986 B CN109253986 B CN 109253986B CN 201811247258 A CN201811247258 A CN 201811247258A CN 109253986 B CN109253986 B CN 109253986B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 32
- 239000007788 liquid Substances 0.000 claims abstract description 16
- 230000008859 change Effects 0.000 claims abstract description 11
- 230000008878 coupling Effects 0.000 claims abstract description 10
- 238000010168 coupling process Methods 0.000 claims abstract description 10
- 238000005859 coupling reaction Methods 0.000 claims abstract description 10
- 238000005253 cladding Methods 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims description 28
- 238000000411 transmission spectrum Methods 0.000 claims description 12
- 230000003595 spectral effect Effects 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 5
- 238000012544 monitoring process Methods 0.000 claims description 5
- 230000009466 transformation Effects 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 2
- 238000001228 spectrum Methods 0.000 abstract description 3
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 239000012267 brine Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 2
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- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000002619 bicyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
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- 239000000575 pesticide Substances 0.000 description 1
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- 238000012545 processing Methods 0.000 description 1
- 238000011897 real-time detection Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
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Abstract
The invention discloses a double-ring optical sensor of a cascade Fourier transform spectrometer, which comprises a broadband light source, two annular resonant cavities and the Fourier transform spectrometer; light emitted by the broadband light source is coupled with the first annular resonant cavity through the input straight waveguide; the first annular resonant cavity is cascaded with the second annular resonant cavity through a coupling straight waveguide; the Fourier transform spectrometer is connected with the downloading end of the second annular resonant cavity; the surface of the first annular resonant cavity waveguide is provided with an upper cladding layer which is not contacted with the liquid to be measured and is a reference annular resonant cavity; the surface of the second ring resonator waveguide is in contact with the liquid to be detected and is a sensing ring resonator; the effective refractive index of the sensing ring resonator is changed due to the change of the refractive index of the measured liquid, and the effective refractive index of the reference ring resonator is not changed, so that the spectrum envelope of the two ring resonators after cascade connection is changed, and finally the change of the envelope is reduced by a Fourier transform spectrometer, so that the change information of the refractive index of the measured liquid is obtained.
Description
Technical Field
The invention relates to an optical sensor, in particular to a double-ring optical sensor of a cascade Fourier transform spectrometer.
Background
Biotechnology, information technology, advanced manufacturing technology, etc. are being put into leading-edge technical fields of major development in long-term scientific technical planning in countries. The integrated optical waveguide sensor provided by the invention has wide application prospects in biomedical science, chemical sensing, pesticide detection, food safety and the current hot laboratory-on-chip field on the basis of the three technologies. The portable planar optical waveguide optical sensor manufactured by utilizing the characteristics has the advantages of high sensitivity, electromagnetic interference resistance and the like, and is easy to realize miniaturization and array. More importantly, the system is compatible with the existing optical fiber communication system and communication technology, accords with the great trend of information technology development, and is very suitable for the real-time detection of a safety supervision system, and various fields of food detection, industry, medicine and the like.
The optical sensor with the double-ring cascade resonant cavity can greatly increase the sensitivity of the sensor by utilizing the vernier effect. However, such sensors require testing of the transmission spectrum, curve fitting the spectral envelope, and thus determining the shift position of the peak of the spectral envelope. Testing spectra requires a high precision spectrometer, or a tunable laser. These instruments are bulky and cannot be monolithically integrated.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a double-ring optical sensor of a cascade Fourier transform spectrometer.
The aim of the invention is realized by the following technical scheme: a dual-ring optical sensor of a cascade Fourier transform spectrometer comprises a broadband light source, an input straight waveguide, a coupling straight waveguide, a first ring resonant cavity, a second detector, a third detector and a Fourier transform spectrometer;
the input end of the input straight waveguide is connected with a broadband light source; light emitted by the broadband light source is coupled with the first annular resonant cavity through the input straight waveguide; the first annular resonant cavity is cascaded with the second annular resonant cavity through a coupling straight waveguide; the output end of the coupling straight waveguide is connected with a second detector, and the second detector is used for monitoring the light intensity coupled to the second ring resonant cavity;
the surface of the first annular resonant cavity waveguide is provided with an upper cladding layer which is not contacted with the liquid to be detected and is a reference annular resonant cavity; the surface of the second ring resonant cavity waveguide is in contact with the liquid to be detected and is a sensing ring resonant cavity; a first heating electrode is arranged beside the reference ring resonant cavity; the difference value of the free spectrum ranges of the two ring resonators is adjusted by adjusting the current loaded on the first heating electrode, so that the transmission spectrum envelope period of the cascaded double rings is smaller than the measurement range of the Fourier transform spectrometer, and then the light intensity detected by the second detector is adjusted to be minimum, and at the moment, the light intensity entering the second ring resonator is maximum;
the Fourier transform spectrometer is formed by a Mach-Zehnder interferometer, the input end of the Fourier transform spectrometer is connected with the downloading end of the second ring resonator, and the output end of the Fourier transform spectrometer is connected with the third detector; a first arm of the Mach-Zehnder interferometer has no heating electrode, and a second arm has a second heating electrode; the optical path difference of the two arms is adjusted by adjusting the current loaded on the second heating electrode, the output light intensity after interference of different optical path differences is received by the third detector, the transmission spectrum envelope of the cascade double loop is restored by Fourier transformation, and the refractive index change of the measured liquid is obtained by utilizing the change information of the peak position of the envelope.
Further, the first heating electrode and the second heating electrode are both metal electrodes.
Further, the dual-ring optical sensor also comprises a first detector connected with the output end of the input straight waveguide and used for monitoring the input light intensity stability of the broadband light source.
Further, when no current is applied to the first heating electrode, the optical lengths of the first ring resonator and the second ring resonator are different, and at least one identical resonant frequency exists in the spectral range of the broadband light source. When no current is applied to the second heating electrode, the optical lengths of the first arm and the second arm are the same.
The invention has the beneficial effects that: the light source of the invention adopts a broadband light source with low cost, thereby greatly reducing the manufacturing cost of the sensor; the double-ring cascade sensor utilizes vernier effect to greatly improve the sensitivity of the sensor; the chip spectrometer is integrated in a single chip, so that the volume of the sensor is greatly reduced, and the portability of the sensor is improved; by utilizing the characteristic of low resolution of the chip spectrometer, the detection of the transmission spectrum envelope of the double-ring cascade sensor is realized, so that the complex test data processing process of transmission spectrum envelope fitting is not needed.
Drawings
FIG. 1 is a schematic diagram of a dual-loop optical sensor of a cascaded Fourier transform spectrometer;
FIG. 2 is a graph of transmission spectra of cascaded bicyclic rings at different brine concentrations;
FIG. 3 is a graph showing the relative power output by a Fourier transform spectrometer when the current of the second heating electrode is varied at two different brine concentrations;
FIG. 4 is a schematic representation of transmission spectral envelopes of a dual-loop cascade sensor reduced by a Fourier transform spectrometer at two different brine concentrations;
in the figure, a broadband light source 1, an input straight waveguide 2, a first ring resonator 41, a second ring resonator 42, a first detector 31, a second detector 32, a third detector 33, a first heating electrode 51, a second heating electrode 52, a coupled straight waveguide 6, a liquid 7 to be measured, a fourier transform spectrometer 8, an input end 81, a first arm 82, a second arm 83, and an output end 84.
Detailed Description
The invention is further described below with reference to the drawings and examples.
As shown in fig. 1, the dual-ring optical sensor of the cascaded fourier transform spectrometer provided by the invention comprises a broadband light source 1, an input straight waveguide 2, a coupling straight waveguide 6, a first ring resonator 41, a second ring resonator 42, a second detector 32, a third detector 33 and a fourier transform spectrometer 8;
the input end of the input straight waveguide 2 is connected with the broadband light source 1, the output end of the input straight waveguide is connected with the first detector 31, and the stability of the input light intensity of the broadband light source 1 is monitored through the first detector 31; light emitted by the broadband light source 1 is coupled with the first annular resonant cavity 41 through the input straight waveguide 2; the first ring resonator 41 is cascaded with the second ring resonator 42 through a coupling straight waveguide 6; the output end of the coupling straight waveguide 6 is connected to a second detector 32, and the second detector 32 is used for monitoring the light intensity coupled to the second ring resonator 42;
the waveguide surface of the first ring resonator 41 is provided with an upper cladding layer which is not contacted with the tested liquid 7 and is a reference ring resonator; the waveguide surface of the second ring resonator 42 is in contact with the measured liquid 7 and is a sensing ring resonator; a first heating electrode 51 is provided beside the reference ring resonator; when no current is applied to the first heating electrode 51, the optical lengths of the first ring resonator 41 and the second ring resonator 42 are different, and at least one same resonant frequency exists in the spectral range of the broadband light source 1; the difference value of the free spectral ranges of the two ring resonators is adjusted by adjusting the current loaded on the first heating electrode 51, so that the transmission spectrum envelope period of the cascaded double rings is smaller than the measurement range of the Fourier transform spectrometer 8, and then the light intensity detected by the second detector 32 is adjusted to be minimum, and at the moment, the light intensity entering the second ring resonator 42 is maximum;
the fourier transform spectrometer 8 is formed by a mach-zehnder interferometer, an input end 81 of the fourier transform spectrometer is connected with a downloading end of the second ring resonator 42, and an output end 84 of the fourier transform spectrometer is connected with the third detector 33; the first arm 82 of the mach-zehnder interferometer has no heating electrode and the second arm 83 has a second heating electrode 52; the first arm 82 and the second arm 83 have the same optical length when no current is applied to the second heater electrode 52; the optical path difference of the two arms is adjusted by adjusting the current loaded on the second heating electrode 52, the output light intensity after interference of different optical path differences is received by the third detector 33, the transmission spectrum envelope of the cascade double loop is restored by Fourier transformation, and the refractive index change of the measured liquid 7 is obtained by utilizing the change information of the peak position of the envelope.
In this example, the sensor chip is fabricated using an SOI platform, the waveguide structure has an effective refractive index of 1.81 for TM mode, and the radii of the two rings are 127nm and 130nm, respectively. By varying the magnitude of the current applied to the first heating electrode 51, the transmission spectrum envelope period 60nm of the cascaded double loop is made smaller than the measurement range of the fourier spectrometer. Changing the refractive index of the measured liquid 7 affects the effective refractive index of the waveguide of the second ring resonator 42. The dual-ring transmission spectrum curves are shown in fig. 2 at different effective refractive indices. In this example, it is assumed that the change in current through the second heater electrode 52 allows the Fourier transform spectrometer to have 16 different path differences, corresponding to a wavelength resolution of only 10nm and a measurement range of 230nm. Fig. 3 shows the power received by the third detector 33 as a function of optical path difference for different effective refractive indices of the second ring resonator 42. Fig. 4 is a diagram showing the transmission lines of the cascaded dual-ring resonator according to the simulation data of fig. 3, and the transmission curve envelope of fig. 1 can be restored from fig. 4, and the moving position of the peak of the transmission curve envelope can be judged from the restored transmission lines, so as to obtain the refractive index change information of the measured liquid 7.
The above examples are intended to illustrate the invention, not to limit it. Any modifications and changes made to the present invention fall within the spirit of the invention and the scope of the appended claims.
Claims (5)
1. The double-loop optical sensor of the cascade Fourier transform spectrometer is characterized by comprising a broadband light source (1), an input straight waveguide (2), a coupling straight waveguide (6), a first annular resonant cavity (41), a second annular resonant cavity (42), a second detector (32), a third detector (33) and a Fourier transform spectrometer (8);
the input end of the input straight waveguide (2) is connected with the broadband light source (1); light emitted by the broadband light source (1) is coupled with the first annular resonant cavity (41) through the input straight waveguide (2); the first ring resonator (41) is cascaded with the second ring resonator (42) through a coupling straight waveguide (6); the output end of the coupling straight waveguide (6) is connected with a second detector (32), and the second detector (32) is used for monitoring the light intensity coupled to the second ring resonant cavity (42);
the surface of the waveguide of the first annular resonant cavity (41) is provided with an upper cladding layer which is not contacted with the tested liquid (7) and is a reference annular resonant cavity; the waveguide surface of the second ring resonant cavity (42) is in contact with the liquid (7) to be detected and is a sensing ring resonant cavity; a first heating electrode (51) is arranged beside the reference ring resonator; the difference value of the free spectral ranges of the two ring resonators is adjusted by adjusting the current loaded on the first heating electrode (51) so that the transmission spectrum envelope period of the cascaded double ring is smaller than the measurement range of the Fourier transform spectrometer (8), and then the light intensity detected by the second detector (32) is adjusted to be minimum, and at the moment, the light intensity entering the second ring resonator (42) is maximum;
the Fourier transform spectrometer (8) is formed by a Mach-Zehnder interferometer, an input end (81) of the Fourier transform spectrometer is connected with a downloading end of the second ring resonator (42), and an output end (84) of the Fourier transform spectrometer is connected with the third detector (33); a first arm (82) of the Mach-Zehnder interferometer has no heating electrode, and a second arm (83) has a second heating electrode (52); the optical path difference of the two arms is adjusted by adjusting the current loaded on the second heating electrode (52), the output light intensity after interference of different optical path differences is received by the third detector (33), the transmission spectrum envelope of the cascade double loop is restored by Fourier transformation, and the refractive index change of the measured liquid (7) is obtained by utilizing the change information of the peak position of the envelope.
2. The dual-loop optical sensor of a cascaded fourier transform spectrometer of claim 1, wherein: the first heating electrode (51) and the second heating electrode (52) are both metal electrodes.
3. The dual-loop optical sensor of a cascaded fourier transform spectrometer of claim 1, wherein: the broadband light source also comprises a first detector (31) connected with the output end of the input straight waveguide (2) and used for monitoring the input light intensity stability of the broadband light source (1).
4. The dual-loop optical sensor of a cascaded fourier transform spectrometer of claim 1, wherein: when no current is applied to the first heating electrode (51), the optical lengths of the first ring resonator (41) and the second ring resonator (42) are different, and at least one identical resonant frequency exists in the spectral range of the broadband light source (1).
5. The dual-loop optical sensor of a cascaded fourier transform spectrometer of claim 1, wherein: when no current is applied to the second heating electrode (52), the optical lengths of the first arm (82) and the second arm (83) are the same.
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| CN110044484B (en) * | 2019-05-06 | 2021-05-25 | 长春理工大学 | Cascaded dual-ring enhanced Fourier transform spectrometer |
| CN111947780B (en) | 2020-07-30 | 2022-12-06 | 上海交通大学 | Fourier transform spectrometer on silicon substrate and spectrum reconstruction method |
| CN114018837B (en) * | 2021-10-11 | 2024-08-13 | 吉林大学第一医院 | Sensor for monitoring water vapor and carbon dioxide gas exhaled by human body based on silicon waveguide mainstream method |
| CN113899699B (en) * | 2021-11-08 | 2023-06-27 | 长春理工大学 | Light-emitting and incidence common-aperture multipath space light-focusing system for cascade double-ring biosensor |
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