CN111857198A - Pressure control closed-loop system and pressure control method thereof - Google Patents
Pressure control closed-loop system and pressure control method thereof Download PDFInfo
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- CN111857198A CN111857198A CN202010758003.7A CN202010758003A CN111857198A CN 111857198 A CN111857198 A CN 111857198A CN 202010758003 A CN202010758003 A CN 202010758003A CN 111857198 A CN111857198 A CN 111857198A
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- mounting
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- pressure control
- rotary
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D16/00—Control of fluid pressure
- G05D16/04—Control of fluid pressure without auxiliary power
- G05D16/06—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule
- G05D16/0611—Control of fluid pressure without auxiliary power the sensing element being a flexible membrane, yielding to pressure, e.g. diaphragm, bellows, capsule the sensing element being deformable, e.g. Bourdon tube
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K13/00—Apparatus or processes specially adapted for manufacturing or adjusting assemblages of electric components
- H05K13/04—Mounting of components, e.g. of leadless components
- H05K13/0404—Pick-and-place heads or apparatus, e.g. with jaws
- H05K13/0406—Drive mechanisms for pick-and-place heads, e.g. details relating to power transmission, motors or vibration damping
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Fluid Mechanics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- Manipulator (AREA)
Abstract
The invention provides a pressure control closed-loop system, which comprises a rotary bearing arranged in a shell sleeve, wherein a mounting rotary shaft penetrates through the rotary bearing, one end of the mounting rotary shaft is in driving connection with a driving mechanism, and the other end of the mounting rotary shaft is provided with a mounting suction head; still set up the force response following mechanism between subsides dress rotation axis and the actuating mechanism, force response following mechanism includes the force sensor who is connected with the dress rotation axis, the other end of force sensor is connected with the one end of sensor connecting piece, and the sensor connecting piece passes through the force following mechanism and is connected with rotatory main part. The invention provides a pressure control closed loop system with a high-responsiveness force following function.
Description
Technical Field
The invention relates to the field of automation equipment, in particular to the technical field of automation production equipment, and particularly relates to a pressure control closed-loop system and a pressure control method thereof.
Background
In recent years, with the increase of communication speed requirements, chip components are increasingly miniaturized, products are integrated in high density, and the requirements of production processes and reliability are higher and higher. In the chip mounting process, the requirement on stress is higher and higher. The chip is affected by rapid temperature rise and drop in the process of mounting such as welding, the deformation of the product is increased, and the difficulty of stress following is increased.
For example, patent application No.: CN201821426966.1, patent name: area pastes dress pressure feedback's mounting head discloses a area pastes dress pressure feedback's mounting head, includes: the motor, the machine support, the vacuum cavity, the cavity rotation axis, electrically conductive sliding ring, pressure sensing spring, ball swivel bearing, the swivel bearing sleeve pipe, pressure sensor and suction nozzle subassembly, wherein, the one end of cavity rotation axis pierces through the vacuum cavity that sets up on the motor support and is connected with the motor, the other end overlaps in proper order and is equipped with the electrically conductive sliding ring of its stator and motor support connection, the pressure sensing spring that sets up between motor support and ball swivel bearing, the swivel bearing sleeve pipe of cover on ball swivel bearing, pressure sensor and the coaxial setting of swivel bearing sleeve pipe and both ends are connected with swivel bearing sleeve pipe, suction nozzle subassembly and the coaxial setting of swivel bearing sleeve pipe.
However, the following problems still exist with the light collimation control stage in the prior art:
first, although the pressure-sensitive spring is used for elastic engagement in the prior art, flexible contact is achieved. But the high-responsiveness force following is lacked, and the tiny stress cannot be amplified, so that the control precision is improved.
Secondly, the adopted ball rotary bearing can meet the use requirement of equipment with low precision requirement though reducing friction through balls, but can obviously not meet the use requirement of equipment with higher precision control requirement.
Thirdly, the mounting angle is not convenient to adjust after the workpiece is sucked.
Disclosure of Invention
The invention overcomes the defects of the prior art and provides a pressure control closed-loop system with a high-responsiveness force following function and a pressure control method thereof.
In order to achieve the purpose, the invention adopts the technical scheme that: a pressure control closed loop system comprises a rotary bearing arranged in a shell sleeve, wherein a mounting rotary shaft penetrates through the rotary bearing, one end of the mounting rotary shaft is in driving connection with a driving mechanism, and a mounting suction head is arranged at the other end of the mounting rotary shaft; the mounting rotary shaft and the driving mechanism are also provided with a force response following mechanism, the force response following mechanism comprises a force sensor connected with the mounting rotary shaft, the other end of the force sensor is connected with one end of a sensor connecting piece, and the sensor connecting piece is connected with a rotary driving piece through the force following mechanism.
In a preferred embodiment of the present invention, the force following mechanism includes a plurality of compression springs disposed between the sensor link and the rotary driving member, and a plurality of tension springs elastically connecting the sensor link and the rotary driving member.
In a preferred embodiment of the present invention, one end of the rotating driving member is drivingly connected to the driving mechanism, a docking hole is provided in the other end of the rotating driving member, the compression spring is accommodated in the docking hole, and one end of the sensor connector inserted into the docking hole abuts against the compression spring.
In a preferred embodiment of the present invention, a limiting bearing is transversely disposed on the longitudinally disposed sensor connecting member in a penetrating manner, a through hole communicated with the connecting hole is disposed on the rotating driving member, and through holes are respectively disposed at two ends of the limiting bearing in a penetrating manner on the rotating driving member.
In a preferred embodiment of the present invention, at least one pair of first tension spring fixing members is disposed on the periphery of the sensor connecting member, at least one pair of second tension spring fixing members is disposed on the periphery of the rotating driving member, and the first tension spring fixing members are elastically connected with the second tension spring fixing members on a straight line through tension springs.
In a preferred embodiment of the invention, the shell is in driving connection with an external mounting mechanism, and the mounting mechanism drives the shell to drive the mounting suction head to move up and down for pressing mounting.
In a preferred embodiment of the invention, the lower end of a mounting rotating shaft is provided with a mounting suction head, the upper end of the mounting rotating shaft is provided with a vacuum suction port, and the vacuum suction port is connected with a vacuum cylinder through a vacuum suction pipe; the rotary bearing sleeved outside the mounting rotary shaft is an air floatation rotary bearing.
In a preferred embodiment of the present invention, one end of the mounting suction head is provided with a joint end butted with the mounting rotating shaft, the other end of the mounting suction head is provided with an adsorption hole for adsorbing materials, and a support ring platform is arranged on the periphery of the adsorption hole.
In a preferred embodiment of the present invention, the mounting suction head is provided with a magnetic adsorption part, and the magnetic adsorption part can be stably adsorbed and clamped with the mounting rotating shaft.
In a preferred embodiment of the present invention, a method for controlling pressure in a closed-loop system for pressure control comprises the steps of:
feeding, namely sucking a workpiece through a mounting suction head;
secondly, posture adjustment, namely driving the mounting suction head to rotate through a driving mechanism and mounting angles of workpieces;
step three, mounting, namely, amplifying force response and mounting following performance are realized, and longitudinal relative acting force is applied between mounting rotating shafts through a compression spring and a tension spring, so that acting force received by a workpiece when the mounting suction head is mounted is amplified;
and step four, after the mounting is finished, the pressing distance of the force is adjusted through the mounting force fed back by the force sensor.
The invention solves the defects existing in the technical background, and has the beneficial technical effects that:
the invention discloses a pressure control closed-loop system with a high-responsiveness force following function and a pressure control method thereof.
1. When the tension of the tension spring is adjusted to be equal to the gravity of the shaft and the pressure of the spring, response can be generated when the mounting force is greater than 0 g; meanwhile, when the bottom is stressed more than the surface mounting rotating shaft, the pressure of the spring plays a role in buffering, the upper limit of the surface mounting force depends on the measuring range of the force sensor, and therefore the whole set of force control system can achieve wide-range high precision.
2. When the mounting rotating shaft is stressed to move up and down, an air film gap is formed between the air floatation rotating bearing and the mounting rotating shaft, so that no friction force exists during up-and-down relative movement, the force control precision cannot be influenced, and meanwhile, the air floatation rotating bearing can ensure the linearity requirement of the mounting rotating shaft.
3. The rotary bearing and the rotary driving part are in rolling friction when moving up and down relatively, and the inner side wall of the rotary driving part is polished by a mirror surface, so that the friction force during moving up and down is reduced, and the influence of the friction force on force control is avoided.
4. The force control of the mounting rotating shaft is a flexible structure, so that the product can be quickly mounted by taking and placing, and the product is not required to be pressed and damaged due to single-row stroke overshoot.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a first schematic structural diagram of a preferred embodiment of the present invention;
FIG. 2 is a second schematic structural view of the preferred embodiment of the present invention with the carriage and housing removed and the suction head attached;
FIG. 3 is a schematic illustration of the exploded structure of the preferred embodiment of the present invention with the carriage and housing removed and the suction head attached;
FIG. 4 is a schematic diagram of the configuration of a placement head according to a preferred embodiment of the present invention;
the device comprises a rotating driving part 1, a tension spring fixing part II 2, a compression spring 3, a sensor connecting part 4, a limiting bearing 5, a tension spring 6, a tension spring fixing part I7, a force sensor 8, a mounting rotating shaft 9, a rotating bearing 10, a shell sleeve 11, a sliding seat 12, a driving mechanism 13, a vacuum suction pipe 14, a mounting suction head 15, a connecting end 151, a supporting ring table 152, a suction nozzle 153 and a suction hole 154.
Detailed Description
The invention will now be described in further detail with reference to the accompanying drawings and examples, which are simplified schematic drawings and illustrate only the basic structure of the invention in a schematic manner, and thus show only the constituents relevant to the invention.
It should be noted that, if directional indications (such as up, down, bottom, top, etc.) are involved in the embodiment of the present invention, the directional indications are only used for explaining the relative position relationship, motion situation, etc. of each component in a certain posture, and if the certain posture is changed, the directional indications are changed accordingly. The terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Unless expressly stated or limited otherwise, the terms "disposed," "connected," and "connected" are intended to be inclusive and mean, for example, that there may be a fixed connection, a removable connection, or an integral connection; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Example one
As shown in fig. 1 to 4, a pressure control closed loop system includes a housing 11, a rotary bearing 10, a mounting rotary shaft 9, a driving mechanism 13, a force response following mechanism, and a mounting suction head 15. The shell 11 is in driving connection with an external mounting mechanism through a sliding seat 12, the shell 11 is driven to move up and down through the mounting mechanism, a rotary bearing 10 is arranged in the shell 11, the rotary bearing 10 is an air floatation rotary bearing 10, a mounting rotary shaft 9 penetrates through the air floatation rotary bearing, the upper end of the mounting rotary shaft 9 is in driving connection with a driving mechanism 13, and a mounting suction head 15 is arranged at the lower end of the mounting rotary shaft 9; a force response following mechanism is also provided between the mounting rotation shaft 9 and the drive mechanism 13. The driving mechanism 13 adopts a driving motor, the driving mechanism 13 drives the mounting rotating shaft 9 to rotate, and the mounting rotating shaft 9 drives the mounting suction head 15 to rotate. And the rotary bearing 10 and the mounting rotary shaft 9 and the mounting suction head 15 are concentrically arranged on a straight line.
Specifically, the force response following mechanism comprises a force sensor 8 connected with a mounting rotating shaft 9, one end of the force sensor 8 is connected with the upper end of the mounting rotating shaft 9, the upper end of the force sensor 8 is connected with the lower end of a longitudinally arranged sensor connecting piece 4, and the upper end of the longitudinally arranged sensor connecting piece 4 is connected with the rotary driving piece 1 through the force following mechanism. The rotary driving part 1 is in driving connection with the driving mechanism 13, the driving mechanism 13 drives the rotary driving part 1 to drive the mounting rotating shaft 9 to rotate, and the mounting rotating shaft 9 drives the mounting suction head 15 to rotate. More specifically, the force following mechanism includes at least one compression spring 3 disposed between the sensor link 4 and the rotary driving member 1, and at least one pair of tension springs 6 elastically connecting the sensor link 4 and the rotary driving member 1. The periphery of the sensor connecting piece 4 is provided with at least one pair of first tension spring fixing pieces 7, the periphery of the rotary driving piece 1 is provided with at least one pair of second tension spring fixing pieces 22, and the first tension spring fixing pieces 7 are elastically connected with the second tension spring fixing pieces 22 which are on the same line through tension springs 6.
Further, the one end and the actuating mechanism 13 drive of rotatory driving piece 1 are connected, are provided with the butt joint hole in the other end of rotatory driving piece 1, have received compression spring 3 in the butt joint hole, and the one end that sensor connecting piece 4 and compression spring 3 support to lean on is inserted in the butt joint hole. The sensor connecting piece 4 longitudinally arranged is transversely provided with a limiting bearing 5 in a penetrating mode, a rotating bearing 10 sleeve is further sleeved between the rotating bearing 10 and the sensor connecting piece 4, a through hole communicated with the connecting hole is formed in the rotating driving piece 1, and through holes in the rotating driving piece 1 are respectively formed in two ends of the limiting bearing 5 in a penetrating mode.
Specifically, the lower end of the mounting rotating shaft 99 is provided with a mounting suction head 15, the upper end of the mounting rotating shaft 99 is provided with a vacuum suction port, the vacuum suction port is connected with a vacuum cylinder through a vacuum suction pipe 14, and the vacuum suction port of the mounting rotating shaft 99 is communicated with the lower end of the mounting rotating shaft 99 through the mounting suction head 15. One end of the mounting suction head 15 is provided with a connection end 151 which is in butt joint with the mounting rotating shaft 99, the other end of the mounting suction head 15 is provided with an adsorption hole 154 for absorbing materials, the adsorption hole 154 is communicated with the vacuum suction pipe 14 through a vacuum suction port, and the periphery of the adsorption hole 154 is provided with a support ring platform 152. The mounting suction head 15 is provided with a magnetic adsorption part, and can be stably adsorbed and combined with the mounting rotating shaft 99 through the magnetic adsorption part.
Example two
A pressure control method of a pressure control closed-loop system comprises the following steps:
feeding, namely sucking a workpiece through a mounting suction head 15;
secondly, posture adjustment, namely driving a mounting suction head 15 to rotate through a driving mechanism 13, and mounting angles of workpieces;
step three, mounting, namely, realizing amplifying force response and mounting following performance, and applying longitudinal relative acting force between mounting rotating shafts 99 through a compression spring 3 and a tension spring 6 so as to amplify acting force received by a workpiece when the workpiece is mounted on a mounting suction head 15;
and step four, after the mounting is finished, the pressing distance of the force is adjusted through the mounting force fed back by the force sensor 8.
The working principle of the invention is as follows:
as shown in fig. 1 to 4, the compression spring 3 is used together with the tension spring 6, and when the tension of the tension spring 6 is adjusted to be equal to the gravity of the shaft and the pressure of the spring, response can be realized when the mounting force is greater than 0 g; meanwhile, when the bottom stress is larger than the mounting rotating shaft 9, the spring pressure plays a role in buffering, the upper limit of the mounting force depends on the measuring range of the force sensor 8, and therefore the whole set of force control system can achieve wide-range high precision.
When the mounting rotating shaft 9 is stressed to move up and down, an air film gap is formed between the air floating type rotating bearing 10 and the mounting rotating shaft 9, so that no friction force exists during up-and-down relative movement, force control precision cannot be influenced, and meanwhile, the air floating type rotating bearing 10 can ensure the linearity requirement of the mounting rotating shaft 9.
The up-and-down relative motion between the rotary bearing 10 and the rotary driving part 1 is rolling friction, and the mirror surface polishing of the inner side wall of the rotary driving part 1 reduces the friction force during the up-and-down motion and avoids the influence of the friction force on the force control. The force control of the mounting rotating shaft 9 is a flexible structure, so that the mounting can be carried out quickly when a workpiece is taken and placed, and products are not required to be crushed due to single-row stroke overshoot.
The above embodiments are specific supports for the idea of the present invention, and the protection scope of the present invention is not limited thereby, and any equivalent changes or equivalent modifications made on the basis of the technical scheme according to the technical idea of the present invention still belong to the protection scope of the technical scheme of the present invention.
Claims (10)
1. A pressure control closed loop system, characterized by: the rotary bearing is arranged in a shell sleeve, a mounting rotary shaft penetrates through the rotary bearing, one end of the mounting rotary shaft is in driving connection with a driving mechanism, and a mounting suction head is arranged at the other end of the mounting rotary shaft; the mounting rotary shaft and the driving mechanism are also provided with a force response following mechanism, the force response following mechanism comprises a force sensor connected with the mounting rotary shaft, the other end of the force sensor is connected with one end of a sensor connecting piece, and the sensor connecting piece is connected with a rotary driving piece through the force following mechanism.
2. A pressure control closed loop system as defined in claim 1 wherein: the force following mechanism comprises a plurality of compression springs arranged between the sensor connecting piece and the rotary driving piece and a plurality of tension springs for elastically connecting the sensor connecting piece and the rotary driving piece.
3. A pressure control closed loop system as claimed in claim 2, wherein: one end of the rotary driving piece is in driving connection with the driving mechanism, a butt joint hole is formed in the other end of the rotary driving piece, the compression spring is contained in the butt joint hole, and the sensor connecting piece is inserted into one end in the butt joint hole and abuts against the compression spring.
4. A pressure control closed loop system as defined in claim 3 wherein: the sensor connecting piece is longitudinally arranged, a limiting bearing transversely penetrates through the sensor connecting piece, a through hole communicated with the connecting hole is formed in the rotary driving piece, and the two ends of the limiting bearing are respectively penetrated through the through hole in the rotary driving piece.
5. A pressure control closed loop system as defined in claim 4 wherein: the sensor connecting piece is provided with at least one pair of first tension spring fixing pieces at the periphery, the rotating driving piece is provided with at least one pair of second tension spring fixing pieces at the periphery, and the first tension spring fixing pieces are elastically connected with the second tension spring fixing pieces on the same straight line through tension springs.
6. A pressure control closed loop system as defined in claim 5 wherein: the shell sleeve is in driving connection with an external mounting mechanism, and the mounting mechanism drives the shell sleeve to drive the mounting suction head to move up and down for pressing and mounting.
7. A pressure control closed loop system as defined in claim 6 wherein: the lower end of the pasting rotary shaft is provided with a pasting suction head, the upper end of the pasting rotary shaft is provided with a vacuum suction port, and the vacuum suction port is connected with a vacuum cylinder through a vacuum suction pipe; the rotary bearing sleeved outside the mounting rotary shaft is an air floatation rotary bearing.
8. A pressure control closed loop system as defined in claim 7 wherein: one end of the pasting and mounting suction head is provided with a connecting end butted with the pasting and mounting rotating shaft, the other end of the pasting and mounting suction head is provided with an adsorption hole used for absorbing materials, and a support ring platform is arranged on the periphery of the adsorption hole.
9. A pressure control closed loop system as defined in claim 8 wherein: the mounting suction head is provided with a magnetic adsorption part, and the mounting suction head can be stably adsorbed and clamped with a mounting rotating shaft through the magnetic adsorption part.
10. A method of pressure control in a closed loop system of pressure control as claimed in any one of claims 1 to 9, wherein: comprises the following steps of (a) carrying out,
feeding, namely sucking a workpiece through a mounting suction head;
secondly, posture adjustment, namely driving the mounting suction head to rotate through a driving mechanism and mounting angles of workpieces;
step three, mounting, namely, amplifying force response and mounting following performance are realized, and longitudinal relative acting force is applied between mounting rotating shafts through a compression spring and a tension spring, so that acting force received by a workpiece when the mounting suction head is mounted is amplified;
and step four, after the mounting is finished, the pressing distance of the force is adjusted through the mounting force fed back by the force sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010758003.7A CN111857198B (en) | 2020-07-31 | 2020-07-31 | Pressure control closed-loop system and pressure control method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010758003.7A CN111857198B (en) | 2020-07-31 | 2020-07-31 | Pressure control closed-loop system and pressure control method thereof |
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| Publication Number | Publication Date |
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| CN111857198A true CN111857198A (en) | 2020-10-30 |
| CN111857198B CN111857198B (en) | 2023-08-08 |
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| CN202010758003.7A Active CN111857198B (en) | 2020-07-31 | 2020-07-31 | Pressure control closed-loop system and pressure control method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116086664A (en) * | 2023-03-14 | 2023-05-09 | 苏州猎奇智能设备有限公司 | 360 rotatory little pressure sensing module of degree and mounting adsorption equipment |
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| CN1489434A (en) * | 2002-08-29 | 2004-04-14 | ������������ʽ���� | Element mounting device |
| CN108337872A (en) * | 2018-03-22 | 2018-07-27 | 珠海市运泰利自动化设备有限公司 | A kind of high-precision minitype suction nozzle module and its design method |
| CN108447809A (en) * | 2018-05-10 | 2018-08-24 | 山东安吉奥自动化科技有限公司 | Die bonder pressure control device and sorting mechanism pressure control rotary system |
| CN209120585U (en) * | 2018-08-31 | 2019-07-16 | 昆山科亚迪自动化设备有限公司 | Mounting head with placement pressure feedback |
| CN110611996A (en) * | 2018-06-15 | 2019-12-24 | 朗微士光电（苏州）有限公司 | Chip mounter |
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2020
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1489434A (en) * | 2002-08-29 | 2004-04-14 | ������������ʽ���� | Element mounting device |
| CN108337872A (en) * | 2018-03-22 | 2018-07-27 | 珠海市运泰利自动化设备有限公司 | A kind of high-precision minitype suction nozzle module and its design method |
| CN108447809A (en) * | 2018-05-10 | 2018-08-24 | 山东安吉奥自动化科技有限公司 | Die bonder pressure control device and sorting mechanism pressure control rotary system |
| CN110611996A (en) * | 2018-06-15 | 2019-12-24 | 朗微士光电（苏州）有限公司 | Chip mounter |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116086664A (en) * | 2023-03-14 | 2023-05-09 | 苏州猎奇智能设备有限公司 | 360 rotatory little pressure sensing module of degree and mounting adsorption equipment |
| CN116086664B (en) * | 2023-03-14 | 2023-08-15 | 苏州猎奇智能设备有限公司 | 360 rotatory little pressure sensing module of degree and mounting adsorption equipment |
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| CN111857198B (en) | 2023-08-08 |
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