CN101900575B - Opto-sensor based on active resonant cavity and passive resonant cavity cascaded with same - Google Patents
Opto-sensor based on active resonant cavity and passive resonant cavity cascaded with same Download PDFInfo
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Abstract
The invention discloses an opto-sensor based on an active resonant cavity and a passive resonant cavity cascaded with the same, which at least comprises the active resonant cavity, the passive resonant cavity and an optical receiver, wherein the active resonant cavity is internally provided with gain and can transmit a uniformly-spaced pectinate spontaneous radiation spectrum or a laser spectrum, and the passive resonant cavity is provided with a uniformly-spaced pectinate filtering spectrum. The spectrum transmitted by the active resonant cavity is input to the passive resonant cavity and then is filtered by the passive resonant cavity, thus the emergent light is received by the optical receiver. The passive resonant cavity is internally provided with a section of sensing unit the optical length of which can be changed with the changes of external environment. The invention takes a multimode active resonant cavity with low cost as an input light source. When the optical length in the active resonant cavity equals to that in the passive resonant cavity, an optical power detector is simply used to measure the changes of the output light intensity, thus the changes of measured physical quantity can be obtained, with simple detection and low cost; and when the optical length in the active resonant cavity does not equal to that in the passive resonant cavity, a circumscribed spectrograph can be used to expand the measuring range and improve testing accuracy.
Description
Technical field
The present invention relates to optical sensor, especially relate to a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it.
Background technology
The light sensing technology has crucial application as an important branch of information science technology at aspects such as industrial process control, environmental monitoring, food security and national security.The light sensing technology can solve the sensitivity that fax sense technology exists low, be subject to disturb, the sensitive time is long, the problem that detects the uneasy congruent aspect of some chemical gas.The advantage that optical sensor has is highly sensitive, volume is little, anti-electromagnetic interference capability is strong, it is integrated to be convenient to, can online detection is occupied more and more important position at sensory field.
The ultimate principle of optical waveguide sensor spare is based on the evanescent wave that the interface/surface occurred of optical fiber or slab guide; Because evanescent wave appears the surface (contact measured material) of waveguide and returns in the waveguide; Thereby influence the characteristic of transmission light in the waveguide, the variation of therefore surveying transmission light in the waveguide can realize the light sensing.
Like Fig. 1, people such as K.De Vos are at document " Silicon-on-Insulat or microring resonator forsensitive and label-free biosensing ", Optics Express 15, pp.7610-7615 (2007).The middle proposition utilized the scheme of toroidal cavity resonator as optical waveguide sensor, and toroidal cavity resonator is a kind of of optical cavity, and be higher as transducer sensitivity because it has more sharp-pointed filtering spectral line, therefore received extensive concern.The shortcoming of people's schemes such as K.De Vos is that the wavelength that needs an expensive spectrometer to measure transmission peaks moves, and its measuring accuracy is directly related with the precision of spectrometer.If with measuring near the method that certain fixed wave length luminous energy changes the transmission peaks, the single-mode laser that then needs a narrow linewidth is as light source, and the wavelength of laser instrument will have accurate relative position with the transmission peaks of resonant ring, and highly stable.The cost that these require all to have increased greatly measurement mechanism has reduced reliability.
Summary of the invention
To the deficiency in the background technology, the object of the present invention is to provide a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it.
The technical scheme that the present invention adopts is following:
Technical scheme 1:
The present invention includes the active resonant cavity of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and have the uniformly-spaced passive resonant cavity of comb filtering spectrum, and optical power detector; Active resonant cavity is identical with the optical length of passive resonant cavity; At least be provided with the passive resonant cavity sensing unit that one section optical length can change with external environment in the passive resonant cavity; The spectrum of an output port emission of active resonant cavity is input to passive resonant cavity, is received by an optical power detector after the filtering through passive resonant cavity again.
Said active resonant cavity is active Fabry-Perot cavity, active ring resonator or the inner multisection type active resonant cavity that has the distributed Feedback optical grating construction.
Said passive resonant cavity is passive annular resonant cavity, passive Fabry-Perot cavity or the inner multisection type passive resonant cavity that has the distributed Feedback optical grating construction.
Said active resonant cavity is one and has applied the cycle microwave-driven signal identical with the cycle of operation of photon in active resonant cavity, thereby keeps its emission spectrum not receive the active resonant cavity of external interference.
Another output port place of said active resonant cavity is provided with another optical power detector.
Technical scheme 2:
The present invention includes the active resonant cavity of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and have the uniformly-spaced passive resonant cavity of comb filtering spectrum, and spectrometer; Active resonant cavity is different with the optical length of passive resonant cavity; At least be provided with the passive resonant cavity sensing unit that one section optical length can change with external environment in the passive resonant cavity; The spectrum of an output port emission of active resonant cavity is input to passive resonant cavity, is received by spectrometer after the filtering through passive resonant cavity again.
Said active resonant cavity is active Fabry-Perot cavity, active ring resonator or the inner multisection type active resonant cavity that has the distributed Feedback optical grating construction.
Said passive resonant cavity is passive annular resonant cavity, passive Fabry-Perot cavity or the inner multisection type passive resonant cavity that has the distributed Feedback optical grating construction.
Said active resonant cavity is one and has applied the cycle microwave-driven signal identical with the cycle of operation of photon in active resonant cavity, thereby keeps its emission spectrum not receive the active resonant cavity of external interference.
Compare with background technology, the beneficial effect that the present invention has is:
The filter effect of the present invention uses active-passive cascade dual resonant cavity when active when identical with the passive resonant cavity optical length, only needs simply just to obtain with the variation that optical power detector is measured output light intensity in the full spectral range variation of measurand; No longer need obtain the information of spectral correlation through spectrometer; Reduce the device detection cost, use multimode active resonant cavity with low cost such as Fabry-Perot (Fabry-Perot) chamber, reduce the cost that device production is made as the input light source; And; Through active and passive element integrated technology, need not external light source, also eliminated demand to highly difficult, expensive sensing waveguide optically-coupled.Further, when active and passive resonant cavity optical length are inequality, obtain the output spectrum of two resonator cavity cursor effects, can further expand measurement range, improve measuring accuracy through spectrometer.Through seeing from above several angles, optical sensor of the present invention is compared Traditional passive optical sensor cost and is reduced greatly, uses with test more easy.
Description of drawings
Fig. 1 is based on the passive optical waveguide sensor synoptic diagram of single ring resonator in the background technology.
Fig. 2 is first kind of embodiment structural representation of the present invention.
Fig. 3 is that active Fabry-Perot cavity and passive annular resonant cavity optical path difference are the fluorescence emission spectrum of 0 o'clock active Fabry-Perot cavity and the transmission spectrum of passive annular resonant cavity in first kind of embodiment of the present invention.
Fig. 4 is that active Fabry-Perot cavity and passive annular resonant cavity optical path difference are the fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum stack result of 0 o'clock active Fabry-Perot cavity in first kind of embodiment of the present invention.
Fig. 5 is active Fabry-Perot cavity and the fluorescence emission spectrum of non-0 o'clock active Fabry-Perot cavity of passive annular resonant cavity optical path difference and the transmission spectrum of passive annular resonant cavity in first kind of embodiment of the present invention.
Fig. 6 is the fluorescence emission spectrum and the passive resonant cavity transmission spectrum stack result of active Fabry-Perot cavity and non-0 o'clock active resonant cavity of passive annular resonant cavity optical path difference in first kind of embodiment of the present invention.
Fig. 7 is the curve that optical power detector detects in first kind of embodiment of the present invention luminous power is led variations in refractive index with the equivalence of passive annular resonant cavity ripple.
Fig. 8 is second kind of embodiment structural representation of the present invention.
Fig. 9 is the third embodiment structural representation of the present invention.
Figure 10 is the 4th kind of embodiment structural representation of the present invention.
Figure 11 is the 5th kind of embodiment structural representation of the present invention.
Figure 12 is the 6th kind of embodiment structural representation of the present invention.
Figure 13 is a plurality of longitudinal modes of active Fabry-Perot cavity and passive annular resonant cavity.And the material gain of active cavity spectrum.
Figure 14 is that the passive annular resonant cavity refractive index is the fluorescence emission spectrum of 3.215 o'clock active Fabry-Perot cavities and the transmission spectrum of passive annular resonant cavity in the 6th kind of embodiment of the present invention.
Figure 15 is that the passive annular resonant cavity refractive index is the fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum stack result of 3.215 o'clock active Fabry-Perot cavities in the 6th kind of embodiment of the present invention.
Figure 16 is that the passive annular resonant cavity refractive index is the fluorescence emission spectrum of 3.2155 o'clock active Fabry-Perot cavities and the transmission spectrum of passive annular resonant cavity in the 6th kind of embodiment of the present invention.
Figure 17 is that the passive annular resonant cavity refractive index is the fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum stack result of 3.2155 o'clock Fabry-Perot cavities in the 6th kind of embodiment of the present invention.
Figure 18 is fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum stack result that spectrometer receives two pattern energy Fabry-Perot cavity when suitable in the 6th kind of embodiment of the present invention.
Among the figure: 1, active Fabry-Perot cavity, 2, passive annular resonant cavity, 3, optical power detectors; 11, close microwave-driven signal of cycle and the photon cycle of operation in active resonant cavity, 12, active Fabry-Perot cavity first catoptron, 13, active Fabry-Perot cavity second catoptron; 20, passive annular resonant cavity passive waveguide region, 21, the passive annular resonant cavity sensing unit, 22, first passive wave guide; 23, second passive wave guide, 4, passive Fabry-Perot cavity, 40, passive Fabry-Perot cavity passive waveguide region; 41, passive Fabry-Perot cavity sensing unit, 42, passive Fabry-Perot cavity first catoptron, 43, passive Fabry-Perot cavity second catoptron; 5, active ring resonator; 51, the 3rd passive wave guide, 6, another optical power detector, 7, spectrometer.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
Fig. 2 the present invention is based on active resonant cavity and first kind of embodiment of the optical sensor of the passive resonant cavity of cascade with it.Which comprises at least an active Fabry-Perot cavity 1 that has an internal gain and have the passive annular resonant cavity 2 that comb filtering is uniformly-spaced composed with one with the output of pectination spectrum uniformly-spaced, and an optical power detector 3; Active Fabry-Perot cavity is identical with the optical length of passive annular resonant cavity; Be provided with the passive annular resonant cavity sensing unit 21 that one section optical length can change with external environment in the passive annular resonant cavity; The spectrum of active Fabry-Perot cavity emission is input to passive annular resonant cavity through first passive wave guide 22; Through after the filtering of passive annular resonant cavity, received by an optical power detector 3 through second passive wave guide 23.
Active Fabry-Perot cavity is made up of with active Fabry-Perot cavity second catoptron 13 gain region and active Fabry-Perot cavity first catoptron 12 that is positioned at its both ends of the surface among the figure.The photon of spontaneous radiation is exaggerated in gain region, is reflected back toward in two catoptrons, 12,13 place's parts and continues in the active cavity to obtain to amplify, and another part then sees through active Fabry-Perot cavity second catoptron 13 outgoing and forms the pectination emission spectrum.Passive annular resonant cavity 2 is by passive annular resonant cavity passive waveguide region 20, and passive annular resonant cavity sensing unit 21 constitutes.The spectrum of active Fabry-Perot cavity emission is received by optical power detector through after the filtering outgoing of passive annular resonant cavity.Passive annular resonant cavity is connected with optical power detector with active Fabry-Perot cavity respectively through first and second passive wave guides.
The luminous power P that optical power detector monitors can be expressed as:
Wherein I (ω) representes the emission spectrum of active Fabry-Perot cavity 1, the filtering spectral line of T (ω) expression passive annular resonant cavity 2.As a rule, the emission spectrum live width of active Fabry-Perot cavity 1 is far smaller than the filtering spectrum of passive annular resonant cavity 2, therefore has:
ω wherein
k=k π c/L
1, be the k level resonance frequency of active Fabry-Perot cavity 1, c is the light velocity, L
1It is the optical length of active resonant cavity 1.Δ (ω) is an impulse function, and F (ω) is the envelope of emission spectrum, ω
K0It is emission spectrum envelope peak frequency.
For passive annular resonant cavity, its filter function can be expressed as:
Wherein C is the straight-through coupling coefficient of passive annular resonant cavity institute band coupling mechanism, L
2Be optical length half the of passive annular resonant cavity, ω is an angular frequency, and c is the light velocity in the vacuum, T
0Be constant.
(2) (3) substitutions (1) can be got:
L wherein
1Be the optical length of active resonant cavity, Δ L=L
2-L
1, Δ k=k-k
0In general active resonant cavity 1 luminescence spectrum scope, little if sensing scope changes, can have Δ L＜＜L
1With Δ k＜＜k
0,, therefore can ignore high-order a small amount of 2 π Δ k (Δ the L)/L in (4) formula denominator
1, (4) formula can be transformed to:
Wherein
representes the general power that active Fabry-Perot cavity sends.Can find out by formula (5); The power P that optical power detector receives is relevant with the light path discrepancy delta L of active Fabry-Perot cavity and passive annular resonant cavity, and when Δ L was 0, the power that optical power detector receives was maximum; Two light paths depart from many more, and the power that then receives is more little.Therefore; When the optical length of sensing unit 21 receives the external environment factor such as stress, when temperature or measured matter concentration etc. changed, the total optical length of passive annular resonant cavity will change; Cause Δ L to change, thereby cause the optical power change that optical power detector receives.Through measuring this variable power, just can obtain information measured such as stress, temperature.
It is 200 μ m that Fig. 3 has provided a length; Refractive index is 3.215; Operation wavelength is suitable with this active resonant cavity with refractive index in fluorescence emission spectrum and length that the active Fabry-Perot cavity of 1550nm is operated in below the threshold current, and girth is the transmission spectrum of the passive annular resonant cavity of 400 μ m.At this moment, the light path discrepancy delta L of two resonator cavitys is 0, and the transmission spectrum peak value of the fluorescence emission spectrum of active resonant cavity and passive resonant cavity is aligned with each other, and the power that active resonant cavity is launched is 4.823mW.Fig. 4 is active Fabry-Perot cavity fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum result after the stack mutually, i.e. the output power spectrum of whole sensor, and calculating the gross output that optical power detector detects is 3.995mW.
When the refractive index of passive resonant cavity because of the external environment influence when 3.215 become 3.217; The fluorescence emission spectrum of active resonant cavity and the transmission spectrum of passive resonant cavity are as shown in Figure 5; This moment is because the change of sensing unit equivalent refractive index; The light path in two chambeies has had little difference, and the transmission spectrum peak value of the fluorescence emission spectrum of active resonant cavity and passive resonant cavity staggers mutually, and the power that active resonant cavity is launched is still 4.823mW.Fig. 6 is active Fabry-Perot cavity fluorescence emission spectrum and the passive annular resonant cavity transmission spectrum result after the stack mutually, and calculating the gross output that optical power detector detects is 0.2862mW.
Fig. 7 is the curve of Output optical power with the passive annular resonant cavity variations in refractive index, and visible, the subtle change of refractive index just can cause the variation of sensor Output optical power.In variations in refractive index 0～4 * 10
-4Scope in, variable power is linear basically, we can utilize this zone to do sensing.
Visible by above-mentioned example, when active resonator cavity is operated in threshold value when following, can change just can obtain variations such as extraneous stress, temperature through the output power of acquisition sensor.When being operated in threshold value, active resonator cavity can obtain similar Effect on Detecting equally when above.
Fig. 8 the present invention is based on active resonant cavity and second embodiment of the optical sensor of the passive resonant cavity of cascade with it; It comprises the active ring resonator 5 of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and has the uniformly-spaced passive annular resonant cavity 2 of comb filtering spectrum; And an optical power detector 3, active ring resonator links to each other with passive annular resonant cavity through the 3rd passive wave guide 51.In addition, active ring resonator can also be the active resonant cavity that the inside multisection type active resonant cavity that has the distributed Feedback optical grating construction etc. is exported pectination spontaneous emission spectrum uniformly-spaced or laser spectrum.
Fig. 9 the present invention is based on active resonant cavity and the 3rd embodiment of the optical sensor of the passive resonant cavity of cascade with it; It comprises the active Fabry-Perot cavity 1 of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and has the uniformly-spaced passive Fabry-Perot cavity 4 of comb filtering spectrum; And optical power detector 3; Passive Fabry-Perot cavity comprises: passive Fabry-Perot cavity first catoptron 42; Passive Fabry-Perot cavity second catoptron 43; Passive Fabry-Perot cavity passive waveguide region 40, the passive Fabry-Perot cavity sensing unit 41 that optical length can change with external environment.In addition, passive Fabry-Perot cavity can also be the passive resonant cavity that the inside multisection type active resonant cavity that has the distributed Feedback optical grating construction etc. is exported pectination spontaneous emission spectrum uniformly-spaced or laser spectrum.
Figure 10 the present invention is based on active resonant cavity and the 4th embodiment of the optical sensor of the passive resonant cavity of cascade with it; It comprises that an active Fabry-Perot cavity 1 with the output of pectination spectrum uniformly-spaced that has an internal gain has the passive annular resonant cavity 2 that comb filtering is uniformly-spaced composed with one, and an optical power detector 3; Thereby active ring resonator is one have been applied the cycle microwave-driven signal 11 identical with the cycle of operation of photon in active resonant cavity and keeps its emission spectrum not receive the active Fabry-Perot cavity 1 of external interference.
Can know by (5) formula; The luminous power that optical power detector 3 obtains is relevant with passive annular resonant cavity 2 optical path differences with active Fabry-Perot cavity 1; Therefore the variation of any active Fabry-Perot cavity 1 light path also can cause the fluctuation of power, particularly is operated in the above multimode laser of threshold value because mode competition causes the instability of output spectrum and power, causes the interference to measurement result; If but drive active Fabry-Perot cavity 1 with aforementioned microwave signal 11; Its resonance frequency can be by accurate locking so, thereby can reduce the interference that 1 pair of result of detection of active Fabry-Perot cavity causes, and improves the sensitivity of sensing.
Figure 11 the present invention is based on active resonant cavity and the 5th embodiment of the optical sensor of the passive resonant cavity of cascade with it; It comprises that an active Fabry-Perot cavity 1 with the output of pectination spectrum uniformly-spaced that has an internal gain has the passive annular resonant cavity 2 that comb filtering is uniformly-spaced composed with one, and an optical power detector 3; In addition, be provided with another optical power detector 6, be used to receive the output spectrum that does not pass through passive annular resonant cavity filtering in the outside of active Fabry-Perot cavity second catoptron 12.
Active Fabry-Perot cavity 1 output power when receiving the interference of external environment variation can fluctuate; Particularly being operated in the above multimode laser of threshold value can have interference to measurement result because output spectrum that the mode competition effect causes and power are unstable; And the luminous power that optical power detector 6 obtains in this embodiment can reflect this type of power swing; Therefore; Through the power that obtains on optical power detector 3 and 6 is compared, the active resonant cavity power that can the filtering external interference brings is unstable, improves sensing accuracy.
Figure 12 the present invention is based on active resonant cavity and the 6th kind of embodiment of the optical sensor of the passive resonant cavity of cascade with it.Which comprises at least an active Fabry-Perot cavity 1 that has an internal gain and have the passive annular resonant cavity 2 that comb filtering is uniformly-spaced composed with one with the output of pectination spectrum uniformly-spaced, and spectrometer 7; Active Fabry-Perot cavity is different with the optical length of passive annular resonant cavity; At least be provided with the passive annular resonant cavity sensing unit 21 that one section optical length can change with external environment in the passive annular resonant cavity; The spectrum of active Fabry-Perot cavity emission is input to passive annular resonant cavity through first passive wave guide 22; Through after the filtering of passive annular resonant cavity, received by spectrometer 7 through second passive wave guide 23.
The light path of passive annular resonant cavity is slightly different with active Fabry-Perot cavity in this embodiment; The mode of resonance frequency interval of two resonator cavitys is also different slightly; Be respectively Δ f and Δ f; This makes that the mode of resonance of two resonator cavitys only overlaps at the fo place fully in laser material gain spectral scope, like Figure 13.At this moment, have only the luminous energy of frequency f o to pass through passive annular resonant cavity, thereby the intensity that on spectrometer, can see fo is far longer than adjacent pattern than low-loss ground.When the light path of passive annular resonant cavity changes owing to the change of sensing unit (part in the frame of broken lines) equivalent refractive index; The filtering spectral line of passive annular resonant cavity can produce an overall offset; Cause overlapping the peak and move, and the lowest common multiple of Δ f and Δ f becomes Free Spectral Range to adjacent harmonic peak.The relative light distribute power of each harmonic peak changes, and utilizes an external spectrometer 7 just can measure variations in refractive index.Owing to utilized cursor effect, so this method has higher sensitivity than traditional single passive resonant ring.
It is 200 μ m that Figure 14 has provided a length; Refractive index is 3.215; Operation wavelength is 360 μ m at fluorescence emission spectrum and girth that the active Fabry-Perot cavity of 1550nm is operated in below the threshold current, the transmission spectrum of the passive annular resonant cavity that refractive index is identical with this active resonant cavity.At this moment; The mode of resonance of two resonator cavitys overlaps at the 1550nm place fully; Have only the luminous energy of 1550nm wavelength to pass through passive annular resonant cavity in the emission spectrum of active Fabry-Perot cavity, from spectrometer, can obtain spectrum shown in figure 15 than low-loss ground.
When the refractive index of passive resonant cavity because of the external environment influence when 3.215 become 3.2155; The fluorescence emission spectrum of active resonant cavity and the transmission spectrum of passive resonant cavity are shown in figure 16; Because moving of passive annular resonant cavity transmission spectrum; The mode of resonance of two resonator cavitys becomes at the 1548nm place and overlaps fully, and the luminous energy that has only the 1548nm wavelength through passive annular resonant cavity, obtains spectrum shown in figure 17 than low-loss ground on spectrometer.
Can obtain by above-mentioned analysis, when the variations in refractive index 5 * 10 of passive annular resonant cavity
-4The time; A saltus step just takes place in the maximum pattern of energy in the output spectrum of this sensor; Can simply converse the variable quantity of passive annular resonant cavity waveguide index, further be transformed into the variation (like temperature, humidity) of external environment with the number of moding.In addition, when change of refractive was between two states, we can come the resolution of further refinement refractive index through the power ratio (like Figure 18) between the suitable pattern of two energy in the output spectrum.
The foregoing description is used for the present invention that explains, rather than limits the invention.In the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.For example active Fabry-Perot cavity can change makes other any active resonant cavities of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum; And passive annular resonant cavity can change and does the optical texture that any other can produce the periodic filter spectral line; Like etched diffraction grating; Array waveguide grating, sampling Bragg grating etc.
Claims (7)
1. one kind based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it; It is characterized in that: comprise the active resonant cavity of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and have the uniformly-spaced passive resonant cavity of comb filtering spectrum, and an optical power detector (3); Active resonant cavity is identical with the optical length of passive resonant cavity; At least be provided with the passive resonant cavity sensing unit that one section optical length can change with external environment in the passive resonant cavity; The spectrum of an output port emission of active resonant cavity is input to passive resonant cavity, is received by an optical power detector (3) after the filtering through passive resonant cavity again.
2. according to claim 1 a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it, it is characterized in that: said active resonant cavity is active Fabry-Perot cavity (1), active ring resonator (5) or the inner multisection type active resonant cavity that has the distributed Feedback optical grating construction.
3. according to claim 1 a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it, it is characterized in that: said passive resonant cavity is passive annular resonant cavity (2), passive Fabry-Perot cavity (4) or the inner multisection type passive resonant cavity that has the distributed Feedback optical grating construction.
4. according to claim 1 a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it; It is characterized in that: said active resonant cavity is one and has applied the cycle microwave-driven signal (11) identical with the cycle of operation of photon in active resonant cavity, thereby keeps its emission spectrum not receive the active resonant cavity of external interference.
5. according to claim 1 a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it, it is characterized in that: another output port place of said active resonant cavity is provided with another optical power detector (6).
6. one kind based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it; It is characterized in that: comprise the active resonant cavity of launching pectination spontaneous emission spectrum uniformly-spaced or laser spectrum that has internal gain and have the uniformly-spaced passive resonant cavity of comb filtering spectrum, and spectrometer (7); Described active resonant cavity is a Fabry-Perot cavity; Described passive resonant cavity is a passive annular resonant cavity; Fabry-Perot cavity is different with the optical length of passive annular resonant cavity; The mode of resonance frequency interval of two resonator cavitys also has difference, thereby the mode of resonance of two resonator cavitys is only at f in laser material gain spectral scope
0Place's frequency overlaps fully; At least be provided with the passive annular resonant cavity sensing unit that one section optical length can change with external environment in the passive annular resonant cavity; When the light path of passive annular resonant cavity changes owing to the change of sensing unit equivalent refractive index; The filtering spectral line of passive annular resonant cavity can produce an overall offset; Cause the coincidence peak of two resonator cavitys to move to adjacent harmonic peak, the spectrum of an output port emission of Fabry-Perot cavity is input to passive annular resonant cavity, is received by spectrometer (7) after the filtering through passive annular resonant cavity again.
7. according to claim 6 a kind of based on the active resonant cavity and the optical sensor of the passive resonant cavity of cascade with it; It is characterized in that: said active resonant cavity is one and has applied the cycle microwave-driven signal (11) identical with the cycle of operation of photon in active resonant cavity, thereby keeps its emission spectrum not receive the active resonant cavity of external interference.
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| CN105355024B (en) * | 2015-12-02 | 2019-04-12 | 中北大学 | The wired extracting method and device of adverse circumstances physical parameter |
| CN106290170B (en) * | 2016-07-27 | 2019-10-25 | 哈尔滨工业大学深圳研究生院 | A kind of light fibre humidity transducer of the hypersensitivity based on full agar F-P cavity |
| CN108759880B (en) * | 2018-04-28 | 2020-05-12 | 中国科学技术大学 | On-chip optical microcavity sensor and optical microcavity coupling waveguide sensing device using same |
| CN113395128B (en) | 2020-03-12 | 2023-12-15 | 华为技术有限公司 | Device for generating false optical signal and cascade system |
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| CN101261222A (en) * | 2008-04-11 | 2008-09-10 | 浙江大学 | High-sensitivity micro- resonant cavity photo-sensor |
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