CN101825480B - Broadband light source and cascaded optical waveguide filter-based optical sensor - Google Patents
Broadband light source and cascaded optical waveguide filter-based optical sensor Download PDFInfo
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Abstract
The invention discloses a broadband light source and cascaded optical waveguide filter-based optical sensor. The optical sensor comprises a wideband light source, an input waveguide, a sensing ring-shaped resonant cavity which is coupled with the input waveguide, a connection waveguide which is coupled with the sensing ring-shaped resonant cavity, a reference ring-shaped resonant cavity which is coupled with the connection waveguide, an output waveguide which is coupled with the reference resonant cavity, and two optical power meters, wherein the optical length of the sensing ring-shaped resonant cavity is the same as that of the reference ring-shaped resonant cavity; every resonance frequency of the sensing ring-shaped resonant cavity correspondingly coincides with that of the reference ring-shaped resonant cavity one by one; and at least a part of waveguide in the sensing ring-shaped resonant cavity is subjected to the detected variable influence or at least a part of waveguide cladding is contacted with the detected materials. As the movement which is caused by the detected variable influence or the change of the detected materials can be converted into the change of total transmission output power by using the cascaded filter effect of an isometric double resonant cavity, the measured quantity is simply and effectively detected.
Description
Technical field
The present invention relates to optical waveguide sensor, especially relate to a kind of optical waveguide sensor based on cascading annular cavity based on wideband light source and cascaded optical waveguide filter.
Background technology
The light sensing technology has crucial application as an important branch of information science technology at aspects such as industrial process control, environmental monitoring, food security and national security.The light sensing technology can solve the sensitivity that fax sense technology exists low, be subject to disturb, the sensitive time is long, the problem that detects the uneasy congruent aspect of some chemical gas.The advantage that optical sensor has is highly sensitive, volume is little, anti-electromagnetic interference capability is strong, it is integrated to be convenient to, can online detection is occupied more and more important position at sensory field.
The ultimate principle of optical waveguide sensor spare is based on the evanescent wave that the interface/surface occurred of optical fiber or slab guide, because evanescent wave appears the surface (contact measured material) of waveguide and can return with in the waveguide, and influencing the characteristic of transmitting light in the waveguide, the variation of therefore surveying transmission light in the waveguide can realize the light sensing.
Ring resonator has sharp-pointed harmonic peak because of it, can realize high sensitivity and receives much concern.Fig. 1 has provided the optical waveguide sensor structural representation based on single ring resonator.The variation of mode refractive index causes moving of ring resonator transmission spectrum, by measuring near the variation that wavelength moves or the energy variation of the light of certain fixed wave length just can be measured measured matter transmission peaks of transmission peaks.K.De?Vos?etal，“Silicon-on-Insulat?or?microring?resonator?for?sensitive?and?label-freebiosensing”，Optics?Express?15，pp.7610-7615(2007)。The shortcoming of this method is that the wavelength of measuring transmission peaks moves expensive spectrometer of needs, and its measuring accuracy is directly related with the precision of spectrometer.If with measuring near the method that certain fixed wave length luminous energy changes the transmission peaks, the laser instrument that then needs a narrow linewidth is as light source, and the wavelength of laser instrument will have accurate relative position with the transmission peaks of resonant ring, and highly stable.The cost that these require all to have increased greatly measurement mechanism has reduced reliability.
Summary of the invention
The object of the present invention is to provide a kind of optical sensor based on wideband light source and cascaded optical waveguide filter, use wide light source with low cost such as LED as the input light source, survey measured matter, measured variation by the variation of measuring full spectrum output light intensity (need not detecting light spectrum information), and the stability requirement of light source and system is also reduced greatly.
The technical scheme that the present invention solves its technical matters employing is:
Technical scheme 1:
A kind of optical sensor based on wideband light source and cascaded optical waveguide filter, it is characterized in that: the input waveguide that it comprises wideband light source, be coupled with wideband light source, with input waveguide be coupled with reference to ring resonator, with the waveguide that is connected that is coupled with reference to ring resonator, be coupled with the output waveguide that is connected sensing ring-shaped resonant that waveguide is coupled, be coupled with the sensing resonator cavity, with input waveguide and survey first light power meter of its emergent light power; Described identical with the optical length of sensing ring-shaped resonant with reference to ring resonator, described optical length with reference to ring resonator makes its resonance frequency corresponding to a series of equally spaced frequency of operation, the optical length of described sensing ring-shaped resonant make its resonance frequency with reference to the corresponding one by one coincidence of the resonance frequency of ring resonator; Have at least part of waveguide to be subjected to the measured variable influence in the sensing ring-shaped resonant or have at least the part of waveguide covering to contact with measured matter.
Coupling between described all waveguides and the ring resonator is that direction of passage coupling mechanism or the multi-mode interference coupler by separately are coupled.
Described all waveguides and ring resonator are the plane integrated light guides.
Described all waveguides and ring resonator are to be made of optical fiber.
Described wideband light source is a light emitting diode.
The other end of input waveguide and second light power meter are coupled.
Described measured variable is stress or temperature, and described measured matter is liquid or gas.
Technical scheme 2:
It is characterized in that: comprise the wideband light source that is coupled successively, input waveguide, with reference to optical filter, connect waveguide, sensing optical filter, output waveguide, light power meter; Described frequencies of transmission with reference to optical filter is corresponding to a series of equally spaced frequency of operation, the frequencies of transmission of described sensing optical filter with reference to the corresponding one by one coincidence of the frequencies of transmission of optical filter; Have at least part of waveguide to be subjected to the measured variable influence in the sensing optical filter or have at least the part of waveguide covering to contact with measured matter.
Described all waveguides and optical filter are to be constituted or be made of the plane integrated light guide by optical fiber.
Described optical filter is to be made of one or more Mach-Zehnder interferometers; Or constitute by array waveguide grating; Or constitute by Fabry-Perot interferometer.
The beneficial effect that the present invention has is:
By using the filter effect of the long cascade dicyclo of same chamber, with the mobile synchronous variation that changes last all peak energies of total outgoing spectrum into of sensing ring cavity resonance spectrum, measure measured matter or measured variation by the variation of measuring output light intensity in the full spectral range again.The input light source adopts the cheap wide light sources of price such as LED, and need not to adopt expensive tuned laser, and what survey is energy in the full spectral range, and need not supervisory wavelength or use the high-resolution spectroscopy instrument, greatly reduces cost, and is simple.Meanwhile also increased sensitivity, material refractive index changes detectable minimum and reaches 3.9 * 10
-7
Description of drawings
Fig. 1 is based on the optical waveguide sensor synoptic diagram of single ring resonator in the background technology.
Fig. 2 is first kind of embodiment structural representation of the present invention
Fig. 3 is first kind of embodiment transmission spectrum of the present invention synoptic diagram.
Fig. 4 is that first kind of embodiment measured matter of the present invention changes back transmission spectrum synoptic diagram.
Fig. 5 (a) is that the led light source curve of spectrum (b) is the total output spectra after measured matter changes under first kind of embodiment led light source of the present invention for the total output spectra (c) under first kind of embodiment led light source of the present invention.
Fig. 6 is non-sensing unit and sensing unit waveguide cross-section synoptic diagram.
Fig. 7 is the total output intensity of TM of the example that provides of first kind of embodiment and the variation diagram of the total output intensity of TE mould
Fig. 8 is second kind of embodiment structural representation of the present invention.
Fig. 9 is the third embodiment structural representation of the present invention.
Among the figure: 1, input waveguide, 2, output waveguide, 3, connect waveguide, 10, with reference to ring resonator, 20, sensing ring-shaped resonant, 51, multi-mode interference coupler, 52, multi-mode interference coupler, 53, multi-mode interference coupler, 54, multi-mode interference coupler, 41, light power meter, 42, light power meter, 101, with reference to optical filter, 102, the sensing optical filter.
Embodiment
The present invention is further illustrated below in conjunction with drawings and Examples.
Embodiment 1:
Fig. 2 is first embodiment synoptic diagram of the present invention.It comprises wideband light source 0, the input waveguide 1 that is coupled with wideband light source, with input waveguide 1 be coupled with reference to ring resonator 10, be connected waveguide 3 with reference ring resonator 10 is coupled, with be connected the sensing ring-shaped resonant 20 that waveguide 3 is coupled, the output waveguide 2 that is coupled with sensing resonator cavity 20, survey the power meter 41 of input waveguide 1 other end emergent power, survey the power meter 42 of output waveguide 2 emergent powers, described identical with the optical length of sensing ring-shaped resonant 20 with reference to ring resonator 10, described optical length with reference to ring resonator 10 makes its resonance frequency corresponding to a series of equally spaced frequency of operation, the optical length of described sensing ring-shaped resonant 20 make it resonance frequency with overlap fully with reference to the resonance frequency of ring resonator 10 is corresponding one by one; Have at least part of waveguide (for example get frame of broken lines in) to be subjected to measured variable influence such as stress, temperature in the sensing ring-shaped resonant 20 or its covering contacts with measured matter.Stress, the influence of measured variables such as temperature can cause that the optical length of sensing ring-shaped resonant 20 changes or the variation of the character such as refractive index of measured matter influences the optical length of sensing ring-shaped resonant 20 by evanescent wave, cause the variation of its harmonic peak position, cascade filtering effect by two resonator cavitys changes the high sensitivity that the variation of this harmonic peak position transforms the intensity at all peaks on total output spectra synchronously, thereby just can obtain information such as the refractive index of measured variable or measured matter and concentration by the strength information that utilizes power meter 42 to survey light signal in the output waveguides 2.The effect of light power meter 41 is a power (near the steady state value of light source power) of surveying input waveguide 1 straight-through end.If the light source power instability, then can change by the ratio of light power meter 42 and light power meter 41 measure measured, to eliminate the error that the light source power fluctuation brings.
Coupling direction of passage coupling mechanism among Fig. 2 between all waveguides and the ring resonator is realized.
When entering light that input waveguide 1 propagates to the right, wideband light source 0 arrives waveguide with the time with reference to ring resonator 10 couplings regional, it is side-coupled in ring to understand some light, and resonance inside takes place, because the self-interference effect of ring, have only when the light path (light path multiply by its refractive index for the length of ring) with reference to ring resonator 10 satisfies the integral multiple of optical wavelength (this wavelength is called the resonance wavelength of ring), the light wave of this wavelength could be coupled out from connect waveguide, continue left to propagate, all the other most of luminous energies will be from the port outgoing on the input waveguide right side.In like manner, the condition of resonance that also must satisfy sensing ring-shaped resonant 20 from the wavelength that connects the light wave that waveguide 3 propagates left could pass through sensing ring-shaped resonant 20 and export from output waveguide 2.
The ring resonator amplitude transmission coefficient is:
Coupling coefficient in the formula between c representative ring and waveguide, n, R is the refractive index and the radius of representative ring respectively.k
0It is light wave wave number in a vacuum.Can obtain the condition of resonance of toroidal cavity resonator by (1) formula:
2nπR＝mλ (2)
Wherein λ is the resonance wavelength of ring, and m is certain positive integer.
Because the chamber appearance of two rings together, so its transmission spectrum identical (free spectrum FSR is identical); Because two ring tandem connection are so total transmission spectrum is
T＝T1×T2 (3)
Has the effect of multiplying each other, wherein T
1=| t
1|
2, T
2=| t
2|
2Be respectively sensing ring-shaped resonant 10, with reference to the transmission spectrum of ring resonator 20.
Fig. 3 has provided first embodiment with reference to ring resonator 10, sensing ring-shaped resonant 20 transmission spectrum (a) separately and total transmission spectrum (b).With reference to the wavelength of ring resonator 10 resonance, sensing ring-shaped resonant 20 is resonance also, so reach maximum equally on total output spectra.
Make its optical length of time spent and can change when sensing ring-shaped resonant 20 is subjected to stress, temperature variation etc., or its covering material is when changing, because the effect of evanescent wave in the covering can cause that ring 10 waveguide mode effective refractive indexs change, and then cause that also optical length changes.According to
The transmission spectrum T1 of sensing ring-shaped resonant 10 can be moved.As shown in Figure 4: (a) there has been dislocation at the peak one to one of original T1 and T2, total (b) show on the transmission spectrum to be exactly that all peak powers all descend.
If adopt LED as wideband light source 0, its curve of spectrum is shown in Fig. 5 (a), and total outgoing spectrum is shown in Fig. 5 (b), and outgoing spectrum total after T1 is moved is shown in Fig. 5 (c).Can survey the variation of measured variable or measured matter by the variation of measuring the total optical power of whole spectrum in enclosing.
If waveguiding structure is selected the stripe shape waveguide for use, based on SOI (silicon-on-insulator) platform, waveguide core layer height 0.22um, width 1um, sandwich layer refractive index 3.48, refractive index of substrate 1.444.For the TM mould, pattern effective refractive index n
EffVariable quantity is with respect to cladding index n
cThe ratio of variable quantity is:
dn
eff/dn
c＝43％for?TM (5)
For the TE mould, pattern effective refractive index n
EffVariable quantity is with respect to cladding index n
cThe ratio of variable quantity is:
dn
eff/dn
c＝15％for?TE (6)
Fig. 6 has provided waveguide cross-section synoptic diagram when being used for the material measurement.(a) provided non-sensing unit waveguide cross-section, top covering can be selected material or the reference materials suitable with measured matter such as Su-8 glue or silicon dioxide for use, also shields simultaneously; (b) provided the sensing unit waveguide cross-section, top covering is a measured matter, and the variation of measured matter causes the waveguide mode variations in refractive index.
The radius of two rings is taken as 140um, and the energy coupling coefficient gets 10% between ring and the straight wave guide, and loss is made as 1db/cm, and the led light source energy is made as 1mw.
Fig. 7 has provided the measured matter refractive index and has changed to 1.33+2.02 * 10 from 1.33
-3The time, the variation of the total light energy output of TM mould, and the measured matter refractive index changes to 1.33+5.84 * 10 from 1.33
-3The time, the variation of the total light energy output of TE mould.As seen from the figure, along with measured matter variations in refractive index (T1 moves), because stagger gradually with the inferior harmonic peak of one-level among T1, the T2, total light energy output reduces gradually.TM mould maximum sensitivity (slope is the highest) reaches 25600dB/RIU as calculated, is that the detector of 0.01dB combines with detection accuracy, and then the minimum refractive index that can survey is changed to 3.9 * 10
-7TE mould maximum sensitivity reaches 8700dB/RIU, is that the detector of 0.01dB combines with detection accuracy, and then the minimum refractive index that can survey is changed to 1.15 * 10
-6
TE, the detection sensitivity of TM pattern is not both owing to they effective refractive index n separately
EffVariation is with respect to cladding index n
cThe susceptibility difference that changes, and modal dispersion difference.Comparatively speaking the TM mould is highly sensitive, and investigative range is little; The sensitivity of TE mould is low, and investigative range is big.In the practical application, can two constant power polarization states of LED emergent light be sent into two independently cascade ring sensors respectively, form two detection channels with suitable polarization separator.Can select different passages according to detection accuracy and area requirement, or both combinations are reached high sensitivity and wide-measuring range simultaneously.
Embodiment 2:
Fig. 8 is second kind of embodiment structural representation of the present invention.It comprises wideband light source 0, the input waveguide 1 that is coupled with wideband light source, with input waveguide be coupled with reference to ring resonator 10, be connected waveguide 3 with reference ring resonator 10 is coupled, with be connected the sensing ring-shaped resonant 20 that waveguide 3 is coupled, the output waveguide 2 that is coupled with sensing resonator cavity 20, survey the light power meter 41 of input waveguide 1 other end emergent power, survey the light power meter 42 of output waveguide 2 emergent powers, described identical with the optical length of sensing ring-shaped resonant 20 with reference to ring resonator 10, described optical length with reference to ring resonator 10 makes its resonance frequency corresponding to a series of equally spaced frequency of operation, the optical length of described sensing ring-shaped resonant 20 make its resonance frequency with reference to corresponding one by one basic coincidence of the resonance frequency of ring resonator 10; Have at least part of waveguide (for example get frame of broken lines in) to be subjected to measured variable influence such as stress, temperature in the sensing ring-shaped resonant 20 or its covering contacts with measured matter.Stress, the influence of measured variables such as temperature can cause that the optical length of sensing ring-shaped resonant 20 changes or the variation of the character such as refractive index of measured matter influences the optical length of sensing ring-shaped resonant 20 by evanescent wave, cause the variation of its harmonic peak position, cascade filtering effect by two resonator cavitys changes the high sensitivity that the variation of this harmonic peak position transforms the intensity at all peaks on total output spectra synchronously, thereby just can obtain information such as the refractive index of measured variable or measured matter and concentration by the strength information that utilizes light power meter 42 to survey light signal in the output waveguides 2.The effect of light power meter 41 is a power (near the steady state value of light source power) of surveying input waveguide 1 straight-through end.If the light source power instability, then can change by the ratio of light power meter 42 and light power meter 41 measure measured, to eliminate the error that the light source power fluctuation brings.
Coupling among Fig. 8 between all waveguides and the ring resonator realizes by multi-mode interference coupler 51,52,53,54 separately.
The foregoing description has mainly been discussed the situation that optical waveguide and ring shape resonator are based on planar optical waveguide.Optical waveguide described in the present invention and ring shape resonator also can be based on optical fiber or micro-nano fiber structure, and fiber optic loop resonator cavity and I/O and the coupling that is connected between the optical fiber can realize by the method for method of fusing or evanescent wave coupling.Has advantage with optical fiber structure to polarized non-sensitive.Little ring structure of making of micro-nano fiber can increase the peak-to-peak interval of resonance, increases the relative tolerance of resonant ring length.
Embodiment 3:
Ring shape resonator among the present invention is the effect of playing an optical filter, advantage with high-quality-factor (Q value), but ring shape resonator can be replaced by wave filters such as a Mach-Zehnder (Mach-Zehnder) interferometer, array waveguide grating, Bragg grating or Fabry-Perot (Fabry-Perot) interferometers, and wherein Fabry-Perot (Fabry-Perot) interferometer can be made of two Bragg gratings.
As shown in Figure 9, comprise wideband light source 0, input waveguide 1 with the wideband light source coupling, with input waveguide be coupled with reference to optical filter 101, be connected waveguide 3 with reference optical filter 101 is coupled, with be connected the sensing optical filter 102 that waveguide 3 is coupled, the output waveguide 2 that is coupled with sensing optical filter 102, survey the light power meter 42 of output power, described frequencies of transmission with reference to optical filter 101 is corresponding to a series of equally spaced frequency of operation, the frequencies of transmission of described sensing optical filter 102 with reference to corresponding one by one basic coincidence of the frequencies of transmission of optical filter 101; Have at least part of waveguide to be subjected to measured variable influence such as stress, temperature in the sensing optical filter 102 or its covering contacts with measured matter.The variation of the influence of measured variable such as stress, temperature or the character such as refractive index of measured matter can cause the variation of sensing optical filter 102 frequencies of transmission, cascade filtering effect by two optical filters changes the high sensitivity that the variation of this frequencies of transmission transforms the intensity at all peaks on total output spectra synchronously, thereby just can obtain information such as the refractive index of measured variable or measured matter and concentration by the strength information that utilizes power meter 42 to survey light signal in the output waveguides 2.
The foregoing description is used for the present invention that explains, rather than limits the invention.In the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (10)
1. optical sensor based on wideband light source and cascaded optical waveguide filter is characterized in that: the input waveguide (1) that it comprises wideband light source (0), be coupled with wideband light source (0), with input waveguide be coupled with reference to ring resonator (10), be coupled with reference to ring resonator (10) be connected waveguide (3), be coupled with the output waveguide (2) that is connected sensing ring-shaped resonant (20) that waveguide (3) is coupled, be coupled with sensing ring-shaped resonant (20), with output waveguide (2) and survey first light power meter (42) of its emergent light power; Described identical with the optical length of sensing ring-shaped resonant (20) with reference to ring resonator (10), described optical length with reference to ring resonator (10) makes its resonance frequency corresponding to a series of equally spaced frequency of operation, the optical length of described sensing ring-shaped resonant (20) make its resonance frequency with reference to the corresponding one by one coincidence of the resonance frequency of ring resonator (10); Have at least part of waveguide to be subjected to the measured variable influence in the sensing ring-shaped resonant (20) or have at least the part of waveguide covering to contact with measured matter.
2. a kind of optical sensor according to claim 1 is characterized in that: the coupling between described all waveguides and the ring resonator is that direction of passage coupling mechanism or the multi-mode interference coupler by separately are coupled.
3. a kind of optical sensor according to claim 1 is characterized in that: described all waveguides and ring resonator are the plane integrated light guides.
4. a kind of optical sensor according to claim 1 is characterized in that: described all waveguides and ring resonator are to be made of optical fiber.
5. a kind of optical sensor according to claim 1 is characterized in that: described wideband light source is a light emitting diode.
6. a kind of optical sensor according to claim 1 is characterized in that: the other end of described input waveguide (1) and second light power meter (41) are coupled.
7. a kind of optical sensor according to claim 1 is characterized in that: described measured variable is stress or temperature, and described measured matter is liquid or gas.
8. optical sensor based on wideband light source and cascaded optical waveguide filter is characterized in that: comprise the wideband light source (0) that is coupled successively, input waveguide (1), with reference to optical filter (101), connect waveguide (3), sensing optical filter (102), output waveguide (2) and light power meter (42); Described frequencies of transmission with reference to optical filter (101) is corresponding to a series of equally spaced frequency of operation, the frequencies of transmission of described sensing optical filter (102) with reference to the corresponding one by one coincidence of the frequencies of transmission of optical filter (101); Have at least part of waveguide to be subjected to the measured variable influence in the sensing optical filter (102) or have at least the part of waveguide covering to contact with measured matter.
9. a kind of optical sensor according to claim 8 is characterized in that: described all waveguides and optical filter are to be constituted or be made of the plane integrated light guide by optical fiber.
10. according to Claim 8 or 9 described a kind of optical sensors, it is characterized in that: described optical filter is to be made of one or more Mach-Zehnder interferometers; Or constitute by array waveguide grating; Or constitute by Fabry-Perot interferometer.
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| CN2010101047628A CN101825480B (en) | 2010-01-29 | 2010-01-29 | Broadband light source and cascaded optical waveguide filter-based optical sensor |
| US13/575,602 US9052291B2 (en) | 2010-01-29 | 2011-01-21 | Optical sensor based on a broadband light source and cascaded waveguide filters |
| PCT/CN2011/070449 WO2011091735A1 (en) | 2010-01-29 | 2011-01-21 | Optical sensor based on broadband light source and cascaded optical waveguide filter |
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| CN2010101047628A CN101825480B (en) | 2010-01-29 | 2010-01-29 | Broadband light source and cascaded optical waveguide filter-based optical sensor |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6052495A (en) * | 1997-10-01 | 2000-04-18 | Massachusetts Institute Of Technology | Resonator modulators and wavelength routing switches |
| CN2765146Y (en) * | 2005-01-24 | 2006-03-15 | 东南大学 | Optical fiber Prague grating sensing multiplexing device with quasi-distributed dynamic/static sensing |
| CN1877264A (en) * | 2006-07-05 | 2006-12-13 | 冉曾令 | Method for realizing long distance fiber laser Bragg fiber grating sensing system |
| CN101261222A (en) * | 2008-04-11 | 2008-09-10 | 浙江大学 | High-sensitivity micro- resonant cavity photo-sensor |
| CN101424619A (en) * | 2008-11-27 | 2009-05-06 | 上海电力学院 | Method for producing wave guide ring shaped resonant cavity nitrogen dioxide gas sensor |
| CN101598607A (en) * | 2009-07-03 | 2009-12-09 | 电子科技大学 | A kind of high sensitivity temperature sensor |
-
2010
- 2010-01-29 CN CN2010101047628A patent/CN101825480B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6052495A (en) * | 1997-10-01 | 2000-04-18 | Massachusetts Institute Of Technology | Resonator modulators and wavelength routing switches |
| CN2765146Y (en) * | 2005-01-24 | 2006-03-15 | 东南大学 | Optical fiber Prague grating sensing multiplexing device with quasi-distributed dynamic/static sensing |
| CN1877264A (en) * | 2006-07-05 | 2006-12-13 | 冉曾令 | Method for realizing long distance fiber laser Bragg fiber grating sensing system |
| CN101261222A (en) * | 2008-04-11 | 2008-09-10 | 浙江大学 | High-sensitivity micro- resonant cavity photo-sensor |
| CN101424619A (en) * | 2008-11-27 | 2009-05-06 | 上海电力学院 | Method for producing wave guide ring shaped resonant cavity nitrogen dioxide gas sensor |
| CN101598607A (en) * | 2009-07-03 | 2009-12-09 | 电子科技大学 | A kind of high sensitivity temperature sensor |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105044847A (en) * | 2015-05-20 | 2015-11-11 | 哈尔滨工程大学 | Fiber splitter based on liquid drop coupling |
| CN105044847B (en) * | 2015-05-20 | 2018-04-24 | 哈尔滨工程大学 | Optical fiber splitter based on drop coupling |
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