CN108374145B - 掩模组件 - Google Patents

掩模组件 Download PDF

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Publication number
CN108374145B
CN108374145B CN201810101505.5A CN201810101505A CN108374145B CN 108374145 B CN108374145 B CN 108374145B CN 201810101505 A CN201810101505 A CN 201810101505A CN 108374145 B CN108374145 B CN 108374145B
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CN
China
Prior art keywords
mask
division
deposition
mask assembly
side portion
Prior art date
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Active
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CN201810101505.5A
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English (en)
Chinese (zh)
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CN108374145A (zh
Inventor
李锺大
姜泽教
孔守喆
田相轩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung Display Co Ltd
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Samsung Display Co Ltd
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Publication date
Application filed by Samsung Display Co Ltd filed Critical Samsung Display Co Ltd
Publication of CN108374145A publication Critical patent/CN108374145A/zh
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/10—Deposition of organic active material
    • H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
    • H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroluminescent Light Sources (AREA)
CN201810101505.5A 2017-02-01 2018-02-01 掩模组件 Active CN108374145B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2017-0014341 2017-02-01
KR1020170014341A KR20180089925A (ko) 2017-02-01 2017-02-01 마스크 어셈블리

Publications (2)

Publication Number Publication Date
CN108374145A CN108374145A (zh) 2018-08-07
CN108374145B true CN108374145B (zh) 2022-03-04

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ID=63017074

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201810101505.5A Active CN108374145B (zh) 2017-02-01 2018-02-01 掩模组件

Country Status (2)

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KR (1) KR20180089925A (ko)
CN (1) CN108374145B (ko)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102642138B1 (ko) * 2018-09-04 2024-03-04 엘지이노텍 주식회사 증착용 마스크 및 이의 제조 방법
CN110643938B (zh) * 2019-10-31 2022-07-05 京东方科技集团股份有限公司 掩膜板组件
KR20210155428A (ko) 2020-06-15 2021-12-23 삼성디스플레이 주식회사 마스크 조립체
KR102633293B1 (ko) * 2022-04-26 2024-02-05 주식회사 한송네오텍 부분패턴 분할 마스크를 이용한 고해상 대면적 마스크 프레임 어셈블리 제조방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102157699A (zh) * 2010-02-02 2011-08-17 乐金显示有限公司 掩模组件
CN102569673A (zh) * 2010-12-20 2012-07-11 三星移动显示器株式会社 掩膜框架组件、其制造方法及制造有机发光显示器的方法
CN102760842A (zh) * 2011-04-25 2012-10-31 三星移动显示器株式会社 用于薄膜沉积的掩模框架组件
CN102766841A (zh) * 2011-05-06 2012-11-07 三星移动显示器株式会社 用于薄膜沉积的掩模框架组件及其制造方法
KR20130039013A (ko) * 2011-10-11 2013-04-19 엘지디스플레이 주식회사 마스크 프레임 조립체
CN105839051A (zh) * 2016-05-09 2016-08-10 京东方科技集团股份有限公司 掩模板及其制作方法、oled显示基板和显示装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102106336B1 (ko) * 2013-07-08 2020-06-03 삼성디스플레이 주식회사 증착용 마스크

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102157699A (zh) * 2010-02-02 2011-08-17 乐金显示有限公司 掩模组件
CN102569673A (zh) * 2010-12-20 2012-07-11 三星移动显示器株式会社 掩膜框架组件、其制造方法及制造有机发光显示器的方法
CN102760842A (zh) * 2011-04-25 2012-10-31 三星移动显示器株式会社 用于薄膜沉积的掩模框架组件
CN102766841A (zh) * 2011-05-06 2012-11-07 三星移动显示器株式会社 用于薄膜沉积的掩模框架组件及其制造方法
KR20130039013A (ko) * 2011-10-11 2013-04-19 엘지디스플레이 주식회사 마스크 프레임 조립체
CN105839051A (zh) * 2016-05-09 2016-08-10 京东方科技集团股份有限公司 掩模板及其制作方法、oled显示基板和显示装置

Also Published As

Publication number Publication date
CN108374145A (zh) 2018-08-07
KR20180089925A (ko) 2018-08-10

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