TWI630669B - Liquid detection device - Google Patents

Abstract

The present invention provides a liquid detection device, including: an image capturing unit for capturing a surface image of an object to be measured; a light source unit disposed below the image capturing unit for providing a light source for detecting the object to be detected; A cover is provided outside the light source unit, and a detection port is provided at the bottom of the cover; an air blowing unit is provided below the cover, and an air curtain can be formed to cover the detection port. Thin flat jet section set horizontally.

Description

Liquid detection device

The invention relates to a detection device, in particular to a liquid detection device for detecting the liquid covering condition on a metal pad of a substrate and preventing liquid volatiles from affecting the detection accuracy.

Known in the process of ball mounting in the semiconductor packaging process, firstly spray the flux (Flux Jetting) on a substrate with a plurality of metal pads in a spraying station, and then to a cleaning station to help the metal pads The flux is washed away with the oxide layer of the metal pad. Finally, a plurality of solder balls are respectively planted on the metal pad of the substrate at a ball-planting station. Among them, after the substrate is sprayed with flux, a detection device is required to detect the metal pad. The coverage of the flux. The detection device analyzes the image by taking a lens to the substrate to ensure that all the substrates can meet the predetermined standards for the next process.

Volatile substances are generated due to the volatilization of solvents such as flux. The volatiles of the flux may adhere to the lens of the detection device, making the mirror surface of the lens atomize and affecting the accuracy of the detection. Theoretically, it is necessary to spray the flux on the substrate. Wait for a period of time to allow the volatiles to completely disperse before testing. However, in practice, it is impossible to spend too much waiting time because of the pursuit of productivity efficiency per unit time. Therefore, when using a detection device to detect the flux coverage on the metal pad, There are situations where the volatiles of the flux affect the detection accuracy.

That is, the object of the present invention is to provide a liquid detection device which can prevent liquid volatiles on the object to be detected from affecting the detection accuracy.

A liquid detection device according to the purpose of the present invention includes: an image capturing unit for capturing a surface image of an object to be measured; a light source unit disposed below the image capturing unit for providing a light source for detecting the object to be measured A cover, which is set outside the light source unit, and a detection port is provided at the bottom of the cover; an air blowing unit, which is arranged below the cover, can form an air curtain to cover the detection port, and the air blowing unit is provided with a A thin flat-shaped jet section arranged horizontally.

Another liquid detection device according to the purpose of the present invention includes: an image capturing unit for capturing a surface image of an object to be measured; and a light source unit disposed below the image capturing unit for providing the object to be detected A light source; a cover, which is arranged outside the light source unit, and a detection port is provided at the bottom of the cover; a cover member is provided between the light source unit and the detection port, and a transparent light transmitting member is provided on the cover; A light source unit is below a beam splitter; an air blowing unit is arranged below the cover, and an air curtain can be formed to cover the detection port.

Another liquid detection device according to the purpose of the present invention includes an image capturing unit for capturing a surface image of an object to be measured. The image capturing unit is provided with an imager in a direction perpendicular to the surface of the object to be measured. And a lens; a light source unit disposed below the image capturing unit to provide a light source for detecting the object to be detected, the light source unit is provided with a light emitter and a beam splitter, and the light emitter is horizontally arranged on the surface of the object to be measured The beam splitter is set at a forty-five degree deflection angle between the image capturing unit and the object to be measured. One side of the beam splitter faces the lens, and the other side corresponds to the light emitter. A cover is arranged on the light source. Outside the unit, a detection port is provided at the bottom of the cover; an air blowing unit is provided below the cover, and an air curtain can be formed to cover the detection port.

In the liquid detection device of the embodiment of the present invention, the imaging unit and the light source unit are covered by the cover, and a blowing unit is provided at the detection port at the bottom of the cover to blow gas to form an air curtain to cover the detection port, so that Liquid volatiles on the object to be tested are not easy to directly enter the enclosure and attach to the imaging unit or light source unit, which will affect the detection accuracy. In addition, if the liquid volatiles accidentally pass through the air curtain and enter When entering the cover, the cover can stop the liquid volatiles from rising upwards. If the light-transmitting elements on the cover are atomized by the liquid volatiles, they can be wiped directly to remove the volatiles. Convenience.

A‧‧‧Liquid detection device

A1‧‧‧Image acquisition unit

A11‧‧‧Image picker

A12‧‧‧Lens

A2‧‧‧Mounting plate

A21‧‧‧face

A3‧‧‧Light source unit

A31‧‧‧light emitter

A32‧‧‧ Beamsplitter

A4‧‧‧Cover

A41‧‧‧First side plate

A42‧‧‧Second side plate

A43‧‧‧Test port

A44‧‧‧Top plate

A441‧‧‧Wiring port

A5‧‧‧Blowing unit

A51‧‧‧Jet Department

A52‧‧‧Air curtain

A6‧‧‧ Cover

A61‧‧‧Spigot

A62‧‧‧Translucent parts

W‧‧‧DUT

W1‧‧‧Liquid

W11‧‧‧Liquid volatiles

W2‧‧‧ substrate

W3‧‧‧metal pad

FIG. 1 is a schematic diagram of the configuration of the liquid detection device and the object to be measured in the embodiment of the present invention.

FIG. 2 is a schematic perspective view of a separation cover of a liquid detection device according to an embodiment of the present invention.

FIG. 3 is a schematic diagram of the configuration of the blowing unit under the cover in the embodiment of the present invention.

FIG. 4 is a schematic diagram of a liquid detection device for detecting an object to be detected in an embodiment of the present invention.

Please refer to FIG. 1. In the embodiment of the present invention, the liquid detection device A shown in the figure can be used to perform the surface detection of the test object W. The test object W is a substrate W2 sprayed with a transparent liquid W1 such as flux on the surface. A plurality of metal pads W3 are provided on the surface of the substrate W2.

Please refer to FIGS. 2, 3 and 4. The liquid detection device A includes: an image capturing unit A1, which is disposed on one side of a mounting plate A2 to capture a surface image of the object to be measured W. The image capturing unit A1 is An image pickup device A11 and a lens A12 are provided in a direction perpendicular to the surface of the object to be measured. The image pickup device A11 may be a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS). A light source unit A3 is provided. It is located on one side of the mounting plate A2 and below the image capturing unit A1, and is used to provide a light source for detecting the object W to be measured. The light source unit A3 is provided with a light emitter A31 and a beam splitter A32. The surface of the object W is horizontally arranged and can emit ultraviolet light (UV light). The beam splitter A32 has a forty-five-degree deviation angle from the upper left to the lower right and is located between the imaging unit A1 and the object to be measured. The beam splitter A32 One side corresponds to the lens A12, and the other side corresponds to the light emitter A31. The ultraviolet light emitted by the light emitter A31 can be projected in the vertical direction on the surface of the object to be measured W by the refraction of the beam splitter A32 to form coaxial light coaxial with the imaging unit A1; a cover A4 is provided on the mounting plate A2. On one side, it consists of a first side plate A41 standing upright and two second side plates A42 standing up in a zigzag configuration. The cover A4 is screwed to the mounting plate A2 with two second side plates A42 respectively. The two end surfaces A21 and the height of the cover A4 can form the cover A4 when the cover A4 covers one side of the mounting plate A2 and cover the image capturing unit A1 and the light source unit A3 at the same time; the bottom of the cover A4 A detection port A43 is provided, and a top plate A44 is provided on the top of the cover A4, and a wiring port A441 is provided thereon to provide an external circuit to be electrically connected to the image capturing unit A1 and the light source unit A3 in the cover A4 through the wiring port A441; The air blowing unit A5 is located at the bottom of the mounting plate A2 and is located on one side below the cover A4. The air blowing unit A5 is provided with a thin flat air jet portion A51 horizontally arranged to form an air curtain A52 under the detection port A43. Detection port A43; a cover A6 is provided between the light source unit A3 and the detection port A43. Engrave the A61 is provided with a port, and having a transparent member of the light-transmissive embedded in the engraving A62 A62 at the mouth, the transparent member disposed below the dichroic mirror A62 A32.

In the liquid detection device A of the embodiment of the present invention, the light source unit A3 irradiates the surface of the object W with coaxial ultraviolet light, and obtains a top-view image of the surface of the object W with the imaging unit A1 in a vertical direction. Metal pad W3 area Because metal pad W3 is a highly reflective metal material, the diffusion process of ultraviolet light between liquid W1 and metal pad W3 will make the area brighter on the image. The overhead image is subjected to binarized image processing to detect the coverage of the transparent liquid W1 on the surface of the object W on the metal pad W3.

The method for preventing the liquid volatiles from affecting the detection accuracy by the liquid detection device inspected in the embodiment of the present invention includes: performing a table on the detection device A to test the object W sprayed with the liquid W1. During surface image detection, the image capturing unit A1 and the light source unit A3 are covered by the cover A4, and the gas is blown by the blowing unit A5 under the cover A4 to form an air curtain A52 to block the liquid volatiles on the object to be measured W W11 enters the casing A4 through the detection port A43 at the bottom of the casing A4.

In the liquid detection device of the embodiment of the present invention, the imaging unit A1 and the light source unit A3 are covered by the casing A4, and a blowing unit A5 is provided at the detection port A43 at the bottom of the casing A4 to blow gas to form a gas The curtain A52 covers the detection port A43, making it difficult for the liquid volatiles W11 on the object W to directly enter the casing A4 and attach to the imaging unit A1 or the light source unit A3, which affects the detection accuracy. In addition, if the liquid volatiles W11 is inadvertent When passing through the air curtain A52 and entering the casing A4, the covering member A6 can stop the liquid volatiles W11 from rising upwards. If the light transmitting member A62 is atomized with the liquid volatiles W11 attached, it can wipe the light directly. The A62 removes volatiles W11, which is also convenient for cleaning.

However, the above are only the preferred embodiments of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, the simple equivalent changes and modifications made according to the scope of the patent application and the description of the invention, All are still within the scope of the invention patent.

Claims (7)

A liquid detection device includes: an image capturing unit for capturing a surface image of an object to be measured; a light source unit disposed below the image capturing unit for providing a light source for detecting the object to be tested; a cover A cover is provided outside the light source unit, and a detection port is provided at the bottom of the cover; an air blowing unit is provided below the cover, and an air curtain can be formed to cover the detection port, and the air blowing unit is provided with a horizontally arranged Thin flat jet section. A liquid detection device includes: an image capturing unit for capturing a surface image of an object to be measured; a light source unit disposed below the image capturing unit for providing a light source for detecting the object to be tested; a cover A cover is provided outside the light source unit, and a detection port is provided at the bottom of the housing; a cover member is provided between the light source unit and the detection port, and a transparent light transmitting member is provided on one of the light source unit beam splitters Bottom; An air blowing unit is arranged below the cover, and an air curtain can be formed to cover the detection port. A liquid detection device includes: an image capturing unit for capturing a surface image of an object to be measured; the image capturing unit is provided with an image pickup device and a lens in a direction perpendicular to the surface of the object to be measured; a light source A unit is provided below the image capturing unit to provide a light source for detecting the object to be measured. The light source unit is provided with a light emitter and a beam splitter, the light emitter is horizontally arranged on the surface of the object to be measured, and the beam splitter is four A fifteen degree deflection angle is set between the image capturing unit and the object to be measured. One side of the beam splitter faces the lens and the other side corresponds to the light emitter. A cover is provided outside the light source unit. The cover A detection port is provided at the bottom of the shell; an air blowing unit is arranged below the cover, and an air curtain can be formed to cover the detection port. The liquid detection device according to item 3 of the patent application scope, wherein the light emitter emits ultraviolet light. The liquid detection device according to any one of claims 1 to 3, wherein the cover is disposed outside the image capturing unit. For example, the liquid detection device described in item 5 of the scope of the patent application, wherein the height of the cover can constitute the cover and cover the image capturing unit and the light source unit at the same time. The liquid detection device according to item 5 of the scope of the patent application, wherein a top plate is provided on the top of the cover, and a wiring opening is provided on the top plate to provide external circuits through the wiring opening and the imaging unit and the light source unit in the cover. link.