CN108333177A - Liquid detection device - Google Patents
Liquid detection device Download PDFInfo
- Publication number
- CN108333177A CN108333177A CN201710851629.0A CN201710851629A CN108333177A CN 108333177 A CN108333177 A CN 108333177A CN 201710851629 A CN201710851629 A CN 201710851629A CN 108333177 A CN108333177 A CN 108333177A
- Authority
- CN
- China
- Prior art keywords
- liquid
- unit
- light source
- detecting
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 37
- 239000007788 liquid Substances 0.000 title abstract description 20
- 230000005540 biological transmission Effects 0.000 claims description 8
- 239000012491 analyte Substances 0.000 claims description 2
- 238000004891 communication Methods 0.000 claims description 2
- 238000007664 blowing Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 description 12
- 229910052751 metal Inorganic materials 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 239000003039 volatile agent Substances 0.000 description 9
- 239000000843 powder Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 241000196324 Embryophyta Species 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 235000006508 Nelumbo nucifera Nutrition 0.000 description 1
- 240000002853 Nelumbo nucifera Species 0.000 description 1
- 235000006510 Nelumbo pentapetala Nutrition 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012858 packaging process Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N2021/8411—Application to online plant, process monitoring
Abstract
The invention provides a liquid detection device, comprising: an image capturing unit for capturing a surface image of an object to be measured; a light source unit arranged below the image capturing unit for providing a light source for detecting the object to be detected, a housing covering the light source unit, and a detection port arranged at the bottom of the housing; and the air blowing unit is arranged below the housing and can form an air curtain to shield the detection port.
Description
Technical field
The present invention about a kind of detection device, on espespecially a kind of metal gasket for detecting substrate liquid covering situation and
It can prevent liquid volatiles from influencing the liquid-detecting of accuracy of detection.
Background technology
Known plant ball (Ball Mounting) operation in semiconductor packaging process is first in a spray coating operations station
To the substrate spraying scaling powder (Flux Jetting) equipped with several metal gaskets, then to a cleaning station by helping on metal gasket
Solder flux is washed away together with the oxide layer of metal gasket, and several soldered balls are finally planted to a plant ball work station gold for being placed on substrate respectively
Belong on pad；Wherein, need to detect the covering shape of scaling powder on metal gasket after substrate has sprayed scaling powder by a detection device
Condition, the detection device, to substrate capture post analysis image, are attained by with the substrate for ensuring all with camera lens and meet next technique
Preassigned.
Invention content
Volatile matter is generated because scaling powder equal solvent can all volatilize, the volatile matter of scaling powder may be attached to detection device
Camera lens on, make camera lens minute surface be atomized and influence detection precision, theoretically need to wait for one after substrate has sprayed scaling powder
The section time is detected again after allowing volatile matter to disperse completely, but because pursuing the capacity efficiency in the unit interval in practice, it can not
Too many stand-by period can be expended, therefore when scaling powder covers situation on detection device detection metal gasket, still fluxing agent
The situation that volatile matter influences accuracy of detection occurs.
Therefore, the purpose of the present invention is to provide a kind of liquid volatiles prevented on determinand to influence accuracy of detection
Liquid-detecting.
The liquid-detecting of purpose according to the present invention, including：One taking unit, to capture the surface shadow of a determinand
Picture；One light source unit is set to below the taking unit, to provide one case of light source of the analyte detection to be measured, is located at the light
Except source unit, which offers a detection mouth；One insufflation unit is set to below the case, can form air curtain screening
Cover the detection mouth.
The liquid-detecting of the embodiment of the present invention, because taking unit is covered with light source unit by case, and in case
Gas is blowed to form air curtain occlusion detection mouth equipped with insufflation unit again at the detection mouth of bottom, makes evaporating on determinand
Object, which is not easy to be directly entered in case, to be attached on taking unit or light source unit and influences accuracy of detection；If in addition, evaporating
When object is entered across air curtain in case accidentally, covering members can barrier liquid volatile matter continue up and climb sharply, if transmission element thereon
Liquid volatiles in attachment and when being atomized, can directly wipe transmission element removal volatile matter, also there is convenience in cleaning.
Description of the drawings
Fig. 1 is the schematic diagram of the configuration of liquid-detecting and determinand in the embodiment of the present invention.
Fig. 2 is the stereoscopic schematic diagram of liquid-detecting separation case in the embodiment of the present invention.
Fig. 3 is the schematic diagram of the insufflation unit configuration below case in the embodiment of the present invention.
Fig. 4 is the schematic diagram that liquid-detecting is detected determinand in the embodiment of the present invention.
【Symbol description】
A liquid-detecting A1 taking units
A11 view-finder A12 camera lenses
The end faces A2 mounting plate A21
A3 light source unit A31 photophores
A32 spectroscope A4 cases
A41 the first side plate the second side plates of A42
A43 detection mouth A44 top plates
A441 wiring mouth A5 insufflation units
A51 jets portion A52 air curtains
A6 covering members A61 engraves mouth
A62 transmission element W determinands
W1 liquid W11 liquid volatiles
W2 substrate W3 metal gaskets
Specific implementation mode
Referring to Fig. 1, liquid-detecting A as shown in the figure can be used to execute the table of determinand W for the embodiment of the present invention
Face is detected, and determinand W is the substrate W2 of the transparency liquids W1 such as a surface spraying fluxing agent, and the surface of substrate W2 is equipped with number
A metal gasket W3.
Fig. 2,3,4 are please referred to, liquid-detecting A includes：
One taking unit A1 is set to the side of a mounting plate A2, to capture the surface image of determinand W, the capture list
First A1 is equipped with an a view-finder A11 and camera lens A12 on the direction vertical with the determinand W surface, and view-finder A11 can be electricity
Lotus coupling assembly (CCD) or complementary metal oxide semiconductor (CMOS)；
One light source unit A3, it is to be measured to provide set on the side of mounting plate A2 and below taking unit A1
The light source of object W detections, light source unit A3 are equipped with a photophore A31 and a spectroscope A32, photophore A31 and determinand W tables
Face in it is horizontally disposed and can emitting ultraviolet light (UV light), spectroscope A32 is in 45 degree of angle excursions of upper left bottom right and sets
Between taking unit A1 and determinand W, the one side of spectroscope A32 corresponds to camera lens A12, and another side corresponds to the photophore
A31 makes the ultraviolet light that photophore A31 launches that can be projeced into the table of determinand W with vertical direction by the refraction of spectroscope A32
Face forms the axis light coaxial with taking unit A1；
One case A4 is set to the side of mounting plate A2, is the first side plate A41 erected by one piece and two pieces erect the
Two side plate A42 are formed in the configuration of ㄇ fonts, and case A4 is fixed at two ends of mounting plate A2 with two piece of second side plate A42 respectively
On the A21 of face, and the height of case A4 may make up case A4 covers simultaneously when case A4 is covered in the side of mounting plate A2 in taking
Except unit A1 and light source unit A3；The bottoms case A4 offer a detection mouth A43, and a top plate A44 is equipped at the top of case A4,
A wiring mouth A441 is offered thereon to provide outside line through the taking unit A1 and light in the wiring mouth A441 and case A4
Source unit A3 electrical communications；
One insufflation unit A5, is set to the bottom of mounting plate A2 and the side below case A4, insufflation unit A5 are equipped with
One in horizontally disposed thin flat-shaped jet portion A51, to form an air curtain A52 occlusion detection mouths A43 below detection mouth A43；
One covering members A6 is set between light source unit A3 and detection mouth A43, which is provided with one and engrave a mouthful A61, and has one transparent
Transmission element A62 be embedded at this and engrave at mouthful A62, transmission element A62 is set to below spectroscope A32.
In the liquid-detecting A of the embodiment of the present invention, light source unit A3 with coaxial ultraviolet light determinand W surface,
And obtain the vertical view image of determinand W surface in vertical direction with taking unit A1；It is covered with the areas metal gasket W3 of liquid W1
Domain is because metal gasket W3 is the metal material for having high reflectivity, therefore diffusion process meeting of the ultraviolet light between liquid W1 and metal gasket W3
Keep the region more bright on image, binary image processing is carried out to examine to the vertical view image of determinand W surface again later
Survey covering situations of the determinand W surface transparency liquid W1 on metal gasket W3.
The liquid-detecting of inspection of the embodiment of the present invention prevents the method for liquid volatiles influence accuracy of detection on the implementation,
Including：When detection device A carries out surface image detection to the determinand W for being coated with liquid W1, make taking unit A1 and light source
Unit A3 is covered by case A4, and it is to be measured to form air curtain A52 blockings by the insufflation unit A5 below case A4 to blow gas
Liquid volatiles W11 on object W is entered by the detection mouth A43 of the bottoms case A4 in case A4.
The liquid-detecting of the embodiment of the present invention, because taking unit A1 and light source unit A3 is covered by case A4,
And gas is blowed to form air curtain A52 occlusion detection mouths equipped with insufflation unit A5 again at the detection mouth A43 of the bottoms case A4
A43 makes the liquid volatiles W11 on determinand W be not easy to be directly entered in case A4 and be attached to taking unit A1 or light source unit
A3 is upper and influences accuracy of detection；In addition, when if liquid volatiles W11 is entered across air curtain A52 in case A4 accidentally, covering members A6
Can barrier liquid volatile matter W11 continue up and climb sharply, if the upper liquid volatiles W11 of transmission element A62 attachments thereon and when being atomized,
Transmission element A62 removal volatile matter W11 can be directly wiped, also there is convenience in cleaning.
But the foregoing is merely illustrative of the preferred embodiments of the present invention, when the model implemented of the present invention cannot be limited with this
It encloses, i.e., all still belongs to according to simple equivalent changes and modifications made by scope of the present invention patent and invention description content generally
In the range of patent of the present invention covers.
Claims (8)
1. a kind of liquid-detecting, including：
One taking unit, to capture the surface image of a determinand；
One light source unit is set to below the taking unit, to provide the light source of the analyte detection to be measured
One case is located at except the light source unit, which offers a detection mouth；
One insufflation unit is set to below the case, can form an air curtain and cover the detection mouth.
2. liquid-detecting as described in claim 1, which is characterized in that the insufflation unit is equipped with one in horizontally disposed thin
Flat-shaped jet portion.
3. liquid-detecting as described in claim 1, which is characterized in that be equipped with one between the light source unit and the detection mouth
Covering members which is provided with a transparent transmission element below a spectroscope of the light source unit.
4. liquid-detecting as described in claim 1, which is characterized in that the taking unit is vertical with the determinand surface
Direction be equipped with a view-finder and a camera lens；The light source unit be equipped with a photophore and a spectroscope, the photophore with it is to be measured
Object surface is in being horizontally disposed with, which is set in 45 degree of angle excursions between the taking unit and determinand, spectroscope
One side corresponds to the camera lens, and another side corresponds to the photophore.
5. liquid-detecting as claimed in claim 4, which is characterized in that the photophore is emitting ultraviolet light.
6. liquid-detecting as described in claim 1, which is characterized in that the case is located at except the taking unit.
7. liquid-detecting as claimed in claim 6, which is characterized in that the height of the case may make up case while be provide with
Except taking unit and light source unit.
8. liquid-detecting as claimed in claim 6, which is characterized in that be equipped with a top plate at the top of the case, which opens
Equipped with a wiring mouth to provide outside line through the taking unit and light source unit electrical communication in the wiring mouth and case.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW106102267A TWI630669B (en) | 2017-01-20 | 2017-01-20 | Liquid detection device |
| TW106102267 | 2017-01-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108333177A true CN108333177A (en) | 2018-07-27 |
Family
ID=62922975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710851629.0A Pending CN108333177A (en) | 2017-01-20 | 2017-09-19 | Liquid detection device |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN108333177A (en) |
| TW (1) | TWI630669B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116908062A (en) * | 2023-09-07 | 2023-10-20 | 儒亚科技（北京）有限公司 | Online detection analyzer for particles in lubricating oil |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2596352Y (en) * | 2002-07-29 | 2003-12-31 | 西安交通大学 | Real-time monitoring optical image detector for product quality in industrial production |
| CN102954966A (en) * | 2011-08-19 | 2013-03-06 | 天津市三特电子有限公司 | Hot continuous cast billet surface quality detection system |
| CN202886297U (en) * | 2012-09-29 | 2013-04-17 | 深圳市华星光电技术有限公司 | Image capturing device and detecting device |
| WO2015080745A1 (en) * | 2013-11-27 | 2015-06-04 | Halliburton Energy Services, Inc. | Air curtain generator for optical sensing devices |
| CN204405526U (en) * | 2015-01-15 | 2015-06-17 | 中国航空工业集团公司沈阳发动机设计研究所 | A kind of anti-pollution observation window |
| CN104823038A (en) * | 2012-10-15 | 2015-08-05 | 特克斯特斯特股份公司 | Method for detecting drops of liquid on surface of test specimen |
| CN104914104A (en) * | 2014-03-13 | 2015-09-16 | 日本株式会社日立高新技术科学 | Imaging apparatus for thermal analyzer and thermal analyzer including the same |
| CN105784597A (en) * | 2016-05-26 | 2016-07-20 | 秦皇岛港股份有限公司 | Protecting device for visual inspection system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| SG126104A1 (en) * | 2005-03-31 | 2006-10-30 | Shibuya Kogyo Co Ltd | Conductive ball mounting method, and apparatus therefor |
| TWI271249B (en) * | 2005-12-27 | 2007-01-21 | Delta Electronics Inc | Automatic spraying method for flux of wave solder oven |
| JP5502732B2 (en) * | 2007-07-23 | 2014-05-28 | ヘンケル リミテッド | Solder flux |
| TW201612511A (en) * | 2014-09-24 | 2016-04-01 | Solomon Technology Corp | Inspection equipment of transparent colloid |
| JP6475030B2 (en) * | 2015-01-30 | 2019-02-27 | Ａｉメカテック株式会社 | Substrate processing system and substrate processing method |
-
2017
- 2017-01-20 TW TW106102267A patent/TWI630669B/en active
- 2017-09-19 CN CN201710851629.0A patent/CN108333177A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2596352Y (en) * | 2002-07-29 | 2003-12-31 | 西安交通大学 | Real-time monitoring optical image detector for product quality in industrial production |
| CN102954966A (en) * | 2011-08-19 | 2013-03-06 | 天津市三特电子有限公司 | Hot continuous cast billet surface quality detection system |
| CN202886297U (en) * | 2012-09-29 | 2013-04-17 | 深圳市华星光电技术有限公司 | Image capturing device and detecting device |
| CN104823038A (en) * | 2012-10-15 | 2015-08-05 | 特克斯特斯特股份公司 | Method for detecting drops of liquid on surface of test specimen |
| WO2015080745A1 (en) * | 2013-11-27 | 2015-06-04 | Halliburton Energy Services, Inc. | Air curtain generator for optical sensing devices |
| CN104914104A (en) * | 2014-03-13 | 2015-09-16 | 日本株式会社日立高新技术科学 | Imaging apparatus for thermal analyzer and thermal analyzer including the same |
| CN204405526U (en) * | 2015-01-15 | 2015-06-17 | 中国航空工业集团公司沈阳发动机设计研究所 | A kind of anti-pollution observation window |
| CN105784597A (en) * | 2016-05-26 | 2016-07-20 | 秦皇岛港股份有限公司 | Protecting device for visual inspection system |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116908062A (en) * | 2023-09-07 | 2023-10-20 | 儒亚科技（北京）有限公司 | Online detection analyzer for particles in lubricating oil |
| CN116908062B (en) * | 2023-09-07 | 2023-12-19 | 儒亚科技（北京）有限公司 | Online detection analyzer for particles in lubricating oil |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201828379A (en) | 2018-08-01 |
| TWI630669B (en) | 2018-07-21 |
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|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180727 |