CN108413875A - A kind of adjustable non-contact type high-precision length measuring system of scale - Google Patents
A kind of adjustable non-contact type high-precision length measuring system of scale Download PDFInfo
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- CN108413875A CN108413875A CN201810062527.5A CN201810062527A CN108413875A CN 108413875 A CN108413875 A CN 108413875A CN 201810062527 A CN201810062527 A CN 201810062527A CN 108413875 A CN108413875 A CN 108413875A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
Abstract
A kind of adjustable non-contact type high-precision length measuring system of scale, is related to optical precision measurement field.Including:Optical measurement projection module, for forming light and shade interference fringe as optical measurement ruler scale on measured piece surface；Optical projection mark module, for forming mark of the spectral signature as optical measurement ruler scale on measured piece surface；Data collection and analysis module for acquiring the interference fringe of workpiece and workpiece surface, the image information of spectral signature, and goes out according to image information digital simulation the size of measured piece.The present invention constructs one without under conditions of being contacted with workpiece using laser interference principle, it almost can measure to real-time and precise the scheme of the high-precision optical measuring scale of workpiece size, and the process for hardly interfering workpiece, can thus significantly increase production efficiency.
Description
Technical field
The present invention relates to optical precision measurement field, specially a kind of adjustable non-contact type high-precision linear measure longimetry of scale
System.
Background technology
For workpiece in carrying out the process such as cutting, grinding, operator confirms the size of current workpiece if necessary,
Vernier caliper, micrometer caliper or micrometer equal length survey tool can generally be used.But based on the measurement of the above tool
Journey inevitably interrupts the process of workpiece, so the measurement of workpiece size can cause centainly the processing progress of workpiece
Influence.In addition, in measurement process, especially repeatedly measurement, generated due to being difficult accurately to be aligned survey tool with workpiece
Error can influence the machining accuracy of workpiece.
Principle of optical interference in optics has a wide range of applications in the industry, for example, laser interferometer, holographic imaging and
Spectrum analysis is all based on this.Wherein, the laser interferometer that can accurately measure change in optical path length is usually used to and accurately surveys
It measures the relative displacement of object or the opposite variation of light communication media, precision is even higher in Nano grade.For example, gravitation
The successful discovery of wave is precisely due to the laser interferometer measurement of superelevation sensitivity has arrived fine spatial deformation caused by gravitational wave.Laser
The sensitivity of interferometer comes from the generating mode of signal, and the homologous coherent beam in interferometer in two-arm is finally with conllinear side
Formula is completely superposed, coherently projects on detector.The cosine value of the angle corresponding to signal and optical path difference measured is linear
Relationship.Because the corresponding angle of optical path difference of single wavelength is 2 π, optical path difference often changes half wavelength, the signal detected
A change procedure from minimum value to maximum value will be undergone.If the laser used is visible light, such as 600nm, then
Only 300nm corresponding to half wavelength.When the intensity of the homologous light of two beams is equal, the minimum value of measured interference signal
It is zero, maximum value is four times of single beam intensity, therefore, can be by the interference measured by detector in practical measurement process
The concrete numerical value of the intensity of signal is precisely calculated the variation of optical path difference, i.e. the relative displacement of object or beam propagation medium
Opposite variation.
Although above interference technique has high sensitivity, but because can only provide the coherent signal of single-point, nothing
Method intuitively calibrates the size of object and uses as a visible high-acruracy survey ruler.
Invention content
The object of the present invention is to provide a kind of adjustable non-contact type high-precision length measuring system of scale, which passes through
Light and shade interference fringe is incident upon measured piece surface by optical measurement projection module, and light will be formed by optical projection mark module
Spectrum mark is incident upon measured piece surface as mark, acquires image information by data collection and analysis module and according to image
Information accurately calculates the size for fitting measured piece, measurement accuracy is up to nanoscale, to for described in background technology can not
The size for intuitively calibrating object provides an effective solution scheme.
Realize that above-mentioned purpose obtains technical solution and is：A kind of adjustable non-contact type high-precision length measuring system of scale,
It is characterized in that：Including:
Optical measurement projection module, for forming light and shade interference fringe as optical measurement ruler scale on measured piece surface；
Optical projection mark module, for forming mark of the spectral signature as optical measurement ruler scale on measured piece surface；
Data collection and analysis module, for acquiring the interference fringe of workpiece and workpiece surface, the image information of spectral signature,
And go out the size of measured piece according to image information digital simulation.
Further, the optical measurement projection module includes laser, beam expander, the first reflective mirror, narrowband reflection mirror
And the spectroscope of adjustable angle；
Beam expander is arranged on the light beam outbound course of laser, and spectroscope is arranged on the light outbound course of beam expander, the
One reflective mirror is arranged in spectroscopical transmission direction, and the setting of narrowband reflection mirror is in light splitting specular reflection direction；
The light beam that the laser the projects mirror that is split after beam expander expands is divided into a branch of horizontal light of isocandela and a branch of phase
To the first oblique light ray that vertical bars deflection angle is a, the first oblique light ray reflects to form a branch of opposite through narrowband reflection mirror
Vertical bars deflection angle is the third oblique light ray of c, and horizontal light beam returns to spectroscope, again by dividing through the first mirror reflection
Light microscopic reflects to form the second oblique light ray that a branch of Relative vertical vertical line deflection angle is b, and third oblique light ray passes through spectroscope
The light and shade interference fringe for being incident upon measured piece surface is cooperatively formed with the second oblique light ray.
Further, the optical projection mark module includes mercury lamp light source, short focus collimation convex lens, packaged type gear
Tabula rasa, reflective gratings, long-focus collimation convex lens, the second reflective mirror；
Short focus collimation convex lens is arranged on the outbound course of mercury lamp light source, and reflective gratings setting collimates convex lens in short focus
On the light outbound course of mirror, long-focus collimation convex lens is arranged on the light outbound course of reflective gratings, and second is reflective
Mirror is arranged on the light outbound course that long-focus collimates convex lens；
The light that mercury lamp light source projects is through short focus collimation convex lens shape at the collimated light beam directive reflective gratings of narrow diameter, reflection
Formula grating by different-waveband pipeline diffraction to different angles, then through long-focus collimation convex lens shape at wide diameter collimation mark light
Beam, wide diameter collimation mark light beam form bands of a spectrum mark by the second mirror reflection to measured piece surface；
The packaged type light barrier setting is collimated in short focus between convex lens and reflective gratings, in the state of immigration, edge
The light that short focus collimation convex lens projects is blocked by packaged type light barrier, and when removing state, convex lens is collimated along short focus
The light of injection directive reflective gratings without barrier.
Further, data collection and analysis module includes computer, is arranged above measured piece and changes with interference fringe
The parallel guide rail in direction is provided with the optical camera that can be walked along guide rail on guide rail, and optical camera is connect with computer, light
Downward, the camera lens of optical camera is the optical amplifier camera lens of adjustable magnification to the camera lens of video camera.
Further, the optical camera is mounted on by pivotal slide mechanism on guide rail, and pivotal slide mechanism includes
The sliding platform being slidably mounted on guide rail is connected with electric rotating machine on sliding platform, and the output end of electric rotating machine is connected with water
The shaft of flat setting, the output end of shaft are connected with mounting bracket, and the optical camera is connected on mounting bracket；
Lead screw is connected with by screw rodb base on guide rail, be connected on the sliding platform with the matched nut of wire rod thread, it is described
One end of lead screw is connected with driving motor.
The mounting bracket and the optical camera being connected on mounting bracket are arranged on the outside of the end of guide rail.
The concrete operating principle of the present invention will be illustrated in specific embodiment part.
Beneficial effects of the present invention：
1, the present invention constructs one using laser interference principle and is not necessarily under conditions of being contacted with workpiece, can almost real-time and precise
The scheme of the high-precision optical measuring scale of workpiece size is measured on ground, and hardly interferes the process of workpiece, in this way
Production efficiency can be significantly increased.
2, measurement accuracy of the invention not only matches in the market up to Nano grade to precision machined requirement, Er Qiewei
Processing staff provides a visual linear measure longimetry means, so that processing staff is producing height with low side process equipment
It is gathered around when precision workpiece there are one reliable reference standard, to provide a kind of saving money in terms of work pieces process for production capacity upgrading
The Green Development approach in source.
3, present invention can apply to the workpiece calibrations in workpiece process, and measurement accuracy is hardly by the shadow of temperature
It rings, therefore the precision, efficiency and yield of work pieces process can be significantly increased.
Description of the drawings
Fig. 1 is the schematic diagram of the present invention；
Fig. 2 is that workpiece interference fringe is incident upon the schematic diagram on workpiece；
Fig. 3 is the driving structure schematic diagram of mobile light barrier；
Fig. 4 is the structural schematic diagram of data collection and analysis module；
Fig. 5 is the data analysis step flow chart of data collection and analysis module；
Fig. 6 be measured workpiece, interference fringe, optical camera pixel ranks location diagram；
Fig. 7 is the schematic diagram that measuring system is mounted on two-dimension rotating platform.
Specific implementation mode
As shown in Fig. 1-4, the present invention includes optical measurement projection module 1, optical projection mark module 2 and data acquisition
Analysis module 3.
Optical measurement projection module 1 includes frequency stabilized He-Ne laser 11, beam expander 12, the first reflective mirror 13, narrowband reflection
The wavelength of the spectroscope 15 of mirror 14 and adjustable angle, frequency stabilized He-Ne laser 11 is 632nm, and wavelength stability is higher than
0.1ppm；Beam expander 12 includes being successively set on the light beam of frequency stabilized He-Ne laser 11 to project concavees lens 121 and convex on direction
Lens 122；Narrowband reflection mirror 14 is strictly perpendicular to vertical direction and only light beam, transmission other waves of the reflection wavelength for 632nm
Long light beam；First reflective mirror 13 is strictly perpendicular to horizontal direction；The light splitting ratio of spectroscope 15 is 1:1, spectroscope 15 is arranged
There is frame, and on hollow L-shaped angular adjustment frame 16,15 lower end frame of spectroscope is hinged with angular adjustment frame 16, point
It is provided with tension spring 40 between the both sides frame and angular adjustment frame 16 of light microscopic 15, the threaded upper ends of angular adjustment frame 16 are connected with micro-
Knob 17, the upper end frame of spectroscope 15 is adjusted to be supported on vernier knob 17.
Beam expander 12 is arranged on the light beam outbound course of frequency stabilized He-Ne laser 11, and spectroscope 15 is arranged in beam expander 12
Light outbound course on, the first reflective mirror 13 is arranged in the transmission direction of spectroscope 15, narrowband reflection mirror 14 setting point
On 15 reflection direction of light microscopic；It is about 10cm's that the light beam that frequency stabilized He-Ne laser 11 projects forms diameter after beam expander 12 expands
Collimated light beam, according to the Rayleigh range range formula of laser, this light beam is considered flat within the working range of this measuring system
Surface wave, the collimated light beam of the 10cm mirror 15 that is split are divided into a branch of horizontal light k of isocandela and a branch of Relative vertical vertical line deflection angle
The first oblique light ray g, horizontal light k that degree is a reflects back into spectroscope 15, anti-by spectroscope 15 again through the first reflective mirror 13
The a branch of second oblique light light n to form that a branch of Relative vertical vertical line deflection angle is b is penetrated, the first oblique light ray g is anti-through narrowband
It penetrates mirror 14 and reflects to form a branch of third oblique light ray m that a branch of Relative vertical vertical line deflection angle is c, third oblique light ray m is worn
It crosses spectroscope 15 and the second oblique light ray n cooperatively forms the light and shade interference fringe shown in Fig. 2 for being incident upon 45 surface of measured piece
46 should select carry on the market herein as optical measurement ruler scale in addition to ensuring the measurement accuracy of this measuring system
The flatness of confession uses up measured reflective mirror 13, narrowband reflective mirror 14 and spectroscope 15.
Vernier knob 17 be used for spectroscope 15 angle adjustment, rotary fine adjustment knob 17 can adjust third oblique light ray m,
The size of angle e between second oblique light ray n, to realize the adjusting of optical measurement ruler scale size, specially：It rotates micro-
Knob 17 is adjusted, size of the spectroscope 15 horizontal by the angle d between the oblique line q of 45 ° of angles is adjusted, you can use adjusting a, b,
The size of c, it is final to realize the big minor adjustment of angle e, and a=b=c=2d, e=4d can be derived by geometrical relationship.
Size by adjusting angle e adjusts optical measurement ruler scale size, it is ensured that third oblique light ray m and the
Angular bisector between two oblique light ray n is constant, flat without recalibrating this angle to make operating personnel after having adjusted scale
Direction of the separated time relative to measured piece surface.
The intensity distribution for the interference fringe that third oblique light ray m and the second oblique light ray n are formed can be by following formula table
It reaches：
According to formula（1）, for convenience of explanation, on the basis of the coordinate-system of Fig. 2, defined herein light and shade interference fringe gradient becomes
Change direction is X-direction, and the direction of interference fringe arrangement is Y direction, the angle of third oblique light ray m and the second oblique light ray n
Bisector direction is Z-direction, and the period P of interference fringe is：
Wherein, λ is wavelength, is 1 °, for light beam wavelength λ ≈ 632nm by θ, the period of change of interference fringe is：
By formula (2) it is found that in the case where third oblique light ray m and the second oblique light ray n is plane wave, interference fringe variation
Only angle between wavelength and two light beams is related period, it is unrelated at a distance from striped to light source, and not by temperature fluctuation institute
The caused influence expanded with heat and contract with cold.Therefore use interference fringe as scale be an ideal selection.
Optical projection mark module 2 includes mercury lamp light source 21, short focus collimation convex lens 22, packaged type light barrier
20, reflective gratings 23, long-focus collimation convex lens 24, the second reflective mirror 25.
Short focus collimation convex lens 22 is arranged on the outbound course of mercury lamp light source 21, and reflective gratings 23 are arranged in short focus
On light outbound course away from collimation convex lens 22, the light output in reflective gratings 23 is arranged in long-focus collimation convex lens 24
On direction, the second reflective mirror 25 is arranged on the light outbound course that long-focus collimates convex lens 24.
The collimated light beam directive that the light that mercury lamp light source 21 projects forms narrow diameter through short focus collimation convex lens 22 is reflective
Different-waveband light diffraction to different angles, and is made the wave band between entire visible region by grating 23, reflective gratings 23
It falls in long-focus collimation convex lens 24, then the wide diameter collimation mark light beam formed through long-focus collimation convex lens 24, at this point, former
Different-waveband in wide spectrum light source in visible-range occupies wide diameter light beam different location, and wide diameter collimation mark light beam passes through second
Reflective mirror 25 reflexes to 45 surface of measured piece and forms bands of a spectrum mark.
Packaged type light barrier 20 is slidably mounted on sliding rail 202 by sliding block 201 and is driven by driving mechanism 203
It is slided along sliding rail 202, the common drivings such as cylinder commonly used in the prior art, feed screw nut, electromagnetism may be used in driving mechanism 203
Mode.The setting of packaged type light barrier 20 is collimated in short focus between convex lens 22 and reflective gratings 23, in the state of immigration,
The light projected along short focus collimation convex lens 22 is blocked by packaged type light barrier 20, when removing state, is collimated along short focus
The light directive reflective gratings 23 without barrier that convex lens 22 projects.
Data collection and analysis module 3 include computer 31, be arranged above measured piece and with interference fringe change direction（X
Axis direction）Parallel guide rail 32 is equipped with the optical camera that can be walked along guide rail 32 on guide rail 32 by pivotal slide mechanism 5
The photosensitive sensor chip of machine 33, optical camera 33 is the black and white sensor chip for only incuding light intensity, and data word length should not be low
In 12, optical camera 33 is connect with computer 31, and downward, the camera lens of optical camera 33 is the camera lens of optical camera 33
The optical amplifier camera lens of adjustable magnification.
Pivotal slide mechanism 5 includes the sliding platform 51 being slidably mounted on guide rail 32, and rotation is connected on sliding platform 51
The output end of rotating motor 52, electric rotating machine 52 is connected with horizontally disposed shaft 53, and the output end of shaft 53 is connected with mounting bracket
54, optical camera 33 is connected on mounting bracket 54, and mounting bracket 54 and the optical camera 33 being connected on mounting bracket 54 are set
It sets on the outside of the end of guide rail 32.
Lead screw 62 is connected with by screw rodb base 61 on guide rail 32, is connected on sliding platform 51 matched with 62 screw thread of lead screw
One end of nut 63, lead screw 62 is connected with driving motor 64.
Wherein optical amplifier camera lens has three kinds of operating modes, specially：Full figure pattern, to acquire the whole shape of workpiece
Whole spectral signature on shape and measured piece；Low power amplify, use multiple low as possible along measured piece length direction according to
The interference fringe of secondary acquisition part and corresponding spectral signature；Magnification at high multiple, use amplification factor precise acquisition high as possible
The fine change curve of the interference fringe of measured piece both ends boundary position.
As shown in figure 5,3 data acquisition of data collection and analysis module is as follows：1, it is controlled by driving mechanism 203 removable
Dynamic formula light barrier 20 is removed completely from the light path of optical projection mark module 2, and optical camera 33 is under full figure operating mode
Record the spectral signature of the global shape and workpiece surface of workpiece（In Fig. 5 shown in the sections A）.2, optical camera 33 is put in optics
Macro lens is in the one section of one section of ground successively of the length direction under low power amplification mode by 64 drives edge measured piece of driving motor
Acquire interference fringe and corresponding spectral signature（In Fig. 5 shown in the sections B）；Wherein interference fringe is that optical camera 33 exists
Packaged type light barrier 20 is in immigration state and blocks completely and shoots under conditions of the light path of optical projection mark module 2
It arrives；Spectral signature is complete from the light path of optical projection mark module 2 in packaged type light barrier 20 in optical camera 33
Shooting obtains under conditions of removing.3, packaged type light barrier 20 controlled in immigration state by driving mechanism 203 and completely
The light path of optical projection mark module 2 is blocked, optical camera 33 acquires quilt respectively in the case where magnifying glass is in magnification at high multiple pattern
The fine change curve of measuring piece both ends boundary position interference fringe（In Fig. 5 shown in the sections C）.
Following two points are based on by the analytic process of 3 the image collected data of data collection and analysis module：1）As previously mentioned,
The period of each complete interference fringe variation（That is interference periods P）It is the numerical value precisely determined, it can be by accurate size
The standard gauge block or laser interferometer known are demarcated to obtain；2）The intensity of interference fringe within each interference fringe period of change becomes
Change can be according to formula（1）Function express, and can be based on formula（1）Corresponding length is fitted, so measure
The size of measured piece can be calculated by following formula:
The size of measured piece=N P+XL+XR …………….（3）
Wherein, N is the number of the complete interference fringe period of change of workpiece surface
P is single interference stripe order recognition cycle length
XLThe length corresponding to imperfect interference fringe changing unit for left end, i.e., the left end of interference fringe is to the right to most
Length corresponding to neighbouring π phase interference stripeds.
XRThe length corresponding to imperfect interference fringe changing unit for right end, the i.e. right end of interference fringe are to the left
To the length corresponding to closest π phase interference stripeds.
Imperfect interference fringe is the distance between from interference fringe end to closest light intensity minimum point, and end is most
Left end or right end；Because of cos π=- 1, for minimum, so defining the minimum point in light intensity at π phases.
Because the precision of interference fringe period of change itself is up to 1nm/1cm, even higher.So what is measured is measured
The dimensional accuracy of part depends on measurement and the fitting precision of the imperfect interference fringe in workpiece boundary left and right ends.This is also quilt
The interference fringe on measuring piece boundary needs to use the reason of magnification at high multiple camera lens recording interference fringe intensity finely changes.
It is the specific steps for calculating parser below：
1, according to full figure image, obtain spectral signature entire measured piece surface the curve of spectrum.
2, existed according to the low power enlarged drawing and mercury lamp of each section of interference fringe of measured piece and corresponding spectral signature
There is very abundant spectral peak as fingerprint characteristic in visible-range, is spliced into one and covers the dry of entire measured workpiece surface
The data and curves of stripe order recognition are related to, the number N of the complete interference fringe period of change in measured workpiece surface is then calculated, it is complete
It is single complete interference fringe that whole interference fringe, which is defined as the interference fringe between two adjacent π phases,.
3, according to the image and formula of the interference fringe of measured piece both ends magnification at high multiple（1）, using following equation and
Fit procedure, fits the corresponding length of imperfect interference fringe variation, and specific fitting formula is based on following three points：
（2）Under the high power camera lens of optical camera 33 for given optical imaging system, such as in the present embodiment, figure
The corresponding reality of single pixel of picture is also a determining instrument parameter in the size of object plane, is used hereinIndicate tested
Measure direction（X-direction）On size.
（3）According to formula（1）, measured piece measurement direction（Interference fringe change direction）On position（x）With interference item
Phase on lineThere are linear relationship, formula is as follows：
Compares figure 6, interference fringe are radiated at the light distribution in the image plane of magnification at high multiple camera lens after measured workpiece
It can be expressed as：
Then the length X of the imperfect interference fringe of left endLFor：
So far, the length X of the imperfect interference fringe of left end is obtainedLFitting result, recycle the data that take of right end
It can be fitted to obtain the length X of the imperfect interference fringe of right endR。
It is to be herein pointed out in the two-dimensional array data that only video camera takes that above fit procedure is used
A ranks data, corresponding is certain single position in interference fringe orientation (Y direction).If measured object exists
There are local defects for this position, and it will cause the inaccuracy of fitting result.But the meanwhile two-dimensional array data that video camera is shot
It is middle that large number of X can be extracted along Y directionLMatch value, if workpiece itself is not defective in itself on the whole, that
These X fittedLValue should be only affected by noise, so the distribution of value meets gaussian random probability distribution, therefore：
…………….（8）
In addition, it is to be herein pointed out optical measurement projection module 1, optical projection mark module 2 be successively set on by
Measure workpiece surface, optical projection mark module 2 formed wide diameter collimation mark light beam reflected by the second reflective mirror 25,
And narrowband reflection mirror 14, spectroscope 15 are sequentially passed through in measuring piece surface formation bands of a spectrum mark.
To avoid causing to block to optical measurement projection module 1, optical projection mark module 2, data collection and analysis module 3
The side being arranged above measured workpiece makes data collection and analysis module 3 and optical measurement projection module 1, optical projection mark
Knowing module 2 is staggered on vertical direction, and optical camera 33 can be driven by electric rotating machine 52 keeps camera lens direction tested
Measure workpiece.
Secondly, it is also stated that, by optical measurement projection module 1, optical projection mark module 2 and data acquisition module
The measuring system 10 for the present invention that block 3 is constituted, as shown in fig. 7, in actual use, achievable Y-axis and Z axis rotation should be assembled to
Two-dimension rotating platform 8 on, two-dimension rotating platform 8 includes rack 81, is equipped with Z axis motor 82 in rack 81, Z axis motor 82
Output end is connected with y-axis motor 83, and measuring system 10 is connected to the output end of y-axis motor 83, measuring system 10 and Z axis motor 82
Coaxial line is arranged.
Measuring system is driven to turn that around Y-axis, optical measurement projection module 1 in measuring system 10 can be made by y-axis motor 83
In third oblique light ray m and the second oblique light ray n angular bisector perpendicular to workpiece surface, can to reduce to the maximum extent
Influence of the environmental perturbation existing for energy to measuring system.The angular bisector of third oblique light ray m and the second oblique light ray n perpendicular to
The judging rules of workpiece surface are：When third oblique light ray m and the angular bisector of the second oblique light ray n are vertical with workpiece surface
When, the period of interference fringe reaches minimum value.In practical operation, only entire measuring system need to be rotated around Y-axis, when in workpiece surface
Interference fringe when reaching minimum value, third oblique light ray m is vertical in workpiece with the angular bisector of the second oblique light ray n.
In addition, measuring system 10 and measurement workpiece pair can be made by driving measuring system 10 to turn about the Z axis by Z axis motor 82
Together, specific method is：In fit procedure, each X for being fitted along Y directionLValue Ying Yuqi is in the Y direction（Workpiece boundary）
Specific location without linear relationship, if there is linear relationship, then illustrate that measured workpiece and interference fringe do not have stringent Horizon
Row should drive measuring system 10 to turn about the Z axis, until each X by Z axis motor 82 at this timeLValue is with it on workpiece boundary
Extraction position be not present linear relationship, this just allow the operator to easily by this measuring system 10 be measured
Workpiece precise alignment.
Claims (6)
1. a kind of adjustable non-contact type high-precision length measuring system of scale, it is characterised in that：Including:
Optical measurement projection module, for forming light and shade interference fringe as optical measurement ruler scale on measured piece surface；
Optical projection mark module, for forming mark of the spectral signature as optical measurement ruler scale on measured piece surface；
Data collection and analysis module, for acquiring the interference fringe of workpiece and workpiece surface, the image information of spectral signature,
And go out the size of measured piece according to image Chinese scholartree nasal mucus information digital simulation.
2. the adjustable non-contact type high-precision length measuring system of a kind of scale according to right 1, it is characterised in that：It is described
Optical measurement projection module includes the spectroscope of laser, beam expander, the first reflective mirror, narrowband reflection mirror and adjustable angle；
Beam expander is arranged on the light beam outbound course of laser, and spectroscope is arranged on the light outbound course of beam expander, the
One reflective mirror is arranged in spectroscopical transmission direction, and the setting of narrowband reflection mirror is in light splitting specular reflection direction；
The light beam that the laser the projects mirror that is split after beam expander expands is divided into a branch of horizontal light of isocandela and a branch of phase
To the first oblique light ray that vertical bars deflection angle is a, the first oblique light ray reflects to form a branch of opposite through narrowband reflection mirror
Vertical bars deflection angle is the third oblique light ray of c, and horizontal light beam returns to spectroscope, again by dividing through the first mirror reflection
Light microscopic reflects to form the second oblique light ray that a branch of Relative vertical vertical line deflection angle is b, and third oblique light ray passes through spectroscope
The light and shade interference fringe for being incident upon measured piece surface is cooperatively formed with the second oblique light ray.
3. the adjustable non-contact type high-precision length measuring system of a kind of scale according to claim 1, it is characterised in that：
The optical projection mark module include mercury lamp light source, short focus collimation convex lens, packaged type light barrier, reflective gratings,
Long-focus collimates convex lens, the second reflective mirror；
Short focus collimation convex lens is arranged on the outbound course of mercury lamp light source, and reflective gratings setting collimates convex lens in short focus
On the light outbound course of mirror, long-focus collimation convex lens is arranged on the light outbound course of reflective gratings, and second is reflective
Mirror is arranged on the light outbound course that long-focus collimates convex lens；
The light that mercury lamp light source projects is through short focus collimation convex lens shape at the collimated light beam directive reflective gratings of narrow diameter, reflection
Formula grating by different-waveband pipeline diffraction to different angles, then through long-focus collimation convex lens shape at wide diameter collimation mark light
Beam, wide diameter collimation mark light beam form bands of a spectrum mark by the second mirror reflection to measured piece surface；
The packaged type light barrier setting is collimated in short focus between convex lens and reflective gratings, in the state of immigration, edge
The light that short focus collimation convex lens projects is blocked by packaged type light barrier, and when removing state, convex lens is collimated along short focus
The light of injection directive reflective gratings without barrier.
4. the adjustable non-contact type high-precision length measuring system of a kind of scale according to claim 1, it is characterised in that：
Data collection and analysis module includes computer, is arranged above measured piece and the guide rail parallel with interference fringe change direction, leads
The optical camera that can be walked along guide rail is provided on rail, optical camera is connect with computer, the camera lens of optical camera
Downward, the camera lens of optical camera is the optical amplifier camera lens of adjustable magnification.
5. the adjustable non-contact type high-precision length measuring system of a kind of scale according to claim 1, it is characterised in that：
The optical camera is mounted on by pivotal slide mechanism on guide rail, and pivotal slide mechanism includes being slidably mounted on guide rail
Sliding platform is connected with electric rotating machine on sliding platform, and the output end of electric rotating machine is connected with horizontally disposed shaft, shaft
Output end is connected with mounting bracket, and the optical camera is connected on mounting bracket；
Lead screw is connected with by screw rodb base on guide rail, be connected on the sliding platform with the matched nut of wire rod thread, it is described
One end of lead screw is connected with driving motor.
6. the adjustable non-contact type high-precision length measuring system of a kind of scale according to claim 5, it is characterised in that：
The mounting bracket and the optical camera being connected on mounting bracket are arranged on the outside of the end of guide rail.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
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| CN108413875B (en) | 2020-01-17 |
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