CN101261222A - High-sensitivity micro- resonant cavity photo-sensor - Google Patents
High-sensitivity micro- resonant cavity photo-sensor Download PDFInfo
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- CN101261222A CN101261222A CNA2008100604608A CN200810060460A CN101261222A CN 101261222 A CN101261222 A CN 101261222A CN A2008100604608 A CNA2008100604608 A CN A2008100604608A CN 200810060460 A CN200810060460 A CN 200810060460A CN 101261222 A CN101261222 A CN 101261222A
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Abstract
The invention discloses a micro resonant cavity light sensor with high sensitivity which comprises an input waveguide, a micro resonant cavity, an output waveguide and a light power attenuator. The input waveguide and the output waveguide are respectively coupled with the micro resonant cavity and arranged at two sides of the micro resonant cavity; one end of the input waveguide is a light source access of the whole light sensor and the other end is connected with an input terminal of the light power attenuator; an output terminal of the light power attenuator is connected with one end of the output waveguide; and the other end of the output waveguide is an exit end of sensing signals. The micro resonant cavity light sensor has the simple structure and the convenient design and is produced by only needing the standard process. By using the design of the micro resonant cavity, very sharp spectrum response can be realized; and consequently the test with high accuracy and high sensitivity can be realized.
Description
Technical field
The present invention relates to a kind of micro-resonant cavity photo-sensor, belong to optical sensor spare field.
Background technology
In recent years, demand low-cost, high sensitivity moral miniature transducer constantly increases, especially at aspects such as biology, environment and chemistry.Address that need, be subjected to everybody gradually based on the integrated-type optical sensor of plane light wave waveguide technology and pay close attention to.At present existing multiple structure, as Mach-Zehnder interferometer (A.Densmore, etal.A silicon-on-insulator photonic wire based evanescent field sensor.IEEEPhotonics Technology Letters, 18 (23): 2520-2522,2006), surface plasma wave sensing (Homola J, et al.Surface plasmon resonance sensors:review.Sensors and ActuatorsB-Chemical, 54 (1-2): 3-15,1999) and little ring/micro-resonant cavity structures such as little dish (Sang-Yeon Choet al.A Polymer Microdisk Photonic Sensor Integrated Onto Silicon.IEEE PhotonicsTechnology Letters, 18 (20): 2096-2098,2006).Wherein, micro-resonant cavity such as little ring/little dish becomes one of the most promising sensor construction owing to having size array little, that be easy to form high integration.Therefore when the optical waveguide effective refractive index changed along with target substance concentration, the resonance wavelength of micro-resonant cavity was drifted about, and can record the concentration change of target substance by testing this wave length shift.Yet, in order to realize more accurate test, must the higher optical sensor of development precision.
Summary of the invention
The objective of the invention is a kind of high-sensitivity micro-resonant cavity photo-sensor.
High-sensitivity micro-resonant cavity photo-sensor of the present invention, comprise input waveguide, micro-resonant cavity, output waveguide and optical power attenuation device, input waveguide and output waveguide are coupled with micro-resonant cavity respectively, place the both sides of micro-resonant cavity, one end of input waveguide is the light source incoming end of overall optical sensor, the other end of input waveguide links to each other with the input end of optical power attenuation device, and the output terminal of optical power attenuation device links to each other with an end of output waveguide, and the other end of output waveguide is the transducing signal exit end.
Above-mentioned micro-resonant cavity can be little ring, little dish, microballoon or photon crystal micro cavity, also can be any two or more combination of little ring, little dish, microballoon and these several structures of photon crystal micro cavity.
Above-mentioned optical power attenuation device can be bent lightguide, Y branch, directional coupler, multi-mode interference coupler or Mach-Zehnder interferometer, or is two optical waveguides that have gap or lateral excursion in the junction.
Its course of work is: measured matter is covered the upper surface of micro-resonant cavity sensor, and light is coupled with micro-resonant cavity from an end incident of input waveguide, and the wavelength that satisfies resonance is at micro-resonant cavity generation resonance, and exports from output waveguide.The light that does not satisfy resonance wavelength then enters output waveguide from the other end outgoing of input waveguide and through the optical power attenuation device, wherein part light is because the coupling between output waveguide and the micro-resonant cavity, be coupled into micro-resonant cavity once more, and another part is from the outgoing of the output waveguide other end.When the measured matter material refractive index changed, micro-resonant cavity resonance wavelength was drifted about.Variation by drift of test resonance wavelength or a certain fixed wave length power can realize the high sensitivity sensing.
The effect that the present invention is useful is:
The present invention is simple in structure, and design is convenient, only needs standard technology to make.The design of employing micro-resonant cavity can realize very sharp-pointed spectral response, thereby realizes high precision, high sensitivity testing.
Description of drawings
Fig. 1 is that the optical power attenuation device in the micro-resonant cavity sensor is the synoptic diagram of bent lightguide;
Fig. 2 is that the optical power attenuation device in the micro-resonant cavity sensor is the synoptic diagram of directional coupler;
Fig. 3 is that the optical power attenuation device in the micro-resonant cavity sensor is the synoptic diagram of Mach-Zehnder interferometer;
Fig. 4 is that the optical power attenuation device in the micro-resonant cavity sensor is the synoptic diagram of Y branch;
Fig. 5 is that the optical power attenuation device in the micro-resonant cavity sensor is the synoptic diagram of multi-mode interference coupler;
Fig. 6 is that the optical power attenuation device in the micro-resonant cavity sensor is two synoptic diagram that have the optical waveguide in gap in the junction;
Fig. 7 is that the optical power attenuation device in the micro-resonant cavity sensor is two synoptic diagram that have the optical waveguide of lateral excursion in the junction;
Fig. 8 is that the spectral response of the present invention and traditional micro-resonant cavity sensor is compared, and solid line is the spectral response of micro-resonant cavity sensor of the present invention among the figure, and dotted line is the spectral response of traditional micro-resonant cavity sensor;
Fig. 9 is when effective variations in refractive index 2 * 10
-5The time, the spectral response situation of change, curve 1,2 is respectively the forward and backward spectral response curve of the present invention of variations in refractive index among the figure; Curve 3,4 is respectively the spectral response curve of the forward and backward traditional micro-resonant cavity sensor of variations in refractive index.
Embodiment
With reference to Fig. 1, high-sensitivity micro-resonant cavity photo-sensor of the present invention, comprise input waveguide 1, micro-resonant cavity 2, output waveguide 3 and optical power attenuation device 4, input waveguide 1 and output waveguide 3 are coupled with micro-resonant cavity 2 respectively, place the both sides of micro-resonant cavity 2, one end of input waveguide 1 is the light source incoming end of overall optical sensor, the other end of input waveguide 1 links to each other with the input end of optical power attenuation device 4, the output terminal of optical power attenuation device 4 links to each other with an end of output waveguide 3, and the other end of output waveguide 3 is the transducing signal exit end.In the example shown in Figure 1, the optical power attenuation device is a bent lightguide.
Perhaps the optical power attenuation device also can adopt directional coupler, Mach-Zehnder interferometer, Y branch, multi-mode interference coupler, two optical waveguide or two optical waveguides that have lateral excursion in the junction that have the gap in the junction respectively as Fig. 2～shown in Figure 7.
When the measured matter refractive index changed, the effective refractive index of micro-resonant cavity also changed, thereby resonance wavelength is drifted about.Variation by drift of test resonance wavelength or a certain fixed wave length power can realize the high sensitivity sensing.
Be example with micro-resonant cavity sensor shown in Figure 4 below, illustrate that the present invention has highly sensitive characteristics.
In this example, micro-resonant cavity adopts little ring structure, little ring radius R=10 μ m, and the optical power attenuation device adopts Y branch, and transmitance is 50%.The spectral response curve of the present invention and traditional micro-resonant cavity sensor is relatively seen Fig. 8, and as seen from the figure, near the spectral response curve of micro-resonant cavity sensor of the present invention slope wavelength 1547.52nm is very big.
Fig. 9 has provided when effective refractive index change delta n=2 * 10
-5The time, the spectral response situation of change, as seen figure all can record the variation that the measured matter refractive index is taken place by the variation of testing resonance wavelength drift or a certain fixed wave length (as 1547.52nm) power thus.Because the spectral response curve slope is very big,, then can reach higher transducer sensitivity if adopt the power variation of test fixed wave length (1547.52nm).For example, when Δ n=2 * 10
-5, the power at 1547.52nm place is reduced to 0.25 from 0.95, so its sensitivity even can reach 2 * 10
-6
Test shows, adopts the optical power attenuation device of alternate manner also can reach same effect.
The foregoing description is used for the present invention that explains, rather than limits the invention, and in the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (4)
1, a kind of high-sensitivity micro-resonant cavity photo-sensor, it is characterized in that comprising input waveguide (1), micro-resonant cavity (2), output waveguide (3) and optical power attenuation device (4), input waveguide (1) and output waveguide (3) are coupled with micro-resonant cavity (2) respectively, place the both sides of micro-resonant cavity (2), one end of input waveguide (1) is the light source incoming end of overall optical sensor, the other end of input waveguide (1) links to each other with the input end of optical power attenuation device (4), the output terminal of optical power attenuation device (4) links to each other with an end of output waveguide (3), and the other end of output waveguide (3) is the transducing signal exit end.
2, high-sensitivity micro-resonant cavity photo-sensor according to claim 1 is characterized in that micro-resonant cavity (2) is little ring, little dish, microballoon or photon crystal micro cavity.
3, high-sensitivity micro-resonant cavity photo-sensor according to claim 1 is characterized in that micro-resonant cavity (2) is any two or more combination of little ring, little dish, microballoon and these several structures of photon crystal micro cavity.
4, high-sensitivity micro-resonant cavity photo-sensor according to claim 1, it is characterized in that optical power attenuation device (4) is bent lightguide, Y branch, directional coupler, multi-mode interference coupler or Mach-Zehnder interferometer, or be two optical waveguides that have gap or lateral excursion in the junction.
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101871790A (en) * | 2010-06-08 | 2010-10-27 | 浙江大学 | Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter |
| CN101900575A (en) * | 2010-06-22 | 2010-12-01 | 浙江大学 | Opto-sensor based on active resonant cavity and passive resonant cavity cascaded with same |
| CN101975763A (en) * | 2010-08-24 | 2011-02-16 | 中北大学 | Integrated probe type microsphere cavity sensor |
| CN101825480B (en) * | 2010-01-29 | 2011-06-08 | 浙江大学 | Broadband light source and cascaded optical waveguide filter-based optical sensor |
| WO2011091735A1 (en) * | 2010-01-29 | 2011-08-04 | 浙江大学 | Optical sensor based on broadband light source and cascaded optical waveguide filter |
| CN102636456A (en) * | 2012-03-02 | 2012-08-15 | 中国科学院半导体研究所 | Sensor integrated with light waveguides and micro-cavities based on light intensity detection |
| CN103808692A (en) * | 2014-01-20 | 2014-05-21 | 浙江大学 | Mach-Zehnder interferometer and micro-cavity cascaded intensity detection type sensor |
| CN105675545A (en) * | 2016-01-15 | 2016-06-15 | 浙江工业大学 | High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor |
| CN110849843A (en) * | 2019-11-06 | 2020-02-28 | 东南大学 | Silicon-based refractive index sensor based on cascading U-shaped waveguide nested micro-ring |
| EP4152082A4 (en) * | 2020-05-21 | 2023-11-08 | ZTE Corporation | Optical modulator and control method therefor |
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2008
- 2008-04-11 CN CN200810060460A patent/CN100593711C/en not_active Expired - Fee Related
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2011091735A1 (en) * | 2010-01-29 | 2011-08-04 | 浙江大学 | Optical sensor based on broadband light source and cascaded optical waveguide filter |
| CN101825480B (en) * | 2010-01-29 | 2011-06-08 | 浙江大学 | Broadband light source and cascaded optical waveguide filter-based optical sensor |
| CN101871790A (en) * | 2010-06-08 | 2010-10-27 | 浙江大学 | Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter |
| CN101871790B (en) * | 2010-06-08 | 2012-03-21 | 浙江大学 | Photo sensor based on vernier effect of broadband light source and cascading optical waveguide filter |
| CN101900575B (en) * | 2010-06-22 | 2012-05-02 | 浙江大学 | Opto-sensor based on active resonant cavity and passive resonant cavity cascaded with same |
| CN101900575A (en) * | 2010-06-22 | 2010-12-01 | 浙江大学 | Opto-sensor based on active resonant cavity and passive resonant cavity cascaded with same |
| CN101975763A (en) * | 2010-08-24 | 2011-02-16 | 中北大学 | Integrated probe type microsphere cavity sensor |
| CN102636456A (en) * | 2012-03-02 | 2012-08-15 | 中国科学院半导体研究所 | Sensor integrated with light waveguides and micro-cavities based on light intensity detection |
| CN103808692A (en) * | 2014-01-20 | 2014-05-21 | 浙江大学 | Mach-Zehnder interferometer and micro-cavity cascaded intensity detection type sensor |
| CN103808692B (en) * | 2014-01-20 | 2015-11-11 | 浙江大学 | The strength investigation type sensor of a kind of Mach-Zehnder interferometer and microcavity cascade |
| CN105675545A (en) * | 2016-01-15 | 2016-06-15 | 浙江工业大学 | High-sensitivity intensity detection method based on self-interference type micro resonator cavity light sensor |
| CN110849843A (en) * | 2019-11-06 | 2020-02-28 | 东南大学 | Silicon-based refractive index sensor based on cascading U-shaped waveguide nested micro-ring |
| EP4152082A4 (en) * | 2020-05-21 | 2023-11-08 | ZTE Corporation | Optical modulator and control method therefor |
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| CN100593711C (en) | 2010-03-10 |
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