CN101900575B - An optical sensor based on an active resonant cavity and a cascaded passive resonant cavity - Google Patents
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Abstract
本发明公开了一种基于有源谐振腔和与之级联的无源谐振腔的光传感器。至少包括一个带有内部增益的可发射等间隔梳状自发辐射谱或激光谱的有源谐振腔和一个具有等间隔梳状滤波谱的无源谐振腔,以及一个光接收器。所述有源谐振腔发射的光谱输入到无源谐振腔,经过无源谐振腔的滤波之后,出射光被光接收器所接收。所述无源谐振腔中设有一段光学长度能随外界环境改变而改变的传感区。本发明使用成本低廉的多模有源谐振腔作为输入光源。当两个腔光学长度相同时,只需要简单地用光功率探测器测量输出光强度的变化就能得到被测物理量的变化,测试简便,成本低;当两个腔光学长度不同时,通过外接光谱仪还能够扩展测量范围,提高测试精度。
The invention discloses an optical sensor based on an active resonant cavity and a passive resonant cavity cascaded therewith. At least one active resonant cavity with internal gain capable of emitting equally spaced comb-shaped spontaneous emission spectrum or laser spectrum, one passive resonant cavity with equally spaced comb-shaped filtering spectrum, and an optical receiver are included. The spectrum emitted by the active resonant cavity is input to the passive resonant cavity, and after being filtered by the passive resonant cavity, the emitted light is received by the optical receiver. The passive resonant cavity is provided with a sensing area whose optical length can be changed with the change of the external environment. The invention uses a low-cost multi-mode active resonant cavity as an input light source. When the optical lengths of the two cavities are the same, it is only necessary to simply measure the change of the output light intensity with an optical power detector to obtain the change of the measured physical quantity, which is easy to test and low in cost; when the optical lengths of the two cavities are different, the external The spectrometer can also expand the measurement range and improve the test accuracy.
Description
技术领域 technical field
本发明涉及光传感器,尤其是涉及一种基于有源谐振腔和与之级联的无源谐振腔的光传感器。The invention relates to an optical sensor, in particular to an optical sensor based on an active resonant cavity and a passive resonant cavity cascaded with it.
背景技术 Background technique
光传感技术作为信息科学技术的一个重要分支,在工业过程控制、环境监测、食品安全和国家安全等方面有着十分重要的应用。光传感技术可解决电传感技术存在的灵敏度低、易受干扰、感应时间较长、检测某些化学气体不安全等方面的问题。光传感器具有灵敏度高、体积小、抗电磁干扰能力强、便于集成、可在线检测的优点,在传感领域占有越来越重要的地位。As an important branch of information science and technology, optical sensing technology has very important applications in industrial process control, environmental monitoring, food safety and national security. Optical sensing technology can solve the problems of low sensitivity, susceptibility to interference, long sensing time and unsafe detection of certain chemical gases in electrical sensing technology. Optical sensors have the advantages of high sensitivity, small size, strong anti-electromagnetic interference ability, easy integration, and online detection, and they occupy an increasingly important position in the sensing field.
光波导传感器件的基本原理是基于光纤或平面波导的界面/表面所出现的倏逝波,由于倏逝波透出波导的表面(接触待测物质)并返回波导中,从而影响波导中传输光的特性,因此探测波导中传输光的变化可实现光传感。The basic principle of the optical waveguide sensor device is based on the evanescent wave that appears on the interface/surface of the optical fiber or planar waveguide. Since the evanescent wave penetrates the surface of the waveguide (contacting the substance to be measured) and returns to the waveguide, it affects the light transmitted in the waveguide. , so detecting changes in the transmitted light in the waveguide enables photo-sensing.
如图1,K.De Vos等人在文献“Silicon-on-Insulat or microring resonator forsensitive and label-free biosensing”,Optics Express 15,pp.7610-7615(2007)。中提出利用环形谐振器作为光波导传感器的方案,环形谐振器是光谐振腔的一种,由于其具有比较尖锐的滤波谱线,用作传感器灵敏度较高,因此受到了广泛关注。K.De Vos等人方案的缺点在于需要一个价格昂贵的光谱仪来测量透射峰的波长移动,其测量精度与光谱仪的精度直接相关。如果用测量透射峰附近某个固定波长光能量变化的方法,则需要一个窄线宽的单模激光器作为光源,而且激光器的波长要与谐振环的透射峰有精确的相对位置,而且要高度稳定。这些要求都大大增加了测量装置的成本,降低了可靠性。As shown in Figure 1, K. De Vos et al. in the literature "Silicon-on-Insulat or microring resonator forsensitive and label-free biosensing", Optics Express 15, pp.7610-7615 (2007). In the paper, the scheme of using the ring resonator as the optical waveguide sensor is proposed. The ring resonator is a kind of optical resonant cavity. Because it has a relatively sharp filtering line and is used as a sensor with high sensitivity, it has received extensive attention. The disadvantage of the K.De Vos et al. scheme is that an expensive spectrometer is needed to measure the wavelength shift of the transmission peak, and its measurement accuracy is directly related to the accuracy of the spectrometer. If the method of measuring the energy change of a fixed wavelength near the transmission peak is used, a single-mode laser with a narrow linewidth is required as the light source, and the wavelength of the laser must have a precise relative position with the transmission peak of the resonant ring, and it must be highly stable. . These requirements greatly increase the cost of the measurement device and reduce reliability.
发明内容 Contents of the invention
针对背景技术中的不足,本发明的目的在于提供一种基于有源谐振腔和与之级联的无源谐振腔的光传感器。In view of the deficiencies in the background technology, the object of the present invention is to provide an optical sensor based on an active resonant cavity and a passive resonant cavity cascaded therewith.
本发明采用的技术方案如下:The technical scheme that the present invention adopts is as follows:
技术方案1:Technical solution 1:
本发明包括带有内部增益的可发射等间隔梳状自发辐射谱或激光谱的有源谐振腔和具有等间隔梳状滤波谱的无源谐振腔,以及光功率探测器;有源谐振腔与无源谐振腔的光学长度相同,无源谐振腔中至少设有一段光学长度能随外界环境改变而改变的无源谐振腔传感区,有源谐振腔的一个输出端口发射的光谱输入到无源谐振腔,经过无源谐振腔的滤波之后再被一个光功率探测器所接收。The invention includes an active resonant cavity capable of emitting equally spaced comb-shaped spontaneous radiation spectrum or laser spectrum with internal gain, a passive resonant cavity with an equally spaced comb-shaped filter spectrum, and an optical power detector; the active resonant cavity and The optical length of the passive resonant cavity is the same, and there is at least a passive resonant cavity sensing area whose optical length can change with the external environment in the passive resonant cavity, and the spectrum emitted by an output port of the active resonant cavity is input to the wireless The source resonator is filtered by the passive resonator and then received by an optical power detector.
所述有源谐振腔为有源法布里-珀罗谐振腔、有源环形谐振腔或者内部带有分布式反馈光栅结构的多段式有源谐振腔。The active resonator is an active Fabry-Perot resonator, an active ring resonator or a multi-segment active resonator with a distributed feedback grating structure inside.
所述无源谐振腔为无源环形谐振腔、无源法布里-珀罗谐振腔或者内部带有分布式反馈光栅结构的多段式无源谐振腔。The passive resonator is a passive ring resonator, a passive Fabry-Perot resonator or a multi-segment passive resonator with a distributed feedback grating structure inside.
所述有源谐振腔是一个施加了周期与光子在有源谐振腔中的运行周期相同的微波驱动信号,从而保持其发射光谱不受外界干扰的有源谐振腔。The active resonant cavity is an active resonant cavity that is applied with a microwave driving signal with the same cycle as that of photons in the active resonant cavity, so as to keep its emission spectrum free from external interference.
所述有源谐振腔的另一个输出端口处设有另一个光功率探测器。Another optical power detector is arranged at the other output port of the active resonant cavity.
技术方案2:Technical solution 2:
本发明包括带有内部增益的可发射等间隔梳状自发辐射谱或激光谱的有源谐振腔和具有等间隔梳状滤波谱的无源谐振腔,以及光谱仪;有源谐振腔与无源谐振腔的光学长度不同,无源谐振腔中至少设有一段光学长度能随外界环境改变而改变的无源谐振腔传感区,有源谐振腔一个输出端口发射的光谱输入到无源谐振腔,经过无源谐振腔的滤波之后再被光谱仪所接收。The invention includes an active resonant cavity capable of emitting equally spaced comb-shaped spontaneous emission spectrum or laser spectrum with internal gain, a passive resonant cavity with an equally spaced comb-shaped filter spectrum, and a spectrometer; the active resonant cavity and the passive resonator The optical length of the cavity is different. At least a section of the passive resonant cavity sensing area whose optical length can change with the external environment is provided in the passive resonant cavity. The spectrum emitted by an output port of the active resonant cavity is input to the passive resonant cavity. After being filtered by the passive resonant cavity, it is received by the spectrometer.
所述有源谐振腔为有源法布里-珀罗谐振腔、有源环形谐振腔或者内部带有分布式反馈光栅结构的多段式有源谐振腔。The active resonator is an active Fabry-Perot resonator, an active ring resonator or a multi-segment active resonator with a distributed feedback grating structure inside.
所述无源谐振腔为无源环形谐振腔、无源法布里-珀罗谐振腔或者内部带有分布式反馈光栅结构的多段式无源谐振腔。The passive resonator is a passive ring resonator, a passive Fabry-Perot resonator or a multi-segment passive resonator with a distributed feedback grating structure inside.
所述有源谐振腔是一个施加了周期与光子在有源谐振腔中的运行周期相同的微波驱动信号,从而保持其发射光谱不受外界干扰的有源谐振腔。The active resonant cavity is an active resonant cavity that is applied with a microwave driving signal with the same cycle as that of photons in the active resonant cavity, so as to keep its emission spectrum free from external interference.
与背景技术相比,本发明具有的有益效果是:Compared with background technology, the beneficial effect that the present invention has is:
本发明使用有源-无源级联双谐振腔的滤波效应,当有源和无源谐振腔光学长度相同时,只需要简单地用光功率探测器测量全光谱范围内输出光强度的变化就能得到被测物理量的变化,不再需要通过光谱仪得到光谱相关的信息,降低器件测试成本,使用法布里-珀罗(Fabry-Perot)腔等成本低廉的多模有源谐振腔作为输入光源,降低器件生产制作的成本,并且,通过有源和无源元件集成技术,无需外接光源,也消除了对高难度、高成本的传感波导光耦合的需求。进一步的,当有源和无源谐振腔光学长度不相同时,通过光谱仪得到两个谐振腔游标效应的输出光谱,能够进一步扩展测量范围,提高测试精度。通过从以上几个角度看,本发明的光传感器相比传统的无源光传感器成本大大降低,使用与测试更为简便。The present invention uses the filtering effect of the active-passive cascaded double resonant cavity. When the optical lengths of the active and passive resonant cavities are the same, it is only necessary to simply use an optical power detector to measure the change of the output light intensity in the full spectral range. The change of the measured physical quantity can be obtained, and it is no longer necessary to obtain spectral-related information through a spectrometer, reducing the cost of device testing, and using low-cost multi-mode active resonant cavities such as Fabry-Perot cavities as input light sources , reduce the cost of device production, and, through the integration technology of active and passive components, no external light source is needed, and the need for high-difficulty and high-cost sensing waveguide optical coupling is also eliminated. Furthermore, when the optical lengths of the active and passive resonators are different, the output spectra of the vernier effect of the two resonators can be obtained through the spectrometer, which can further expand the measurement range and improve the test accuracy. From the perspectives above, the cost of the light sensor of the present invention is greatly reduced compared with the traditional passive light sensor, and the use and test are easier.
附图说明 Description of drawings
图1是背景技术中基于单个环形谐振腔的无源光波导传感器示意图。Fig. 1 is a schematic diagram of a passive optical waveguide sensor based on a single ring resonant cavity in the background art.
图2是本发明第一种实施方式结构示意图。Fig. 2 is a schematic structural diagram of the first embodiment of the present invention.
图3是本发明第一种实施方式中有源法布里-珀罗谐振腔与无源环形谐振腔光程差为0时有源法布里-珀罗谐振腔的荧光发射谱和无源环形谐振腔的透射谱。Fig. 3 is the fluorescence emission spectrum of the active Fabry-Perot resonator and passive ring resonator when the optical path difference between the active Fabry-Perot resonator and the passive ring resonator is 0 Transmission spectrum of a ring resonator.
图4是本发明第一种实施方式中有源法布里-珀罗谐振腔与无源环形谐振腔光程差为0时有源法布里-珀罗谐振腔的荧光发射谱与无源环形谐振腔透射谱叠加结果。Fig. 4 is the fluorescence emission spectrum of the active Fabry-Perot resonator and the passive ring resonator when the optical path difference between the active Fabry-Perot resonator and the passive ring resonator in the first embodiment of the present invention is 0 Superposition results of ring resonator transmission spectra.
图5是本发明第一种实施方式中有源法布里-珀罗谐振腔与无源环形谐振腔光程差非0时有源法布里-珀罗谐振腔的荧光发射谱和无源环形谐振腔的透射谱。Fig. 5 is the fluorescence emission spectrum of the active Fabry-Perot resonator and passive Transmission spectrum of a ring resonator.
图6是本发明第一种实施方式中有源法布里-珀罗谐振腔与无源环形谐振腔光程差非0时有源谐振腔的荧光发射谱与无源谐振腔透射谱叠加结果。Fig. 6 is the superposition result of the fluorescence emission spectrum of the active resonator and the transmission spectrum of the passive resonator when the optical path difference between the active Fabry-Perot resonator and the passive ring resonator is non-zero in the first embodiment of the present invention .
图7是本发明第一种实施方式中光功率探测器探测到的光功率随无源环形谐振腔波等效导折射率变化的曲线。Fig. 7 is a curve of the variation of the optical power detected by the optical power detector with the equivalent guide refractive index of the passive ring resonator wave in the first embodiment of the present invention.
图8是本发明第二种实施方式结构示意图。Fig. 8 is a schematic structural diagram of the second embodiment of the present invention.
图9是本发明第三种实施方式结构示意图。Fig. 9 is a schematic structural diagram of a third embodiment of the present invention.
图10是本发明第四种实施方式结构示意图。Fig. 10 is a schematic structural diagram of a fourth embodiment of the present invention.
图11是本发明第五种实施方式结构示意图。Fig. 11 is a schematic structural diagram of the fifth embodiment of the present invention.
图12是本发明第六种实施方式结构示意图。Fig. 12 is a schematic structural diagram of the sixth embodiment of the present invention.
图13是有源法布里-珀罗谐振腔和无源环形谐振腔的多个纵模。以及有源腔的材料增益谱。Figure 13 shows multiple longitudinal modes of an active Fabry-Perot resonator and a passive ring resonator. and the material gain spectrum of the active cavity.
图14是本发明第六种实施方式中无源环形谐振腔折射率为3.215时有源法布里-珀罗谐振腔的荧光发射谱和无源环形谐振腔的透射谱。Fig. 14 is the fluorescence emission spectrum of the active Fabry-Perot resonator and the transmission spectrum of the passive ring resonator when the refractive index of the passive ring resonator is 3.215 in the sixth embodiment of the present invention.
图15是本发明第六种实施方式中无源环形谐振腔折射率为3.215时有源法布里-珀罗谐振腔的荧光发射谱与无源环形谐振腔透射谱叠加结果。Fig. 15 is the superposition result of the fluorescence emission spectrum of the active Fabry-Perot resonator and the transmission spectrum of the passive ring resonator when the refractive index of the passive ring resonator is 3.215 in the sixth embodiment of the present invention.
图16是本发明第六种实施方式中无源环形谐振腔折射率为3.2155时有源法布里-珀罗谐振腔的荧光发射谱和无源环形谐振腔的透射谱。Fig. 16 is the fluorescence emission spectrum of the active Fabry-Perot resonator and the transmission spectrum of the passive ring resonator when the refractive index of the passive ring resonator is 3.2155 in the sixth embodiment of the present invention.
图17是本发明第六种实施方式中无源环形谐振腔折射率为3.2155时法布里-珀罗谐振腔的荧光发射谱与无源环形谐振腔透射谱叠加结果。Fig. 17 is the superposition result of the fluorescence emission spectrum of the Fabry-Perot resonator and the transmission spectrum of the passive ring resonator when the refractive index of the passive ring resonator is 3.2155 in the sixth embodiment of the present invention.
图18是本发明第六种实施方式中光谱仪接收到两个模式能量相当时法布里-珀罗谐振腔的荧光发射谱与无源环形谐振腔透射谱叠加结果。Fig. 18 is the superposition result of the fluorescence emission spectrum of the Fabry-Perot resonator and the transmission spectrum of the passive ring resonator when the spectrometer receives two modes with equal energy in the sixth embodiment of the present invention.
图中:1、有源法布里-珀罗谐振腔,2、无源环形谐振腔,3、一个光功率探测器,11、周期与光子在有源谐振腔中的运行周期相近的微波驱动信号,12、有源法布里-珀罗谐振腔第一反射镜,13、有源法布里-珀罗谐振腔第二反射镜,20、无源环形谐振腔无源波导区,21、无源环形谐振腔传感区,22、第一无源波导,23、第二无源波导,4、无源法布里-珀罗谐振腔,40、无源法布里-珀罗谐振腔无源波导区,41、无源法布里-珀罗谐振腔传感区,42、无源法布里-珀罗谐振腔第一反射镜,43、无源法布里-珀罗谐振腔第二反射镜,5、有源环形谐振腔,51、第三无源波导,6、另一个光功率探测器,7、光谱仪。In the figure: 1. Active Fabry-Perot resonator, 2. Passive ring resonator, 3. An optical power detector, 11. Microwave drive with a period similar to that of photons in the active resonator Signal, 12, the first mirror of the active Fabry-Perot resonator, 13, the second mirror of the active Fabry-Perot resonator, 20, the passive waveguide area of the passive ring resonator, 21, Passive ring resonator sensing area, 22, first passive waveguide, 23, second passive waveguide, 4, passive Fabry-Perot resonator, 40, passive Fabry-Perot resonator Passive waveguide area, 41, passive Fabry-Perot resonator sensing area, 42, first mirror of passive Fabry-Perot resonator, 43, passive Fabry-Perot resonator The second reflection mirror, 5, the active ring resonant cavity, 51, the third passive waveguide, 6, another optical power detector, 7, the spectrometer.
具体实施方式 Detailed ways
下面结合附图和实施例对本发明作进一步的说明。The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
图2是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第一种实施方式。它至少包括一个带有内部增益的具有等间隔梳状光谱输出的有源法布里-珀罗谐振腔1和一个具有等间隔梳状滤波谱的无源环形谐振腔2,以及一个光功率探测器3;有源法布里-珀罗谐振腔与无源环形谐振腔的光学长度相同,无源环形谐振腔中设有一段光学长度能随外界环境改变而改变的无源环形谐振腔传感区21,有源法布里-珀罗谐振腔发射的光谱通过第一无源波导22输入到无源环形谐振腔,经过无源环形谐振腔的滤波之后,通过第二无源波导23被一个光功率探测器3所接收。Fig. 2 is the first implementation of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it according to the present invention. It includes at least one active Fabry-
图中有源法布里-珀罗谐振腔由增益区以及位于其两端面的有源法布里-珀罗谐振腔第一反射镜12和有源法布里-珀罗谐振腔第二反射镜13构成。自发辐射的光子在增益区中被放大,在两反射镜12,13处一部分被反射回有源腔内继续获得放大,另一部分则透过有源法布里-珀罗谐振腔第二反射镜13出射形成梳状发射光谱。无源环形谐振腔2由无源环形谐振腔无源波导区20,无源环形谐振腔传感区21构成。有源法布里-珀罗谐振腔发射的光谱经过无源环形谐振腔的滤波出射后被光功率探测器所接收。无源环形谐振腔通过第一和第二无源波导分别与有源法布里-珀罗谐振腔和光功率探测器相连接。In the figure, the active Fabry-Perot resonator is composed of the gain region and the
光功率探测器监测到的光功率P可以表示成:The optical power P monitored by the optical power detector can be expressed as:
其中I(ω)表示有源法布里-珀罗谐振腔1的发射谱,T(ω)表示无源环形谐振腔2的滤波谱线。通常来说,有源法布里-珀罗谐振腔1的发射光谱线宽远远小于无源环形谐振腔2的滤波谱,因此有:Where I(ω) represents the emission spectrum of the active Fabry-
其中ωk=kπc/L1,是有源法布里-珀罗谐振腔1的第k级谐振频率,c是光速,L1是有源谐振腔1的光学长度。Δ(ω)是冲击函数,F(ω)是发射谱的包络,ωk0是发射谱包络峰值频率。Where ω k =kπc/L 1 is the kth resonant frequency of the active Fabry-
对于无源环形谐振腔,其滤波函数可表示为:For a passive ring resonator, its filter function can be expressed as:
其中C为无源环形谐振腔所带耦合器的直通耦合系数,L2是无源环形谐振腔的光学长度的一半,ω为角频率,c为真空中的光速,T0为常数。where C is the through-coupling coefficient of the coupler attached to the passive ring resonator, L2 is half the optical length of the passive ring resonator, ω is the angular frequency, c is the speed of light in vacuum, and T0 is a constant.
将(2)(3)代入(1)可得:Substitute (2)(3) into (1) to get:
其中L1是有源谐振腔的光学长度,ΔL=L2-L1,Δk=k-k0。在一般有源谐振腔1发光谱线范围内,如果传感范围变化不大,可以有ΔL<<L1和Δk<<k0,,因此可忽略(4)式分母中的高阶小量2πΔk(ΔL)/L1,(4)式可以变换为:Where L 1 is the optical length of the active resonant cavity, ΔL=L 2 −L 1 , Δk=kk 0 . In the general active
其中表示有源法布里-珀罗谐振腔发出的总功率。由式(5)可以看出,光功率探测器接收到的功率P与有源法布里-珀罗谐振腔和无源环形谐振腔的光程差异ΔL有关,当ΔL为0时,光功率探测器接收到的功率最大,两光程偏离越多,则接收到的功率越小。因此,当传感区21的光学长度受到外界环境因素诸如应力,温度或者被测物质浓度等改变时,无源环形谐振腔总光学长度就会发生变化,导致ΔL变化,从而引起光功率探测器接收到的光功率变化。通过测量该功率变化,就可以获得应力,温度等被测信息。in Indicates the total power emitted by the active Fabry-Perot resonator. It can be seen from formula (5) that the power P received by the optical power detector is related to the optical path difference ΔL between the active Fabry-Perot resonator and the passive ring resonator. When ΔL is 0, the optical power The power received by the detector is the largest, and the more the two optical paths deviate, the smaller the received power will be. Therefore, when the optical length of the
图3给出了一个长度为200μm,折射率为3.215,工作波长在1550nm的有源法布里-珀罗谐振腔工作在阈值电流以下的荧光发射谱以及一个长度和折射率与该有源谐振腔相当,周长为400μm的无源环形谐振腔的透射谱。此时,两个谐振腔的光程差异ΔL为0,有源谐振腔的荧光发射谱和无源谐振腔的透射谱峰值互相对准,有源谐振腔发射出的功率为4.823mW。图4为有源法布里-珀罗谐振腔荧光发射谱与无源环形谐振腔透射谱互相叠加后的结果,即整个传感器的输出功率谱,计算得到光功率探测器探测到的总输出功率为3.995mW。Figure 3 shows the fluorescence emission spectrum of an active Fabry-Perot resonator with a length of 200 μm, a refractive index of 3.215, and an operating wavelength of 1550 nm below the threshold current, as well as a length and refractive index related to the active resonator Cavity comparable, transmission spectrum of a passive ring resonator with a circumference of 400 μm. At this time, the optical path difference ΔL of the two resonators is 0, the fluorescence emission spectrum of the active resonator is aligned with the peak value of the transmission spectrum of the passive resonator, and the power emitted by the active resonator is 4.823mW. Figure 4 is the result of superposition of the fluorescence emission spectrum of the active Fabry-Perot resonator and the transmission spectrum of the passive ring resonator, that is, the output power spectrum of the entire sensor, and the total output power detected by the optical power detector is calculated is 3.995mW.
当无源谐振腔的折射率因外界环境影响而从3.215变为3.217时,有源谐振腔的荧光发射谱和无源谐振腔的透射谱如图5所示,此时由于传感区等效折射率的改变,两个腔的光程有了小差异,有源谐振腔的荧光发射谱和无源谐振腔的透射谱峰值互相错开,有源谐振腔发射出的功率仍旧为4.823mW。图6为有源法布里-珀罗谐振腔荧光发射谱与无源环形谐振腔透射谱互相叠加后的结果,计算得到光功率探测器探测到的总输出功率为0.2862mW。When the refractive index of the passive resonant cavity changes from 3.215 to 3.217 due to the influence of the external environment, the fluorescence emission spectrum of the active resonant cavity and the transmission spectrum of the passive resonant cavity are shown in Figure 5. At this time, due to the equivalent With the change of the refractive index, there is a small difference in the optical path of the two cavities. The peaks of the fluorescence emission spectrum of the active resonant cavity and the transmission spectrum of the passive resonant cavity are staggered from each other, and the power emitted by the active resonant cavity is still 4.823mW. Fig. 6 is the superposition result of the fluorescence emission spectrum of the active Fabry-Perot resonator and the transmission spectrum of the passive ring resonator, and the calculated total output power detected by the optical power detector is 0.2862mW.
图7是输出光功率随无源环形谐振腔折射率变化的曲线,可见,折射率的微小变化就能引起传感器输出光功率的变化。在折射率变化在0~4×10-4的范围内,功率变化基本成线性,我们可以利用该区域做传感。Fig. 7 is a curve of the output optical power changing with the refractive index of the passive ring resonant cavity. It can be seen that a small change in the refractive index can cause a change in the output optical power of the sensor. In the range of 0~4×10 -4 of refractive index change, the power change is basically linear, and we can use this area for sensing.
由上述例子可见,当有源谐振腔工作在阈值以下时,可以通过探测传感器的输出功率变化就可以得到外界应力、温度等变化。当有源谐振腔工作在阈值以上时同样可以得到类似的探测效果。It can be seen from the above examples that when the active resonant cavity works below the threshold, changes in external stress and temperature can be obtained by detecting changes in the output power of the sensor. Similar detection effects can also be obtained when the active resonant cavity works above the threshold.
图8是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第二个实施方式,它包括带有内部增益的可发射等间隔梳状自发辐射谱或激光谱的有源环形谐振腔5和具有等间隔梳状滤波谱的无源环形谐振腔2,以及一个光功率探测器3,有源环形谐振腔通过第三无源波导51与无源环形谐振腔相连。另外,有源环形谐振腔还可以是内部带有分布式反馈光栅结构的多段式有源谐振腔等输出等间隔梳状自发辐射谱或激光谱的有源谐振腔。Fig. 8 is the second embodiment of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it according to the present invention, which includes a comb-shaped spontaneous emission spectrum or laser spectrum with internal gain that can emit equal intervals The
图9是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第三个实施方式,它包括带有内部增益的可发射等间隔梳状自发辐射谱或激光谱的有源法布里-珀罗谐振腔1和具有等间隔梳状滤波谱的无源法布里-珀罗谐振腔4,以及一个光功率探测器3,无源法布里-珀罗谐振腔包括:无源法布里-珀罗谐振腔第一反射镜42,无源法布里-珀罗谐振腔第二反射镜43,无源法布里-珀罗谐振腔无源波导区40,光学长度能随外界环境改变而改变的无源法布里-珀罗谐振腔传感区41。另外,无源法布里-珀罗谐振腔还可以是内部带有分布式反馈光栅结构的多段式有源谐振腔等输出等间隔梳状自发辐射谱或激光谱的无源谐振腔。Fig. 9 is the third embodiment of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it of the present invention, which includes a comb-shaped spontaneous emission spectrum or laser spectrum with internal gain that can emit equal intervals Active Fabry-
图10是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第四个实施方式,它包括一个带有内部增益的具有等间隔梳状光谱输出的有源法布里-珀罗谐振腔1和一个具有等间隔梳状滤波谱的无源环形谐振腔2,以及一个光功率探测器3;有源环形谐振腔是一个施加了周期与光子在有源谐振腔中的运行周期相同的微波驱动信号11从而保持其发射光谱不受外界干扰的有源法布里-珀罗谐振腔1。Fig. 10 is the fourth embodiment of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it of the present invention, which includes an active Fab with internal gain with equally spaced comb spectral
由(5)式可知,光功率探测器3获得的光功率和有源法布里-珀罗谐振腔1和无源环形谐振腔2光程差有关,因此任何有源法布里-珀罗谐振腔1光程的变化也会造成功率的波动,特别是工作在阈值以上的多模激光器由于模式竞争造成输出光谱和功率的不稳定,导致对测量结果的干扰,但如果用前述微波信号11驱动有源法布里-珀罗谐振腔1,那么其谐振频率可以被精确的锁定,从而可以减少有源法布里-珀罗谐振腔1对探测结果造成的干扰,提高传感的灵敏度。It can be seen from formula (5) that the optical power obtained by the
图11是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第五个实施方式,它包括一个带有内部增益的具有等间隔梳状光谱输出的有源法布里-珀罗谐振腔1和一个具有等间隔梳状滤波谱的无源环形谐振腔2,以及一个光功率探测器3;此外,在有源法布里-珀罗谐振腔第二反射镜12的外侧设有另一个光功率探测器6,用于接收未经过无源环形谐振腔滤波的输出光谱。Fig. 11 is the fifth embodiment of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it of the present invention, which includes an active Fab with internal gain with equally spaced comb spectral
有源法布里-珀罗谐振腔1在受到外界环境变化的干扰时输出功率会发生波动,特别是工作在阈值以上的多模激光器由于模式竞争效应造成的输出光谱和功率不稳定会对测量结果有干扰,而本实施方式中光功率探测器6得到的光功率能够反映此类的功率波动,因此,通过将光功率探测器3和6上得到的功率进行对比,能够滤除外界干扰带来的有源谐振腔功率不稳定,提高传感精度。The output power of the active Fabry-
图12是本发明基于有源谐振腔和与之级联的无源谐振腔的光传感器的第六种实施方式。它至少包括一个带有内部增益的具有等间隔梳状光谱输出的有源法布里-珀罗谐振腔1和一个具有等间隔梳状滤波谱的无源环形谐振腔2,以及光谱仪7;有源法布里-珀罗谐振腔与无源环形谐振腔的光学长度不同,无源环形谐振腔中至少设有一段光学长度能随外界环境改变而改变的无源环形谐振腔传感区21,有源法布里-珀罗谐振腔发射的光谱通过第一无源波导22输入到无源环形谐振腔,经过无源环形谐振腔的滤波之后,通过第二无源波导23被光谱仪7所接收。FIG. 12 is the sixth implementation of the optical sensor based on the active resonant cavity and the passive resonant cavity cascaded with it according to the present invention. It includes at least one active Fabry-
本实施方式中无源环形谐振腔的光程与有源法布里-珀罗谐振腔略有不同,两个谐振腔的谐振模式频率间隔也略微不同,分别是Δf和Δf,这使得在激光器材料增益谱范围内两个谐振腔的谐振模式仅在fo处完全重合,如图13。此时,只有频率fo的光能较低损耗地通过无源环形谐振腔,从而在光谱仪上能看到fo的强度远远大于相邻的模式。当无源环形谐振腔的光程由于传感区(虚线框内部分)等效折射率的改变而改变时,无源环形谐振腔的滤波谱线会产生一个整体偏移,导致重合峰向相邻的谐振峰移动,而Δf和Δf的最小公倍数成为自由光谱范围。各谐振峰的相对光功率分布变化,利用一个外接光谱仪7就可以测出折射率变化。由于利用了游标效应,因此该方法比传统的单个无源谐振环具有更高的灵敏度。The optical path of the passive ring resonator in this embodiment is slightly different from that of the active Fabry-Perot resonator, and the resonant mode frequency intervals of the two resonators are also slightly different, which are Δf and Δf respectively, which makes the laser The resonant modes of the two resonators within the material gain spectrum completely coincide only at fo, as shown in Figure 13. At this time, only the light of frequency fo can pass through the passive ring resonant cavity with low loss, so the intensity of fo can be seen on the spectrometer is much greater than that of the adjacent modes. When the optical path of the passive ring resonator changes due to the change of the equivalent refractive index of the sensing region (the part inside the dotted line frame), the filtering spectral lines of the passive ring resonator will have an overall shift, resulting in the coincidence peaks towards the phase The adjacent harmonic peaks move, and the least common multiple of Δf and Δf becomes the free spectral range. The change of the relative optical power distribution of each resonance peak can be measured by using an
图14给出了一个长度为200μm,折射率为3.215,工作波长在1550nm的有源法布里-珀罗谐振腔工作在阈值电流以下的荧光发射谱以及一个周长为360μm,折射率与该有源谐振腔相同的无源环形谐振腔的透射谱。此时,两个谐振腔的谐振模式在1550nm处完全重合,有源法布里-珀罗谐振腔的发射谱中只有1550nm波长的光能较低损耗地通过无源环形谐振腔,从光谱仪上可以得到如图15所示的光谱。Figure 14 shows the fluorescence emission spectrum of an active Fabry-Perot resonator with a length of 200 μm, a refractive index of 3.215, and a working wavelength of 1550 nm below the threshold current, and a circumference of 360 μm, with a refractive index corresponding to the Transmission spectrum of the same passive ring resonator as the active resonator. At this time, the resonant modes of the two resonators completely overlap at 1550nm, and in the emission spectrum of the active Fabry-Perot resonator, only the light energy with a wavelength of 1550nm passes through the passive ring resonator with low loss, and the light from the spectrometer The spectrum shown in Figure 15 can be obtained.
当无源谐振腔的折射率因外界环境影响而从3.215变为3.2155时,有源谐振腔的荧光发射谱和无源谐振腔的透射谱如图16所示,由于无源环形谐振腔透射谱的移动,两个谐振腔的谐振模式变为在1548nm处完全重合,只有1548nm波长的光能较低损耗地通过无源环形谐振腔,在光谱仪上得到如图17所示的光谱。When the refractive index of the passive resonator changes from 3.215 to 3.2155 due to the influence of the external environment, the fluorescence emission spectrum of the active resonator and the transmission spectrum of the passive resonator are shown in Figure 16. Since the transmission spectrum of the passive ring resonator The resonant modes of the two resonators become completely overlapped at 1548nm, and only the light with a wavelength of 1548nm passes through the passive ring resonator with low loss, and the spectrum shown in Figure 17 is obtained on the spectrometer.
由上述分析可得到,当无源环形谐振腔的折射率变化5×10-4时,该传感器的输出光谱中能量最大的模式就发生一次跳变,可以简单的用模式跳变的个数来换算出无源环形谐振腔波导折射率的变化量,进一步转化到外界环境的变化(如温度,湿度)。另外,当折射率的变化介于两个状态之间时,我们可以通过输出光谱中两个能量相当的模式之间的功率比值(如图18)来进一步细化折射率的分辨率。From the above analysis, it can be obtained that when the refractive index of the passive ring resonator changes by 5×10 -4 , the mode with the highest energy in the output spectrum of the sensor undergoes a jump, which can be simply calculated by the number of mode jumps The amount of change in the refractive index of the passive ring resonator waveguide is converted, and further transformed into changes in the external environment (such as temperature and humidity). In addition, when the refractive index changes between two states, we can further refine the resolution of the refractive index by outputting the power ratio between two energy-equivalent modes in the spectrum (as shown in Figure 18).
上述实施例用来解释说明本发明,而不是对本发明进行限制。在本发明的精神和权利要求的保护范围内,对本发明作出的任何修改和改变,都落入本发明的保护范围。例如有源法布里-珀罗谐振腔可以换作其他任何可发射等间隔梳状自发辐射谱或激光谱的有源谐振腔,而无源环形谐振腔可以换做任何其他可以产生周期性滤波谱线的光学结构,如刻蚀衍射光栅,阵列波导光栅,采样布拉格光栅等。The above-mentioned embodiments are used to illustrate the present invention, but not to limit the present invention. Within the spirit of the present invention and the protection scope of the claims, any modification and change made to the present invention will fall into the protection scope of the present invention. For example, the active Fabry-Perot resonator can be replaced by any other active resonator that emits equally spaced comb-like spontaneous emission spectrum or laser spectrum, and the passive ring resonator can be replaced by any other that can generate periodic filtering Optical structures of spectral lines, such as etched diffraction gratings, arrayed waveguide gratings, sampled Bragg gratings, etc.
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CN102169027A (en) * | 2011-01-13 | 2011-08-31 | 华中科技大学 | Quasi-distributed optical fiber temperature and stress sensor and detector |
CN103884683B (en) * | 2014-03-25 | 2016-04-27 | 浙江大学 | Based on the optical sensor of F-P semiconductor laser and the cascade of film F-P optical filter |
CN105355024B (en) * | 2015-12-02 | 2019-04-12 | 中北大学 | The wired extracting method and device of adverse circumstances physical parameter |
CN106290170B (en) * | 2016-07-27 | 2019-10-25 | 哈尔滨工业大学深圳研究生院 | An ultra-high-sensitivity fiber-optic humidity sensor based on a full-agar F-P cavity |
CN108759880B (en) * | 2018-04-28 | 2020-05-12 | 中国科学技术大学 | On-chip optical microcavity sensor and optical microcavity coupled waveguide sensing device using the same |
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