AU2016365309B2 - Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods - Google Patents

Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods Download PDF

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Publication number
AU2016365309B2
AU2016365309B2 AU2016365309A AU2016365309A AU2016365309B2 AU 2016365309 B2 AU2016365309 B2 AU 2016365309B2 AU 2016365309 A AU2016365309 A AU 2016365309A AU 2016365309 A AU2016365309 A AU 2016365309A AU 2016365309 B2 AU2016365309 B2 AU 2016365309B2
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AU
Australia
Prior art keywords
ultrasonic transducers
bias
group
substrate
cmuts
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Ceased
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AU2016365309A
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AU2016365309A1 (en
Inventor
Susan A. Alie
Kailiang Chen
Jaime Scott Zahorian
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Butterfly Network Inc
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Butterfly Network Inc
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Publication of AU2016365309B2 publication Critical patent/AU2016365309B2/en
Ceased legal-status Critical Current
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0207—Driving circuits
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
    • A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
    • A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
    • A61B8/4488—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
  • Ultra Sonic Daignosis Equipment (AREA)
  • Micromachines (AREA)
AU2016365309A 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods Ceased AU2016365309B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US14/957,098 2015-12-02
US14/957,098 US9987661B2 (en) 2015-12-02 2015-12-02 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods
PCT/US2016/064325 WO2017095988A1 (en) 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (cmuts) and related apparatus and methods

Publications (2)

Publication Number Publication Date
AU2016365309A1 AU2016365309A1 (en) 2018-06-14
AU2016365309B2 true AU2016365309B2 (en) 2021-08-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
AU2016365309A Ceased AU2016365309B2 (en) 2015-12-02 2016-12-01 Biasing of capacitive micromachined ultrasonic transducers (CMUTs) and related apparatus and methods

Country Status (10)

Country Link
US (2) US9987661B2 (https=)
EP (1) EP3383277B1 (https=)
JP (1) JP2019504534A (https=)
KR (1) KR102121137B1 (https=)
CN (1) CN108366774A (https=)
AU (1) AU2016365309B2 (https=)
CA (1) CA3006505A1 (https=)
ES (1) ES2909488T3 (https=)
TW (1) TWI705858B (https=)
WO (1) WO2017095988A1 (https=)

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US8402831B2 (en) * 2009-03-05 2013-03-26 The Board Of Trustees Of The Leland Standford Junior University Monolithic integrated CMUTs fabricated by low-temperature wafer bonding

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