CN108359962B - 化纤织带涂氧化铝层的方法和装置 - Google Patents

化纤织带涂氧化铝层的方法和装置 Download PDF

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CN108359962B
CN108359962B CN201810323623.0A CN201810323623A CN108359962B CN 108359962 B CN108359962 B CN 108359962B CN 201810323623 A CN201810323623 A CN 201810323623A CN 108359962 B CN108359962 B CN 108359962B
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杨宪伟
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Taizhou Runjie Logistics Safety Equipment Technology Co ltd
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/56—After-treatment

Abstract

化纤织带表层附着阻燃氧化铝涂层的方法和装置，装置由原料室、PECVD沉积室、涂层室和附属物构成，各室之间通过闸阀的开关可以隔断和联通。化纤织带经PECVD气相沉积烷基铝在表层产生铝薄膜后，在涂层室吸附氧化铝粉体团聚包裹，再经输入富氧空气深度氧化形成非晶的氧化铝薄膜层。

Description

化纤织带涂氧化铝层的方法和装置
技术领域
本发明提供了一种对化纤织带表层涂上氧化铝薄膜层的方法和装置，以在织带表层起到防静电、提高强度、阻燃和容易着色的作用，属于阻燃材料涂层技术领域。
背景技术
捆绑货物的织带使用丙纶、涤纶等化学纤维改性织成，有相当严格的防静电、阻燃、着色要求。氧化铝粉体是绝缘、阻燃隔热性能较好的无机材料，在化纤织带表层可以起到提高强度防割裂专用，也是环保颜料的着色中间体。常用的化纤织带氧化铝涂层方法是用苯类有机溶剂、颜料与氧化铝粉体混合，然后加热使有机物挥发干燥而成，这种方式产生的氧化铝涂层在摩擦后也容易脱落，而且涂层过程造成环境污染。由于氧化铝粉体材料作为涂层不容易和化纤结合，需要烧结才能聚结在化纤表层，高温烧结造成了化纤强度降低，而且烧结的氧化铝层主要为晶体结构，硬度加大使化纤织带的柔韧性降低，在使用过程也容易造成氧化铝层剥落。
发明内容
本发明是对化纤织带表层附着阻燃氧化铝涂层的方法和装置，化纤织带经PECVD气相沉积铝薄膜后吸附氧化铝粉体团聚包裹，再经深度氧化形成非晶的氧化铝薄膜层。装置由原料室2、PECVD沉积室1、涂层室3构成。在原料室2有放料门4，原料室2与沉积室1之间有闸阀5；沉积室上部有真空泵8和烷基铝储罐9，室内有电极10，化纤织带14从电极10的正负极之间通过；沉积室1与涂层室3与之间有闸阀6；涂层室3有取料门7，下部有富氧空气输入管的开关15，上部有氧化铝储罐11。各室之间通过闸阀的开关可以隔断和联通。织带阻燃着色用无机氧化铝的涂层方法有以下步骤：
(1)打开各室之间的闸阀5和6，打开放料门4，把缠有化纤织带的原料带缠绕轴12放入原料室2固定，拉出化纤织带14经过沉积室1接到涂层室3的涂层带缠绕轴13上，涂层带缠绕轴13转动可以使化纤织带14通过沉积室1进入涂层室3。
(2)启动真空泵8对已经联通的三个腔室抽真空，达到10-3Pa后关闭真空泵8。
(3)打开烷基铝罐9将烷基铝气体通入PECVD沉积室1中，保持体积浓度在3％-5％；打开氧化铝储罐11把粒度小于5μm的ρ型氧化铝粉体通入涂层室3，保持在120-200mg/m3。
(4)启动PECVD电极10，烷基铝被等离子化，铝离子开始在化纤织带表层沉积纳米铝薄膜，沉积过程保持烷基铝体积浓度在3％-5％。转动涂层带缠绕轴13使化纤织带14保持拉直和移动，化纤织带14表层形成纳米铝薄膜后进入涂层室3缠绕在涂层带缠绕轴13。
(5)覆有铝薄膜的化纤织带14进入涂层室3后，因表层铝薄膜具有较强的静电，均匀吸附ρ型氧化铝粉体，化纤织带14表层初步有铝箔膜与氧化铝粉体涂层。运行过程间歇打开氧化铝储罐11向涂层室3输入氧化铝粉，保持涂层室3的氧化铝在120-200mg/m3。
(6)化纤织带14完全缠绕到涂层带缠绕轴13后，关闭PECVD电极10，关闭PECVD沉积室1和涂层室3之间的闸阀6。打开涂层室3下部的富氧空气输入管的开关15，向涂层室3通入含氧量40％、湿度＜5％的空气，至涂层室3压力达到常压。打开取料门7，取出涂有氧化铝薄膜涂层的化纤织带14，完成操作。
本发明的铝薄膜沉积过程因沉积室保持较高负压，电极发出的热量，不能传导到化纤织带14，使化纤织带14的温度保持在40℃以下，没有因温度升高造成强度降低。在抽真空状态活性非常强的纳米铝箔膜被ρ型氧化铝粉体的氧元素氧化，使化纤织带14表层的涂层成为铝的半氧化粉体，更提高了反应活性，加剧了团聚密度。化纤织带14表层的涂层成为铝的半氧化粉体接触高浓度氧后，在常温条件下氧化形成了非晶型的薄膜状氧化铝涂层，具有氧化铝的绝缘、隔热、易着色的效果，而且具有韧性，与化纤织带14结合紧密不易脱落。
附图说明
图1装置示意图
具体实施方案
(1)打开各室之间的闸阀5和6，打开放料门4，把缠有化纤织带的原料带缠绕轴12放入原料室2固定，拉出化纤织带14经过沉积室1接到涂层室3的涂层带缠绕轴13上，涂层带缠绕轴13转动可以使化纤织带14通过沉积室1进入涂层室3。关闭放料门4、烷基铝罐9、富氧空气输入管的开关15、氧化铝储罐11、取料门7。
(2)启动真空泵8对已经联通的三个腔室抽真空，达到10-3Pa后关闭真空泵8。
(3)打开烷基铝罐9将烷基铝气体通入沉积室1中，保持体积浓度在3％-5％；打开氧化铝储罐11把粒度小于5μm的ρ型氧化铝粉体通入涂层室3，保持在120-200mg/m3。
(4)启动PECVD电极10，烷基铝被等离子化，铝离子开始在化纤织带表层沉积纳米铝薄膜，沉积过程保持烷基铝体积浓度在3％-5％。转动涂层带缠绕轴13使化纤织带14保持拉直和移动，化纤织带14表层形成纳米铝薄膜后进入涂层室3缠绕在涂层带缠绕轴13。
(5)覆有铝薄膜的化纤织带14进入涂层室3后，因表层铝薄膜具有较强的静电，均匀吸附ρ型氧化铝粉体，化纤织带14表层初步有铝箔膜与氧化铝粉体涂层。活性非常强的纳米铝箔膜被ρ型氧化铝粉体的氧元素氧化，使化纤织带14表层的涂层成为铝的半氧化粉体，更提高了反应活性，加剧了团聚密度。运行过程间歇打开氧化铝储罐11向涂层室3输入氧化铝粉，保持涂层室3的氧化铝在120-200mg/m3。
(6)化纤织带14完全缠绕到涂层带缠绕轴13后，关闭PECVD电极10，关闭沉积室1和涂层室3之间的闸阀6。打开涂层室3下部的富氧空气输入管的开关15，向涂层室3通入含氧量40％、湿度＜5％的空气，至涂层室3压力达到常压。打开取料门7，取出涂有氧化铝薄膜涂层的化纤织带14。

Claims (5)

1.一种化纤织带涂氧化铝层的方法，其特征是装置由原料室、沉积室、涂层室构成，各室之间通过闸阀的开关可以隔断和联通；在原料室有放料门，沉积室室内有电极，上部安有真空泵和烷基铝储罐；涂层室有取料门，上部有氧化铝储罐，下部有富氧空气输入管的开关；化纤织带经PECVD气相沉积铝薄膜后吸附氧化铝粉体团聚包裹，再经深度氧化形成非晶的氧化铝薄膜层，织带涂氧化铝层的方法有以下步骤：
(1)打开各室之间的闸阀，打开放料门放入缠有化纤织带的原料带缠绕轴，拉出化纤织带头经过沉积室接到涂层室的涂层带缠绕轴，涂层带缠绕轴转动可以使化纤织带通过沉积室进入涂层室；关闭放料门、烷基铝罐、富氧空气输入管的开关、氧化铝储罐、取料门；
(2)启动真空泵对已经联通的三个腔室抽真空，达到10-3Pa后关闭真空泵；
(3)打开烷基铝罐将烷基铝气体通入沉积室中，保持体积浓度在3％-5％；打开氧化铝储罐把氧化铝粉体通入涂层室，保持涂层室内氧化铝悬浮状态，在120-200mg/m3；
(4)启动PECVD的电极，转动涂层带缠绕轴使化纤织带保持拉直和移动，烷基铝气体等离子化使铝离子沉积在化纤织带表层形成纳米铝薄膜后进入涂层室缠绕在涂层带缠绕轴；
(5)覆有铝薄膜的化纤织带进入涂层室均匀吸附ρ型氧化铝粉体，运行过程间歇打开氧化铝储罐向涂层室输入氧化铝粉，保持涂层室的氧化铝在120-200mg/m3；
(6)化纤织带完全缠绕到涂层带缠绕轴后，关闭PECVD电极，关闭沉积室和涂层室之间的闸阀；打开涂层室的富氧空气输入管的开关，向涂层室通入富氧干燥空气，至涂层室压力达到常压打开取料门，取出涂有氧化铝薄膜涂层的化纤织带。
2.根据权利要求1所述，一种化纤织带涂氧化铝层的方法，其特征是化纤织带从电极的正负极之间通过。
3.根据权利要求1所述，一种化纤织带涂氧化铝层的方法，其特征是沉积过程保持烷基铝浓度在3％-5％。
4.根据权利要求1所述，一种化纤织带涂氧化铝层的方法，其特征是氧化铝为粒度小于5μm的ρ型氧化铝。
5.根据权利要求1所述，一种化纤织带涂氧化铝层的方法，其特征是富氧干燥空气含氧量40％、湿度＜5％。
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