CN105180978A - Optical sensor based on narrow-band light source and filtering characteristic adjustable element and method thereof - Google Patents
Optical sensor based on narrow-band light source and filtering characteristic adjustable element and method thereof Download PDFInfo
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Abstract
The invention relates to an optical sensor based on a narrow-band light source and a filtering characteristic adjustable element and a method thereof. The optical sensor is provided with a narrow-band light source and characterized in that emergent light of the narrow-band light source is connected to an optical sensing element with the filtering characteristics being adjustable, a regulation and control input end of the optical sensing element is connected to a regulation and control element, the output end of the optical sensing element is connected to an optical detector, and the regulation and control element and the optical detector are further connected to a signal processing and control element. The method comprises the steps of starting each component of the optical sensor; changing optical effect regulation and control parameters of the regulation and control element, and recording emergent light signal information; applying the signal amount to be sensed, changing the optical effect regulation and control parameters of the regulation and control element again, recording emergent light signal information, comparing and analyzing data, which is acquired by the two times of measurement, of the optical signal information and the regulation and control parameters before and after the signal amount to be sensed is applied, and extracting parameters of the signal amount to be sensed. According to the invention, usage of an expensive spectrometer, a wavelength adjustable light source and an optical detector array is avoided, thereby effectively reducing the cost of the sensor and the complexity of a sensing system.
Description
Technical field
The present invention relates to a kind of optical sensor.Particularly relate to a kind of optical sensor based on narrow-band light source and filtering characteristic adjustable element and method thereof.
Background technology
Infotech as 21 century development in science and technology mainstay is based upon on the correlation technique bases such as sensor, communication, computing machine.Wherein, sensor is that information data gathers indispensable instrument, and it is also the core component in Internet of Things.Although sensor technology relative maturity such as traditional machinery, chemistry, its exist precision low, easily the deficiency such as to be disturbed.Optical sensor relies on its excellent performance can substitute traditional sensors in a lot of fields and can expand the field of sensor use.Such as optical sensor both can be used for conventional sensing as monitored the important parameter such as electric current, voltage, electromagnetism of electric system, may be used for again complicated actual measurement place as undersea detection, aviation monitoring and radiation detection etc.Optical sensor can adopt LVPS to power even passive system, makes it particularly be applicable to the strict Test Field of safety anti-explosive measure requirement.In addition, combining wireless and (or) wired data transfer, also can realize the remote multi-point real-tune TT & C based on optical sensor.
Optical sensor system at present based on the optical sensor with frequency spectrum resonance characteristic generally comprises a Wavelength tunable light source or wideband light source, optical sensor and a spectrometer with frequency spectrum resonance characteristic, as K.DeVos, I.Bartolozzi, E.Schacht, P.Bienstman, andR.Baets, " Silicon-on-Insulatormicroringresonatorforsensitiveandlab el-freebiosensing; " Opt.Express15,7610-7615 (2007).Spectrometer can be measured the change of frequency spectrum resonance characteristic thus extract the quantity of information treating sensing.This scheme needs to use the expensive and spectrometer of equipment complexity, and its measuring accuracy and accuracy depend on the resolution of light source and spectrometer, precision and degree of stability.These require the complexity and the cost that significantly increase sensor, reduce reliability and portability.
Another kind of optical sensor scheme uses wide spectrum light source, a grating demodulation multiplexer that different wave length can be distinguished (dispersion), with a photodetector array, as " a kind of based on passive resonant cavity and grating demodulation multiplexer cascade optical waveguide sensor ", the patent No.: 2011205416922.In described grating demodulation multiplexer and detector array, any one detector forms a bandpass filter, goes out to treat the semaphore of sensing by the change detection of different detector institutes sensed light signal.Measuring accuracy based on the optical sensor of this scheme depends primarily on the resolution of the dispersion of grating demodulation multiplexer, precision and degree of stability, and the dispersion precision of grating demodulation multiplexer and degree of stability are subject to precision of manufacturing process impact in reality preparation, be in use vulnerable to external environment fluctuation as the impact of temperature variation etc.These impacts reduce the practicality of scheme and the reliability of sensor.In addition, this scheme needs to use photo-detector in a large number, turn increases cost and the power consumption of sensor.
Summary of the invention
Technical matters to be solved by this invention is, there is provided a kind of can by avoiding using expensive spectrometer, Wavelength tunable light source and photodetector array, effectively reduce the optical sensor based on narrow-band light source and filtering characteristic adjustable element and the method thereof of the cost of sensor and sensor-based system complexity.
The technical solution adopted in the present invention is: a kind of optical sensor based on narrow-band light source and filtering characteristic adjustable element, include narrow-band light source, the emergent light of described narrow-band light source connects the adjustable optical sensor of filtering characteristic, the regulation and control input end of described optical sensor connects the controlling element for regulating and controlling optical sensor spectral filtering characteristic, the output terminal of described optical sensor connects photo-detector, and described controlling element and photo-detector also distinguish connection signal process and control element.
Described optical sensor has at least one in band-pass filtering property, bandreject filtering characteristic, high-pass filtering characteristic, low-frequency filter characteristics and all-pass wave filtering characteristic.
Described optical sensor is surface plasma-wave resonance structure, optical grating construction, finite impulse response filter, infinite impulse response filter, only change signal phase relation all-pass filter and change at least one in the optical texture of the wave filter of transmittance or absorbance at a setting frequency domain.
Described photo-detector is the photo-detector of at least one quantity of information can measured in the power of light signal, phase place and polarization information.
Described controlling element is the spectral filtering characteristic being changed optical sensor by least one optical effect in thermo-optical, acousto-optic, electric light, light light, magneto-optic and mechanical luminous effect.
Described optical sensor includes the bus optical waveguide receiving the narrow band light that narrow-band light source sends, the coupling being positioned at bus optical waveguide side receives the ring-shaped light waveguide resonant cavity of bus optical waveguide transmission light, the light sensor information material being carrier with described ring-shaped light waveguide resonant cavity, the controlling element for the spectral filtering characteristic regulating and controlling optical sensor is positioned at the outside of described ring-shaped light waveguide resonant cavity.
Described light sensor information material is that the optical property of material itself, with physics biochemical effect, corresponding change occurs, described physics biochemical effect includes at least one in pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, optical, electrical, electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.
Described optical sensor includes interferometer and is arranged on the light sensor information material in described interferometer, wherein, described interferometer is by receiving the first optical branching device of narrow band light or light combiner and the second optical branching device docked with the two-way light that described first optical branching device or light combiner separate or light combiner that narrow-band light source sends, the emergent light of described second optical branching device or light combiner connects photo-detector, described smooth sensor information material is arranged in a light path of the first optical branching device or light combiner and the second optical branching device or the docking of light combiner, controlling element for the spectral filtering characteristic regulating and controlling optical sensor is arranged on another light path of the first optical branching device or light combiner and the second optical branching device or the docking of light combiner, described light sensor information material is that the optical property of material itself, with physics biochemical effect, corresponding change occurs, described physics biochemical effect includes pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, light, electricity, at least one in electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.
Described narrow-band light source is LASER Light Source or incoherent light source, or the narrow-band light source be formed by stacking of frequency spectrum wideband light source and frequency domain bandpass filter; Or the combination of limited narrow-band light source.
Based on a method for sensing for the optical sensor of narrow-band light source and filtering characteristic adjustable element, comprise the steps:
1) start all parts of optical sensor, comprise light source, there is spectral filtering characteristic and adjustable optical sensor, controlling element, photo-detector and the signal transacting of filtering characteristic and control element;
2) before applying to treat the semaphore of sensing, controlling element is under the monitoring of signal transacting and control element, the optical effect regulation and control parameter of progressive change controlling element within the scope of setting codomain, the emergent light signal message after the regulation and control of optical sensor modulated element measured by photo-detector, and signal transacting and control element record the corresponding emergent light signal message that the optical effect regulation and control parameter of controlling element and photo-detector measurement obtain;
3) apply after the semaphore of sensing, treat that the physics biochemical effect of the semaphore initiation of sensing changes with optical sensor the optical property of the light sensor information material being carrier, and then change the optical property comprising spectral filtering characteristic of optical sensor;
4) after the physics biochemical effect of the spectral filtering characteristic changing causing optical sensor occurs for the semaphore of sensing and light sensor information material, controlling element is under the monitoring of signal transacting and control element, within the scope of setting codomain, the optical effect of progressive change controlling element regulates and controls parameter again, photo-detector measures the emergent light signal message after the regulation and control of optical sensor modulated element, and signal transacting and control element record the corresponding emergent light signal message that the optical effect regulation and control parameter of controlling element and photo-detector measurement obtain;
5) data of light signal information and the regulation and control parameter applying to treat that twice measurement before and after the semaphore of sensing obtains also are analyzed in signal transacting and control element comparison, extract the semaphore parameter treating sensing, complete sensing process.
A kind of optical sensor based on narrow-band light source and filtering characteristic adjustable element of the present invention and method thereof, by avoiding using expensive spectrometer, Wavelength tunable light source and photodetector array, effectively reduce cost and the sensor-based system complexity of sensor.In addition, the present invention is because the spectral filtering characteristic of optical sensor can be conditioned, so without the need to calibrating accurately light source and optical sensor, reduce the impact on sensing element precision and degree of stability of manufacturing process and operating environment, further increase the dependable with function of sensor.
The optical texture that the present invention has spectral filtering characteristic maybe can provide Purcell, Edward Mills effect (Purcelleffect).This effect can make the optical property change by sensing substance induction initiation of light sensor information material be strengthened, the intensity etc. of such as light absorption, thus improve sensor sensitivity and (or) reduce required for treat sensing sample size or parameter signal intensity.
Sensor involved in the present invention can to wirelessly if radiofrequency signal connection and (or) wired mode be as adopted Fiber connection, carry out remote measurement and control, and multiple spot array, multiparameter, networking, the intelligentized Internet of things system comprising optical sensor can be realized.Sensor involved in the present invention in conjunction with light WDM technology, can also expand usable range and the function of sensor further.
Accompanying drawing explanation
Fig. 1 is that the entirety of optical sensor of the present invention forms block diagram;
Fig. 2 is the structural representation of optical sensor first embodiment of the present invention;
Fig. 3 is the spectral response curve optical sensor shown in Fig. 2 being applied to the ring-shaped light waveguide resonant cavity before treating the semaphore of sensing;
Fig. 4 is the spectral response curve optical sensor shown in Fig. 2 being applied to the ring-shaped light waveguide resonant cavity after the semaphore of sensing;
Fig. 5 is by regulating controlling element parameter R with certain precision, the light signal curve that the photo-detector in sensor obtains measured by optical power meter to the optical sensor shown in Fig. 2;
Fig. 6 is a kind of special case of situation described by Fig. 5;
Fig. 7 is the structural representation of optical sensor second embodiment of the present invention;
Fig. 8 is the process flow diagram of the inventive method.
In figure
110: narrow-band light source 120: optical sensor
130: controlling element 140: photo-detector
150: signal transacting and control element 1201: bus optical waveguide
1202: optical waveguide ring resonator 1203: light sensor information material
1211: interferometer 1212: the first optical branching device or light combiner
1213: light sensor information material 1214: the second optical branching device or light combiner
Embodiment
Below in conjunction with embodiment and accompanying drawing, the optical sensor based on narrow-band light source and filtering characteristic adjustable element of the present invention and method thereof are described in detail.Be worth pointing out, embodiments of the present invention should not be understood to be confined to the following embodiment described.Other are any do not deviate from Spirit Essence of the present invention and principle under do change, modification, substitute, combine, combination, be all interpreted as the substitute mode of equivalence, all should be placed within protection scope of the present invention.
Optical sensor based on narrow-band light source and filtering characteristic adjustable element of the present invention, by avoiding using expensive spectrometer, Wavelength tunable light source and photodetector array, effectively reduces cost and the sensor-based system complexity of sensor.In addition, because the spectral filtering characteristic of optical sensor can be conditioned, so without the need to calibrating accurately light source and optical sensor, reducing the impact on sensing element precision and degree of stability of manufacturing process and operating environment, further increasing the dependable with function of sensor.Optical sensor accessible site signal transacting based on narrow-band light source and filtering characteristic adjustable element of the present invention, control and transfer element, as analog and digital signal modular converter and logical operation module etc. to sensor the signal that gathers process and regulate and control.
As shown in Figure 1, optical sensor based on narrow-band light source and filtering characteristic adjustable element of the present invention, include narrow-band light source 110, described narrow-band light source 110, can be LASER Light Source or incoherent light source as light emitting diode, can be maybe the narrow-band light source be formed by stacking of frequency spectrum wideband light source and frequency domain bandpass filter; It can also be the combination of limited narrow-band light source.The emergent light of described narrow-band light source 110 connects the adjustable optical sensor 120 of filtering characteristic, described optical sensor 120 be one comprise light sensor information material there is spectral filtering characteristic and the adjustable optical sensor of filtering characteristic.The regulation and control input end of described optical sensor 120 connects the controlling element 130 for regulating and controlling optical sensor 120 spectral filtering characteristic, the output terminal of described optical sensor 120 connects photo-detector 140, and described controlling element 130 and photo-detector 140 also distinguish connection signal process and control element 150.The incident light that narrow-band light source sends is detected by photo-detector via after the optical sensor with spectral filtering characteristic.The semaphore treating sensing applied with optical sensor for carrier the interact optical effect that produces of light sensor information material can change the optical property of optical sensor.Applying is treated before and after the semaphore of sensing, by the spectral filtering characteristic of the optical effect regulation and control parameter change optical sensor of progressive change controlling element, measures respectively and records emergent light signal.By comparison and analyze twice measurement light signal and regulation and control parameter data, extract the signal parameter treating sensing, complete sensing process.
Spectral filtering characteristic refers under certain characteristic frequency, shows the amplitude different from other frequencies or the spectral response of phase place.Frequency spectrum shows the filtering characteristics such as band is logical, band resistance, high pass, low pass, all-pass and can meet the needs of the present invention's design and should be included within protection scope of the present invention.This kind of optical element can be but be not limited to surface plasma wave resonance, logical or the rejection filter of band is as grating, finite impulse response filter is as Fabry-Perot (Fabry-Perot) resonator cavity, ring-like optical path resonator cavity, plate-like resonator cavity, photonic crystal resonant cavity, infinite impulse response filter is as Michaelson (Michelson) interferometer, Mach-Zeng Zeer (Mach-Zehnder) interferometer, only change the wave filter of signal phase relation, with optical texture or the optical design based on mixing said structure such as wave filter that change transmittance or absorbance at a certain frequency domain.Spectral filtering characteristic can be with or without periodically by tool.
Described narrow-band light source 110 is frequency spectrum narrow-band light source, its can be LASER Light Source or incoherent light source as light emitting diode, described frequency spectrum narrow-band light source can also be the narrow-band light source be formed by stacking of frequency spectrum wideband light source and frequency domain bandpass filter.Described narrow-band light source 110 can also be the combination of limited narrow-band light source.
Described controlling element 130 is the spectral filtering characteristics being changed optical sensor 120 by least one optical effect in thermo-optical, acousto-optic, electric light, light light, magneto-optic and mechanical luminous effect.Further, the corresponding relation of the spectral filtering characteristic changing of the optical effect that described controlling element 130 produces and optical sensor 120 is determined.Controlling element changes the spectral filtering characteristic of optical sensor by certain optical effect, such as makes resonance frequency or wavelength that drift etc. occurs.Here the optical effect of indication can be but be not limited to thermo-optical (thermo-opticeffect), acousto-optic (acoustic-opticeffect), full light (all-opticaleffect), electric light (electro-opticeffect), magneto-optic (magneto-opticeffect), mechanical light (mechanical-opticeffect) effect.
Described photo-detector 140 is photo-detectors of at least one information in a kind of power, phase place and the polarization information that can measure light signal, in this way based on photodetector or the optical power meter of the materials such as silicon, germanium or indium phosphide.This optical signal is convertible into electric signal for data processing and analysis.
Described optical sensor 120 has at least one in band-pass filtering property, bandreject filtering characteristic, high-pass filtering characteristic, low-frequency filter characteristics and all-pass wave filtering characteristic.Described optical sensor 120 is surface plasma-wave resonance structures, optical grating construction, finite impulse response filter, infinite impulse response filter, only change signal phase relation all-pass filter and change at least one in the optical texture of the wave filter of transmittance or absorbance at a setting frequency domain.
The optical design of described finite impulse response filter and structure are at least one in Fabry-Perot (Fabry-Perot) resonator cavity, ring-like optical path resonator cavity, plate-like resonator cavity and photonic crystal resonant cavity.
The optical design of described infinite impulse response filter and structure are Michaelson (Michelson) interferometer and (or) Mach-Zeng Zeer (Mach-Zehnder) interferometer.
In an embodiment of the present invention, described signal transacting and control element 150 can adopt the processor chips of 8051 single-chip microcomputers or ARM company to add required voltage source and internal memory.As carried out igh-speed wire-rod production line (as ~ 1GHz), element can adopt the FPGA programmable logic chip of Xilinx company and the AD/DA development board of ADI company.
As shown in Figure 2, described optical sensor 120 includes the bus optical waveguide 1201 receiving the narrow band light that narrow-band light source 110 sends, the coupling being positioned at bus optical waveguide 1201 side receives the ring-shaped light waveguide resonant cavity 1202 of bus optical waveguide 1201 transmission light, the light sensor information material 1203 being carrier with described ring-shaped light waveguide resonant cavity 1202, described light sensor information material 1203 can with treat that the semaphore of sensing interacts, controlling element 130 for the spectral filtering characteristic regulating and controlling optical sensor 120 is positioned at the outside of described ring-shaped light waveguide resonant cavity 1202.
Described light sensor information material 1203 is that the optical property of material itself with certain physics biochemical effect, corresponding change can occur, described physics biochemical effect is including, but not limited at least one in pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, optical, electrical, electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material 1203 is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.For example, according to sensing needs, light sensor information material can be that ferromagnetic material is used for sensing electromagnetic field or biology enzyme and is used for the specific biological reagent of sensing.
Embodiment shown in Fig. 2, be one based on the adjustable optical sensor of the filtering characteristic of the finite impulse response filter of ring-shaped light waveguide resonant cavity 1202.After the narrow band light that light source 110 sends enters bus optical waveguide 1201, when the native resonant frequency of the frequency resonant cavity of light is consistent, incident light is coupled into ring-shaped light waveguide resonant cavity 1202, therefore, the luminous power (I) of the output light that endpiece photo-detector 140 detects can decay, and the light of this frequency partly can be reflected back input end.Under the control of data processing and control element 150, controlling element 130 changes the spectral filtering characteristic of wave filter by certain optical effect such as thermo-optic effect, charge carrier plasma dispersion effect etc., and the optical property of ring-shaped light waveguide changes as native resonant frequency or wavelength drift about on frequency spectrum.For example, controlling element 130 can adopt the resistance of conducting, the controllable heat radiation produced by Injection Current changes the refractive index of the carrier mass of ring-shaped light waveguide resonant cavity 1202 thus the spectral filtering characteristic of change ring-shaped light waveguide resonant cavity 1202, as R.Amatya, C.W.Holzwarth, H.I.Smith, andR.J.Ram, " PrecisionTunableSiliconCompatibleMicroringFilters; " IEEEPhotonicsTechnologyLetters, vol.20, no.20, pp.1739-1741 (2008).Treat sensing semaphore can be carrier with ring-shaped light waveguide resonant cavity 1202 light sensor information material 1203 interacts in optical sensor, and the optical property of corresponding change ring-shaped light waveguide is as native resonant frequency or wavelength.
As shown in Figure 3 and Figure 4, be the spectral response applying the ring-shaped light waveguide resonant cavity treated before and after the semaphore of sensing respectively.In figure, transverse axis represents wavelength X, and the longitudinal axis represents that the corresponding emergent light signal message of the photo-detector of sensor measured by optical power meter is as luminous power I (λ).310 and the 410 identical incident light light wavelength lambda all pointing to transverse axis scale in two figure
0.Before not applying measured signal amount, the spectral response of the corresponding ring-shaped light waveguide resonant cavity of curve 320.By progressive adjustment controlling element parameter R, the spectral response homologous thread 321,322,323 respectively of ring-shaped light waveguide resonant cavity.Curve 420 correspondence applies the spectral response of the ring-shaped light waveguide resonant cavity after the semaphore of sensing.The change correspondence of curve 320 and 420 treats that the semaphore of sensing and light sensor information material react the change of the optical effect produced and the optical sensor spectral response caused thereof.Curve 321,322,323,421,422,423 regulate the spectral response of the optical waveguide ring resonator corresponding to controlling element parameter R again after applying to treat the semaphore of sensing.Should point out, curve 321,322,323,421,422,423 are only the schematic diagram by regulating controlling element parameter R to change the spectral response of resonator cavity, and in practical application, controlling element parameter R should carry out parameter scanning with enough intensive stepping-in amount within the scope of certain codomain, obtain abundant emergent light signal message I (R), to ensure precision and the accuracy of sensor measurement.
As shown in Figure 5, by regulating controlling element parameter R with certain precision, the photo-detector in sensor is measured as light power meter and can be obtained I (R) curve 510 and 520.Curve 510 and 520 is the corresponding data applying to treat before and after the semaphore of sensing respectively.By analyzing the controlling element parameter R and emergent light signal message I (R) that two secondary data record, the corresponding relation of the spectral filtering characteristic changing of the optical effect produced in conjunction with known controlling element and optical sensor, the precalibrated measurement data of comparison and correlation theory model and numerical simulation data, can extract the information of the semaphore treating sensing.
It is a kind of special case of situation described by Fig. 5 shown in Fig. 6.This special case can betide and apply after the semaphore of sensing, sensing element shows and is significantly better than impact on anaclasis character to the change of optical absorption property, as on frequency spectrum, the change of native resonant frequency or wavelength obviously drift on frequency spectrum does not appear in the spectral filtering characteristic of optical sensor, only some character such as luminous power 610 and 620 of emergent light signal changes.This situation does not affect the normal operation of sensor.By the difference of comparison emergent light signal, the precalibrated measurement data of comparison and correlation theory model and numerical simulation data, still accurately can extract the information of the semaphore treating sensing.
As shown in Figure 7, described optical sensor 120 can also be the light sensor information material 1213 including interferometer and be arranged in described interferometer, wherein, described interferometer is by receiving the first optical branching device of narrow band light or light combiner 1211 and the second optical branching device docked with the two-way light that described first optical branching device or light combiner 1211 separate or light combiner 1212 that narrow-band light source 110 sends, the emergent light of described second optical branching device or light combiner 1212 connects photo-detector 140, described smooth sensor information material 1213 is arranged in a light path of the first optical branching device or light combiner 1211 and the second optical branching device or light combiner 1212 docking, described light sensor information material 1213 can with treat that the semaphore of sensing interacts, controlling element 130 for the spectral filtering characteristic regulating and controlling optical sensor 120 is arranged on another light path of the first optical branching device or light combiner 1211 and the second optical branching device or light combiner 1212 docking.
Described light sensor information material 1213 is that the optical property of material itself with certain physics biochemical effect, corresponding change can occur, described physics biochemical effect includes at least one in pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, optical, electrical, electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material 1213 is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.
Embodiment shown in Fig. 7 is that the adjustable optical sensor of filtering characteristic comprises an infinite impulse response filter based on Mach-Zeng Zeer (Mach-Zehnder) interferometer 1211,1212.The narrow band light that light source 110 produces is divided into two-way by the first optical branching device or light combiner 1212: one of them light path contains controlling element 130; Another Lu Guanghui is by light sensor information material 1213.Controlling element 130 changes the phase place of this road light signal by optical effects such as thermo-optical, charge carrier plasma dispersion effects, causes optical transport to postpone.For the asymmetrical Mach of light path-Zeng Zeer (Mach-Zehnder) interferometer, after two-way light coherence stack, form the spectral response of the adjustable band resistance type wave filter of filtering characteristic.In such cases, the spectral response schematic diagram of interferometer is similar to the spectral response of the ring-shaped light waveguide resonant cavity shown in Fig. 3.Treat the semaphore of sensing by with light sensor information material 1213 interact change interferometer optical property as the spectrum position of band-stop response.Applying is treated before and after the semaphore of sensing, and signal transacting and control element 150 regulate and control the spectral filtering characteristic of parameter change interferometer by the optical effect of progressive change controlling element 130, and the photo-detector 140 of output terminal is measured respectively and recorded emergent light signal.By comparison and analyze twice measurement light signal and regulation and control parameter data, the signal parameter treating sensing can be extracted.As a kind of variants of this embodiment, controlling element 130 and light sensor information material 1213 also can be in the same light path of interferometer.
As shown in Figure 8, the method for sensing of the optical sensor based on narrow-band light source and filtering characteristic adjustable element of the present invention, comprises the steps:
1) start all parts of optical sensor, comprise light source 110, there is spectral filtering characteristic and adjustable optical sensor 120, controlling element 130, photo-detector 140 and the signal transacting of filtering characteristic and control element 150;
2) before applying to treat the semaphore of sensing, controlling element 130 is under the monitoring of signal transacting and control element 150, with the optical effect regulation and control parameter of enough intensive stepping-in amount progressive change controlling element 130 within the scope of setting codomain, photo-detector 140 measure the modulated element 130 of optical sensor 120 regulate and control after emergent light signal message, signal transacting and control element 150 record the optical effect regulation and control parameter of controlling element 130 and the corresponding emergent light signal message obtained measured by photo-detector 140;
3) apply after the semaphore of sensing, treat the optical property of the light sensor information material 1203/1213 that the physics biochemical effect change that the semaphore of sensing causes is carrier with optical sensor 120, and then change the optical property comprising spectral filtering characteristic of optical sensor 120;
4) after the physics biochemical effect of the spectral filtering characteristic changing causing optical sensor 120 occurs for the semaphore of sensing and light sensor information material 1203/1213, controlling element 130 is under the monitoring of signal transacting and control element 150, again with the optical effect regulation and control parameter of enough intensive stepping-in amount progressive change controlling element 130 within the scope of setting codomain, photo-detector 140 measures the emergent light signal message after modulated element 130 regulation and control of optical sensor 120, signal transacting and control element 150 record controlling element 130 optical effect regulation and control parameter and photo-detector 140 measure the corresponding emergent light signal message obtained,
5) data of light signal information and the regulation and control parameter applying to treat that twice measurement before and after the semaphore of sensing obtains also are analyzed in signal transacting and control element 150 comparison, extract the semaphore parameter treating sensing, complete sensing process.
Claims (10)
1. the optical sensor based on narrow-band light source and filtering characteristic adjustable element, it is characterized in that, include narrow-band light source (110), the emergent light of described narrow-band light source (110) connects the adjustable optical sensor (120) of filtering characteristic, the regulation and control input end of described optical sensor (120) connects the controlling element (130) for regulating and controlling optical sensor (120) spectral filtering characteristic, the output terminal of described optical sensor (120) connects photo-detector (140), described controlling element (130) and photo-detector (140) also distinguish connection signal process and control element (150).
2. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1, it is characterized in that, described optical sensor (120) has at least one in band-pass filtering property, bandreject filtering characteristic, high-pass filtering characteristic, low-frequency filter characteristics and all-pass wave filtering characteristic.
3. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1, it is characterized in that, described optical sensor (120) is surface plasma-wave resonance structure, optical grating construction, finite impulse response filter, infinite impulse response filter, only change signal phase relation all-pass filter and change at least one in the optical texture of the wave filter of transmittance or absorbance at a setting frequency domain.
4. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1, it is characterized in that, described photo-detector (140) is the photo-detector of at least one quantity of information can measured in the power of light signal, phase place and polarization information.
5. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1, it is characterized in that, described controlling element (130) is the spectral filtering characteristic being changed optical sensor (120) by least one optical effect in thermo-optical, acousto-optic, electric light, light light, magneto-optic and mechanical luminous effect.
6. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1 or 2 or 3, it is characterized in that, described optical sensor (120) includes the bus optical waveguide (1201) receiving the narrow band light that narrow-band light source (110) sends, the coupling being positioned at bus optical waveguide (1201) side receives the ring-shaped light waveguide resonant cavity (1202) of bus optical waveguide (1201) transmission light, with the light sensor information material (1203) that described ring-shaped light waveguide resonant cavity (1202) is carrier, controlling element (130) for regulating and controlling the spectral filtering characteristic of optical sensor (120) is positioned at the outside of described ring-shaped light waveguide resonant cavity (1202).
7. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 6, it is characterized in that, described light sensor information material (1203) is that the optical property of material itself, with physics biochemical effect, corresponding change occurs, described physics biochemical effect includes pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, light, electricity, at least one in electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material (1203) is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.
8. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1 or 2 or 3, it is characterized in that, described optical sensor (120) includes interferometer and is arranged on the light sensor information material (1213) in described interferometer, wherein, described interferometer is by receiving the first optical branching device of narrow band light or light combiner (1211) and the second optical branching device docked with the two-way light that described first optical branching device or light combiner (1211) separate or light combiner (1212) that narrow-band light source (110) sends, the emergent light of described second optical branching device or light combiner (1212) connects photo-detector (140), described smooth sensor information material (1213) is arranged in the light path that the first optical branching device or light combiner (1211) and the second optical branching device or light combiner (1212) dock, controlling element (130) for regulating and controlling the spectral filtering characteristic of optical sensor (120) is arranged on another light path that the first optical branching device or light combiner (1211) and the second optical branching device or light combiner (1212) dock, described light sensor information material (1213) is that the optical property of material itself, with physics biochemical effect, corresponding change occurs, described physics biochemical effect includes pressure, stress, speed, acceleration, flow, flow velocity, temperature, humidity, gas, liquid, biological reagent, sound, light, electricity, at least one in electromagnetic field and radiation effect, the variable optical property of described smooth sensor information material (1213) is refractive index, absorptivity, polarization, at least one in the measure that luminous intensity is relevant with polarization.
9. the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to claim 1, it is characterized in that, described narrow-band light source (110), LASER Light Source or incoherent light source, or the narrow-band light source be formed by stacking of frequency spectrum wideband light source and frequency domain bandpass filter; Or the combination of limited narrow-band light source.
10. a method for sensing for the optical sensor based on narrow-band light source and filtering characteristic adjustable element according to any one of claim 1-8, is characterized in that, comprise the steps:
1) start all parts of optical sensor, comprise light source (110), there is spectral filtering characteristic and adjustable optical sensor (120), controlling element (130), photo-detector (140) and the signal transacting of filtering characteristic and control element (150);
2) before applying to treat the semaphore of sensing, controlling element (130) is under the monitoring of signal transacting and control element (150), the optical effect regulation and control parameter of progressive change controlling element (130) within the scope of setting codomain, the emergent light signal message after optical sensor (120) modulated element (130) regulation and control measured by photo-detector (140), signal transacting and control element (150) record controlling element (130) optical effect regulation and control parameter and photo-detector (140) measure the corresponding emergent light signal message obtained,
3) apply after the semaphore of sensing, treat the optical property of the light sensor information material (1203/1213) that the physics biochemical effect change that the semaphore of sensing causes is carrier with optical sensor (120), and then change the optical property comprising spectral filtering characteristic of optical sensor (120);
4) after the physics biochemical effect of the spectral filtering characteristic changing causing optical sensor (120) occurs for the semaphore of sensing and light sensor information material (1203/1213), controlling element (130) is under the monitoring of signal transacting and control element (150), within the scope of setting codomain, the optical effect of progressive change controlling element (130) regulates and controls parameter again, photo-detector (140) measures the emergent light signal message after optical sensor (120) modulated element (130) regulation and control, signal transacting and control element (150) record controlling element (130) optical effect regulation and control parameter and photo-detector (140) measure the corresponding emergent light signal message obtained,
5) data of light signal information and the regulation and control parameter applying to treat that twice measurement before and after the semaphore of sensing obtains also are analyzed in signal transacting and control element (150) comparison, extract the semaphore parameter treating sensing, complete sensing process.
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