JP2022028039A - マスクアセンブリー及びその製造方法 - Google Patents
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- 238000007740 vapor deposition Methods 0.000 claims abstract description 47
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- 238000000231 atomic layer deposition Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
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- 239000010703 silicon Substances 0.000 description 2
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- 238000002834 transmittance Methods 0.000 description 2
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910017109 AlON Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004734 Polyphenylene sulfide Substances 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
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- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 230000008020 evaporation Effects 0.000 description 1
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- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005525 hole transport Effects 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- HRHKULZDDYWVBE-UHFFFAOYSA-N indium;oxozinc;tin Chemical compound [In].[Sn].[Zn]=O HRHKULZDDYWVBE-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
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- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000002071 nanotube Substances 0.000 description 1
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- 229920001568 phenolic resin Polymers 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 239000012994 photoredox catalyst Substances 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
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- 229920000069 polyphenylene sulfide Polymers 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- YVTHLONGBIQYBO-UHFFFAOYSA-N zinc indium(3+) oxygen(2-) Chemical compound [O--].[Zn++].[In+3] YVTHLONGBIQYBO-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/02—Local etching
- C23F1/04—Chemical milling
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
トパターン420によって定義される第2開口432と重畳する。この際、図4a及び図4bに示したように、第1フォトレジストパターン410は、第2フォトレジストパターン420より大きい面積を有することができる。
本発明のさらに他の一実施形態に係る図3cのさらに他の平面図である。本発明の他の一実施形態と同じ構成についての説明は説明の便宜のために省略する。
スクアセンブリー10が配置される。マスクアセンブリー10は、図1に示す分割マスク200を含んでいる。分割マスク200は、マスクフレーム100上に配置される。分割マスク200の上部には蒸着用基板300が配置される。
Ox)又はオルトケイ酸テトラエチル(TEOS)などで形成できるが、これに限定され
るものではない。
明が属する技術分野で通常の知識を有する者に明らかであろう。
200 分割マスク
201 第1面
202 第2面
300 蒸着用基板
410 第1フォトレジストパターン
411 第1蒸着パターン
412 補助パターン
420 第2フォトレジストパターン
431 第1開口
432 第2開口
451 第1溝
452 第2溝
Claims (5)
- 分割マスク基板を準備し、
前記分割マスク基板の一方の面に、第1開口を定義する第1蒸着パターン及び前記第1開口の内側に配置された補助パターンを含む第1フォトレジストパターンを形成し、
前記分割マスク基板の他方の面に第2開口を定義する第2フォトレジストパターンを形成し、
前記分割マスク基板の前記一方の面をハーフエッチングし、
前記ハーフエッチングされた分割マスク基板の前記一方の面上にレジンを塗布し、
前記分割マスク基板の前記他方の面をハーフエッチングすることを含み、
前記補助パターンは、前記第2開口と重畳する、マスクアセンブリー製造方法。 - 前記補助パターンの中心は、前記第1開口の中心と一致する、請求項1に記載のマスクアセンブリー製造方法。
- 前記分割マスク基板の前記他方の面をハーフエッチングした後に、
前記第1フォトレジストパターン及び前記第2フォトレジストパターンを除去することをさらに含む、請求項1に記載のマスクアセンブリー製造方法。 - 前記第1フォトレジストパターンは、前記第2フォトレジストパターンの面積より大きな面積を有する、請求項1に記載のマスクアセンブリー製造方法。
- 前記第1フォトレジストパターンは、前記第1蒸着パターンと前記補助パターンとを接続する少なくとも一つの接続部をさらに含む、請求項1に記載のマスクアセンブリー製造方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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KR1020160142135A KR20180046970A (ko) | 2016-10-28 | 2016-10-28 | 마스크 어셈블리 및 이의 제조 방법 |
KR10-2016-0142135 | 2016-10-28 | ||
JP2017205933A JP2018071001A (ja) | 2016-10-28 | 2017-10-25 | マスクアセンブリー及びその製造方法 |
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JP2017205933A Division JP2018071001A (ja) | 2016-10-28 | 2017-10-25 | マスクアセンブリー及びその製造方法 |
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JP2021207610A Pending JP2022028039A (ja) | 2016-10-28 | 2021-12-21 | マスクアセンブリー及びその製造方法 |
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JP (2) | JP2018071001A (ja) |
KR (1) | KR20180046970A (ja) |
Families Citing this family (5)
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KR102640346B1 (ko) * | 2018-07-12 | 2024-02-23 | 엘지이노텍 주식회사 | Oled용 증착 마스크 |
KR20210007084A (ko) | 2019-07-09 | 2021-01-20 | 삼성디스플레이 주식회사 | 표시 패널 |
TW202147666A (zh) * | 2020-05-27 | 2021-12-16 | 南韓商奧魯姆材料股份有限公司 | 掩模的製造方法、掩模支撐模板的製造方法及框架一體型掩模的製造方法 |
KR102377777B1 (ko) * | 2020-05-27 | 2022-03-24 | 주식회사 오럼머티리얼 | 마스크의 제조 방법, 마스크 지지 템플릿의 제조 방법 및 프레임 일체형 마스크의 제조 방법 |
KR102442459B1 (ko) * | 2020-10-07 | 2022-09-14 | 주식회사 오럼머티리얼 | 마스크 지지 템플릿의 제조 방법, 마스크 지지 템플릿 및 프레임 일체형 마스크의 제조 방법 |
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JP2009244581A (ja) * | 2008-03-31 | 2009-10-22 | Dainippon Printing Co Ltd | 真空紫外光用マスク、真空紫外光によるパターン形成体の製造方法および真空紫外光によるパターン形成体製造装置 |
JP2015140464A (ja) * | 2014-01-29 | 2015-08-03 | 大日本印刷株式会社 | 蒸着マスク装置及び熱バリア材 |
JP2016113668A (ja) * | 2014-12-15 | 2016-06-23 | 大日本印刷株式会社 | 蒸着マスクの製造方法、蒸着マスクを作製するために用いられる金属板および蒸着マスク |
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JP5751810B2 (ja) * | 2010-11-26 | 2015-07-22 | 日立マクセル株式会社 | メタルマスクの製造方法、枠部材及びその製造方法 |
JP6372755B2 (ja) * | 2014-12-24 | 2018-08-15 | 大日本印刷株式会社 | 蒸着マスクの製造方法、蒸着マスクを作製するために用いられる金属板および蒸着マスク |
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2016
- 2016-10-28 KR KR1020160142135A patent/KR20180046970A/ko not_active Application Discontinuation
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2017
- 2017-10-25 JP JP2017205933A patent/JP2018071001A/ja active Pending
-
2021
- 2021-12-21 JP JP2021207610A patent/JP2022028039A/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2009244581A (ja) * | 2008-03-31 | 2009-10-22 | Dainippon Printing Co Ltd | 真空紫外光用マスク、真空紫外光によるパターン形成体の製造方法および真空紫外光によるパターン形成体製造装置 |
JP2015140464A (ja) * | 2014-01-29 | 2015-08-03 | 大日本印刷株式会社 | 蒸着マスク装置及び熱バリア材 |
JP2016113668A (ja) * | 2014-12-15 | 2016-06-23 | 大日本印刷株式会社 | 蒸着マスクの製造方法、蒸着マスクを作製するために用いられる金属板および蒸着マスク |
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