CN108337872A - A kind of high-precision minitype suction nozzle module and its design method - Google Patents
A kind of high-precision minitype suction nozzle module and its design method Download PDFInfo
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- CN108337872A CN108337872A CN201810241394.8A CN201810241394A CN108337872A CN 108337872 A CN108337872 A CN 108337872A CN 201810241394 A CN201810241394 A CN 201810241394A CN 108337872 A CN108337872 A CN 108337872A
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0408—Incorporating a pick-up tool
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Abstract
The present invention discloses and provides a kind of the high-precision minitype suction nozzle module and its design method of suction nozzle independent control simple in structure, small, each.High-precision minitype suction nozzle module in the present invention includes electric-control system and several vertically arranged accurate cylinders, several accurate cylinders are electrically connected with the electric-control system, it is both provided with directive slide track on each accurate cylinder, sliding is provided with movable block on each directive slide track, each movable block is connected with the output end of the corresponding accurate cylinder, and vacuum slot is vertically provided on each movable block.The present invention can be used for Electronic Testing, semiconductor test technical field.
Description
Technical field
The present invention relates to a kind of high-precision minitype suction nozzle module and its design methods.
Background technology
In SMT chip mounters in the application of existing suction nozzle module, to ensure that the accuracy that picks and places of suction nozzle, suction nozzle are mounted
In the up and down action for realizing suction nozzle on Z axis motor.Existing SMT chip mounters are to improve space availability ratio and operational efficiency, will be more
A suction nozzle is installed on same motor and moves up and down jointly, and for electronics, semiconductor test industry, test event
It is required that it is different, need single suction nozzle that there is enough independence, therefore each suction nozzle needs independent Z axis driving.Traditional
Suction nozzle module in the application the shortcomings that, first, because its single component suction nozzle volume is excessive, the module of more suction nozzles combinations occupies board
Big quantity space, stroke limiting of the module in board；Second is that in certain applications, more suction nozzles are combined in same Z axis and are driven, are reduced
The flexibility of single suction nozzle operation.
Invention content
The technical problem to be solved in the present invention is to provide a kind of height of suction nozzle independent control simple in structure, small, each
Accurate miniature suction nozzle module and its design method.
The technical solution adopted in the present invention is：The present invention includes a kind of high-precision minitype suction nozzle module, described high-accuracy
Miniature suction nozzle module includes electric-control system and several vertically arranged accurate cylinders, several accurate cylinders with it is described automatically controlled
System is electrically connected, and is both provided with directive slide track on each accurate cylinder, is slided and be provided on each directive slide track
Movable block, each movable block are connected with the output end of the corresponding accurate cylinder, on each movable block
It is vertically provided with vacuum slot, suction nozzle spring is provided at the suction inlet of the vacuum slot.
Further, the high-precision minitype suction nozzle module further includes Z axis motor and the output shaft phase with the Z axis motor
The Z axis mounting base of cooperation, adaptation is provided with rotating platform in the Z axis mounting base, and several precisions are arranged at the rotation
Turn on platform.
Further, the high-precision minitype suction nozzle module further includes CCD camera, and the CCD camera is arranged in the Z axis
In mounting base, the CCD camera is electrically connected with the electric-control system.
Further, the high-precision minitype suction nozzle module further includes angle compensation module, the angle compensation module packet
Include with several one-to-one angle adjusters of vacuum slot, several angle adjusters respectively with the electric-control system
Electrical connection.
Further, the high-precision minitype suction nozzle module further includes precision limit module, the precision limit module packet
Include several groups photoelectric sensor and sensing chip, sensing chip described in several groups photoelectric sensor and several groups with several vacuum
Suction nozzle corresponds cooperation.
Further, the precision limit module further includes positioning PCBA board, and several photoelectric sensors, which are adapted to, to be set
It sets in the positioning PCBA board, each photoelectric sensor is including U-shaped sensor top and U-shaped sensor lower part, often
Core bar is both provided on a movable block, the sensing chip is correspondingly arranged on the core bar, and the sensing chip passes through described
Moving up and down for core bar is matched with the U-shaped notch on the U-shaped sensor top or the U-shaped sensor lower part respectively, the U
The sectional dimension of the U-shaped notch on type sensor top and the U-shaped sensor lower part is more than the sectional dimension of the sensing chip.
Further, the precision limit module further includes the auxiliary mounting blocks being arranged in the positioning PCBA board, institute
It states and is provided with several through-holes compatible with the core bar on auxiliary mounting blocks, the core bar passes through the logical of the auxiliary mounting blocks
Hole, the both ends of the core bar are respectively arranged with spring up and down, the spring up and down both ends phase with the auxiliary mounting blocks respectively
Cooperation.
The invention also includes a kind of method of the design high-precision minitype suction nozzle module, the design method is described true
When suction mouth draws product, vacuum generator pull of vacuum f=sp0.11/a, wherein s is vacuum generator sucker
Sectional area, p are negative pressure of vacuum when vacuum generator is stablized, and a is safety coefficient；The suction nozzle spring when executing sucking action by
Damping vibration is carried out after impact, spring force fs=kAe during damped motion-βtCos (wt+b), wherein k is normal
Number, Ae-βtIndicate vibrations amplification, w is angular frequency；After vacsorb product, the equilibrant force relationship of product is f=G+fs,
Wherein, G is by suction product gravity；Equilibrant force when product is drawn can be expressed as f=G+fs1 +△ fs2, wherein when
fs1>>△fs2When, damping vibration process is negligible to the stability influence of vacsorb, and pull of vacuum design at this time can meet
Suction nozzle picks and places the stability of action process.
Further, the vacuum generator forms T=V*60/ (Q-Q the time required to stable vacuumL), wherein V is
Vacuum generator tracheal volume, Q are vacuum generator inhalation flow, QLAmount of leakage when to adsorb, and vacuum generator tracheae holds
Product V=π/4d2L, wherein L is tracheae pipe range, and d is tracheae caliber.
Further, when the core bar matches during up and down motion with the photoelectric sensor, accurate cylinder band
The thrust that dynamic movable block moves up and down is F1It is F with pulling force2, accurate cylinder self resistance is fb, upper and lower the elastic coefficient difference
For k1、k2, length is respectively l1, l2, accurate cylinder moving stroke is h；The correlation of each power is such as in accurate cylinder round trip
Under：
1)F1 = fb + k1·(h+△l)；
2)F2 = fb + k2·(h+△l)；
3)△l <=± 0.5mm, wherein △ l=l2-l1。
Beneficial effects of the present invention are：The present invention accurate cylinder and vacuum slot be all made of in the same direction it is flat, closely set
The mode set designs, and can efficiently reduce lateral occupancy volume；It can ensure that vacuum slot Z-direction is transported by the way that directive slide track is arranged
Dynamic accuracy, and there is ± 0.01mm straightness.On the other hand, in the present invention, each vacuum slot has matched
One movable block, each vacuum slot are relatively independent；Each precision cylinder only can be connected to automatically controlled system by the way that pneumatic joint is arranged
System can reach by controlling movable block respectively and control the purpose of each vacuum slot respectively；Multiple precision cylinder combination installations
The design requirement of structure and control software is substantially reduced；In addition, since vertical direction is without volume increase, volume is laterally occupied
Small, module total volume still maintains miniature, embodies good expansion, when carrying out the expansion combination of multigroup module, it is only necessary to
Increasing structural mount and control interface quantity can quickly and easily be expanded.
Description of the drawings
Fig. 1 is the structural schematic diagram of the present invention；
Fig. 2 be accurate cylinder, precision limit module and suction nozzle cooperation schematic diagram；
Fig. 3 is the synthesis stress curve figure in accurate cylinder round trip.
Specific implementation mode
As shown in Figures 1 and 2, specific implementation mode of the invention is：The present invention includes main body mounting plate 1, fixed setting
In 1 upper left vacuum generator component 11 of the main body mounting plate, it is fixed at the electricity in 1 upper right side of main body mounting plate
Control system 1 and the Z axis motor for being fixed at 1 front center of main body mounting plate, the output shaft of the Z axis motor downwards and
It is connected with Z axis mounting base 6, CCD camera 8, the Z axis mounting base 6 are provided on the right side of the front end of the Z axis mounting base 6
Front end on the left of be provided with rotating platform 7, the CCD camera 8 and the rotating platform 7 design side by side；The rotating platform 7
Lower end adaptation be connected with four groups of vertically arranged precision cylinders 2, accurate cylinder 2 described in four groups is by being arranged in respective upper end
Pneumatic joint 21 coordinate conduit and be communicated to the electric-control system 1；The rear portion of each accurate cylinder 2 is vertically provided with
Directive slide track 3 is slidably matched on the directive slide track 3 and is provided with movable block 4, and the external form of the movable block 4 is obform body；Each
The movable block 4 is arranged in the bottom of the corresponding accurate cylinder 2, and the output end of the precision cylinder 2 is connected to the work
The middle part of motion block 4, the precision cylinder 2 can control the upper and lower displacement of the movable block 4；The front end of each movable block 4
It is respectively connected with vertically arranged vacuum slot 5；It is provided with suction nozzle spring 51 at the lower end suction inlet of the vacuum slot 5；Another party
Face, the vacuum generator component 11 include and four groups of precision cylinders, 2 one-to-one four vacuum generators, the vacuum hair
Raw device carries vacuum generation, solenoid valve and pressure sensor, the vacuum generator and is communicated to the vacuum slot 5 by tracheae
Upper end, the vacuum generator component 11 is electrically connected with the electric-control system 1；The invention also includes angle compensation module, institutes
Stating angle compensation module includes and four 5 one-to-one angle adjusters of the vacuum slot, four angle adjusters
It is electrically connected with the electric-control system 1, the angle adjuster is the prior art, and the angle adjuster acts on corresponding true
On the outer wall of suction mouth 5, the rotation angle of the vacuum slot 5 can be finely tuned.Yet another aspect, the invention also includes precisions to limit
Position module 9, the precision limit module 9 are integrally located at the rear of the movable block 4, and the precision limit module 9 includes one piece
Vertically arranged positioning PCBA board 93, fixed and evenly distributed four groups of photoelectricity being arranged in positioning 93 upper front end of PCBA board
Sensor 91 and be fixed at it is described positioning 93 front lower portion of PCBA board auxiliary mounting blocks 95, the positioning PCBA board 93 and
The main body mounting plate 1 is fixedly connected；It is correspondingly arranged on the auxiliary mounting blocks 95 there are four through-hole, interts on each through-hole and set
Be equipped with core bar 94, the both ends of the core bar 94 are arranged with spring 96 up and down respectively, the spring 96 up and down respectively with the auxiliary
The both ends of mounting blocks 95 are in contact cooperation；Photoelectric sensor 91 described in every group includes U-shaped sensor top 911 and U-shaped sensing
Device lower part 912, each core bar 94 equal in 4 rear side end of the movable block, the sensing chip 92 pass through the upper and lower of the core bar 94
Movement is matched with the U-shaped notch on the U-shaped sensor top 911 or the U-shaped sensor lower part 912 respectively；The U-shaped biography
The sectional dimension of the U-shaped notch on sensor top 911 and the U-shaped sensor lower part 912 is more than the section ruler of the sensing chip 92
It is very little.
In the present invention, each vacuum slot 5 is both connected on accurate cylinder 2, and the precision with directive slide track 3 is accurate
Cylinder 2, it is ensured that ± 0.01mm the straightness of the Z axis movement of vacuum slot 5, and pass through U-shaped sensor top when Z axis movement
911 and U-shaped sensor lower part 912 cooperation sensing chip 92 can realize upper and lower precision limit.Precision limit module 9 is integrated in precision
The rear of cylinder 2 is placed exactly in both ends with the position of vacuum slot 5 and does not interfere；Accurate cylinder 2 and vacuum slot 5 are all made of together
It is designed to mode flat, being closely arranged, lateral occupancy volume can be efficiently reduced；Each precision cylinder 2 is only by setting
Electric-control system 1 can be connected to by setting pneumatic joint 21, be can reach by controlling movable block 4 respectively and controlled each vacuum slot respectively
5 purpose improves the flexibility of vacuum slot 5；Design of multiple precision cylinder 2 combination installations for structure and control software
It is required that substantially reducing；In addition, since vertical direction increases without volume, laterally occupy small, module total volume still maintains micro-
Type embodies good expansion, when carrying out the expansion combination of multigroup module, it is only necessary to increase structural mount and control connects
Mouth quantity can be expanded quickly and easily.
In the suction nozzle module of nonstandard class equipment, it can realize that the Z axis of single suction nozzle independently drives using cylinder connection suction nozzle,
But it can not further meet rotation and pick and place action request.For the suction nozzle module of partial cylinders control, it is limited to bulk factor, it should
Class module can not be rotated.For some electronics and semiconductor test application, the excercises of self-defining suction nozzle are needed
Make.Vacuum slot 5 in the present invention is integrated in the lower end of rotating platform 7 with accurate cylinder 2, can freely carry out angular transition；Together
When, after coordinating upper angle compensating module, by the positioning and demarcating between rotating platform and each vacuum slot 5, it can be directed to every
A vacuum slot 5 carries out independent angular transition and angle compensation.Angle compensation module is that the design increases the one of rotation process
Big characteristic.In electronic product fetching process, product may be various states before pickup, although CCD camera 8 can be with
The line of production before identification pickup, but the direction may have slight angular deviations with board conventional coordinates.And use the design
In rotational structure, can individually carry out large-scale angle compensation for each vacuum slot 5, ensure the pickup production of vacuum slot 5
The position and direction of product, while also further ensuring the accuracy of pickup product.Angle compensation ensure that production with rotary motion
Free position before product pickup can be eliminated, and pick up precision to improve product, and expansible for different product and load
Have environment, it is adaptable.
Accumulative positioning accuracy can be increased to ± 0.02mm in conjunction with the identification of CCD camera 8, and mended for the angle of each suction nozzle
Repay the precision that can further improve pickup, and the structure and deviation of clone and carrier extensively.
Amount of leakage Q when vacuum generator inhalation flow Q, absorptionL, pipe range L, caliber d negative pressure of vacuum p when can calculate stable
(kPa), and T (~ ms) the time required to vacuum is stablized in formation.Volume V=π/4d2L of vacuum line, and formed and stablized very
It is T=V*60/ (Q-Q that suction, which takes required Best-case Response Time,L).And pull of vacuum is born by sucker sectional area s with vacuum
P is pressed to codetermine, wherein a is safety coefficient（Vertical sling is 8）, obtain pull of vacuum f=sp0.11/a.
By product gravity g, pull of vacuum f conversion suction nozzle spring force fs, and picks and places action buffer damping vibrations and determine to inhale
Decrement and original precompressed amount when 51 stroke of mouth spring, feeding.Spring carries out damping vibration after being hit, during damped motion
Spring force fs=kAe-βtCos (wt+b), wherein Ae-βtIndicate vibrations amplification, w is angular frequency.Vacsorb
After product, all equilibrant force relationships of product are f=g+fs, and the equilibrant force of vacuum slot suction when product is drawn can be with
It is expressed as f=g+fs1 +△ fs2, work as fs1>>△ fs2When, damping vibration process can to the stability influence of vacsorb
Ignore, and pull of vacuum design at this time can meet the stability that suction nozzle picks and places action process.
The present invention installs multiple accurate cylinders 2 concentratedly to reduce modular volume, and upper and lower spring 96 coordinates core bar 94, can be with
Buffering reduces the displacement distance of sensing chip 92 on core bar 94 and improves precision；Due to U-shaped sensor top 911 and U-shaped sensor
The sectional dimension of the U-shaped notch of lower part 912 is more than the sectional dimension of sensing chip 92, thus sensing chip 92 and photoelectric sensor 91 it
Between for non-contact type induction cooperation.During the up and down motion of core bar 94, accurate cylinder 2 drives pushing away for the up and down motion of movable block 4
Power F1With pulling force F2, 2 self resistance f of accurate cylinderb, 96 coefficient of elasticity k of upper and lower spring1、k2, length l1, l2, the fortune of accurate cylinder 2
Dynamic stroke h；The correlation of each power is as follows in 2 round trip of accurate cylinder：
1)F1 =fb+k1·(h+△l)
2)F2=fb+k2·(h+△l)
3)△l<=±0.5mm。
The synthesis stress curve of accurate cylinder 2 is shown in attached drawing 3 in motion process, when accurate cylinder 2 is located at lower position-arresting, lower bullet
Spring discharges completely, and upper spring is compressed h, at this time 2 stress coincidence formula 1 of accurate cylinder)；When accurate cylinder 2 is located at upper position-arresting,
Upper spring discharges completely, and lower spring is compressed h, at this time 2 stress coincidence formulas 2 of accurate cylinder)；And 2 frictional force of accurate cylinder
With active force conversely, because friction force effect exists so that there are △ l's by amount of spring compression when total dynamic balance for accurate cylinder 2
Deviation, the deviation range to stress are ± fb.As shown, in stop bit, it is F that final equilibrant force, which is likely to occur deviation range,
± fb.And in the movement of vacuum slot 5, suction nozzle spring 51 needs the deviation of stroke amount of compatible △ l, so that in fetching process
The stability that middle suction nozzle end face is contacted with product surface.
The theoretical accounting of suction nozzle spring force and pull of vacuum and mathematics thrust are analyzed, and different product and board are widely used in
Using.Spring force buffer curve analysis rationally eliminate product pick and place action in impact force, improve the stability of module, have
Conducive to increase module service life.Pull of vacuum is main power source in product fetching process, and the stability of pull of vacuum is direct
Affect the precision and stability that product takes, puts.By the Theoretical Design to each parameter of vacuum occurring source, determine that optimal vacuum is inhaled
Combination parameter design needed for power.Using means of numerical analysis such as mathematical modeling, machine learning, can be fitted suction nozzle spring constant,
Quantitative correlation between each parameters such as 2 push/pull power of accurate cylinder, stroke size, cushioning coefficient, to which optimization system hardware is matched
It sets, software arrange parameter is so that suction nozzle picks and places action and reaches high stability（A ten thousandth material casting rate can be achieved）.
The up and down motion of accurate cylinder 2 is required to limit sensors in place, and all photoelectric sensors 91 collect in the design
It is positioned in PCBA board 93 at being designed at one piece, and position relationship determines that mutual alignment tolerance is by positioning between each sensor
PCBA board 93 ensures.Contactless optical electric induction is used between sensing chip 92 and photoelectric sensor 91, the response time is short, uses frequency
Rate is high.For sensor PCBA convenient for extending transversely, ductility is strong, and utilization ratio is high, and batch cost is cheap.91 component of photoelectric sensor
Design detects response in real time when 94 high-frequency reciprocating of core bar being allowed to move, while non-contact inductive mode improves sensor stabilization
Property and service life.
The present invention can be used for Electronic Testing, semiconductor test technical field.
Claims (10)
1. a kind of high-precision minitype suction nozzle module, it is characterised in that：It includes electric-control system（1）With several vertically arranged precisions
Cylinder（2）, several accurate cylinders（2）With the electric-control system（1）Electrical connection, each accurate cylinder（2）It is upper equal
It is provided with directive slide track（3）, each directive slide track（3）On sliding be provided with movable block（4）, each movable block
（4）With the corresponding accurate cylinder（2）Output end be connected, each movable block（4）On be vertically provided with it is true
Suction mouth（5）, the vacuum slot（5）Suction inlet at be provided with suction nozzle spring（51）.
2. a kind of high-precision minitype suction nozzle module according to claim 1, it is characterised in that：The high-precision minitype suction nozzle
Module further includes Z axis motor and the matched Z axis mounting base of output shaft with the Z axis motor（6）, the Z axis mounting base（6）
Upper adaptation is provided with rotating platform（7）, several precisions（2）It is arranged at the rotating platform（7）On.
3. a kind of high-precision minitype suction nozzle module according to claim 2, it is characterised in that：The high-precision minitype suction nozzle
Module further includes having CCD camera（8）, the CCD camera（8）It is arranged in the Z axis mounting base（6）On, the CCD camera（8）
With the electric-control system（1）Electrical connection.
4. a kind of high-precision minitype suction nozzle module according to claim 1, it is characterised in that：The high-precision minitype suction nozzle
Module further includes angle compensation module, and the angle compensation module includes and several vacuum slots（5）One-to-one angle
Spend adjuster, several angle adjusters respectively with the electric-control system（1）Electrical connection.
5. a kind of high-precision minitype suction nozzle module according to claim 1, it is characterised in that：The high-precision minitype suction nozzle
Module further includes precision limit module（9）, the precision limit module（9）Including several groups photoelectric sensor（91）And sensing chip
（92）, several groups photoelectric sensor（91）With sensing chip described in several groups（92）With several vacuum slots（5）One is a pair of
It should coordinate.
6. a kind of high-precision minitype suction nozzle module according to claim 5, it is characterised in that：The precision limit module
（9）It further include positioning PCBA board（93）, several photoelectric sensors（91）Adaptation is arranged in the positioning PCBA board（93）
On, each photoelectric sensor（91）Include U-shaped sensor top（911）With U-shaped sensor lower part（912）, Mei Gesuo
State movable block（4）On be both provided with core bar（94）, the sensing chip（92）It is correspondingly arranged at the core bar（94）On, the induction
Piece（92）Pass through the core bar（94）Move up and down respectively with the U-shaped sensor top（911）Or under the U-shaped sensor
Portion（912）U-shaped notch match, the U-shaped sensor top（911）With the U-shaped sensor lower part（912）It is U-shaped lack
The sectional dimension of mouth is more than the sensing chip（92）Sectional dimension.
7. a kind of high-precision minitype suction nozzle module according to claim 6, it is characterised in that：The precision limit module
（9）Further include the auxiliary mounting blocks being arranged in the positioning PCBA board（95）, the auxiliary mounting blocks（95）It is provided on if
The dry and core bar（94）Compatible through-hole, the core bar（94）Across the auxiliary mounting blocks（95）Through-hole, the core
Bar（94）Both ends be respectively arranged with up and down spring（96）, the spring up and down（96）Respectively with the auxiliary mounting blocks（95）'s
Both ends match.
8. a kind of design method of high-precision minitype suction nozzle module as claimed in any one of claims 1 to 6, it is characterised in that：Institute
State vacuum slot（5）When drawing product, vacuum generator pull of vacuum f=sp0.11/a, wherein s is vacuum
Device sucker sectional area, p are negative pressure of vacuum when vacuum generator is stablized, and a is safety coefficient；The suction nozzle spring（51）Executing absorption
Damping vibration is carried out after being impacted when action, spring force fs=kAe during damped motion-βtCos (wt+b),
Wherein, k is constant, Ae-βtIndicate vibrations amplification, w is angular frequency；After vacsorb product, the equilibrant force relationship of product is f
=G+fs, wherein G is by suction product gravity；Equilibrant force when product is drawn is represented by f=G+fs1 +△fs2, when
fs1>>△fs2When, damping vibration process is negligible to the stability influence of vacsorb, and pull of vacuum design at this time can meet
Suction nozzle picks and places the stability of action process.
9. design method according to claim 8, it is characterised in that：The vacuum generator forms stable vacuum and is taken
Between T=V*60/ (Q-QL), wherein V is vacuum generator tracheal volume, and Q is vacuum generator inhalation flow, QLFor absorption
When amount of leakage, and vacuum generator tracheal volume V=π/4d2L, wherein L is tracheae pipe range, and d is tracheae caliber.
10. design method according to claim 8, it is characterised in that：The core bar（94）During up and down motion with
The photoelectric sensor（91）When matching, accurate cylinder（2）Drive movable block（4）The thrust of up and down motion is F1It is with pulling force
F2, accurate cylinder（2）Self resistance is fb, upper and lower spring（96）Coefficient of elasticity is respectively k1、k2, length is respectively l1, l2, accurate
Cylinder（2）Movement travel is h；The correlation of each power is as follows in accurate cylinder round trip：
1)F1 = fb + k1·(h+△l)；
2)F2 = fb + k2·(h+△l)；
3)△l <=± 0.5mm, wherein △ l=l2-l1。
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810241394.8A CN108337872B (en) | 2018-03-22 | 2018-03-22 | High-precision miniature suction nozzle module and design method thereof |
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|---|---|---|---|
| CN201810241394.8A CN108337872B (en) | 2018-03-22 | 2018-03-22 | High-precision miniature suction nozzle module and design method thereof |
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| CN108337872B CN108337872B (en) | 2024-02-13 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100226A (en) * | 2018-09-05 | 2018-12-28 | 华霆（合肥）动力技术有限公司 | Welding detection device and detection method |
| CN111857198A (en) * | 2020-07-31 | 2020-10-30 | 苏州猎奇智能设备有限公司 | Pressure control closed-loop system and pressure control method thereof |
| CN112077581A (en) * | 2020-09-15 | 2020-12-15 | 深圳市芬能自动化设备有限公司 | Plug-in mechanism |
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