CN108366774A - 电容式微机械超声换能器(cmut)的偏置及相关装置和方法 - Google Patents

电容式微机械超声换能器(cmut)的偏置及相关装置和方法 Download PDF

Info

Publication number
CN108366774A
CN108366774A CN201680069783.6A CN201680069783A CN108366774A CN 108366774 A CN108366774 A CN 108366774A CN 201680069783 A CN201680069783 A CN 201680069783A CN 108366774 A CN108366774 A CN 108366774A
Authority
CN
China
Prior art keywords
bias
ultrasound
transducers
substrate
ultrasonic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201680069783.6A
Other languages
English (en)
Chinese (zh)
Inventor
苏珊·A·阿列
海梅·斯科特·扎霍里安
陈凯亮
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Butterfly Network Inc
Original Assignee
Butterfly Network Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Butterfly Network Inc filed Critical Butterfly Network Inc
Publication of CN108366774A publication Critical patent/CN108366774A/zh
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292Electrostatic transducers, e.g. electret-type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207Driving circuits
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4488Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B06GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06BMETHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
CN201680069783.6A 2015-12-02 2016-12-01 电容式微机械超声换能器(cmut)的偏置及相关装置和方法 Pending CN108366774A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/957,098 2015-12-02
US14/957,098 US9987661B2 (en) 2015-12-02 2015-12-02 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
PCT/US2016/064325 WO2017095988A1 (en) 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods

Publications (1)

Publication Number Publication Date
CN108366774A true CN108366774A (zh) 2018-08-03

Family

ID=58797703

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201680069783.6A Pending CN108366774A (zh) 2015-12-02 2016-12-01 电容式微机械超声换能器(cmut)的偏置及相关装置和方法

Country Status (10)

Country Link
US (2) US9987661B2 (https=)
EP (1) EP3383277B1 (https=)
JP (1) JP2019504534A (https=)
KR (1) KR102121137B1 (https=)
CN (1) CN108366774A (https=)
AU (1) AU2016365309B2 (https=)
CA (1) CA3006505A1 (https=)
ES (1) ES2909488T3 (https=)
TW (1) TWI705858B (https=)
WO (1) WO2017095988A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113477495A (zh) * 2021-06-26 2021-10-08 西北工业大学 一种基于堆栈排列的双频长焦深超声换能器

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
US20180180724A1 (en) * 2016-12-26 2018-06-28 Nxp Usa, Inc. Ultrasonic transducer integrated with supporting electronics
WO2019232427A1 (en) 2018-05-31 2019-12-05 Matt Mcgrath Design & Co., Llc Integrated medical imaging apparatus including multi-dimensional user interface
TW202045099A (zh) 2019-02-07 2020-12-16 美商蝴蝶網路公司 用於微加工超音波傳感器裝置的雙層金屬電極
US11361576B2 (en) 2019-05-21 2022-06-14 Boe Technology Group Co., Ltd. Sensor circuit for generating and detecting ultrasonic sensing signal, an ultrasonic sensing display apparatus
US11383269B2 (en) 2019-06-10 2022-07-12 Bfly Operations, Inc. Curved micromachined ultrasonic transducer membranes
US11558062B2 (en) 2019-07-25 2023-01-17 Bfly Operations, Inc. Methods and apparatuses for turning on and off an ADC driver in an ultrasound device
US11684951B2 (en) 2019-08-08 2023-06-27 Bfly Operations, Inc. Micromachined ultrasonic transducer devices having truncated circle shaped cavities
US11921240B2 (en) 2019-09-19 2024-03-05 Bfly Operations, Inc. Symmetric receiver switch for ultrasound devices
EP3815795A1 (en) * 2019-10-30 2021-05-05 Nederlandse Organisatie voor toegepast- natuurwetenschappelijk Onderzoek TNO Membrane transducer with improved bandwidth
US20210328564A1 (en) 2020-04-16 2021-10-21 Butterfly Network, Inc. Methods and circuitry for built-in self-testing of circuitry and/or transducers in ultrasound devices
WO2022212671A1 (en) 2021-04-01 2022-10-06 Bfly Operations, Inc. Apparatuses and methods for configuring ultrasound devices

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030048698A1 (en) * 2001-09-07 2003-03-13 Siemens Medical Systems, Inc. Bias control of electrostatic transducers
CN1886006A (zh) * 2005-06-20 2006-12-27 株式会社日立制作所 电声转换元件、阵列型超声波转换器以及超声波诊断装置
WO2012057272A1 (ja) * 2010-10-27 2012-05-03 オリンパス株式会社 超音波プローブ装置及びその制御方法
CN102458692A (zh) * 2009-06-19 2012-05-16 佳能株式会社 电容型电气机械变换器
US20140010052A1 (en) * 2012-07-06 2014-01-09 Canon Kabushiki Kaisha Capacitive transducer
WO2014151362A2 (en) * 2013-03-15 2014-09-25 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
CN104284283A (zh) * 2013-07-10 2015-01-14 佳能株式会社 静电电容换能器、探测器和被检体信息获取装置

Family Cites Families (113)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5286671A (en) 1993-05-07 1994-02-15 Kulite Semiconductor Products, Inc. Fusion bonding technique for use in fabricating semiconductor devices
US6645145B1 (en) 1998-11-19 2003-11-11 Siemens Medical Solutions Usa, Inc. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6381197B1 (en) * 1999-05-11 2002-04-30 Bernard J Savord Aperture control and apodization in a micro-machined ultrasonic transducer
US6430109B1 (en) 1999-09-30 2002-08-06 The Board Of Trustees Of The Leland Stanford Junior University Array of capacitive micromachined ultrasonic transducer elements with through wafer via connections
US6443901B1 (en) 2000-06-15 2002-09-03 Koninklijke Philips Electronics N.V. Capacitive micromachined ultrasonic transducers
US6694817B2 (en) 2001-08-21 2004-02-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6779387B2 (en) 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6659954B2 (en) 2001-12-19 2003-12-09 Koninklijke Philips Electronics Nv Micromachined ultrasound transducer and method for fabricating same
US7429495B2 (en) 2002-08-07 2008-09-30 Chang-Feng Wan System and method of fabricating micro cavities
US6958255B2 (en) 2002-08-08 2005-10-25 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducers and method of fabrication
US6831394B2 (en) 2002-12-11 2004-12-14 General Electric Company Backing material for micromachined ultrasonic transducer devices
US7312440B2 (en) 2003-01-14 2007-12-25 Georgia Tech Research Corporation Integrated micro fuel processor and flow delivery infrastructure
US7208727B2 (en) 2003-01-14 2007-04-24 Georgia Tech Research Corporation Electrospray systems and methods
US7087023B2 (en) 2003-02-14 2006-08-08 Sensant Corporation Microfabricated ultrasonic transducers with bias polarity beam profile control and method of operating the same
US6865140B2 (en) 2003-03-06 2005-03-08 General Electric Company Mosaic arrays using micromachined ultrasound transducers
US7257051B2 (en) 2003-03-06 2007-08-14 General Electric Company Integrated interface electronics for reconfigurable sensor array
US7313053B2 (en) 2003-03-06 2007-12-25 General Electric Company Method and apparatus for controlling scanning of mosaic sensor array
US7247246B2 (en) 2003-10-20 2007-07-24 Atmel Corporation Vertical integration of a MEMS structure with electronics in a hermetically sealed cavity
US20050121734A1 (en) 2003-11-07 2005-06-09 Georgia Tech Research Corporation Combination catheter devices, methods, and systems
US7030536B2 (en) 2003-12-29 2006-04-18 General Electric Company Micromachined ultrasonic transducer cells having compliant support structure
US7125383B2 (en) 2003-12-30 2006-10-24 General Electric Company Method and apparatus for ultrasonic continuous, non-invasive blood pressure monitoring
US7285897B2 (en) 2003-12-31 2007-10-23 General Electric Company Curved micromachined ultrasonic transducer arrays and related methods of manufacture
US7052464B2 (en) 2004-01-01 2006-05-30 General Electric Company Alignment method for fabrication of integrated ultrasonic transducer array
US7104129B2 (en) 2004-02-02 2006-09-12 Invensense Inc. Vertically integrated MEMS structure with electronics in a hermetically sealed cavity
US20050177045A1 (en) 2004-02-06 2005-08-11 Georgia Tech Research Corporation cMUT devices and fabrication methods
JP2007531357A (ja) 2004-02-27 2007-11-01 ジョージア テック リサーチ コーポレイション ハーモニックcmut素子及び製造方法
WO2005084284A2 (en) 2004-02-27 2005-09-15 Georgia Tech Research Corporation Multiple element electrode cmut devices and fabrication methods
US7646133B2 (en) 2004-02-27 2010-01-12 Georgia Tech Research Corporation Asymmetric membrane cMUT devices and fabrication methods
US7530952B2 (en) 2004-04-01 2009-05-12 The Board Of Trustees Of The Leland Stanford Junior University Capacitive ultrasonic transducers with isolation posts
US8658453B2 (en) 2004-09-15 2014-02-25 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US8309428B2 (en) 2004-09-15 2012-11-13 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer
US7888709B2 (en) 2004-09-15 2011-02-15 Sonetics Ultrasound, Inc. Capacitive micromachined ultrasonic transducer and manufacturing method
US7375420B2 (en) 2004-12-03 2008-05-20 General Electric Company Large area transducer array
US7518251B2 (en) 2004-12-03 2009-04-14 General Electric Company Stacked electronics for sensors
US7037746B1 (en) 2004-12-27 2006-05-02 General Electric Company Capacitive micromachined ultrasound transducer fabricated with epitaxial silicon membrane
US7442570B2 (en) 2005-03-18 2008-10-28 Invensence Inc. Method of fabrication of a AL/GE bonding in a wafer packaging environment and a product produced therefrom
US7250353B2 (en) 2005-03-29 2007-07-31 Invensense, Inc. Method and system of releasing a MEMS structure
US7704743B2 (en) 2005-03-30 2010-04-27 Georgia Tech Research Corporation Electrosonic cell manipulation device and method of use thereof
WO2006123300A2 (en) 2005-05-18 2006-11-23 Kolo Technologies, Inc. Micro-electro-mechanical transducers
EP1883956A4 (en) 2005-05-18 2011-03-23 Kolo Technologies Inc BY-THE-WAFER CONNECTION
CN101558552B (zh) 2005-06-17 2017-05-31 科隆科技公司 具有绝缘延伸部的微机电换能器
US7637149B2 (en) 2005-06-17 2009-12-29 Georgia Tech Research Corporation Integrated displacement sensors for probe microscopy and force spectroscopy
US7612635B2 (en) 2005-08-03 2009-11-03 Kolo Technologies, Inc. MEMS acoustic filter and fabrication of the same
US7880565B2 (en) 2005-08-03 2011-02-01 Kolo Technologies, Inc. Micro-electro-mechanical transducer having a surface plate
US7878977B2 (en) 2005-09-30 2011-02-01 Siemens Medical Solutions Usa, Inc. Flexible ultrasound transducer array
US7441447B2 (en) 2005-10-07 2008-10-28 Georgia Tech Research Corporation Methods of imaging in probe microscopy
US7599254B2 (en) * 2005-12-20 2009-10-06 Siemens Medical Solutions Usa, Inc. Transducer static discharge methods and apparatus
US7622848B2 (en) 2006-01-06 2009-11-24 General Electric Company Transducer assembly with z-axis interconnect
US20070180916A1 (en) 2006-02-09 2007-08-09 General Electric Company Capacitive micromachined ultrasound transducer and methods of making the same
US7615834B2 (en) 2006-02-28 2009-11-10 The Board Of Trustees Of The Leland Stanford Junior University Capacitive micromachined ultrasonic transducer(CMUT) with varying thickness membrane
US7764003B2 (en) 2006-04-04 2010-07-27 Kolo Technologies, Inc. Signal control in micromachined ultrasonic transducer
US7451651B2 (en) 2006-12-11 2008-11-18 General Electric Company Modular sensor assembly and methods of fabricating the same
US7687976B2 (en) 2007-01-31 2010-03-30 General Electric Company Ultrasound imaging system
US7892176B2 (en) 2007-05-02 2011-02-22 General Electric Company Monitoring or imaging system with interconnect structure for large area sensor array
US20080296708A1 (en) 2007-05-31 2008-12-04 General Electric Company Integrated sensor arrays and method for making and using such arrays
US8203912B2 (en) 2007-07-31 2012-06-19 Koninklijke Philips Electronics N.V. CMUTs with a high-k dielectric
US8277380B2 (en) 2007-09-11 2012-10-02 Siemens Medical Solutions Usa, Inc. Piezoelectric and CMUT layered ultrasound transducer array
US8327521B2 (en) 2007-09-17 2012-12-11 Koninklijke Philips Electronics N.V. Method for production and using a capacitive micro-machined ultrasonic transducer
US7843022B2 (en) 2007-10-18 2010-11-30 The Board Of Trustees Of The Leland Stanford Junior University High-temperature electrostatic transducers and fabrication method
US7745248B2 (en) 2007-10-18 2010-06-29 The Board Of Trustees Of The Leland Stanford Junior University Fabrication of capacitive micromachined ultrasonic transducers by local oxidation
US7786584B2 (en) 2007-11-26 2010-08-31 Infineon Technologies Ag Through substrate via semiconductor components
US8483014B2 (en) 2007-12-03 2013-07-09 Kolo Technologies, Inc. Micromachined ultrasonic transducers
CN101874312B (zh) 2007-12-03 2014-06-11 科隆科技公司 微机械超声换能器中的可变工作电压
WO2009073748A1 (en) 2007-12-03 2009-06-11 Kolo Technologies, Inc. Stacked transducing devices
EP2215855A1 (en) 2007-12-03 2010-08-11 Kolo Technologies, Inc. Capacitive micromachined ultrasonic transducer with voltage feedback
WO2009073562A1 (en) 2007-12-03 2009-06-11 Kolo Technologies, Inc. Dual-mode operation micromachined ultrasonic transducer
US8429808B2 (en) 2007-12-03 2013-04-30 Kolo Technologies, Inc. Method for fabrication an electrical transducer
US7781238B2 (en) 2007-12-06 2010-08-24 Robert Gideon Wodnicki Methods of making and using integrated and testable sensor array
US8614151B2 (en) 2008-01-04 2013-12-24 Micron Technology, Inc. Method of etching a high aspect ratio contact
KR100878454B1 (ko) 2008-02-28 2009-01-13 (주)실리콘화일 신호처리블록을 구비하는 적층형 마이크로폰과 그 제조방법
NZ589503A (en) 2008-05-07 2013-07-26 Signostics Ltd Docking system for medical diagnostic scanning using a handheld device
WO2009149721A1 (de) 2008-06-09 2009-12-17 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Diodenbolometer und ein verfahren zur herstellung eines diodenbolometers
JP2009291514A (ja) 2008-06-09 2009-12-17 Canon Inc 静電容量型トランスデューサの製造方法、及び静電容量型トランスデューサ
US7812418B2 (en) 2008-07-29 2010-10-12 Fortemedia, Inc Chip-scaled MEMS microphone package
US8133182B2 (en) * 2008-09-09 2012-03-13 Siemens Medical Solutions Usa, Inc. Multi-dimensional transducer array and beamforming for ultrasound imaging
TWI401975B (zh) * 2008-12-09 2013-07-11 Univ Nat Kaohsiung Applied Sci 具高分子基震盪薄膜之電容式超音波換能器的製作方法
US8431420B2 (en) 2009-01-16 2013-04-30 Hitachi Medical Corporation Manufacturing method of ultrasonic probe and ultrasonic probe
GB2467776A (en) 2009-02-13 2010-08-18 Wolfson Microelectronics Plc Integrated MEMS transducer and circuitry
US8402831B2 (en) 2009-03-05 2013-03-26 The Board Of Trustees Of The Leland Standford Junior University Monolithic integrated CMUTs fabricated by low-temperature wafer bonding
US8315125B2 (en) 2009-03-18 2012-11-20 Sonetics Ultrasound, Inc. System and method for biasing CMUT elements
ES2416182T3 (es) 2009-03-26 2013-07-30 Norwegian University Of Science And Technology (Ntnu) Matriz CMUT de unión de ondas con vías conductoras
US8451693B2 (en) 2009-08-25 2013-05-28 The Board Of Trustees Of The Leland Stanford Junior University Micromachined ultrasonic transducer having compliant post structure
US8345508B2 (en) 2009-09-20 2013-01-01 General Electric Company Large area modular sensor array assembly and method for making the same
US8563345B2 (en) 2009-10-02 2013-10-22 National Semiconductor Corporated Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements
US8222065B1 (en) 2009-10-02 2012-07-17 National Semiconductor Corporation Method and system for forming a capacitive micromachined ultrasonic transducer
US8476145B2 (en) 2010-10-13 2013-07-02 Monolithic 3D Inc. Method of fabricating a semiconductor device and structure
US8241931B1 (en) 2009-10-19 2012-08-14 Analog Devices, Inc. Method of forming MEMS device with weakened substrate
JP5404335B2 (ja) 2009-11-17 2014-01-29 キヤノン株式会社 電気機械変換装置及びその作製方法
US8647279B2 (en) 2010-06-10 2014-02-11 Siemens Medical Solutions Usa, Inc. Volume mechanical transducer for medical diagnostic ultrasound
US8957564B1 (en) 2010-06-29 2015-02-17 Silicon Light Machines Corporation Microelectromechanical system megasonic transducer
JP5702966B2 (ja) 2010-08-02 2015-04-15 キヤノン株式会社 電気機械変換装置及びその作製方法
US8273610B2 (en) 2010-11-18 2012-09-25 Monolithic 3D Inc. Method of constructing a semiconductor device and structure
US8461655B2 (en) 2011-03-31 2013-06-11 Infineon Technologies Ag Micromechanical sound transducer having a membrane support with tapered surface
HK1201429A1 (en) 2011-10-17 2015-09-04 Butterfly Network Inc. Transmissive imaging and related apparatus and methods
US20130096433A1 (en) 2011-10-18 2013-04-18 The Regents Of The University Of Michigan System and Method for Unattended Monitoring of Blood Flow
US20130161702A1 (en) 2011-12-25 2013-06-27 Kun-Lung Chen Integrated mems device
KR101894393B1 (ko) 2011-12-28 2018-09-04 삼성전자주식회사 초음파 변환기 구조물, 초음파 변환기 및 초음파 변환기의 제조 방법
WO2013136212A1 (en) * 2012-03-13 2013-09-19 Koninklijke Philips N.V. Capacitive micro-machined ultrasound transducer device with charging voltage source
KR101388141B1 (ko) 2012-05-31 2014-04-23 전자부품연구원 Cmos 회로가 집적된 마이크로폰 및 그 제조방법
US8735199B2 (en) 2012-08-22 2014-05-27 Honeywell International Inc. Methods for fabricating MEMS structures by etching sacrificial features embedded in glass
CA2795441A1 (en) 2012-10-19 2014-04-19 The Governors Of The University Of Alberta Top-orthogonal-to-bottom electrode (tobe) 2d cmut arrays for low-channel-count 3d imaging
WO2014123922A1 (en) 2013-02-05 2014-08-14 Butterfly Network, Inc. Cmos ultrasonic transducers and related apparatus and methods
US9470710B2 (en) * 2013-02-27 2016-10-18 Texas Instruments Incorporated Capacitive MEMS sensor devices
JP6232124B2 (ja) 2013-03-15 2017-11-15 バタフライ ネットワーク,インコーポレイテッド 相補型金属酸化膜半導体(cmos)超音波振動子およびその形成方法
JP5855050B2 (ja) * 2013-07-10 2016-02-09 キヤノン株式会社 トランスデューサ、被検体情報取得装置
US10806431B2 (en) * 2013-09-25 2020-10-20 Massachusetts Institute Of Technology Application specific integrated circuit with column-row-parallel architecture for ultrasonic imaging
WO2015071387A1 (en) * 2013-11-18 2015-05-21 Koninklijke Philips N.V. Ultrasound transducer assembly
EP3079837B1 (en) * 2013-12-12 2023-02-08 Koninklijke Philips N.V. Monolithically integrated three electrode cmut device
EP3083083B1 (en) * 2013-12-19 2018-08-15 B-K Medical ApS Ultrasound imaging transducer array with integrated apodization
KR102237662B1 (ko) 2014-04-18 2021-04-09 버터플라이 네트워크, 인크. 상보적 금속 산화물 반도체(cmos) 웨이퍼들 내의 초음파 트랜스듀서들 및 관련 장치 및 방법들
US9067779B1 (en) 2014-07-14 2015-06-30 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US20160009544A1 (en) 2015-03-02 2016-01-14 Butterfly Network, Inc. Microfabricated ultrasonic transducers and related apparatus and methods
US9987661B2 (en) 2015-12-02 2018-06-05 Butterfly Network, Inc. Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030048698A1 (en) * 2001-09-07 2003-03-13 Siemens Medical Systems, Inc. Bias control of electrostatic transducers
US6795374B2 (en) * 2001-09-07 2004-09-21 Siemens Medical Solutions Usa, Inc. Bias control of electrostatic transducers
CN1886006A (zh) * 2005-06-20 2006-12-27 株式会社日立制作所 电声转换元件、阵列型超声波转换器以及超声波诊断装置
CN102458692A (zh) * 2009-06-19 2012-05-16 佳能株式会社 电容型电气机械变换器
WO2012057272A1 (ja) * 2010-10-27 2012-05-03 オリンパス株式会社 超音波プローブ装置及びその制御方法
US20130163383A1 (en) * 2010-10-27 2013-06-27 Olympus Corporation Ultrasonic probe device and its control method
US20140010052A1 (en) * 2012-07-06 2014-01-09 Canon Kabushiki Kaisha Capacitive transducer
WO2014151362A2 (en) * 2013-03-15 2014-09-25 Butterfly Network, Inc. Monolithic ultrasonic imaging devices, systems and methods
CN104284283A (zh) * 2013-07-10 2015-01-14 佳能株式会社 静电电容换能器、探测器和被检体信息获取装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113477495A (zh) * 2021-06-26 2021-10-08 西北工业大学 一种基于堆栈排列的双频长焦深超声换能器

Also Published As

Publication number Publication date
TW201739521A (zh) 2017-11-16
AU2016365309A1 (en) 2018-06-14
US9987661B2 (en) 2018-06-05
AU2016365309B2 (en) 2021-08-19
US10272471B2 (en) 2019-04-30
EP3383277A4 (en) 2019-07-24
TWI705858B (zh) 2020-10-01
US20180353995A1 (en) 2018-12-13
WO2017095988A1 (en) 2017-06-08
KR20180088696A (ko) 2018-08-06
EP3383277A1 (en) 2018-10-10
EP3383277B1 (en) 2022-02-02
KR102121137B1 (ko) 2020-06-09
JP2019504534A (ja) 2019-02-14
CA3006505A1 (en) 2017-06-08
ES2909488T3 (es) 2022-05-06
US20170157646A1 (en) 2017-06-08

Similar Documents

Publication Publication Date Title
CN108366774A (zh) 电容式微机械超声换能器(cmut)的偏置及相关装置和方法
TWI714671B (zh) pMUT及pMUT換能器陣列之電極配置
JP5473579B2 (ja) 静電容量型電気機械変換装置の制御装置、及び静電容量型電気機械変換装置の制御方法
JP5525674B2 (ja) チャネル数を低減するための再構成可能なリニアセンサアレイ
KR101689346B1 (ko) 기계적 붕괴 보유를 갖는 사전 붕괴된 cmut
JP6073855B2 (ja) 超音波診断装置及び超音波探触子
US20130162102A1 (en) Tunable ultrasound transducers
US8953414B2 (en) Electromechanical transducer
US20120176002A1 (en) Acoustic transducer and method of driving the same
JP2020513893A5 (https=)
CN101969856A (zh) 预塌陷的电容微机械超声传感器的制造及其应用
SG179386A1 (en) A transducer
JP2019504534A5 (https=)
US9894453B2 (en) Absolute sensitivity of a MEMS microphone with capacitive and piezoelectric electrodes
US9986342B2 (en) Transducer, method for manufacturing transducer, and object information acquiring apparatus
CN110324769B (zh) 超声波传感器以及超声波装置
JP2025175090A (ja) トランスデューサ、及びその駆動方法、並びにシステム
CN113261308B (zh) 压电换能器
Yaacob et al. Theoretical characterization of square piezoelectric micro ultrasonic transducer for underwater applications
Haron et al. Geometrical dimension impact for performance of CMOS based circular shape aluminum nitride (AlN) piezoelectric micromachined ultrasonic transducer (PMUT)
JP5855142B2 (ja) 静電容量型トランスデューサの制御装置、及び静電容量型トランスデューサの制御方法
JP2015005706A (ja) 液体吐出ヘッドの分極処理方法および液体吐出ヘッドの分極処理装置、並びに液体吐出ヘッドの製造方法、液体吐出ヘッド

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
WD01 Invention patent application deemed withdrawn after publication
WD01 Invention patent application deemed withdrawn after publication

Application publication date: 20180803